JP2015013240A - Ultrasonic cleaning device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ultrasonic cleaning device which can improve cleaning effect and can reduce a size.SOLUTION: An ultrasonic cleaning device includes: a cleaning tank 112 with a cleaning agent C stored; first and second ultrasonic irradiation means 121, 122 arranged beneath a liquid surface L in the cleaning tank 112 and having ultrasonic elements 113-120; and conveying means 123 which immerses the cleaned object T in the cleaning agent C in the cleaning tank 112, passes the cleaned object T between the ultrasonic elements 113-120, and then conveys the cleaned object T outside a cleaning tank 210. Thereby, a flow of the cleaning agent C between the cleaned object T and the ultrasonic elements 113-120 becomes slow, and an ultrasonic wave irradiated from the ultrasonic elements 113-120 is irradiated to the cleaned object T without being interrupted by the flow of the cleaning agent C. Therefore, cleaning effect by the cleaning agent C and the ultrasonic wave is improved.

Description

  The present invention relates to an ultrasonic cleaning apparatus for ultrasonically cleaning an object to be cleaned in a cleaning tank filled with a cleaning liquid.

  Conventionally, as an ultrasonic cleaning device that ultrasonically cleans an object to be cleaned in a cleaning tank filled with a cleaning solution, an inlet / outlet hole is provided in the tank abdomen, and a conveyor that conveys the object to be cleaned can be moved through the tank abdomen. And a cleaning tank in which a pair of ultrasonic vibrators are arranged opposite to the upper and lower surfaces of the conveyor in the tank, and the cleaning liquid flowing out from the inlet / outlet hole of the cleaning tank located below the cleaning tank is stored. There has been one that includes a cleaning liquid storage tank and a cleaning liquid circulation means that replenishes the cleaning tank with the cleaning liquid in the cleaning liquid storage tank (see Patent Document 1).

Japanese Patent Laid-Open No. 04-176379

  However, in the conventional ultrasonic cleaning apparatus, the inlet / outlet hole of the cleaning tank is formed to have a size that can pass through the conveyor and the object to be cleaned on the conveyor, and the water level of the cleaning tank is maintained higher than the inlet / outlet hole. In order to immerse the object to be cleaned and the ultrasonic vibrator in water, the amount of cleaning liquid discharged from this inlet / outlet hole is extremely large, and the cleaning liquid storage tank for receiving the discharged cleaning liquid must be enlarged. In addition, the amount of cleaning liquid supplied to the cleaning tank is also extremely large. The flow of the cleaning liquid in the cleaning tank interferes with the ultrasonic wave applied to the object to be cleaned, and the cleaning effect is reduced. There is a problem that the entire apparatus is enlarged because a space for suppressing scattering is required.

  SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve the above-described problems, and to provide an ultrasonic cleaning apparatus that can improve the cleaning effect and can be miniaturized.

  The invention of claim 1 includes a cleaning tank in which a cleaning agent is stored, an ultrasonic irradiation means including a pair of irradiation units installed below the liquid level in the cleaning tank, and an object to be cleaned in the cleaning tank. And a conveying means for conveying the object to be cleaned out of the cleaning tank after passing the object to be cleaned between the pair of irradiation sections.

  According to a second aspect of the present invention, the conveying means immerses the object to be cleaned in the cleaning agent in the cleaning tank from an opening provided in the upper part of the cleaning tank, and from the opening to the outside of the cleaning tank. It shall be conveyed.

  According to the first aspect of the present invention, the flow of the cleaning agent between the object to be cleaned and the irradiation unit of the ultrasonic irradiation unit becomes gentle, and the ultrasonic wave irradiated from the irradiation unit of the ultrasonic irradiation unit is the cleaning agent. Since the object to be cleaned is irradiated without being obstructed by the flow, the cleaning effect by the cleaning agent and the ultrasonic wave is improved. In addition, the gentle flow of the cleaning agent in the cleaning tank prevents the cleaning agent from splashing out of the cleaning tank, improving the maintainability such as cleaning of the ultrasonic cleaning device and powerful cleaning of the cleaning agent. It is possible to prevent coating peeling of the ultrasonic cleaning device due to the components and deterioration of the environment around the ultrasonic cleaning device.

  According to the second aspect of the present invention, the cleaning tank may have a structure in which an opening for feeding and pulling up an object to be cleaned is provided on the upper part, and the entire ultrasonic cleaning apparatus can be simplified by simplifying the cleaning tank or making it compact. And miniaturization can be achieved.

  Preferred embodiments of the present invention will be described with reference to the accompanying drawings. The embodiments described below do not limit the contents of the present invention described in the claims. In addition, all of the configurations described below are not necessarily essential requirements of the present invention.

  1 to 5 show a first embodiment of the ultrasonic cleaning apparatus according to the present invention. The ultrasonic cleaning apparatus 101 according to the present embodiment has an ultrasonic cleaning apparatus T immersed in a heated cleaning agent C. A cleaning process unit 102 for cleaning by irradiating a sound wave, a pre-rinsing process unit 103 for cleaning the object T to be cleaned with heated pure water, and a first to a first object for sequentially cleaning the object T to be cleaned with heated pure water. 3 finish rinsing process units 104, 105, 106, a liquid blow process unit 107 that blows air onto the object to be cleaned T to cut off water, and a hot air drying process unit 108 that blows hot air on the object to be cleaned T to dry it. , In that order.

  In addition, the ultrasonic cleaning apparatus 101 is connected to a previous process (not shown) such as soldering, for example, and the first object T is transferred from the previous process (not shown) to the cleaning process unit. The transport conveyor 109 and the object to be cleaned T are passed from the cleaning process unit 102 to the pre-rinsing process unit 103, the first to third finish rinsing process units 104, 105, 106, and the hot air drying process unit 108, and then the post-process (not shown). And a second conveyer 110 that conveys to the right.

  Here, as the second transfer conveyor 110, a net conveyor capable of directly placing the article to be washed T on the placement surface on which the article to be washed T is placed, a porous belt conveyor or roller conveyor having air permeability, and the like When the object to be cleaned T is transported horizontally on the transport surface like this, it has air permeability and water permeability in the vertical direction, pre-rinse process unit 103, first to third finish rinse process units 104, 105, 106, A structure capable of transmitting pure water and air from the liquid blow process unit 107 and the hot air drying process unit 108 is preferable.

  The cleaning process unit 102 includes an opening 111 that opens an upper portion of a container capable of storing the cleaning agent C, a cleaning tank 112 that can immerse and pull up the object T from the opening 111, and the cleaning tank 112 The first ultrasonic irradiation means 121 and the second ultrasonic irradiation means 122 each provided with a pair of ultrasonic elements 113 to 120 installed below the liquid level L of the cleaning agent C, and a first conveyor 109 In the state where the object T to be cleaned conveyed to the cleaning tank 112 is immersed in the cleaning agent C in the cleaning tank 112, the ultrasonic element 113, 114, 115 of the first ultrasonic irradiation means 121 After passing between the ultrasonic elements 117, 118, 119, and 120 of the second ultrasonic irradiation means 122, the object to be cleaned T is lifted from the cleaning tank 112 and conveyed to the second conveyor 110. Transport means 123.

  The cleaning process unit 102 includes a cleaning agent stock tank 124 that automatically replenishes the cleaning agent C, a cleaning agent surge tank 125 that stores the cleaning agent C supplied to the cleaning tank 112, and cleaning. The cleaning agent C in the tank 112 is circulated to the cleaning tank 112, the cleaning agent surge tank 125, the cleaning tank 112, and the cartridge type cleaning agent filter 127 for removing impurities of the cleaning agent C. And cleaning process heating means (not shown) such as a steam type or an electric heater type for heating the cleaning agent C to a predetermined temperature.

  Here, the pair of ultrasonic elements 113, 114, 115, 116, 117, 118, 119, 120 of the first ultrasonic irradiation means 121 and the second ultrasonic irradiation means 122 are respectively installed with a pair of left and right facing the irradiation surface in the vertical direction, The ultrasonic elements 114, 116, 118, 120 are disposed on the bottom surface of the bottom surface of the cleaning tank 112.

  Further, as the conveying means 123, the object T to be cleaned conveyed from the first conveyor 109 is lowered from above the cleaning tank 112 to below the liquid level L of the cleaning agent C in the cleaning tank 112, and the object T to be cleaned is removed. The lowering device 128 immersed in the cleaning agent C, and the object T to be cleaned immersed in the cleaning agent C by the lowering device 128 are moved in the horizontal direction, and the ultrasonic elements 113, 114, 115 of the first ultrasonic irradiation means 121 are moved. , 116, a passing device 129 for passing in the order between the ultrasonic elements 117, 118, 119, 120 of the second ultrasonic irradiation means 122 and the ultrasonic elements 117, 118, 119 of the second ultrasonic irradiation means 122 , 120 is moved up, the assembling object T is lifted, the assembling object T is lifted from the washing tank 112 and conveyed to the second conveyor 110.

  Here, the lowering device 128 includes a lowering tray 131 that can be moved up and down above the cleaning tank 112 and below the liquid level L in the cleaning tank 112 by an elevating drive mechanism (not shown). The lowering tray 131 may be provided with lowering side holding means (not shown) including a plurality of claw pieces for holding the object T to be cleaned placed on the lowering tray 131 from above. .

  The ascending device 130 includes an ascending tray 133 that can be moved up and down above the cleaning tank 112 and below the liquid level L in the cleaning tank 112 by an elevating drive mechanism (not shown). The ascending tray 133 may be provided with ascending side holding means (not shown) including a plurality of claw pieces for holding the object T to be cleaned placed on the ascending tray 133 from above. .

  Further, the passing device 129 can be moved in the horizontal direction by the horizontal drive mechanism 135, and between the ultrasonic elements 113, 114, 115, 116 of the first ultrasonic irradiation means 121, and the supersonic wave of the second ultrasonic irradiation means 122. A passing tray 136 is provided so as to be able to pass between the sound wave elements 117, 118, 119, and 120 in that order. The passing tray 136 may include passing holding means (not shown) including a plurality of claw pieces for holding the object T to be cleaned placed on the passing tray 136 from the side surface direction. To do. Here, it is preferable that the passing tray 136 has a breathable and water-permeable structure with a network structure or a porous structure and is capable of transmitting the cleaning agent C and ultrasonic waves.

  In addition, on the washing tank 112 side of the second transport conveyor 110, the first blowing nozzle part 139 of the first inter-blower blow 138 that blows air on the article to be cleaned T and blows away moisture is slightly changed in the blowing direction of each other. Are provided with a pair of upper and lower sides that are inclined and opposed in the direction opposite to the direction of travel of the object to be cleaned T, so that dry air can be blown onto the object to be cleaned T conveyed by the second conveyor 110 from above and below. Yes.

  The pre-rinsing process unit 103 is sprayed with heated pure water on the article to be cleaned T, which is installed on the second conveyor 110 and conveyed by the second conveyor 110, so that the article T to be cleaned is viewed from above and below. The pre-rinse side cleaning means 140 to be cleaned, the pre-rinse side drain receiving part 141 that receives drainage from the pre-rinse side cleaning means 140, the pre-rinse side surge tank 142 that stores drainage guided to the pre-rinse side drain receiving part 141, and the pre-rinse side A pre-rinse side spray pump 143 that supplies pure water stored in the surge tank 142 to the pre-rinse side cleaning means 140 in a high pressure state, a pre-rinse side filter unit 144 that removes impurities of pure water in the pre-rinsing process unit 103, and pure water Pre-rinse side heating means (not shown) such as a steam type or an electric heater type for heating to a predetermined temperature.

  The pre-rinsing side cleaning means 140 includes a first pre-rinsing spray 145 and a second pre-rinsing spray 146 arranged side by side in the traveling direction of the article T to be cleaned on the second conveyor 110, and the first pre-rinsing The spray 145 and the second pre-rinse spray 146 include a pair of upper and lower first spray nozzles 147 and 148 that face each other in the blowing direction, and the second conveyor 110 The to-be-cleaned object T conveyed by this is equipped with the pure water heated from the up-down direction so that spray is possible.

  The pre-rinse side drainage receiving part 141 is formed in a shallow bottom plate shape having the deepest part at the center part of the bottom part with the upper part opened, and the pre-rinse side discharge port extending from the deepest part to the pre-rinse side surge pump 142 149.

  Further, the second blowing nozzle portion 151 of the second inter-blow blow 150 is opposed to the second conveyor 110 immediately before the pre-rinsing process unit 103 with the blowing direction slightly inclined in the traveling direction of the article T to be cleaned. It is provided with a pair of upper and lower sides, and is provided so that dry air can be sprayed from above and below to the object to be cleaned T conveyed by the second conveyor 110.

  The first finish rinsing process unit 104 is sprayed with heated pure water on the object T to be cleaned, which is installed on the second conveyor 110 and is transported by the second conveyor 110. First finish rinsing side cleaning means 152 for cleaning water from above and below, first finish rinsing side drain receiving part 153 for receiving drainage from first finish rinsing side cleaning means 152, and first finish rinsing side drainage The first finishing rinse-side surge tank 154 that stores the wastewater guided to the receiving portion 153 and the pure water stored in the first finishing rinse-side surge tank 154 to the first finishing rinse-side cleaning means 152 are in a high-pressure state. The first finish rinse side spray pump 155 to be supplied in step 1, the first finish rinse side filter unit 156 that removes impurities of pure water in the first finish rinse process unit 104, and the pure water is heated to a predetermined temperature. Steam type or electric heater type A first finishing rinse side heating means (not shown), and a.

  The first finish rinsing side cleaning means 152 includes a first finish rinse spray 157 and a second finish rinse spray 158 arranged side by side in the traveling direction of the article to be cleaned T of the second conveyor 110. The first finishing rinse spray 157 and the second finishing rinse spray 158 are a pair of upper and lower first finishing spray nozzle portions 159 and second finishing spray nozzle portions, which face each other in the blowing direction. 160 is provided, and the cleaning object T transported by the second transport conveyor 110 can be sprayed with pure water heated from above and below.

  The first finish rinsing side drainage receiving portion 153 is formed in a shallow dish shape having the deepest portion at the center portion of the bottom portion with the upper portion opened, and from the deepest portion to the first finish rinsing side surge tank 154 And a first finish rinse side discharge port 161 extended.

  The second finish rinsing process unit 105 is sprayed with heated pure water on the object T to be cleaned, which is installed on the second conveyor 110 and conveyed by the second conveyor 110. Second finish rinsing side cleaning means 162 for cleaning up and down from the vertical direction, second finish rinsing side drain receiving portion 163 for receiving drainage from the second finish rinsing side cleaning means 162, and second finish rinsing side drainage The second finishing rinse-side surge tank 164 that stores the wastewater guided to the receiving portion 163 and the pure water stored in the second finishing rinse-side surge tank 164 to the second finishing rinse-side cleaning means 162 in a high pressure state The second finish rinse side spray pump 165 to be supplied in step S2, the second finish rinse side filter unit 166 that removes impurities of pure water in the second finish rinse step unit 105, and the pure water is heated to a predetermined temperature. Steam type or electric heater type A second finishing rinse side heating means (not shown), and a.

  The second finish rinse side cleaning means 162 includes a third finish rinse spray 167 and a fourth finish rinse spray 168 arranged in parallel in the traveling direction of the article T to be cleaned on the second conveyor 110. The third finishing rinse spray 167 and the fourth finishing rinse spray 168 are respectively a pair of upper and lower third finishing spray nozzle portions 169 and a fourth finishing spray nozzle portion that face each other in the blowing direction. 170 to which the object to be cleaned T conveyed by the second conveyor 110 is sprayed with pure water heated from above and below.

  The second finish rinsing side drainage receiving part 163 is formed in a shallow dish shape having the deepest part at the center part of the bottom part with the upper part opened, and from the deepest part to the second finishing rinse side surge tank 164 And a second finish rinse outlet 171 extending.

  The third finish rinsing process unit 106 is sprayed with heated pure water on the object T to be cleaned, which is installed on the second conveyor 110 and conveyed by the second conveyor 110, and is cleaned. The third finish rinse side cleaning means 172 for cleaning the top and bottom from the vertical direction, the third finish rinse side drain receiving part 173 for receiving drainage from the third finish rinse side cleaning means 172, and the third finish rinse side drainage Third finishing rinse-side surge tank 174 for storing drainage guided to receiving portion 173 and pure water stored in third finishing rinse-side surge tank 174 to third finishing rinse-side cleaning means 172 in a high pressure state The third finish rinse side spray pump 175 supplied in step S3, the third finish rinse side filter unit 176 that removes impurities of pure water in the third finish rinse step unit 106, and the pure water are heated to a predetermined temperature. Steam type or electric heater type It includes third finishing rinse side heating means (not shown), a.

  The third finish rinsing side cleaning means 172 includes a fifth finish rinse spray 177 and a sixth finish rinse spray 178 arranged in parallel in the traveling direction of the article T to be cleaned on the second conveyor 110. And a fifth finishing rinse spray 177 and a sixth finishing rinse spray 178 are a pair of upper and lower fifth finishing spray nozzle parts 179 and sixth finishing spray nozzle parts, respectively, facing each other in the blowing direction. 180 is provided so that the water to be cleaned T conveyed on the second conveyor 110 can be sprayed with pure water heated from above and below.

  The third finish rinsing side drainage receiving part 173 is formed in a shallow dish shape having the deepest part at the center part of the bottom part with the upper part opened, and from the deepest part to the third finishing rinse side surge tank A third finish rinsing side discharge port 181 is provided.

  Here, in the pre-rinsing process unit 103 and the first to third finish rinsing process units 104, 105, 106, the openings formed in the upper portions of the surge tanks 142, 154, 164, 174 provided adjacent to each other. 182, 183, 184, 185 are positioned with the opening 185 of the third finishing rinse side surge tank 174 at the highest position, then the opening 184 of the second finishing rinse side surge tank 164, and subsequently The first finishing rinse side surge tank 154 is arranged in the order of the opening 183, and the opening 182 of the pre-rinse side surge tank 142 is arranged at the lowest position, and the descending stairs reverse to the order of the respective steps. It is arranged in the shape of an overflow structure, and the drainage that overflows beyond the capacity of each surge tank 142, 154, 164, 174 flows to each surge tank 142, 154, 164 in the immediately preceding process Yes.

  Due to this overflow structure, the waste water overflowing from the third finish rinse side surge tank 174 flows into the second finish rinse side surge tank 164 and the waste water overflowing from the second finish rinse side surge tank 164 The waste water that flows into the finishing rinse side surge tank 154 and overflows from the first finishing rinse side surge tank 154 flows into the pre-rinse side surge tank 142, and the drainage of the third finishing rinse side surge tank 174 is finished. It has a structure that does not overflow into the process after the rinse process.

  Each of the surge tanks 142, 154, 164, 174 is formed to have a size that can accommodate all of the surge tanks 142, 154, 164, and 174, and has an upper portion connected to each discharge port. It is provided at a position higher than the finish rinse-side surge tank 174, and has a structure that prevents drainage overflowing from the third finish rinse-side surge tank 174 from overflowing the storage tank 186.

  In addition, immediately after the 3rd finishing rinse process unit 106 of the 2nd conveyor 110, the 3rd blowing nozzle part 188 of the 3rd tank blow 187 which sprays air on the to-be-cleaned object T, and blows away a water | moisture content, A pair of upper and lower sides are provided so that their blowing directions are slightly inclined and opposed to the traveling direction of the object to be cleaned T, and dry air is supplied to the object to be cleaned T conveyed by the second conveyor 110 from above and below. It is possible to spray.

  Here, the air supplied to the first to third inter-blow blows 138, 150, and 187 is purified through an inter-blow blow filter 189 such as a HEPA filter and supplied by the inter-blower blower 190. It has a structure.

  The liquid draining blow process unit 107 includes a liquid draining nozzle unit (not shown) capable of spraying dry air from above and below to the object to be cleaned T conveyed by the second conveyor 110, and a liquid draining nozzle unit HEPA that cleans the air by removing impurities in the air supplied to a liquid blower 191 such as a ring blower that supplies dry air (not shown) and a liquid drain nozzle (not shown) And a liquid draining filter 192 such as a filter.

  The hot air drying process unit 108 includes a drying nozzle unit (not shown) capable of spraying hot air from above and below the article T to be cleaned conveyed by the second conveyor 110, and a drying nozzle unit (not shown). ) Drying blower 193 such as a ring blower that supplies dry air to the air) and a heat-resistant HEPA filter that cleans the air by removing impurities from the air supplied to the drying nozzle (not shown) And a drying heating means 195 such as an electric heater that heats the dry air to a predetermined temperature.

  3, 196 is a demister that is a separator that separates and removes liquid fine particles entrained in the gas discharged from the ultrasonic cleaning apparatus 101, and 197 is a cover for the entire apparatus of the ultrasonic cleaning apparatus 101. 198 are cover gratings that cover the piping (not shown) of the ultrasonic cleaning apparatus 101.

  The operation of the cleaning apparatus 1 of the present embodiment having the above configuration will be described. In the cleaning process performed by the cleaning process unit 102, the article T to be cleaned, which has been transferred from the previous process to the cleaning tank 112 by the first conveyor 109, is placed on the lowering tray 131 and is moved into the cleaning tank 112 by the lowering device 128. The ultrasonic elements 113 and 114 of the first ultrasonic irradiation means 121 are immersed in the stored cleaning agent C, then placed on the passing tray 136 and immersed in the cleaning agent C by the passing device 129. , 115, 116, and ultrasonic elements 117, 118, 119, 120 of the second ultrasonic irradiation means 122 are passed in this order, and ultrasonic waves are irradiated from above and below to be cleaned with the cleaning agent C and ultrasonic waves After the object T is cleaned and passes between the ultrasonic elements 117, 118, 119, 120 of the second ultrasonic irradiation means 122, it is placed on the lifting tray 133 and is lifted from the cleaning tank 112 by the lifting device 130. After being pulled up, it is transported to the pre-rinsing process by the second transport conveyor 110. .

  Here, in the second transfer conveyor 110 on the way to the pre-rinsing process, the first blow nozzle 139 of the first inter-blow blow 138 and the second blow nozzle 151 of the second inter-blow blow 150 are cleaned. Dry air is blown onto the object T from above and below, and moisture of the object to be cleaned T is blown away.

  Next, in the pre-rinsing process by the pre-rinsing process unit 103, the object T to be cleaned transported by the second transport conveyor 110 is heated from the first spray nozzle part 147 and the second spray nozzle part 148 from above and below. After the pure water is sprayed and the object to be cleaned T is washed with water, the cleaning agent C and dirt adhering to the cleaning process are washed away, and then the second transport conveyor 110 moves to the first finishing rinse process. Be transported.

  Subsequently, in the first finishing rinsing process by the first finishing rinsing process unit 104, the first finishing spray nozzle unit 159 and the second finishing spray nozzle unit 160 add the object to be cleaned T from above and below. The heated pure water is sprayed to wash the object to be cleaned T, and the cleaning agent C, dirt, etc. of the object to be cleaned T are washed away, and the second conveyor 110 moves to the second finishing rinse step. Be transported.

  Also in the second finishing rinsing process by the second finishing rinsing process unit 105, the object T to be cleaned is heated from the third finishing spray nozzle part 169 and the fourth finishing spray nozzle part 170 in the vertical direction. The pure water is sprayed to wash the article to be cleaned T, and the cleaning agent C and dirt of the article to be cleaned T are washed away and conveyed to the third finishing rinse step by the second conveyor 110. The

  Further, in the third finishing rinsing process by the third finishing rinsing process unit 106, the object T to be cleaned is heated from above and below from the fifth finishing spray nozzle part 179 and the sixth finishing spray nozzle part 180. The pure water thus sprayed is sprayed to wash the object to be cleaned T, and the cleaning agent C and dirt of the object to be cleaned T are washed away and transported to the liquid draining process by the second transport conveyor 110.

  Here, in the second conveyor 110 immediately after the third finishing rinsing step, dry air is blown from the third blowing nozzle portion 188 of the third inter-tank blow 187 to the article T to be cleaned from above and below, The moisture of the article to be cleaned T is blown away.

  In the liquid draining blow process by the liquid draining blow process unit 107, dry air is blown from above and below the liquid to be cleaned T from a liquid draining nozzle portion (not shown), and the water of the object to be cleaned T is blown off. The water to be washed T is drained and conveyed to the hot air drying process by the second conveyor 110.

  In the hot air drying process by the hot air drying process unit 108, hot air is blown from the drying nozzle portion (not shown) onto the object T to be cleaned from above and below to dry the object T to be cleaned. It is conveyed to a process (not shown).

  In the cleaning process of this embodiment, the object to be cleaned T is immersed in the cleaning agent C in the cleaning tank 112 from the opening 111 above the cleaning tank 112 by the lowering device 128 of the transport means 123, and then the passing device of the transport means 123. 129 is moved in the horizontal direction while being immersed in the cleaning agent C, between the ultrasonic elements 113, 114, 115, 116 of the first ultrasonic irradiation means 121, and of the second ultrasonic irradiation means 122. The ultrasonic elements 117, 118, 119, and 120 are sequentially passed to perform cleaning with the cleaning agent C and ultrasonic waves, and are lifted onto the liquid level L of the cleaning tank 112 by the lifting device 130 of the transport unit 123. In the cleaning tank 112 of the present embodiment, there is no element that causes the cleaning agent C to flow other than the movement of the object T to be cleaned by the conveying means 123 and the circulation for cleaning the cleaning agent C by the cleaning agent pump 126. . Therefore, between the object T to be cleaned and the ultrasonic elements 113, 114, 115, 116 of the first ultrasonic irradiation means 121 and the ultrasonic elements 117, 118, 119, 120 of the second ultrasonic irradiation means 122. The flow of the cleaning agent C becomes gentle, so that the ultrasonic elements 113, 114, 115, 116 of the first ultrasonic irradiation means 121 and the ultrasonic elements 117, 118, 119, 120 of the second ultrasonic irradiation means 122 are used. Therefore, the cleaning effect of the cleaning agent C and the ultrasonic waves is improved.

  Further, since the flow of the cleaning agent C in the cleaning tank 112 becomes gentle, the cleaning agent C is also prevented from splashing out of the cleaning tank 112, improving the maintainability such as cleaning of the ultrasonic cleaning apparatus 101 and cleaning. It is possible to prevent coating peeling of the ultrasonic cleaning apparatus 101 due to the strong cleaning component of the agent C and deterioration of the environment around the ultrasonic cleaning apparatus 101.

  Furthermore, the structure of the cleaning tank 112 may be a structure that only includes an opening 111 for loading and lifting the object to be cleaned T at the top, and the cleaning process unit 102 as a whole can be simplified by simplifying and compacting the cleaning tank 112. And miniaturization can be achieved.

  As described above, in this embodiment, corresponding to claim 1, the cleaning tank 112 in which the cleaning agent C is stored and the ultrasonic waves as a pair of irradiation units installed below the liquid level L in the cleaning tank 112 The first ultrasonic irradiation means 121 and the second ultrasonic irradiation means 122 having the elements 113 to 120 and the object T to be cleaned are immersed in the cleaning agent C in the cleaning tank 112 so that the object T to be cleaned is super After passing between the acoustic wave elements 113 to 120, there is provided a transport means 123 for transporting the object to be cleaned T to the outside of the cleaning tank 210.

  In this case, the object T to be cleaned and the ultrasonic elements 113, 114, 115, 116 of the first ultrasonic irradiation means 121 and the ultrasonic elements 117, 118, 119, 120 of the second ultrasonic irradiation means 122 In the meantime, the flow of the cleaning agent C becomes gentle, and the ultrasonic elements 113, 114, 115, 116 of the first ultrasonic irradiation means 121 and the ultrasonic elements 117, 118, 119 of the second ultrasonic irradiation means 122, Since the ultrasonic wave irradiated from 120 is irradiated to the object T without being obstructed by the flow of the cleaning agent C, the cleaning effect by the cleaning agent C and the ultrasonic wave is improved. Further, since the flow of the cleaning agent C in the cleaning tank 112 becomes gentle, the cleaning agent C is also prevented from splashing out of the cleaning tank 112, improving the maintainability such as cleaning of the ultrasonic cleaning apparatus 101 and cleaning. It is possible to prevent coating peeling of the ultrasonic cleaning apparatus 101 due to the strong cleaning component of the agent C and deterioration of the environment around the ultrasonic cleaning apparatus 101.

  Further, this embodiment corresponds to claim 2, and the conveying means 123 immerses the article T to be cleaned in the cleaning agent C in the cleaning tank 112 from the opening 109 provided in the upper part of the cleaning tank 112. It is transported from 109 to the outside of the washing tank 112.

  In this case, the cleaning tank 112 may have a structure in which an opening 111 for loading and pulling up the object to be cleaned T is provided on the upper part, and the cleaning process unit 102 can be simplified by simplifying the cleaning tank 112 or making it compact. Miniaturization can be achieved.

  FIGS. 6 to 8 show a second embodiment of the ultrasonic cleaning apparatus of the present invention. The ultrasonic cleaning apparatus 201 of this embodiment has an ultrasonic cleaning device T immersed in a heated cleaning agent C. A cleaning process unit 202 for cleaning by irradiating with sound waves, a pre-rinsing process unit 203 for cleaning by irradiating ultrasonic waves on the object to be cleaned T immersed in heated pure water W, and a pure water heated to the object to be cleaned T Finish rinsing process unit 204 for cleaning by spraying water, liquid draining blow process unit 205 for blowing air to the object to be cleaned T to cut off the water, and hot air drying process unit 206 for blowing hot air to the object to be cleaned and drying it And in this order.

  In addition, the ultrasonic cleaning apparatus 201 is connected to a previous process (not shown) such as soldering, for example, and the first object T is transferred from the previous process (not shown) to the cleaning process unit 202. And a second conveyor 208 that conveys the object T to be cleaned from the pre-rinsing process unit 203 to the finishing rinse process unit 204 and the hot air drying process unit 206 to the subsequent process (not shown). Yes.

  The cleaning process unit 202 includes an opening 209 that opens an upper portion of a container that can store the cleaning agent C, and a first cleaning tank 210 that can immerse and lift the object to be cleaned T from the opening 209, 1st ultrasonic irradiation means 219, 2nd ultrasonic irradiation means 220, and 3rd each provided with a pair of ultrasonic elements 211-218 installed under the level of cleaning agent C in one cleaning tank 210 The ultrasonic cleaning unit 221 and the fourth ultrasonic irradiation unit 222, and the cleaning object C in the first cleaning tank 210 are transferred to the first cleaning tank 210 by the first transfer conveyor 207. In the state immersed in, the to-be-cleaned object T is set between the ultrasonic elements 211 and 212 of the first ultrasonic irradiation means 219, between the ultrasonic elements 213 and 214 of the second ultrasonic irradiation means 220, and third ultrasonic waves. After passing between the ultrasonic elements 215 and 216 of the irradiation means 221 and between the ultrasonic elements 217 and 218 of the fourth ultrasonic irradiation means 222, the object to be cleaned T It has a first transport means 223 for pulling the first cleaning vessel 210.

  Further, the cleaning process unit 202 includes a cleaning agent surge tank 224 in which the cleaning agent C supplied to the first cleaning tank 210 is stored, and the cleaning agent C in the first cleaning tank 210 for the first cleaning. A tank 210, a cleaning agent surge tank 224, a cleaning agent pump 225 that is circulated to the first cleaning tank 210, a cartridge type cleaning agent filter 226 that removes impurities of the cleaning agent C, and a cleaning agent C A cleaning stock tank (not shown) for automatically replenishing, and a cleaning process heating means (not shown) such as a steam type or an electric heater type for heating the cleaning agent C to a predetermined temperature. I have.

  Here, the pair of ultrasonic elements 211 to 218 of the first ultrasonic irradiation unit 219, the second ultrasonic irradiation unit 220, the third ultrasonic irradiation unit 221, and the fourth ultrasonic irradiation unit 222 are respectively The irradiation surface is installed facing the up and down direction.

  Further, as the first transport means 223, the object T to be cleaned transported from the first transport conveyor 207 is disposed above the first cleaning tank 210 from below the liquid level L1 of the cleaning agent C in the first cleaning tank 210. The first lowering device 227 for immersing the object to be cleaned T in the cleaning agent C and the object T to be cleaned immersed in the cleaning agent C by the first lowering device 227 are moved in the horizontal direction to the first. Between the ultrasonic elements 211 and 212 of the ultrasonic irradiation means 219, between the ultrasonic elements 213 and 214 of the second ultrasonic irradiation means 220, between the ultrasonic elements 215 and 216 of the third ultrasonic irradiation means 221 and the fourth. The first passing device 228 that passes between the ultrasonic elements 217 and 218 of the ultrasonic irradiation means 222 in this order and the object T to be cleaned after passing between the ultrasonic elements 217 and 218 of the fourth ultrasonic irradiation means 222 And a first ascending device 229 that raises the object to be cleaned T onto the liquid level L1 of the first cleaning tank 210.

  Here, the first lowering device 227 is provided with a first elevating drive mechanism (not shown) that can be moved up and down above the first cleaning tank 210 and below the liquid level L1 in the first cleaning tank 210. A descent tray 230 is provided. The first lowering tray 230 includes first lowering side holding means (not shown) comprising a plurality of claw pieces for holding the object T to be cleaned placed on the first lowering tray from above. It may be provided.

  The first ascent device 229 is provided with a first ascending / descending drive mechanism (not shown) so as to be able to ascend / descend above the first cleaning tank 210 and below the liquid level L1 in the first cleaning tank 210. A tray 232 is provided. The first raising tray 232 has first raising side holding means (not shown) comprising a plurality of claw pieces for holding the object T to be cleaned placed on the first raising tray 232 from above. ) May be provided.

  Further, the first passing device 228 can be moved in the horizontal direction by the first horizontal driving mechanism 234, and between the ultrasonic elements 211 and 212 of the first ultrasonic irradiation means 219, the second ultrasonic irradiation means 220. Between the ultrasonic elements 213 and 214, between the ultrasonic elements 215 and 216 of the third ultrasonic irradiation means 221, and between the ultrasonic elements 217 and 218 of the fourth ultrasonic irradiation means 222. A first passing tray (not shown) is provided. The first passing tray (not shown) includes a first claw piece portion that holds a workpiece T placed on the first passing tray (not shown) from the side. Passing holding means (not shown) may be provided. The first passing device 228 is capable of moving the object T to be cleaned in the horizontal direction, and between the ultrasonic elements 211 and 212 of the first ultrasonic irradiation means 219 and the ultrasonic waves of the second ultrasonic irradiation means 220. Even a conveyor installed so as to be able to pass between the elements 213 and 214, between the ultrasonic elements 215 and 216 of the third ultrasonic irradiation means 221 and between the ultrasonic elements 217 and 218 of the fourth ultrasonic irradiation means 222 Be good. Here, a passing tray (not shown) and a conveyor (not shown) in the first passing device 228 have air permeability and water permeability due to a network structure or porous structure, and transmit the cleaning agent C and ultrasonic waves. A possible structure is preferred.

  The pre-rinsing process unit 203 includes an opening 237 in which an upper portion of a container capable of storing pure water W is opened, and a second cleaning tank 238 capable of immersing and pulling up the object T to be cleaned from the opening 237, The first pre-rinse ultrasonic irradiation means 243 provided with a pair of ultrasonic elements 239 to 242 installed under the liquid level L2 of the pure water W in the second cleaning tank 238, the second pre-rinsing ultrasonic irradiation The object to be cleaned T is immersed in the pure water W in the second cleaning tank 238 while the object to be cleaned T transported to the second cleaning tank 238 by the means 244 and a third traverser 283 to be described later. After passing between the ultrasonic elements 239 and 240 of the first pre-rinsing ultrasonic irradiation means 243 and between the ultrasonic elements 241 and 242 of the second pre-rinsing ultrasonic irradiation means 244, the object to be cleaned T is passed through the second And a second conveying means 245 for lifting from the cleaning tank 238.

  The pre-rinsing process unit 203 includes a pre-rinsing surge tank 246 in which the pure water W supplied to the second cleaning tank 238 is stored, and the pure water W in the second cleaning tank 238 as the second cleaning tank. 238, pre-rinsing surge tank 246, pre-rinsing pump 247 circulated to the second cleaning tank 238, cartridge-type pre-rinsing filter 248 for removing pure water W impurities, and replenishment of pure water W automatically A pre-rinsing process tank (not shown), a pre-rinsing process heating means (not shown) such as a steam type or an electric heater type for heating the pure water W to a predetermined temperature, and a pre-rinsing process unit 203 An oil / water separator (not shown) for separating oil from the pure water W is provided.

  Here, the pair of ultrasonic elements 239 to 242 of the first pre-rinsing ultrasonic irradiation means 243 and the second pre-rinsing ultrasonic irradiation means 244 are installed with their irradiation surfaces facing each other in the vertical direction.

  Further, as the second transfer means 245, the object T to be cleaned, which has been transferred to the second cleaning tank 238 by a third traverser 283 to be described later, is placed in the second cleaning tank 238 from above the second cleaning tank 238. A second lowering device 249 that lowers the pure water W to a level below the liquid level L2 and immerses the cleaning object T in the pure water W, and a cleaning target T immersed in the pure water W by the second lowering device 249. The second is moved in the horizontal direction and passed between the ultrasonic elements 239 and 240 of the first pre-rinsing ultrasonic irradiation means 243 and between the ultrasonic elements 241 and 242 of the second pre-rinsing ultrasonic irradiation means 244 in this order. The object T to be cleaned after passing between the passage device 250 and the ultrasonic elements 241 and 242 of the second pre-rinsing ultrasonic irradiation means 244 is raised, and the object T to be cleaned is liquid level L2 of the second cleaning tank 238. And a second lifting device 251 for pulling up.

  Here, the second lowering device 249 is provided with a second elevating mechanism (not shown) that can be moved up and down above the second cleaning tank 238 and below the liquid level L2 in the second cleaning tank 238. A lowering tray 252 is provided. The second lowering tray 252 has second lowering side holding means (not shown) composed of a plurality of claw pieces for holding the object T to be cleaned placed on the second lowering tray 252 from above. ) May be provided.

  The second ascent device 251 is provided with a second ascending mechanism that is capable of ascending and descending above the second cleaning tank 238 and below the liquid level L2 in the second cleaning tank 238 by an elevating drive mechanism (not shown). A tray 254 is provided. The second ascending tray 254 includes a second ascending side holding means (not shown) comprising a plurality of claw pieces for holding the object T to be cleaned placed on the second ascending tray 254 from above. ) May be provided.

  Further, the second passage device 250 can be moved in the horizontal direction by the second horizontal drive mechanism 256, and between the ultrasonic elements 239, 240 of the first pre-rinsing ultrasonic irradiation means 243, the second pre-rinsing super-wave A second passing tray (not shown) provided so as to be able to pass between the ultrasonic elements 241 and 242 of the sound wave irradiation means 244 is provided. The second passage tray (not shown) includes a second claw piece portion that holds the object T to be cleaned placed on the second passage tray (not shown) from the side. Passing holding means (not shown) may be provided. The second passing device 250 is capable of moving the object T to be cleaned in the horizontal direction, and between the ultrasonic elements 239 and 240 of the first pre-rinsing ultrasonic irradiation means 243, and the second pre-rinsing ultrasonic irradiation means. A conveyor provided so as to be able to pass between the ultrasonic elements 241 and 242 in the order of 244 may be used. Here, the passing tray (not shown) and the conveyor (not shown) in the second passing device 250 have air permeability and water permeability due to a network structure or porous structure, and transmit pure water W and ultrasonic waves. A possible structure is preferred.

  The finishing rinse process unit 204 is sprayed with heated pure water on the object T to be cleaned, which is installed on the second conveyor 208 and conveyed on the second conveyor 208, so that the object T to be cleaned is moved in the vertical direction. The finish rinse side cleaning means 259 for cleaning from the finish, the finish rinse side drain receiving part 260 for receiving drainage from the finish rinse side cleaning means 259 and the liquid draining blow process unit 205, and the drainage guided to the finish rinse side drain receiving part 260 In the finishing rinse process unit 204, the finishing rinse side surge tank 261 for storing the liquid, the finishing rinse side spray pump 262 for supplying pure water stored in the finishing rinse side surge tank 261 to the finishing rinse side cleaning means 259 in a high pressure state, and the finishing rinse process unit 204 A cartridge-type finish rinse side filter unit 263 that removes impurities of pure water, and a finish rinse side heating means such as a steam type or an electric heater type that warms pure water to a predetermined temperature ( Is provided with a Shimese not), the.

  The finish rinse side cleaning means 259 includes a first finish rinse spray 264, a second finish rinse spray 265, and a third finish rinse spray 264 arranged side by side in the traveling direction of the article T to be cleaned on the second conveyor 208. A finish rinse spray 266 is provided, and the first finish rinse spray 264, the second finish rinse spray 265, and the third finish rinse spray 266 have slightly different blowing directions with respect to each other. A pair of upper and lower first finishing spray nozzle portions 267, a second finishing spray nozzle portion 268, and a third finishing spray nozzle portion 269, which are opposed to each other in a direction opposite to the traveling direction of The object to be cleaned T conveyed by the second conveyor 208 is provided with pure water heated from above and below so as to be sprayable.

  The finish rinse side drain receiving part 260 is formed in a shallow dish shape having the deepest part at the center part of the bottom part with the upper part opened, and the finish extended from the deepest part to the finish rinse side surge tank 261 A rinse side outlet 271 is provided.

  The liquid draining blow process unit 205 includes a liquid draining nozzle unit 271 capable of spraying dry air from above and below to the object to be cleaned T transported by the second transport conveyor 208, and a dry air applied to the liquid draining nozzle unit 271. A liquid draining blower (not shown) such as a ring blower for supplying the liquid, and a liquid draining filter (such as a HEPA filter for purifying the air by removing impurities from the air supplied to the liquid draining nozzle section 271) (Not shown).

  The hot air drying process unit 206 is arranged in parallel in the traveling direction of the object T to be cleaned on the second conveyor 208, and hot air can be blown from above and below to the object T to be cleaned conveyed by the second conveyor 208. Dry air is supplied to the first drying duct part 272, the second drying duct part 273, the third drying duct part 274, and the first to third drying duct parts 272, 273, 274. For drying a heat-resistant HEPA filter or the like that removes impurities from the air supplied to the drying blower 275 such as a ring blower and the first to third drying ducts 272, 273, and 274 and cleans the air. A filter 276 and a drying heating means 277 such as an electric heater that heats dry air to a predetermined temperature are provided.

  Further, in the ultrasonic cleaning apparatus 201 of the present embodiment, the loader for alignment 278 for aligning the objects to be cleaned T conveyed from the previous process and the objects to be cleaned T aligned by the loader for alignment 278 are parallel to the horizontal direction. A cover 280 for protecting and pressing the first traverser 279 to be moved and placed on the first conveyor conveyer 207, and the upper part of the object to be cleaned T on the first conveyor conveyer 207 immediately before the cleaning process unit 202 The first cover loading / unloading loader 281 to which the cover is mounted and the article to be cleaned T on the first transfer conveyor 207 to which the cover 280 is mounted are moved in parallel in the horizontal direction and placed on the first lowering tray 230. The second traverser 282 to be moved and the object to be cleaned T on the first lifting tray 232 pulled up to the opening 209 on the liquid surface of the first cleaning tank 210 are translated in the horizontal direction to obtain the second Pull up to opening 237 on liquid level L2 of cleaning tank 238 A third traverser 283 to be placed on the second lowering tray 252 and a cover on the second raising tray 254 lifted up to the opening 237 on the liquid level L2 of the second cleaning tank 238. A fourth traverser 284 for moving the cleaning object T in parallel in the horizontal direction and placing it on the second transfer conveyor 208, and an object T to be cleaned on the second transfer conveyor 208 after passing through the hot air drying process unit 206 A third transport conveyor 285 for transporting the product to the subsequent process, a second loader detaching loader 286 for removing the cover 280 of the article T to be cleaned on the third transport conveyor 285, and the target to be cleaned on the third transport conveyor 285 A take-out loader 287 for taking out the object T and sending it to a subsequent process is provided. Here, the cover 280 is preferably a structure having air permeability and water permeability due to a network structure or a porous structure and capable of transmitting the cleaning agent C, pure water W, ultrasonic waves, and the like.

  Reference numeral 288 denotes a control panel of the ultrasonic cleaning apparatus 201, and reference numeral 289 denotes an operation surface of the control panel. Although not shown, the ultrasonic cleaning apparatus 201 of the present embodiment is also a demister (not shown) that is a separator that separates and removes liquid particulates accompanying the discharged gas from the gas, as in the first embodiment. ), A cover (not shown) of the entire apparatus of the ultrasonic cleaning apparatus 201, and a cover grating (not shown) that covers a pipe (not shown) of the ultrasonic cleaning apparatus 201 may be provided.

  The operation of the ultrasonic cleaning apparatus 201 of the present embodiment having the above configuration will be described. In the cleaning process by the cleaning process unit 202, the article T to be cleaned, which has been transferred from the previous process to the first cleaning tank 210 by the first transfer conveyor 207, is placed on the first lowering tray 230 and is moved to the first lowering tray 230. It is immersed in the cleaning agent C stored in the first cleaning tank 210 by the lowering device 227, and then placed on a first passing tray (not shown), and the cleaning agent C is moved by the first passing device 228. In the state immersed in the first ultrasonic irradiation means 219, between the ultrasonic elements 211 and 212, between the ultrasonic elements 213 and 214 of the second ultrasonic irradiation means 220, and between the third ultrasonic irradiation means 221. The ultrasonic wave is passed between the ultrasonic elements 215 and 216 and the ultrasonic elements 217 and 218 of the fourth ultrasonic irradiation means 222 in this order. And after passing between the ultrasonic elements 217 and 218 of the fourth ultrasonic irradiation means 222, the first lifting tray By the first rising device 229 is placed on a 232 after being pulled over the liquid level L1 of the first washing tank 210 is conveyed to pre-rinse step by a third traverser 283.

  Next, in the pre-rinsing process by the pre-rinsing process unit 203, the object T to be cleaned placed on the second lowering tray 252 by the third traverser 283 is moved into the second cleaning tank 238 by the second lowering device 249. The first pre-rinse is immersed in the pure water W stored in the water and then placed on a second passage tray (not shown) and immersed in the pure water W by the second passage device 250. Is passed between the ultrasonic elements 239 and 240 of the ultrasonic irradiating means 243 and the ultrasonic elements 241 and 242 of the second pre-rinsing ultrasonic irradiating means 244 in order, and irradiated with ultrasonic waves from above and below. The object to be cleaned T is cleaned with W and ultrasonic waves, and after passing between the ultrasonic elements 241 and 242 of the second pre-rinsing ultrasonic irradiation means 244, it is placed on the second raising tray 254. The liquid is lifted onto the liquid level L2 of the second washing tank 238 by the second raising device 251. After, it is conveyed by the fourth traverser 284 to the second conveyor 208.

  Subsequently, in the rinsing process for finishing by the finishing rinsing process unit 204, the object T to be cleaned is transferred from the first finishing spray nozzle section 267, the second finishing spray nozzle section 268, and the third finishing spray nozzle section 269. Pure water heated from above and below is sprayed to wash the object to be cleaned T, and the cleaning agent C and dirt of the object to be cleaned T are washed away, and the second conveying conveyor 208 blows off the liquid. It is conveyed to the process.

  In the liquid draining blow process by the liquid draining blow process unit 205, dry air is blown from the liquid draining nozzle portion 271 to the object T to be cleaned from above and below, and the moisture of the object T to be cleaned is blown off. The water is cut off and transported to the hot air drying process by the second transport conveyor 208.

  In the hot air drying process by the hot air drying process unit 206, hot air is blown from the first to third drying duct portions 272, 273, 274 to the object T to be cleaned from above and below to dry the object T to be cleaned. Are conveyed to a subsequent process (not shown).

  In the cleaning process of the present embodiment, the cleaning object C in the first cleaning tank 210 is transferred from the opening 209 above the first cleaning tank 210 by the first lowering means 227 of the first transfer means 223. The ultrasonic element of the first ultrasonic irradiation means 219 is moved in the horizontal direction while being immersed in the cleaning agent C by the first passage device 228 of the first conveying means 223. 211, 212, between the ultrasonic elements 213, 214 of the second ultrasonic irradiation means 220, between the ultrasonic elements 215, 216 of the third ultrasonic irradiation means 221, and ultrasonic waves of the fourth ultrasonic irradiation means 222 The elements 217 and 218 are passed through in order, and cleaning with the cleaning agent C and ultrasonic waves is performed. The first lifting device 229 of the first transport unit 223 pulls up the liquid surface L1 of the first cleaning tank 210. Therefore, in the first cleaning tank 210 of this embodiment, the object to be cleaned T is moved by the first conveying means 223 and the cleaning agent pump 225 is cleaned. It does not have the element flows occur in detergent C in addition to the circulation for the agent C purification. Therefore, the flow of the cleaning agent C between the object to be cleaned T and the ultrasonic elements 211 to 218 of the first to fourth ultrasonic irradiation means 219, 220, 221 and 222 becomes gentle, and the first to first Since the ultrasonic waves irradiated from the ultrasonic elements 211 to 218 of the four ultrasonic irradiation means 219, 220, 221 and 222 are irradiated to the cleaning object T without being obstructed by the flow of the cleaning agent C, the cleaning agent The cleaning effect by C and ultrasonic waves is improved.

  Further, since the flow of the cleaning agent C in the first cleaning tank 210 becomes gentle, it is possible to prevent the cleaning agent C from being scattered outside the first cleaning tank 210, and to clean the ultrasonic cleaning apparatus 201, etc. Improvement of maintainability, coating peeling of the ultrasonic cleaning apparatus 201 due to the strong cleaning component of the cleaning agent C, and deterioration of the environment around the ultrasonic cleaning apparatus 201 can be prevented.

  Furthermore, the structure of the first cleaning tank 210 may be a structure in which an opening 209 for loading and pulling up the object T to be cleaned is only provided on the upper part, and the cleaning of the first cleaning tank 210 is simplified or made compact. The entire process unit 202 can be simplified and downsized.

  In the pre-rinsing process of the present embodiment, the object T to be cleaned is purified water W in the second cleaning tank 238 from the opening 237 above the second cleaning tank 238 by the second lowering means 249 of the second transport means 245. And then moved in the horizontal direction while being immersed in the pure water W by the second passage device 250 of the second transport means 245, so that the superirradiation means 243 of the first pre-rinse is irradiated. Between the ultrasonic elements 239 and 240 and between the ultrasonic elements 241 and 242 of the second pre-rinsing ultrasonic irradiation means 244, and is washed with pure water W and ultrasonic waves. Since the second lifting device 251 pulls up the liquid level L2 of the second cleaning tank 238, the object T to be cleaned is moved by the second transport means 245 in the second cleaning tank 238 of this embodiment. In addition to the circulation for purifying the pure water W by the pump 247 for pre-rinse and other elements, the flow of the pure water W is provided. There. Therefore, the flow of the pure water W between the object to be cleaned T and the ultrasonic elements 239 to 242 of the first to second pre-rinsing ultrasonic irradiation means 243 and 244 becomes gentle, and the first to second Since the ultrasonic waves irradiated from the ultrasonic elements 239 to 242 of the pre-rinsing ultrasonic irradiation means 243 and 244 are irradiated to the cleaning object T without being obstructed by the flow of the pure water W, the pure water W and the ultrasonic waves The cleaning effect by is improved.

  Further, since the flow of the pure water W in the second cleaning tank 238 becomes gentle, the pure water W is also prevented from splashing out of the second cleaning tank 238, and the ultrasonic cleaning apparatus 201 can be cleaned. It is possible to improve the maintainability and prevent the environment around the ultrasonic cleaning apparatus 201 from deteriorating.

  Furthermore, the structure of the second cleaning tank 238 may be a structure in which the opening 237 for loading and lifting the object to be cleaned T is only provided at the top, and the second rinse tank 238 is pre-rinsed by simplification and downsizing. The entire process unit 203 can be simplified and downsized.

  In this embodiment, the upper ultrasonic elements 211, 213, 215, 217 in the first to fourth ultrasonic irradiation means 219 to 222 and the first to second pre-rinsing ultrasonic irradiation means 243 and 244 are provided. The irradiation surface of 239, 241 is formed as an inclined surface that is inclined by lowering the upstream side and raising the downstream side with respect to the traveling direction of the object T to be cleaned in each passing device 228, 250. Air bubbles adhering to the irradiation surfaces of 211, 213, 215, 217, 239, and 241 escape upward along the inclination of the irradiation surface, and bubbles are generated in the upper ultrasonic elements 211, 213, 215, 217, 239, and 241. The ultrasonic elements 211, 213, 215, 217, 239 are prevented from adhering to each other by the presence of bubbles between the object T to be cleaned and the ultrasonic elements 211, 213, 215, 217, 239, 241. , 241 prevents the ultrasonic wave irradiated toward the object to be cleaned T from being attenuated or diffused to reduce the cleaning effect, Cleaning can be effectively performed that.

  Here, the irradiation surface of the upper ultrasonic elements 211, 213, 215, 217, 239, 241 is lowered on the upstream side and raised on the downstream side with respect to the traveling direction of the article to be cleaned T in each passing device 228, 250. The upper ultrasonic elements 211, 213, 215, 215, 215, 215, 215, 215, 215, 215, 215, 215, 215, Bubbles attached to the irradiation surfaces of 217, 239, and 241 can escape upward along the irradiation surface, and ultrasonic cleaning can be performed more effectively.

  As described above, in this embodiment, corresponding to claim 1, the first cleaning tank 210 in which the cleaning agent C is stored and the pair of liquid tanks installed under the liquid level L1 in the first cleaning tank 210. First to fourth ultrasonic irradiation means 219, 220, 221 and 222 provided with ultrasonic elements 211 to 218 as irradiation units, and an object to be cleaned T are immersed in the cleaning agent C in the first cleaning tank 210 Then, after the object to be cleaned T is passed between the ultrasonic elements 211 to 218, the first object is provided with first conveying means 223 for conveying the object to be cleaned T to the outside of the first cleaning tank 210.

  In this case, the flow of the cleaning agent C between the article T to be cleaned and the ultrasonic elements 211 to 218 of the first to fourth ultrasonic irradiation means 219, 220, 221 and 222 becomes gentle, Since the ultrasonic waves irradiated from the ultrasonic elements 211 to 218 of the fourth ultrasonic irradiation means 219, 220, 221 and 222 are irradiated to the cleaning object T without being obstructed by the flow of the cleaning agent C, the cleaning is performed. The cleaning effect by the agent C and ultrasonic waves is improved. Further, since the flow of the cleaning agent C in the first cleaning tank 210 becomes gentle, it is possible to prevent the cleaning agent C from being scattered outside the first cleaning tank 210, and to clean the ultrasonic cleaning apparatus 201, etc. Improvement of maintainability, coating peeling of the ultrasonic cleaning apparatus 201 due to the strong cleaning component of the cleaning agent C, and deterioration of the environment around the ultrasonic cleaning apparatus 201 can be prevented.

  Further, this embodiment corresponds to claim 2 and the first transport means 223 is configured to clean the inside of the first cleaning tank 210 from the opening 209 provided with the article T to be cleaned at the upper part of the first cleaning tank 210. While being immersed in the agent C, it conveys out of the 1st washing tank 210 from the opening part 209. FIG.

  In this case, the first cleaning tank 210 may have a structure in which an opening 209 for inserting and pulling up the object T to be cleaned is only provided on the upper part, and a cleaning process unit by simplifying or downsizing the first cleaning tank 210. The entire 202 can be simplified and downsized.

  Further, in this embodiment, the ultrasonic elements 211 to 218 are arranged in a pair, and the irradiation surfaces of the upper ultrasonic elements 211, 213, 215, and 217 are inclined.

  In this case, bubbles attached to the irradiation surface of the upper ultrasonic elements 211, 213, 215, 217, 239, 241 are allowed to escape upward along the inclination of the irradiation surface, and the upper ultrasonic elements 211, 213, 215, The bubbles 217, 239, and 241 are prevented from adhering to the bubbles, and the presence of bubbles between the object to be cleaned T and the ultrasonic elements 211, 213, 215, 217, 239, and 241 allows the ultrasonic elements 211 to , 213, 215, 217, 239, 241 prevents the ultrasonic wave irradiated toward the object to be cleaned T from being attenuated or diffused to reduce the cleaning effect, thereby effectively cleaning the ultrasonic wave. It can be carried out.

In addition, as the to-be-cleaned object T in each of the above embodiments, printed circuit boards, semiconductors, silicon wafers, electronic parts, general machine parts, precision machine parts, non-ferrous metal parts such as iron and aluminum, glass products, machining Synthetic resin products such as parts, washed products after chemical treatment, etc., and the cleaning agent C is CH ₂ CL ₂ (methylene chloride), HCFC-225, HCFC-123, HCFC- Non-aqueous systems such as second generation fluorocarbons such as 141b, silicon systems such as low molecular silicon, perfluorinated carbons such as perfluorocarbons, lower alcohols such as IPA and 5FD, hydrocarbons such as isoparaffinic hydrocarbons, etc. Higher alcohols such as C15, hydrocarbons such as aliphatic hydrocarbons, terpenes such as limonene, silicons such as low-molecular silicon, quasi-aqueouss such as perfluorine such as perfluorocarbon, caustic Inorganic alkalis such as ethanol, organic alkalis such as jetanolamine, surfactants such as anions and nonions, pure waters such as pure water, alkaline electrolyzed water, oxidizing functional water, reducing functional water, etc. A water-based cleaning agent such as a functional water system is appropriately selected and used.

  In addition, this invention is not limited to the content as described in each said Example, It can change suitably.

1 is a front view of an ultrasonic cleaning apparatus showing a first embodiment of the present invention. It is a top view of an ultrasonic cleaning apparatus same as the above. It is a side view of an ultrasonic cleaning apparatus same as the above. FIG. 3 is an enlarged front view of the vicinity of the cleaning process unit of the ultrasonic cleaning apparatus. It is the same as the above, it is the front view expanded from the pre rinse process unit of the ultrasonic cleaning apparatus to the 1st-3rd finish rinse process unit vicinity. It is a front view of the ultrasonic cleaning apparatus which shows 2nd Example of this invention. It is a top view of an ultrasonic cleaning apparatus same as the above. It is the front view which expanded the cleaning process unit and pre-rinsing process unit vicinity of an ultrasonic cleaning apparatus same as the above.

101 Ultrasonic cleaning equipment
111 opening
112 Washing tank
113-120 ultrasonic element
121 First ultrasonic element
122 Second ultrasonic element
123 Transport means
201 Ultrasonic cleaning equipment
209 opening
210 First washing tank
211-218 ultrasonic element
219 First ultrasonic element
220 Second ultrasonic element
221 Third ultrasonic element
222 Fourth ultrasonic element
223 Conveying means C Cleaning agent T Object to be cleaned L, L1 Liquid level

Claims (2)

A cleaning tank in which a cleaning agent is stored;
Ultrasonic irradiation means provided with a pair of irradiation units installed below the liquid level in the cleaning tank;
A transport means for transporting the object to be cleaned out of the cleaning tank after immersing the object to be cleaned in the cleaning agent in the cleaning tank and passing the object to be cleaned between the pair of irradiation units; An ultrasonic cleaning apparatus comprising:   The conveying means is configured to immerse the object to be cleaned in the cleaning agent in the cleaning tank from an opening provided in the upper part of the cleaning tank and to convey the object to be cleaned from the opening to the outside of the cleaning tank. The ultrasonic cleaning apparatus according to claim 1.

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