JP2007512984A - 半導体用研磨パッドとして用いられる均一なシートを連続的に形成する工程及び装置 - Google Patents

半導体用研磨パッドとして用いられる均一なシートを連続的に形成する工程及び装置 Download PDF

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Publication number
JP2007512984A
JP2007512984A JP2006542628A JP2006542628A JP2007512984A JP 2007512984 A JP2007512984 A JP 2007512984A JP 2006542628 A JP2006542628 A JP 2006542628A JP 2006542628 A JP2006542628 A JP 2006542628A JP 2007512984 A JP2007512984 A JP 2007512984A
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JP
Japan
Prior art keywords
belt
belts
polishing pad
precursor
sheet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2006542628A
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English (en)
Japanese (ja)
Inventor
ジョセフ・シュナイダー
オスカー・スー
ヴォルカー・ウィルハイム
グレッグ・ワッカ
ロザー・ハックラー
Original Assignee
フロイデンベルク・ノンウォーヴェンス・エル・ピー
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Publication date
Application filed by フロイデンベルク・ノンウォーヴェンス・エル・ピー filed Critical フロイデンベルク・ノンウォーヴェンス・エル・ピー
Publication of JP2007512984A publication Critical patent/JP2007512984A/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/001—Manufacture of flexible abrasive materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
    • B29B7/00—Mixing; Kneading
    • B29B7/30—Mixing; Kneading continuous, with mechanical mixing or kneading devices
    • B29B7/32—Mixing; Kneading continuous, with mechanical mixing or kneading devices with non-movable mixing or kneading devices
    • B29B7/325—Static mixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29B—PREPARATION OR PRETREATMENT OF THE MATERIAL TO BE SHAPED; MAKING GRANULES OR PREFORMS; RECOVERY OF PLASTICS OR OTHER CONSTITUENTS OF WASTE MATERIAL CONTAINING PLASTICS
    • B29B7/00—Mixing; Kneading
    • B29B7/30—Mixing; Kneading continuous, with mechanical mixing or kneading devices
    • B29B7/34—Mixing; Kneading continuous, with mechanical mixing or kneading devices with movable mixing or kneading devices
    • B29B7/38—Mixing; Kneading continuous, with mechanical mixing or kneading devices with movable mixing or kneading devices rotary
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/22—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of indefinite length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C67/00—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00
    • B29C67/24—Shaping techniques not covered by groups B29C39/00 - B29C65/00, B29C70/00 or B29C73/00 characterised by the choice of material
    • B29C67/246—Moulding high reactive monomers or prepolymers, e.g. by reaction injection moulding [RIM], liquid injection moulding [LIM]
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
    • B29K2075/00—Use of PU, i.e. polyureas or polyurethanes or derivatives thereof, as moulding material

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Manufacture Of Macromolecular Shaped Articles (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
JP2006542628A 2003-12-05 2004-11-18 半導体用研磨パッドとして用いられる均一なシートを連続的に形成する工程及び装置 Pending JP2007512984A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US52750703P 2003-12-05 2003-12-05
PCT/US2004/039322 WO2005055693A2 (en) 2003-12-05 2004-11-18 Process and apparatus to continuously form a uniform sheet for use as a semiconductor polishing pad

Publications (1)

Publication Number Publication Date
JP2007512984A true JP2007512984A (ja) 2007-05-24

Family

ID=34676752

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006542628A Pending JP2007512984A (ja) 2003-12-05 2004-11-18 半導体用研磨パッドとして用いられる均一なシートを連続的に形成する工程及び装置

Country Status (5)

Country Link
EP (1) EP1689574A2 (zh)
JP (1) JP2007512984A (zh)
CN (1) CN1946539A (zh)
CA (1) CA2548083A1 (zh)
WO (1) WO2005055693A2 (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023145933A1 (ja) * 2022-01-31 2023-08-03 株式会社クラレ ３ｄプリンタによる樹脂シートの製造方法、及びそれにより得られた研磨層を有する研磨パッド

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100960585B1 (ko) 2005-07-15 2010-06-03 도요 고무 고교 가부시키가이샤 적층 시트 및 그 제조 방법
JP4884726B2 (ja) 2005-08-30 2012-02-29 東洋ゴム工業株式会社 積層研磨パッドの製造方法
WO2008029538A1 (fr) 2006-09-08 2008-03-13 Toyo Tire & Rubber Co., Ltd. Tampon à polir
SG177964A1 (en) 2007-01-15 2012-02-28 Toyo Tire & Rubber Co Polishing pad and method for producing the same
JP4593643B2 (ja) 2008-03-12 2010-12-08 東洋ゴム工業株式会社 研磨パッド
CN102211319B (zh) * 2010-04-08 2014-06-11 三芳化学工业股份有限公司 制造抛光垫的方法和抛光垫
DE202010006305U1 (de) * 2010-04-30 2010-09-16 Kraussmaffei Technologies Gmbh Vorrichtung zur Herstellung eines Verbundwerkstoffes
CN102285189B (zh) * 2011-06-15 2014-09-17 上海大唐盛隆制冷科技有限公司 钢带式聚氨酯连续层压机
CN103831745B (zh) * 2014-03-10 2017-01-18 南京宏盛毛毡制品有限公司 一种玻璃抛光轮自动卷筒机
US20180147688A1 (en) * 2016-11-30 2018-05-31 Dow Global Technologies Llc Airless atomizing methods for making chemical mechanical planarization (cmp) polishing pads

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135962A (en) * 1975-01-06 1976-11-25 Uss Eng & Consult Method and device for continuously producing product with threeedimensional pattern from thermoplastic polymer material
JPS52128958A (en) * 1976-04-22 1977-10-28 Kuraray Co Method of producing opposed belt continuous cast plate
JPS63161807A (ja) * 1986-12-24 1988-07-05 株式会社日本可鍛鋳鉄所 活線用引留クランプ
JPH08281679A (ja) * 1995-03-14 1996-10-29 Berndorf Band Gmbh フイルム、シート又は板を連続的に製造する装置及び方法
JP2001089548A (ja) * 1999-09-22 2001-04-03 Toyo Tire & Rubber Co Ltd ポリウレタン発泡体の製造方法及び研磨シート
JP2003516872A (ja) * 1999-12-14 2003-05-20 ロデール ホールディングス インコーポレイテッド 高分子又は高分子複合材研磨パッドの製造方法
JP3452265B1 (ja) * 2002-12-10 2003-09-29 東洋紡績株式会社 研磨シート用高分子材料、研磨シート、及び研磨パッド

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4128369A (en) * 1975-12-10 1978-12-05 Hazelett Strip-Casting Corporation Continuous apparatus for forming products from thermoplastic polymeric material having three-dimensional patterns and surface textures

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51135962A (en) * 1975-01-06 1976-11-25 Uss Eng & Consult Method and device for continuously producing product with threeedimensional pattern from thermoplastic polymer material
JPS52128958A (en) * 1976-04-22 1977-10-28 Kuraray Co Method of producing opposed belt continuous cast plate
JPS63161807A (ja) * 1986-12-24 1988-07-05 株式会社日本可鍛鋳鉄所 活線用引留クランプ
JPH08281679A (ja) * 1995-03-14 1996-10-29 Berndorf Band Gmbh フイルム、シート又は板を連続的に製造する装置及び方法
JP2001089548A (ja) * 1999-09-22 2001-04-03 Toyo Tire & Rubber Co Ltd ポリウレタン発泡体の製造方法及び研磨シート
JP2003516872A (ja) * 1999-12-14 2003-05-20 ロデール ホールディングス インコーポレイテッド 高分子又は高分子複合材研磨パッドの製造方法
JP3452265B1 (ja) * 2002-12-10 2003-09-29 東洋紡績株式会社 研磨シート用高分子材料、研磨シート、及び研磨パッド

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023145933A1 (ja) * 2022-01-31 2023-08-03 株式会社クラレ ３ｄプリンタによる樹脂シートの製造方法、及びそれにより得られた研磨層を有する研磨パッド

Also Published As

Publication number Publication date
WO2005055693A2 (en) 2005-06-23
EP1689574A2 (en) 2006-08-16
CN1946539A (zh) 2007-04-11
CA2548083A1 (en) 2005-06-23
WO2005055693A3 (en) 2005-08-04

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