JP2007508503A5 - - Google Patents
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- Publication number
- JP2007508503A5 JP2007508503A5 JP2006534363A JP2006534363A JP2007508503A5 JP 2007508503 A5 JP2007508503 A5 JP 2007508503A5 JP 2006534363 A JP2006534363 A JP 2006534363A JP 2006534363 A JP2006534363 A JP 2006534363A JP 2007508503 A5 JP2007508503 A5 JP 2007508503A5
- Authority
- JP
- Japan
- Prior art keywords
- valve assembly
- assembly according
- plunger
- polished
- guide spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US48149503P | 2003-10-09 | 2003-10-09 | |
| US60/481,495 | 2003-10-09 | ||
| PCT/US2004/033180 WO2005036035A2 (en) | 2003-10-09 | 2004-10-08 | Valve assembly |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007508503A JP2007508503A (ja) | 2007-04-05 |
| JP2007508503A5 true JP2007508503A5 (https=) | 2010-10-14 |
| JP4904158B2 JP4904158B2 (ja) | 2012-03-28 |
Family
ID=34434814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006534363A Expired - Lifetime JP4904158B2 (ja) | 2003-10-09 | 2004-10-08 | 弁組立体 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8100382B2 (https=) |
| EP (1) | EP1671055B1 (https=) |
| JP (1) | JP4904158B2 (https=) |
| KR (1) | KR101176825B1 (https=) |
| CN (1) | CN1864020B (https=) |
| AU (1) | AU2004280611A1 (https=) |
| CA (1) | CA2540633C (https=) |
| WO (1) | WO2005036035A2 (https=) |
Families Citing this family (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9099231B2 (en) * | 2007-10-23 | 2015-08-04 | Brooks Instrument, Llc | Pressure retaining sleeve |
| JP5688076B2 (ja) * | 2009-05-07 | 2015-03-25 | パーカー・ハニフィン・コーポレーション | 自己整合式の軸方向に抑制された調整器弁アセンブリ |
| JP5189603B2 (ja) * | 2010-01-13 | 2013-04-24 | Ｃｋｄ株式会社 | 流量コントローラ及び比例電磁弁 |
| IT1401177B1 (it) * | 2010-07-28 | 2013-07-12 | Arag S R L | Valvola a membrana ad azionamento elettromeccanico, particolarmente per condotti di derivazione di un fluido di impianti di irrorazione e/o di diserbo e simili |
| US9511151B2 (en) | 2010-11-12 | 2016-12-06 | Uti Limited Partnership | Compositions and methods for the prevention and treatment of cancer |
| DE102011077069A1 (de) * | 2011-06-07 | 2012-12-13 | Robert Bosch Gmbh | Elektromagnetisch betätigbares Ventil |
| US9464729B2 (en) * | 2011-06-14 | 2016-10-11 | Brooks Instrument, Llc | Pressure balanced valve |
| US9188989B1 (en) | 2011-08-20 | 2015-11-17 | Daniel T. Mudd | Flow node to deliver process gas using a remote pressure measurement device |
| US9958302B2 (en) | 2011-08-20 | 2018-05-01 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| US9448564B2 (en) * | 2013-02-15 | 2016-09-20 | Reno Technologies, Inc. | Gas delivery system for outputting fast square waves of process gas during semiconductor processing |
| US10988516B2 (en) | 2012-03-26 | 2021-04-27 | Uti Limited Partnership | Methods and compositions for treating inflammation |
| WO2014040002A2 (en) | 2012-09-10 | 2014-03-13 | Mudd Daniel T | Pressure based mass flow controller |
| US9603948B2 (en) | 2012-10-11 | 2017-03-28 | Uti Limited Partnership | Methods and compositions for treating multiple sclerosis and related disorders |
| JP6081800B2 (ja) * | 2013-01-07 | 2017-02-15 | 株式会社堀場エステック | 流体制御弁及びマスフローコントローラ |
| SG10201803780UA (en) | 2013-11-04 | 2018-06-28 | Uti Lp | Methods and compositions for sustained immunotherapy |
| DE102014109517A1 (de) * | 2014-07-08 | 2016-01-14 | Svm Schultz Verwaltungs-Gmbh & Co. Kg | Magnetventil mit Mäanderfeder |
| KR101617809B1 (ko) * | 2015-02-10 | 2016-05-03 | 주식회사 태성트레이딩 | 솔레노이드 밸브 매니폴드 |
| ES3055030T3 (en) | 2015-05-06 | 2026-02-09 | Uti Lp | Nanoparticle compositions for sustained therapy |
| US10591081B2 (en) * | 2016-04-01 | 2020-03-17 | Emerson Electric Co. | Solenoid coil including bobbin with moisture barrier |
| US10838437B2 (en) | 2018-02-22 | 2020-11-17 | Ichor Systems, Inc. | Apparatus for splitting flow of process gas and method of operating same |
| US11144075B2 (en) | 2016-06-30 | 2021-10-12 | Ichor Systems, Inc. | Flow control system, method, and apparatus |
| US10303189B2 (en) | 2016-06-30 | 2019-05-28 | Reno Technologies, Inc. | Flow control system, method, and apparatus |
| US10679880B2 (en) | 2016-09-27 | 2020-06-09 | Ichor Systems, Inc. | Method of achieving improved transient response in apparatus for controlling flow and system for accomplishing same |
| US10663337B2 (en) | 2016-12-30 | 2020-05-26 | Ichor Systems, Inc. | Apparatus for controlling flow and method of calibrating same |
| US10208870B1 (en) * | 2017-08-09 | 2019-02-19 | Hydrotek Corporation | Solenoid valve |
| EP3716949A4 (en) | 2017-11-29 | 2022-05-18 | UTI Limited Partnership | Methods of treating autoimmune disease |
| US11899477B2 (en) | 2021-03-03 | 2024-02-13 | Ichor Systems, Inc. | Fluid flow control system comprising a manifold assembly |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| BE792109A (fr) * | 1971-12-02 | 1973-03-16 | Rohe Scientific Corp | Soupape a diaphragme a deplacement nul |
| DE2262247A1 (de) * | 1972-12-20 | 1974-06-27 | Teves Gmbh Alfred | Elektromagnetisches ventil |
| US4085921A (en) * | 1975-04-09 | 1978-04-25 | Matsushita Electric Industrial Co., Ltd. | Multiple-mode fluid-flow control valve arrangement |
| JPS51117226A (en) * | 1975-04-09 | 1976-10-15 | Nissan Motor Co Ltd | Air intake means in torch-ignition type internal combustion engine |
| US4070004A (en) * | 1976-03-01 | 1978-01-24 | Waters Associates, Inc. | Diaphragm valve |
| US4635683A (en) * | 1985-10-03 | 1987-01-13 | Ford Motor Company | Variable force solenoid |
| JPS62113977A (ja) * | 1985-11-13 | 1987-05-25 | Aisin Seiki Co Ltd | 電磁弁装置 |
| US4915353A (en) * | 1988-09-26 | 1990-04-10 | Nupro Company | Diaphragm valve |
| US5151178A (en) * | 1989-02-27 | 1992-09-29 | Hewlett-Packard Company | Axially-driven valve controlled trapping assembly |
| US4969629A (en) * | 1989-11-28 | 1990-11-13 | The Boc Group, Inc. | Diaphragm valve |
| US5211372A (en) * | 1991-07-11 | 1993-05-18 | Massachusetts Institute Of Technology | Exhaust valve for a gas expansion system |
| US5158263A (en) * | 1991-10-30 | 1992-10-27 | Stec, Inc. | Flow rate control valve |
| JPH074965A (ja) | 1993-06-18 | 1995-01-10 | Maeda Corp | 地盤変位計測方法 |
| JPH08200525A (ja) * | 1995-01-31 | 1996-08-06 | Hitachi Metals Ltd | 液体原料気化器用弁 |
| US5772181A (en) * | 1995-06-01 | 1998-06-30 | Emerson Electric Co. | Pivoting valve assembly |
| US6394138B1 (en) * | 1996-10-30 | 2002-05-28 | Unit Instruments, Inc. | Manifold system of removable components for distribution of fluids |
| WO1998021633A2 (en) * | 1996-11-14 | 1998-05-22 | Foxboro Eckardt Gmbh | Current to pressure converter |
| JP2000035151A (ja) * | 1998-05-13 | 2000-02-02 | Ckd Corp | プロセスガス供給ユニット |
| JP2000081162A (ja) * | 1998-07-01 | 2000-03-21 | Canon Inc | 弁装置 |
| DE29814444U1 (de) * | 1998-08-12 | 1998-11-19 | C. Rob. Hammerstein GmbH & Co. KG, 42699 Solingen | Sitzgestell eines Fahrzeugsitzes mit einem Sitzträger, der zwei Seitenteile und eine rückwärtige Traverse hat |
| US6220569B1 (en) * | 2000-01-07 | 2001-04-24 | Clippard Instrument Laboratory, Inc. | Electrically controlled proportional valve |
| US6450197B1 (en) * | 2001-01-26 | 2002-09-17 | Vacco Industries, Inc. | Magnetically actuated valve system |
-
2004
- 2004-10-08 US US10/573,615 patent/US8100382B2/en not_active Expired - Lifetime
- 2004-10-08 CA CA2540633A patent/CA2540633C/en not_active Expired - Lifetime
- 2004-10-08 CN CN200480029539.4A patent/CN1864020B/zh not_active Expired - Lifetime
- 2004-10-08 WO PCT/US2004/033180 patent/WO2005036035A2/en not_active Ceased
- 2004-10-08 EP EP04794504A patent/EP1671055B1/en not_active Expired - Lifetime
- 2004-10-08 AU AU2004280611A patent/AU2004280611A1/en not_active Abandoned
- 2004-10-08 JP JP2006534363A patent/JP4904158B2/ja not_active Expired - Lifetime
- 2004-10-08 KR KR1020067009007A patent/KR101176825B1/ko not_active Expired - Lifetime
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