JP2007502960A - 真空装置 - Google Patents
真空装置 Download PDFInfo
- Publication number
- JP2007502960A JP2007502960A JP2006523540A JP2006523540A JP2007502960A JP 2007502960 A JP2007502960 A JP 2007502960A JP 2006523540 A JP2006523540 A JP 2006523540A JP 2006523540 A JP2006523540 A JP 2006523540A JP 2007502960 A JP2007502960 A JP 2007502960A
- Authority
- JP
- Japan
- Prior art keywords
- medium
- line
- storage container
- pressure
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D8/00—Cold traps; Cold baffles
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
- F25B9/14—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point characterised by the cycle used, e.g. Stirling cycle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/002—Gas cycle refrigeration machines with parallel working cold producing expansion devices in one circuit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2309/00—Gas cycle refrigeration machines
- F25B2309/14—Compression machines, plants or systems characterised by the cycle used
- F25B2309/1428—Control of a Stirling refrigeration machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2400/00—General features or devices for refrigeration machines, plants or systems, combined heating and refrigeration systems or heat-pump systems, i.e. not limited to a particular subgroup of F25B
- F25B2400/07—Details of compressors or related parts
- F25B2400/075—Details of compressors or related parts with parallel compressors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2600/00—Control issues
- F25B2600/25—Control of valves
- F25B2600/2523—Receiver valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2700/00—Sensing or detecting of parameters; Sensors therefor
- F25B2700/19—Pressures
- F25B2700/193—Pressures of the compressor
- F25B2700/1931—Discharge pressures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
- F25B2700/00—Sensing or detecting of parameters; Sensors therefor
- F25B2700/19—Pressures
- F25B2700/193—Pressures of the compressor
- F25B2700/1933—Suction pressures
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Claims (8)
- 真空装置であって、
複数の冷却装置(10)を備えており、
媒体供給管路(12)を介して前記冷却装置(10)に接続された圧縮装置(16)を備えており、
前記冷却装置(10)と前記圧縮装置(16)とを接続する媒体戻り管路(14)を備えており、
前記媒体供給管路(12)及び前記媒体戻り管路(14)に接続管路(22,24)を介して接続された貯蔵容器(20)を備えており、
前記媒体供給管路(12)と前記貯蔵容器(20)との間の接続管路(22)内に配置された供給弁(26)を備えており、
媒体圧力の測定のための圧力測定装置(30)及び前記供給弁(26)に接続されていて測定された圧力に依存して前記供給弁(26)を制御するための制御装置(32)を備えている形式のものにおいて、
媒体供給管路(12)内にのみ、若しくは媒体戻り管路(14)内にのみ1つの圧力測定装置(30)を設けてあることを特徴とする真空装置。 - 供給弁(26)の制御のための閾値は冷却装置・特性線に依存して規定されている請求項1に記載の真空装置。
- 媒体戻り管路(14)と貯蔵容器(20)との間の接続管路(24)内に、制御装置(32)に接続された戻し弁を配置してある請求項1又は2に記載の真空装置。
- 媒体戻り管路(14)と貯蔵容器(20)との間の接続管路(24)内に、有利には開口の小さいノズル(28)を配置してある請求項1又は2に記載の真空装置。
- 請求項1から4のいずれか1項に記載の真空装置を制御するための方法において、
圧力測定装置(30)によって測定された最大の閾値の越えられた場合に、供給弁(26)を開き、その結果、媒体を貯蔵容器(20)内へ流入させ、かつ
圧力測定装置(30)によって測定された最小の閾値の下回られた場合に、戻し弁を開き、その結果、媒体を貯蔵容器(20)から媒体戻り管路(14)内へ流入させることを特徴とする、真空装置を制御するための方法。 - 請求項1から4のいずれか1項に記載の真空装置を制御するための方法において、
圧力測定装置(30)によって測定された最大の閾値の越えられた場合に、供給弁(26)を開き、その結果、媒体を貯蔵容器(20)内へ流入させ、かつ
相応の圧力差の生じた際にノズル(28)を介して媒体を、冷却装置(10)における変化する圧力差に基づき媒体供給管路(12)内の圧力が最大の閾値を越えている間、媒体戻り管路(14)へ流入させことを特徴とする、真空装置を制御するための方法。 - 圧縮装置(16)によって媒体を連続的に送り出す請求項5又は6に記載の方法。
- 媒体を貯蔵容器(20)から媒体戻り管路内へのみ放出する請求項5から7のいずれか1項に記載の方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US49699803P | 2003-08-20 | 2003-08-20 | |
PCT/EP2004/007764 WO2005019745A1 (de) | 2003-08-20 | 2004-07-14 | Vakuumvorrichtung |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007502960A true JP2007502960A (ja) | 2007-02-15 |
JP4638871B2 JP4638871B2 (ja) | 2011-02-23 |
Family
ID=34216062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006523540A Expired - Fee Related JP4638871B2 (ja) | 2003-08-20 | 2004-07-14 | 真空装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20060254289A1 (ja) |
EP (1) | EP1656524A1 (ja) |
JP (1) | JP4638871B2 (ja) |
KR (1) | KR20060066103A (ja) |
CN (1) | CN1839285A (ja) |
TW (1) | TW200510636A (ja) |
WO (1) | WO2005019745A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014526673A (ja) * | 2011-09-23 | 2014-10-06 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 冷却方法及び設備 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101327715B1 (ko) * | 2009-12-28 | 2013-11-11 | 가부시키가이샤 알박 | 진공 배기 장치 및 진공 배기 방법, 그리고 기판 처리 장치 |
JP2019506923A (ja) * | 2015-12-30 | 2019-03-14 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | デュアルコンプレッサを有するmriシステム |
CN106370555A (zh) * | 2016-10-10 | 2017-02-01 | 山西汾西矿业(集团)有限责任公司 | 选煤系统的密度计装置 |
WO2019181595A1 (ja) * | 2018-03-23 | 2019-09-26 | 住友重機械工業株式会社 | 極低温冷凍機 |
KR102536332B1 (ko) * | 2022-09-23 | 2023-05-26 | 크라이오에이치앤아이(주) | 크라이오 펌프 시스템 |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62213656A (ja) * | 1986-03-13 | 1987-09-19 | アイシン精機株式会社 | 冷凍機 |
JPH0315677A (ja) * | 1989-03-30 | 1991-01-24 | Aisin Seiki Co Ltd | マルチヘツドクライオポンプ |
JPH04501751A (ja) * | 1988-09-13 | 1992-03-26 | ヘリックス テクノロジー コーポレーション | 電子制御クライオポンプ |
JPH11281177A (ja) * | 1998-03-31 | 1999-10-15 | Sumitomo Heavy Ind Ltd | 蓄冷式冷凍機用圧縮機 |
JP2000266416A (ja) * | 1999-03-15 | 2000-09-29 | Sanyo Electric Co Ltd | 極低温冷凍装置 |
JP2001355929A (ja) * | 2000-05-25 | 2001-12-26 | Cryomech Inc | 一体化された緩衝容積を用いるパルスチューブ極低温冷凍装置 |
JP2002039638A (ja) * | 2000-07-25 | 2002-02-06 | Daikin Ind Ltd | 極低温冷凍装置 |
JP2002106991A (ja) * | 2000-09-29 | 2002-04-10 | Sanyo Electric Co Ltd | ヘリウム圧縮機ユニット |
JP2002277086A (ja) * | 2001-03-21 | 2002-09-25 | Sumitomo Heavy Ind Ltd | 極低温冷凍装置 |
US6530237B2 (en) * | 2001-04-02 | 2003-03-11 | Helix Technology Corporation | Refrigeration system pressure control using a gas volume |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2421398C2 (de) * | 1974-05-03 | 1983-11-24 | Audi Nsu Auto Union Ag, 7107 Neckarsulm | Wärmekraftmaschine für den Antrieb eines Kraftfahrzeuges |
US5010737A (en) * | 1989-03-30 | 1991-04-30 | Aisin Seiki Kabushiki Kaisha | Multi-headed cryopump apparatus |
US7127901B2 (en) * | 2001-07-20 | 2006-10-31 | Brooks Automation, Inc. | Helium management control system |
US6708503B1 (en) * | 2002-12-27 | 2004-03-23 | General Electric Company | Vacuum retention method and superconducting machine with vacuum retention |
-
2004
- 2004-07-14 CN CNA2004800238917A patent/CN1839285A/zh active Pending
- 2004-07-14 EP EP04740983A patent/EP1656524A1/de not_active Withdrawn
- 2004-07-14 US US10/568,565 patent/US20060254289A1/en not_active Abandoned
- 2004-07-14 KR KR1020067003343A patent/KR20060066103A/ko active IP Right Grant
- 2004-07-14 WO PCT/EP2004/007764 patent/WO2005019745A1/de active Application Filing
- 2004-07-14 JP JP2006523540A patent/JP4638871B2/ja not_active Expired - Fee Related
- 2004-08-20 TW TW093125053A patent/TW200510636A/zh unknown
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62213656A (ja) * | 1986-03-13 | 1987-09-19 | アイシン精機株式会社 | 冷凍機 |
JPH04501751A (ja) * | 1988-09-13 | 1992-03-26 | ヘリックス テクノロジー コーポレーション | 電子制御クライオポンプ |
JPH0315677A (ja) * | 1989-03-30 | 1991-01-24 | Aisin Seiki Co Ltd | マルチヘツドクライオポンプ |
JPH11281177A (ja) * | 1998-03-31 | 1999-10-15 | Sumitomo Heavy Ind Ltd | 蓄冷式冷凍機用圧縮機 |
JP2000266416A (ja) * | 1999-03-15 | 2000-09-29 | Sanyo Electric Co Ltd | 極低温冷凍装置 |
JP2001355929A (ja) * | 2000-05-25 | 2001-12-26 | Cryomech Inc | 一体化された緩衝容積を用いるパルスチューブ極低温冷凍装置 |
JP2002039638A (ja) * | 2000-07-25 | 2002-02-06 | Daikin Ind Ltd | 極低温冷凍装置 |
JP2002106991A (ja) * | 2000-09-29 | 2002-04-10 | Sanyo Electric Co Ltd | ヘリウム圧縮機ユニット |
JP2002277086A (ja) * | 2001-03-21 | 2002-09-25 | Sumitomo Heavy Ind Ltd | 極低温冷凍装置 |
US6530237B2 (en) * | 2001-04-02 | 2003-03-11 | Helix Technology Corporation | Refrigeration system pressure control using a gas volume |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014526673A (ja) * | 2011-09-23 | 2014-10-06 | レール・リキード−ソシエテ・アノニム・プール・レテュード・エ・レクスプロワタシオン・デ・プロセデ・ジョルジュ・クロード | 冷却方法及び設備 |
Also Published As
Publication number | Publication date |
---|---|
EP1656524A1 (de) | 2006-05-17 |
WO2005019745A1 (de) | 2005-03-03 |
US20060254289A1 (en) | 2006-11-16 |
JP4638871B2 (ja) | 2011-02-23 |
CN1839285A (zh) | 2006-09-27 |
TW200510636A (en) | 2005-03-16 |
KR20060066103A (ko) | 2006-06-15 |
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