JP2007333672A5 - - Google Patents

Download PDF

Info

Publication number
JP2007333672A5
JP2007333672A5 JP2006168597A JP2006168597A JP2007333672A5 JP 2007333672 A5 JP2007333672 A5 JP 2007333672A5 JP 2006168597 A JP2006168597 A JP 2006168597A JP 2006168597 A JP2006168597 A JP 2006168597A JP 2007333672 A5 JP2007333672 A5 JP 2007333672A5
Authority
JP
Japan
Prior art keywords
wafer
imaging
illumination
imaging means
irradiating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006168597A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007333672A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006168597A priority Critical patent/JP2007333672A/ja
Priority claimed from JP2006168597A external-priority patent/JP2007333672A/ja
Publication of JP2007333672A publication Critical patent/JP2007333672A/ja
Publication of JP2007333672A5 publication Critical patent/JP2007333672A5/ja
Withdrawn legal-status Critical Current

Links

JP2006168597A 2006-06-19 2006-06-19 外観検査装置および外観検査方法 Withdrawn JP2007333672A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006168597A JP2007333672A (ja) 2006-06-19 2006-06-19 外観検査装置および外観検査方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006168597A JP2007333672A (ja) 2006-06-19 2006-06-19 外観検査装置および外観検査方法

Publications (2)

Publication Number Publication Date
JP2007333672A JP2007333672A (ja) 2007-12-27
JP2007333672A5 true JP2007333672A5 (enExample) 2009-08-06

Family

ID=38933275

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006168597A Withdrawn JP2007333672A (ja) 2006-06-19 2006-06-19 外観検査装置および外観検査方法

Country Status (1)

Country Link
JP (1) JP2007333672A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8049878B2 (en) * 2008-08-22 2011-11-01 Corning Incorporated Systems and methods for detecting defects in ceramic filter bodies
JP5552779B2 (ja) * 2009-09-04 2014-07-16 セイコーエプソン株式会社 孔内検査方法
JP5664167B2 (ja) * 2010-11-22 2015-02-04 セイコーエプソン株式会社 検査装置
JP6132322B1 (ja) * 2015-12-10 2017-05-24 上野精機株式会社 外観検査装置
JP2023128225A (ja) * 2022-03-03 2023-09-14 株式会社デンソー 半導体素子の画像検査方法と半導体素子の製造方法
WO2024135842A1 (ja) * 2022-12-23 2024-06-27 ダイキン工業株式会社 撮影装置及び撮影方法

Similar Documents

Publication Publication Date Title
JP2010519515A5 (enExample)
CN107000334B (zh) 对复合结构的在线检验
US10809204B2 (en) Inspection and/or web observation apparatus, use of an arrangement as a background panel or transmitted-light transmitter in the inspection and/or web observation apparatus, and method for operating the inspection and/or web observation
JP2011527476A5 (enExample)
JP2008527627A5 (enExample)
JP2012502316A5 (enExample)
JP2013514566A5 (enExample)
JP2008272806A5 (enExample)
TW200714397A (en) Laser repair apparatus
JP2013033068A5 (enExample)
JP2008087185A5 (enExample)
TWI605246B (zh) 檢查裝置
JP2020170070A5 (enExample)
JP2007333672A5 (enExample)
RU2009116927A (ru) Устройство и способ для наблюдения поверхности образца
JP2006105780A5 (enExample)
JP2003202294A (ja) 検査用照明装置
TW200712479A (en) Surface defect inspection apparatus and surface defect inspection method
JP2011095627A5 (enExample)
TWI456163B (zh) 光學影像擷取模組、對位方法及觀測方法
KR20120014765A (ko) 결함 검사장치 및 이를 이용한 결함 검사방법
TW200604516A (en) Image inspecting device
JP2010286339A (ja) 光源の指向性検査方法およびその装置
JP6801860B2 (ja) 被検査物の外観検査装置
JP2007278713A (ja) 塗装検査装置における照明方法