JP2007326987A - 光硬化性組成物及びそれを用いて形成した焼成物パターン - Google Patents
光硬化性組成物及びそれを用いて形成した焼成物パターン Download PDFInfo
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- JP2007326987A JP2007326987A JP2006160614A JP2006160614A JP2007326987A JP 2007326987 A JP2007326987 A JP 2007326987A JP 2006160614 A JP2006160614 A JP 2006160614A JP 2006160614 A JP2006160614 A JP 2006160614A JP 2007326987 A JP2007326987 A JP 2007326987A
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- WUOACPNHFRMFPN-UHFFFAOYSA-N alpha-terpineol Chemical compound CC1=CCC(C(C)(C)O)CC1 WUOACPNHFRMFPN-UHFFFAOYSA-N 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 150000004056 anthraquinones Chemical class 0.000 description 1
- 230000003254 anti-foaming effect Effects 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 239000012752 auxiliary agent Substances 0.000 description 1
- 239000000440 bentonite Substances 0.000 description 1
- 229910000278 bentonite Inorganic materials 0.000 description 1
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 1
- SRSXLGNVWSONIS-UHFFFAOYSA-N benzenesulfonic acid Chemical compound OS(=O)(=O)C1=CC=CC=C1 SRSXLGNVWSONIS-UHFFFAOYSA-N 0.000 description 1
- 229940092714 benzenesulfonic acid Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 229910000416 bismuth oxide Inorganic materials 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- KDYFGRWQOYBRFD-NUQCWPJISA-N butanedioic acid Chemical compound O[14C](=O)CC[14C](O)=O KDYFGRWQOYBRFD-NUQCWPJISA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000536 complexating effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000001723 curing Methods 0.000 description 1
- PESYEWKSBIWTAK-UHFFFAOYSA-N cyclopenta-1,3-diene;titanium(2+) Chemical compound [Ti+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 PESYEWKSBIWTAK-UHFFFAOYSA-N 0.000 description 1
- SQIFACVGCPWBQZ-UHFFFAOYSA-N delta-terpineol Natural products CC(C)(O)C1CCC(=C)CC1 SQIFACVGCPWBQZ-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- WOWBFOBYOAGEEA-UHFFFAOYSA-N diafenthiuron Chemical compound CC(C)C1=C(NC(=S)NC(C)(C)C)C(C(C)C)=CC(OC=2C=CC=CC=2)=C1 WOWBFOBYOAGEEA-UHFFFAOYSA-N 0.000 description 1
- GUJOJGAPFQRJSV-UHFFFAOYSA-N dialuminum;dioxosilane;oxygen(2-);hydrate Chemical compound O.[O-2].[O-2].[O-2].[Al+3].[Al+3].O=[Si]=O.O=[Si]=O.O=[Si]=O.O=[Si]=O GUJOJGAPFQRJSV-UHFFFAOYSA-N 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- ZBCBWPMODOFKDW-UHFFFAOYSA-N diethanolamine Chemical compound OCCNCCO ZBCBWPMODOFKDW-UHFFFAOYSA-N 0.000 description 1
- 238000007865 diluting Methods 0.000 description 1
- 125000002147 dimethylamino group Chemical group [H]C([H])([H])N(*)C([H])([H])[H] 0.000 description 1
- KUMNEOGIHFCNQW-UHFFFAOYSA-N diphenyl phosphite Chemical compound C=1C=CC=CC=1OP([O-])OC1=CC=CC=C1 KUMNEOGIHFCNQW-UHFFFAOYSA-N 0.000 description 1
- VFHVQBAGLAREND-UHFFFAOYSA-N diphenylphosphoryl-(2,4,6-trimethylphenyl)methanone Chemical compound CC1=CC(C)=CC(C)=C1C(=O)P(=O)(C=1C=CC=CC=1)C1=CC=CC=C1 VFHVQBAGLAREND-UHFFFAOYSA-N 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002148 esters Chemical class 0.000 description 1
- ZUNGGJHBMLMRFJ-UHFFFAOYSA-O ethoxy-hydroxy-oxophosphanium Chemical compound CCO[P+](O)=O ZUNGGJHBMLMRFJ-UHFFFAOYSA-O 0.000 description 1
- ORBFAMHUKZLWSD-UHFFFAOYSA-N ethyl 2-(dimethylamino)benzoate Chemical compound CCOC(=O)C1=CC=CC=C1N(C)C ORBFAMHUKZLWSD-UHFFFAOYSA-N 0.000 description 1
- ZJXZSIYSNXKHEA-UHFFFAOYSA-N ethyl dihydrogen phosphate Chemical compound CCOP(O)(O)=O ZJXZSIYSNXKHEA-UHFFFAOYSA-N 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 235000019000 fluorine Nutrition 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 239000001530 fumaric acid Substances 0.000 description 1
- 238000001879 gelation Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 229910052736 halogen Inorganic materials 0.000 description 1
- 150000002367 halogens Chemical class 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 125000002768 hydroxyalkyl group Chemical group 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 238000007603 infrared drying Methods 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 150000002576 ketones Chemical class 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 150000002734 metacrylic acid derivatives Chemical class 0.000 description 1
- 229910001507 metal halide Inorganic materials 0.000 description 1
- 150000005309 metal halides Chemical class 0.000 description 1
- CAAULPUQFIIOTL-UHFFFAOYSA-N methyl dihydrogen phosphate Chemical compound COP(O)(O)=O CAAULPUQFIIOTL-UHFFFAOYSA-N 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 229910052901 montmorillonite Inorganic materials 0.000 description 1
- 125000004573 morpholin-4-yl group Chemical group N1(CCOCC1)* 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 description 1
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 description 1
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- NWVVVBRKAWDGAB-UHFFFAOYSA-N p-methoxyphenol Chemical compound COC1=CC=C(O)C=C1 NWVVVBRKAWDGAB-UHFFFAOYSA-N 0.000 description 1
- LXTZRIBXKVRLOA-UHFFFAOYSA-N padimate a Chemical compound CCCCCOC(=O)C1=CC=C(N(C)C)C=C1 LXTZRIBXKVRLOA-UHFFFAOYSA-N 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 150000002978 peroxides Chemical class 0.000 description 1
- 229950000688 phenothiazine Drugs 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- CMPQUABWPXYYSH-UHFFFAOYSA-N phenyl phosphate Chemical compound OP(O)(=O)OC1=CC=CC=C1 CMPQUABWPXYYSH-UHFFFAOYSA-N 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-N phosphinic acid Chemical compound O[PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-N 0.000 description 1
- 150000003016 phosphoric acids Chemical class 0.000 description 1
- 239000003504 photosensitizing agent Substances 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 150000007519 polyprotic acids Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 1
- LLHKCFNBLRBOGN-UHFFFAOYSA-N propylene glycol methyl ether acetate Chemical compound COCC(C)OC(C)=O LLHKCFNBLRBOGN-UHFFFAOYSA-N 0.000 description 1
- 229940079877 pyrogallol Drugs 0.000 description 1
- 238000010526 radical polymerization reaction Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000000790 scattering method Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000008117 stearic acid Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229940116411 terpineol Drugs 0.000 description 1
- ISIJQEHRDSCQIU-UHFFFAOYSA-N tert-butyl 2,7-diazaspiro[4.5]decane-7-carboxylate Chemical compound C1N(C(=O)OC(C)(C)C)CCCC11CNCC1 ISIJQEHRDSCQIU-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
- 238000012719 thermal polymerization Methods 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 150000003557 thiazoles Chemical class 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 150000003852 triazoles Chemical class 0.000 description 1
- STCOOQWBFONSKY-UHFFFAOYSA-N tributyl phosphate Chemical compound CCCCOP(=O)(OCCCC)OCCCC STCOOQWBFONSKY-UHFFFAOYSA-N 0.000 description 1
- 150000007964 xanthones Chemical class 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0042—Photosensitive materials with inorganic or organometallic light-sensitive compounds not otherwise provided for, e.g. inorganic resists
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Dispersion Chemistry (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials For Photolithography (AREA)
- Conductive Materials (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Polymerisation Methods In General (AREA)
Abstract
【解決手段】(A)低融点合金粉末、(B)有機バインダー、(C)光重合性モノマー、及び(D)光重合開始剤を含有することを特徴とする。このような光硬化性組成物は、ペースト状形態であってもよく、また予めフィルム状に製膜したドライフィルムの形態であってもよい。
【選択図】なし
Description
このような本発明の光硬化性組成物は、ペースト状形態であってもよく、また予めフィルム状に製膜したドライフィルムの形態であってもよい。
さらに本発明によれば、このような光硬化性組成物を用いて形成された導電性焼成物パターンが提供される。
また、黄変の原因となる銀(Ag)の含有量としては20質量%未満であることが好ましい。20質量%以上となると焼成後のガラス基板の黄変が発生しやすくなり、好ましくない。
このカルボキシル基含有感光性樹脂及びカルボキシル基含有樹脂は、単独でまたは混合して用いてもよいが、いずれの場合でもこれらは合計で組成物全量の1〜35質量%の割合で配合することが好ましい。これらのポリマーの配合量が上記範囲より少ない場合、形成する皮膜中の上記樹脂の分布が不均一になり易く、充分な光硬化性および光硬化深度が得られ難く、選択的露光、現像によるパターニングが困難となる。一方、上記範囲よりも多い場合、焼成時のパターンのよれや線幅収縮を生じ易くなるので好ましくない。
これらの光重合開始剤(D)の配合割合は、前記有機バインダー(カルボキシル基含有感光性樹脂及び/又はカルボキシル基含有樹脂)(B)100質量部当り、1〜30質量部が適当であり、好ましくは、5〜20質量部である。
さらに、より深い光硬化深度を要求される場合、必要に応じて、可視領域でラジカル重合を開始するチバ・スペシャルティ・ケミカルズ社製イルガキュアー784等のチタノセン系光重合開始剤、ロイコ染料等を硬化助剤として組み合わせて用いることができる。
ガラス粉末は、焼成後の導体回路との密着性向上のために、導電粉末(B)100質量部当り、50質量部以下、好ましくは10質量部以下の割合で添加できる。この理由は、その配合量が上記範囲よりも多いと焼成後に充分な導通が得られず、好ましくない。このガラス粉末としては、そのガラス転移点(Tg)300〜500℃、ガラス軟化点(Ts)400〜600℃のものが好ましい。ガラス粉末の軟化点が400℃より低いと、有機バインダーを包み込み易くなり、残存する有機バインダーが分解することによって組成物中にブリスターが生じ易くなるので好ましくない。また、解像度の点からは、平均粒径10μm以下、好ましくは3μm以下のガラス粉末を用いることが好ましい。
焼成後のパターンの膜厚は、1〜30μmであることが好ましく、焼成膜厚が上記範囲よりも薄くなるとパターンの断線、ピンホールなどが起こりやすく充分な導通を得ることが難しく、焼成膜厚が上記範囲を超えて厚くなるとパターン形成が難しくなり好ましくない。
・有機バインダーは、三菱レイヨン社製のカルボキシル基含有樹脂PB−383(Tg=63℃、酸価=176mgKOH/g、重量平均分子量=26,000)を2,2,4−トリメチル−1,3ペンタンジオールモノイソブチレートへ溶解させ、固形分40wt%としたものを用いた。
・ 銀粉末は、平均粒径(D50)=1.7μm、銀99質量%の粉末を使用した。
有機バインダー 250部
トリメチロールプロパントリアクリレート 74部
EO変性トリメチロールプロパントリアクリレート 100部
2−メチル−1−[4−(メチルチオ)フェニル]−
2−モルフォリノプロパン−1−オン 10部
低融点合金粉末 1481部
消泡・レベリング剤(XL490−50:伊藤製油社製) 5部
低融点合金粉末の配合量を2222部としたこと以外は組成物例1と同様の組成物。
低融点合金粉末の配合量を2963部としたこと以外は組成物例1と同様の組成物。
低融点合金粉末を銀粉末に置き換え、配合量を750部としたこと以外は組成物例1と同様の組成物。
低融点合金粉末の配合量を600部としたこと以外は組成物例1と同様の組成物。
低融点合金粉末の配合量を4500部としたこと以外は組成物例1と同様の組成物。
ガラス基板上に、評価用ペーストを200メッシュのポリエステルスクリーンを用いて全面に塗布し、次いで、熱風循環式乾燥炉にて80℃で20分間乾燥して指触乾燥性の良好な皮膜を形成した。その後、ライン/スペース=100/100μmとなるネガフィルムを用いて組成物上の積算光量が900mJ/cm2となるように露光した後、液温30℃の0.4wt%Na2CO3水溶液を用いて現像を行ない、水洗した。最後に空気雰囲気下にて10℃/分で昇温し、560℃で10分間焼成して試験片を作製した。
100メッシュのポリエステルスクリーンを用いて全面に塗布し、次いで、熱風循環式乾燥炉にて80℃で20分間乾燥して指触乾燥性の良好な皮膜を形成した。その後、パターン寸法4mm×100mmのラインが形成できるネガマスクを用いて、組成物上の積算光量が900mJ/cm2となるように露光した後、液温30℃の0.4wt%Na2CO3水溶液を用いて現像を行ない、水洗した。最後に空気雰囲気下にて10℃/分で昇温し、560℃で10分間焼成して基板を作製した。
上記試験片を光学顕微鏡により目視観察してスペース部分が黄色く変色しているか否かを評価した。
上記試験片を用いて表面粗さ計(小坂研究所社製 SE−30H)により膜厚を測定した。
上記試験片を用いてテスター(HIOKI 3540 mΩ HITESTER)により抵抗値を測定した。
Claims (6)
- (A)低融点合金粉末、(B)有機バインダー、(C)光重合性モノマー、及び(D)光重合開始剤を含有することを特徴とする光硬化性組成物。
- 低融点合金粉末(A)を構成する合金の成分が、鉛(Pb)を含まないことを特徴とする請求項1に記載の光硬化性組成物。
- 低融点合金粉末(A)を構成する合金の成分組成が、錫(Sn)を60〜98質量%含む成分組成であることを特徴とする請求項1に記載の光硬化性組成物。
- 低融点合金粉末(A)を構成する合金の成分組成が、銀(Ag)を20質量%以上含まない成分組成であることを特徴とする請求項1に記載の光硬化性組成物。
- 低融点合金粉末(A)が光硬化性組成物中に60〜90質量%の割合で含有することを特徴とする請求項1乃至4のいずれか一項に記載の光硬化性組成物。
- ガラス基板上に、前記請求項1乃至5のいずれか一項に記載の光硬化性組成物のパターンを形成し、焼成して得られる焼成物パターン。
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CN2007101061661A CN101086617B (zh) | 2006-06-09 | 2007-06-08 | 光固化性组合物以及使用其得到的烧成物图案 |
KR1020070055883A KR101442236B1 (ko) | 2006-06-09 | 2007-06-08 | 광경화성 조성물 및 그것을 이용하여 얻어지는 패턴을 갖는소성물 |
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WO2009117873A1 (zh) * | 2008-03-28 | 2009-10-01 | 东莞万德电子制品有限公司 | 玻璃片一次性成形纹路的方法和产品 |
CN104149337A (zh) * | 2014-07-02 | 2014-11-19 | 中国电子科技集团公司第五十五研究所 | 一种用于三维打印的光固化材料及其应用方法 |
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CN105301900A (zh) * | 2015-11-16 | 2016-02-03 | 北京中科紫鑫科技有限责任公司 | 一种光刻胶组合物和形成光刻图案的方法 |
CN106435236B (zh) * | 2016-11-08 | 2018-11-23 | 西安铂力特增材技术股份有限公司 | 一种镍基高温合金制件的制备方法 |
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JP2005276573A (ja) * | 2004-03-24 | 2005-10-06 | Taiyo Ink Mfg Ltd | 感光性導電ペースト及びそれを用いて形成した導電体パターン |
JP2007131788A (ja) * | 2005-11-11 | 2007-05-31 | Fujifilm Corp | 記録材料用樹脂組成物、感光性転写材料、表示装置用遮光膜の形成方法、液晶表示装置用カラーフィルタ、並びに液晶表示装置 |
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US20040170925A1 (en) * | 2002-12-06 | 2004-09-02 | Roach David Herbert | Positive imageable thick film compositions |
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JPH06228442A (ja) * | 1993-02-02 | 1994-08-16 | Asahi Chem Ind Co Ltd | 光重合性導電ペースト |
JPH06290635A (ja) * | 1993-04-01 | 1994-10-18 | Toray Ind Inc | 感光性導電ペースト |
JP2003203524A (ja) * | 2001-09-12 | 2003-07-18 | Mesh Kk | ハンダ含有感光性フィルム、ハンダ含有感光性ペースト、及びハンダパターン形成方法 |
JP2005276573A (ja) * | 2004-03-24 | 2005-10-06 | Taiyo Ink Mfg Ltd | 感光性導電ペースト及びそれを用いて形成した導電体パターン |
JP2007131788A (ja) * | 2005-11-11 | 2007-05-31 | Fujifilm Corp | 記録材料用樹脂組成物、感光性転写材料、表示装置用遮光膜の形成方法、液晶表示装置用カラーフィルタ、並びに液晶表示装置 |
Cited By (2)
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WO2009117873A1 (zh) * | 2008-03-28 | 2009-10-01 | 东莞万德电子制品有限公司 | 玻璃片一次性成形纹路的方法和产品 |
CN104149337A (zh) * | 2014-07-02 | 2014-11-19 | 中国电子科技集团公司第五十五研究所 | 一种用于三维打印的光固化材料及其应用方法 |
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KR101442236B1 (ko) | 2014-09-19 |
KR20070118031A (ko) | 2007-12-13 |
JP4751773B2 (ja) | 2011-08-17 |
CN101086617B (zh) | 2012-07-04 |
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