JP2007314877A5 - - Google Patents
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- Publication number
- JP2007314877A5 JP2007314877A5 JP2007117863A JP2007117863A JP2007314877A5 JP 2007314877 A5 JP2007314877 A5 JP 2007314877A5 JP 2007117863 A JP2007117863 A JP 2007117863A JP 2007117863 A JP2007117863 A JP 2007117863A JP 2007314877 A5 JP2007314877 A5 JP 2007314877A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- cover
- evaporation source
- thru
- electrode cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008020 evaporation Effects 0.000 claims 8
- 238000001704 evaporation Methods 0.000 claims 8
- 238000007740 vapor deposition Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007117863A JP4846650B2 (ja) | 2006-04-28 | 2007-04-27 | 電極カバーおよび蒸着装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006126794 | 2006-04-28 | ||
| JP2006126794 | 2006-04-28 | ||
| JP2007117863A JP4846650B2 (ja) | 2006-04-28 | 2007-04-27 | 電極カバーおよび蒸着装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007314877A JP2007314877A (ja) | 2007-12-06 |
| JP2007314877A5 true JP2007314877A5 (https=) | 2010-03-25 |
| JP4846650B2 JP4846650B2 (ja) | 2011-12-28 |
Family
ID=38849002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007117863A Expired - Fee Related JP4846650B2 (ja) | 2006-04-28 | 2007-04-27 | 電極カバーおよび蒸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4846650B2 (https=) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010015795A (ja) * | 2008-07-03 | 2010-01-21 | Hitachi Ltd | 有機発光素子の作製方法及び作製装置 |
| EP2629590A1 (en) | 2008-06-17 | 2013-08-21 | Hitachi Ltd. | An organic light-emitting device |
| CN106995915A (zh) * | 2017-05-11 | 2017-08-01 | 成都西沃克真空科技有限公司 | 一种旋转式多位阻蒸设备 |
| CN106987806A (zh) * | 2017-05-11 | 2017-07-28 | 成都西沃克真空科技有限公司 | 一种电极杆的电极输入锁紧装置 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5733067B2 (https=) * | 1974-06-04 | 1982-07-14 | ||
| JPS5852024B2 (ja) * | 1976-09-28 | 1983-11-19 | 電気化学工業株式会社 | 抵抗加熱型真空蒸着装置 |
| JPS6264767A (ja) * | 1985-09-03 | 1987-03-23 | 清水建設株式会社 | 石炭サイロの目詰り防止方法及びその装置 |
| JP4488273B2 (ja) * | 2001-03-23 | 2010-06-23 | オリンパス株式会社 | 薄膜形成用のターゲット組立体、蒸着源、薄膜形成装置及び薄膜形成方法 |
-
2007
- 2007-04-27 JP JP2007117863A patent/JP4846650B2/ja not_active Expired - Fee Related
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