JP2007298120A - Slider for linear guide apparatus, linear guide apparatus, manufacturing method of slider for linear guide apparatus, movable member for carrier device and carrier device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a slider for a linear guide apparatus capable of changing a pre-load quantity in assembling and in using without furnishing an exclusive screw for pre-load adjustment, the linear guide apparatus and a manufacturing method of the linear guide apparatus. <P>SOLUTION: The slider 16 has an installing surface 17f to install a member 100 to beguided and mounting holes 32 to make a pair are formed on both sides in the cross direction on this installing surface 17f on this linear guide apparatus. Respective parts on which the mounting holes 32 to make a pair are formed as inclined surfaces respectively inclined toward the outside in the axially rectangular direction of a guide rail on this installing surface 17f. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a movable member for a conveyance device and a conveyance device, and more particularly to a slider for a linear motion guide device, a linear motion guide device, and a method for manufacturing a slider for the linear motion guide device.

  The linear motion guide device is a transport device that guides a guided member linearly, and is used in various machines such as a semiconductor manufacturing device, a precision processing machine, and a precision measuring instrument. In this type of linear motion guide device, the guided member is mounted on the mounting surface of the slider. The slider is a movable member that moves relative to the guide rail via a plurality of rolling elements that circulate while rolling in the endless circulation path.

  Here, when high rigidity is required for the linear motion guide device, the rolling element is used with a preload applied thereto. That is, by using a rolling element having a diameter slightly larger (for example, about several μm to several tens of μm) than the distance between the rolling surfaces of the guide rail and the slider, the rolling element is elastically deformed in advance. Keep it. This amount of elastic deformation is called a preload amount. The greater the preload amount, the higher the rigidity, but the higher the sliding resistance.

The degree of the preload applied to the linear motion guide device varies depending on the application. For example, when a particularly large rigidity is required, such as a machine tool, the amount of preload is large. On the other hand, in an application where a low sliding resistance is required in order to improve machine efficiency and improve control performance, such as a semiconductor manufacturing apparatus, the preload amount is small or no preload is applied.
By the way, the preload amount that is appropriate when the linear motion guide device is used does not always become an appropriate preload amount before use, that is, during transportation or assembly.

  For example, when the preload amount is increased in order to maintain high rigidity during use, the sliding resistance of the slider increases accordingly. On the other hand, it is necessary to move the slider to a specific position on the guide rail before use, for example, when assembling the linear motion guide device. At this time, when the amount of preload is large, the sliding resistance may reach several tens of N to several hundreds of N. Therefore, a very large amount of labor is required to move the slider to a specific position. Become.

  Further, in order to realize a low sliding resistance in use, when the preload amount is reduced or no preload is applied, the sliding resistance of the slider is also reduced accordingly. On the other hand, if the amount of preload is small before use, for example, during transportation, the slider may move unexpectedly on the guide rail. In particular, in an apparatus that uses the guide rail in a vertical direction, the slider may fall off the guide rail due to its own weight. Therefore, a stopper for restraining the movement of the slider is required, and handling is troublesome.

Thus, although the linear motion guide device is used with a preload amount according to the application, the preload amount is not always an appropriate preload amount even before use. Therefore, it is desirable that the amount of preload can be adjusted between the state before use and the state during use. Therefore, for example, a technique described in Patent Document 1 is disclosed as a linear motion guide device that enables adjustment of the preload amount.
In the technique described in Patent Document 1, a slider is preliminarily provided with a preload adjusting screw at the center of its mounting surface. And the recessed part is formed in the part which provides the screw for this preload adjustment, and the inclined surface which becomes high toward the outer side of a slider side surface is partially formed along the width direction both sides of the recessed part. Thus, a desired preload amount can be set by appropriately adjusting the preload adjusting screw.
Japanese Utility Model Publication No. 60-127836

  However, in the technique described in Patent Document 1, since a preload adjusting screw is used, in order to set a desired preload amount, adjustment with the preload adjusting screw, measurement of the sliding resistance of the slider, Need to be repeated. Therefore, in setting the desired preload amount, it takes time and effort to measure the preload amount each time, and appropriate experience is required until the desired preload amount is set appropriately.

Also, since the preload adjusting screw is used in a state where it is not completely fixed (a state where a gap remains between the slider mounting surface and the guided member), the preload adjusting screw is in use. Looseness and preload may change.
Accordingly, the present invention has been made paying attention to such problems, and is a linear motion guide that can change the amount of preload at the time of assembly and at the time of use without providing a dedicated screw for adjusting the preload. It is an object of the present invention to provide an apparatus slider, a linear motion guide device, a manufacturing method of the linear motion guide device slider, a movable member for the transport device, and a transport device.

  In order to solve the above-mentioned problems, a first invention of the present invention is a linear motion guide provided with guide rails each having a rolling element guide surface extending along a direction in which the guided member should be conveyed on both sides in the axial direction. It is used in an apparatus, and is straddled across a plurality of rolling elements so as to be opposed to the guide rail, and is further provided to face the rolling element guide surface of the guide rail. A pair of sleeve portions having a load rolling element guide surface that forms a rolling element track with the moving body guide surface, and a connecting portion connecting the pair of sleeve portions, the connecting portion facing the guide rail A mounting surface for mounting the guided member on a side opposite to the side, and mounting holes for fixing the guided member corresponding to the pair of sleeve portions on the mounting surface; Pairs are provided at each of the positions on both sides in the direction perpendicular to the axis. The mounting surface is formed in such a manner that each of the mounting surfaces, in which the pair of mounting holes are formed, extends in a direction in which the rolling element guide surface and the load rolling element guide surface face each other. It is characterized by being formed as an inclined surface inclined.

  According to the first aspect of the present invention, the slider mounting surface is provided with an inclined surface at the portion where the mounting hole is formed. If this is used for a linear motion guide device, for example, a preload such as a dedicated adjusting screw is provided. Even if the adjusting means is not provided at the center part of the slider, it is possible to obtain a preload amount different from that before use by simply fixing a guided member, for example, by tightening a normal fixing bolt. it can. Therefore, if the angle of the inclined surface is managed, an appropriate preload amount can be automatically given at each stage during use and before use.

Here, the slider for linear motion guide devices according to the present invention can be formed such that the inclined surface increases as it goes outward in the axial direction of the guide rail.
Here, the “displacement amount of the inclined surface” is a distance in a direction opposite to the horizontal plane as a reference, and in this case, in the state before the guided member is mounted, from the position of the slider center. The amount of decline.

  With such a configuration, when the guided member is mounted on the mounting surface of the slider, the pair of sleeve portions of the slider is deformed so as to open outward. As a result, the load rolling element guide surface of the slider moves in a direction away from the rolling element guide surface of the guide rail. Therefore, at the time of use, the preload amount can be set to be smaller than before use. For example, an appropriate sliding resistance is given before use, so that unnecessary movement of the slider is suppressed, and it is suitable when it is desired to reduce the sliding resistance during use.

In the linear motion guide slider according to the present invention, the inclined surface may be formed such that the amount of displacement increases as it goes inward in the axial direction of the guide rail.
Here, the “displacement amount of the inclined surface” is a distance in a direction facing the horizontal plane as a reference, and in this case, the position of the slider end in the state before the guided member is mounted. It becomes the amount of depression from.

  With such a configuration, when the guided member is mounted on the mounting surface of the slider, the pair of sleeve portions of the slider is deformed so as to close inward. As a result, the load rolling element guide surface of the slider moves in a direction approaching the rolling element guide surface of the guide rail. Therefore, at the time of use, the preload amount can be set to be larger than before use. For example, it is suitable for a case where the slider is easily movable by making the sliding resistance small before use, and it is desired to give an appropriate sliding resistance during use.

In the linear guide slider according to the present invention, the inclined surface is preferably a surface having an inclination in a range satisfying the following (Equation 1).
(0.004 / Hcosα) ≦ θ ≦ (0.02 / Hcosα) (Formula 1)
Where α is the contact angle (deg) of the rolling element with respect to the horizontal plane, H is the average distance (mm) from the mounting surface of the slider to the center of each rolling element row, and θ is the axis of the mounting hole It is the inclination angle (rad) of the mounting surface of the slider on the line.

With such a configuration, the amount of adjustment of the preload can be set in a range of 4 μm to 20 μm, which is suitable for a general linear motion guide device. Therefore, the angle of the inclined surface is managed within a predetermined range and automatically appropriate. It is more preferable to give a preload amount at the time of use and at each stage before use.
In the linear motion guide slider according to the present invention, the inclined surface can be formed from a single arc having a cross-sectional shape in the direction perpendicular to the axis. If the cross-sectional shape in the direction perpendicular to the axis is a single arc, it is preferable to facilitate processing.

Further, the linear guide slider according to the present invention is preferably a surface having a radius satisfying the following (Expression 2) when the inclined surface is formed from a single circular arc.
(BH cos α / 0.02) ≦ R ≦ (BH cos α / 0.004) (Formula 2)
Where α is the contact angle (deg) of the rolling element with respect to the horizontal plane, H is the average distance (mm) from the mounting surface of the slider to the center of each rolling element row, and B is from the center of the slider. The distance (mm) to the axis of the mounting hole, R is the radius (mm) of a single arc on the slider mounting surface.

With such a configuration, the amount of adjustment of the preload can be set in a range of 4 μm to 20 μm which is suitable for a general linear motion guide device. Therefore, the angle of the inclined surface is set within a predetermined range while facilitating the processing of the inclined surface. Therefore, it is more preferable to automatically provide an appropriate amount of preload at each stage of use and before use.
Furthermore, the second invention of the present invention is a guide rail having a rolling element guide surface extending along a direction in which the guided member is to be conveyed, and the rolling element guide surface and the rolling element guide surface. A linear motion comprising a slider having a load rolling element guide surface that forms a moving body raceway, and a plurality of rolling elements interposed in the rolling body raceway so as to be able to move relative to the guide rail. The guide device is characterized in that the slider for linear motion guide device according to the present invention is used for the slider.

According to the second invention, since the slider for linear motion guide device according to the present invention is used, the guided member can be mounted without providing a preload adjusting means such as a dedicated adjusting screw at the center of the slider. For example, it is possible to obtain a preload amount different from that before use by simply tightening a normal fixing bolt.
Further, a third invention of the present invention is a method for manufacturing the slider according to the present invention, wherein each of the mounting holes is formed on the surface to be processed as the mounting surface. It is characterized by including an inclined surface machining step for machining as an inclined surface that is inclined along the opposing direction of the rolling element guide surface and the load rolling element guide surface.

According to the third aspect of the present invention, the inclined surface to be included in the slider for the linear motion guide device according to the present invention can be processed with respect to the surface to be processed as the mounting surface of the slider material. A slider for a motion guide device can be suitably manufactured.
Here, in the method for manufacturing a slider for a linear motion guide device according to the present invention, the inclined surface machining step includes pressing the pair of sleeve portions from the inner side in the axial direction, An outward elastic deformation process in which the sleeve portion is elastically deformed outward, and a slider material in a state of being elastically deformed outward in the outward elastic deformation process, on a surface to be processed as a mounting surface thereof It is preferable to include a removal processing step for performing the removal processing. If the slider for a linear motion guide device according to the present invention is manufactured by the manufacturing method including such steps, for example, the displacement amount of the inclined surface increases toward the outside in the axial direction of the guide rail. It is suitable for forming.

  Moreover, in the manufacturing method of the slider for linear motion guide devices according to the present invention, the inclined surface machining step includes pressing the pair of sleeve portions from the outside in the axial direction, and the pair of sleeves by the pressing force. Inward elastic deformation process in which the part is elastically deformed inward, and the slider material that is elastically deformed inward in the inward elastic deformation process is removed from the surface to be processed as its mounting surface It is preferable to include a removal processing step for processing.

If the slider for a linear motion guide device according to the present invention is manufactured by a manufacturing method including such steps, for example, the displacement amount of the inclined surface increases toward the inner side in the axial direction of the guide rail. It is suitable for forming.
In addition, as a removal process in the said removal process process, a grinding process can be used suitably.

Furthermore, a fourth invention of the present invention is a guide member used in a transport device that transports a guided member to a fixing member to which the guide member is fixed, along the direction in which the guided member should be transported. A movable member having load rolling element guide surfaces extending on both sides in the direction perpendicular to the axis is arranged so as to be relatively movable in the axial direction via a plurality of rolling elements, and the load rolling element of the movable member A pair of sleeve portions having rolling element guide surfaces that form rolling element raceways together with the load rolling element guide surfaces facing the guide surfaces, respectively, and a connecting portion that connects the pair of sleeve portions to each other, The connecting portion has a mounting surface for mounting the fixing member on a side opposite to the side facing the movable member, and the mounting surface has a mounting hole for fixing the guided member, Corresponding to the pair of sleeves in the direction perpendicular to the axis The mounting surface is formed as a pair, and the mounting surface is formed so that the respective portions where the paired attachment holes are formed are opposed to the rolling element guide surface and the load rolling element guide surface. It is characterized by being formed as an inclined surface inclined along the direction.
According to the fourth invention, since the mounting surface of the guide member is provided with the inclined surface in the portion where the mounting hole is formed, if this is used in the transport device, the guide member is fixed to the fixing member. For example, it is possible to obtain a preload amount different from that before use by simply tightening a normal fixing bolt.

According to a fifth aspect of the present invention, there is provided a guide member having a rolling element guide surface extending along a direction in which the guided member is to be conveyed, and the rolling element guide surface and the rolling element guide surface. And a movable member having a load rolling member guide surface that forms a moving member raceway, a plurality of rolling members interposed in the rolling member raceway, and provided so as to be relatively movable with respect to the guide member. And the guide member for conveyance devices according to the present invention is used as the guide member.
According to the transport device according to the fifth aspect of the invention, since the transport device guide member according to the present invention is used, for example, by simply tightening a normal fixing bolt for fixing the guide member to the fixing member, Therefore, it can be configured to obtain an appropriate preload amount.

  As described above, according to the present invention, the slider for linear motion guide device, the linear motion guide device, and the linear motion that can change the amount of preload between assembly and use without providing a dedicated preload adjusting screw. A guide device slider manufacturing method, a transport device guide member, and a transport device can be provided.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings as appropriate.
1 to 3 are views for explaining a linear guide of the first embodiment of the linear guide device according to the present invention, FIG. 1 is a perspective view of the linear guide, and FIG. FIG. 2 (b) is a front view showing a part thereof broken, and FIG. 2 (c) is a right side view thereof. FIG. 3 is a diagram for explaining an infinite circuit in the linear guide. In FIG. 3, a part of the infinite circuit is shown in a cross-sectional view of the YY portion in FIG. .

As shown in FIG. 1, the linear guide 10 includes a guide rail 12 and a slider 16 that straddles the guide rail 12 so as to be relatively movable.
The guide rail 12 has a substantially square cross-sectional shape, and a total of four rolling element guide surfaces 14 are formed on each side of the guide rail 12 along the direction in which the guided member should be conveyed. Yes. The slider 16 includes a slider body 17 and a pair of end caps 22 attached to both ends in the moving direction. The shape of the slider body 17 and the end cap 22 that are continuous in the axial direction is a substantially U-shaped cross-sectional shape.

The slider body 17 has a pair of sleeve portions 30 on both sides, and the pair of sleeve portions 30 are connected to each other by a connecting portion 31 to form a substantially U-shape.
As shown in FIG. 1, the connecting portion 31 of the slider body 17 is formed with projecting portions 17 h on both sides in the width direction. The connecting portion 31 has a mounting surface 17f for mounting the guided member on the surface opposite to the side facing the guide rail 12 (hereinafter, this surface is also referred to as "slider upper surface"). Yes. The mounting surface 17f has mounting holes 32 for fixing the guided member to the overhang portions 17h on both sides in the width direction.

The attachment hole 32 is a circular through hole penetrating in the vertical direction of the overhanging portion 17h. Then, corresponding to the pair of sleeve portions 30, a pair is provided at a position on the upper side of the sleeve portion 30, and the guide rail 12 is formed at a total of four locations, two on each side of the guide rail 12 in the axial direction. (In this example, there are two pairs). Here, as shown in FIG. 2B, the axis VL of each mounting hole 32 is formed perpendicular to the reference plane BL on which the guide rail 12 is to be mounted (hereinafter the same in other examples). .
Further, as shown in FIG. 2 (b), the slider body 17 has a load rolling element guide surface 18 having a substantially semicircular cross section facing each rolling element guide surface 14 of the guide rail 12 inside each sleeve portion 30. There are 2 lines each, for a total of 4 lines.

  As shown in FIG. 3, the end cap 22 is formed with a pair of direction change paths 24 that are respectively connected to both ends of the load rolling element guide surface 18. Further, the slider body 17 is formed with a rolling element return passage 20 formed in a through hole having a circular cross section parallel to the load rolling element guide surface 18 and communicating with the pair of direction changing paths 24. ing. A space sandwiched between the rolling element guide surface 14 of the guide rail 12 and the load rolling element guide surface 18 of the slider body 17 facing the rolling element guide path 12 forms a rolling element track 26.

The above-described pair of direction change paths 24, rolling element return paths 20, and rolling element raceways 26 constitute a total of four rows of infinite circulation paths 28 that are annularly continuous. Furthermore, each infinite circulation path 28 is loaded with a plurality of balls 46 as rolling elements that roll while applying a load between the guide rail 12 and the slider 16. The plurality of balls 46 in each endless circulation path 28 constitute a rolling element row 62 together with the rolling element accommodation belt 50 by a single rolling element accommodation belt 50 formed in an end shape. As the moving body row 62 circulates in the endless circulation path 28, the slider 16 can be moved relative to the guide rail 12.
Here, in this linear guide 10, the mounting surface 17 f of the slider body 17 is inclined along the direction in which the rolling body guide surface 14 and the load rolling body guide surface 18 are opposed to each other. It is formed as an inclined surface.

  Hereinafter, the mounting surface 17f of the linear guide 10 will be described in more detail. FIG. 4 is an enlarged view showing a portion of the rolling element raceway in FIG. FIG. 5 is a graph showing the result of measuring the shape (inclined state) of the mounting surface 17f along the width direction of the slider 16, as indicated by the arrow indicated by the symbol X in FIG. FIG. 6 is a diagram for explaining a state before and after mounting the slider 16 mounted on a table serving as a guided member. FIG. 6A shows a state before mounting, and FIG. b) shows the state after mounting. In the figure, the state before and after the mounting is exaggerated for easy understanding.

  As shown in FIG. 5 and FIG. 6A, in this linear guide 10, the mounting surface 17f of the slider 16 is formed from a single arc whose sectional shape in the direction perpendicular to the axis of the guide rail 12 is an intermediate convex shape. Thus, the guide rail 12 is formed as an inclined surface in which the amount of displacement gradually increases toward the outside in the axial direction. Here, the radius R of this medium convex single arc is radius R = 70000 mm.

  As a result, in this linear guide 10, as shown exaggeratedly in FIG. 6, when the slider 16 is fixed to the table 100 serving as a guided member by passing the fixing bolt 90 through the mounting hole 32 of the slider body 17, the mounting surface 17 f Is elastically deformed and restrained in a state where it is in contact with the surface 100f on which the table 100 is mounted at the position of the fixing bolt 90. Therefore, as shown in the figure, the sleeves 30 of the slider 16 are deformed so that the state after the mounting is opened outward compared to the state before the mounting (see FIG. 5A). (See (b)). Therefore, since the load rolling element guide surface 18 of the slider 16 moves in a direction away from the rolling element guide surface 14 of the guide rail 12, the preload amount can be reduced in use compared to before use.

Hereinafter, a method for specifically setting and forming the mounting surface 17f formed as the inclined surface will be described in more detail.
Now, assuming that the measurement position shown in FIG. 5 is x, if the displacement amount of the mounting surface 17f at this measurement position x [mm] (in this example, the amount of depression from the position of the slider center CL) is y, The displacement y [mm] is approximately expressed by the following (formula 3).
y = x ² / 2R (Formula 3)
Further, the inclination angle θx [rad] of the slider upper surface at the measurement position x [mm] is expressed by the following (Expression 4).
θx = dy / dx = x / R (Formula 4)

Therefore, if the distance from the center of the slider body 17 to the axis VL of the mounting hole 32 (hereinafter referred to as “fixed distance”) is B [mm] (see FIG. 2B), the inclination of the mounting hole 32 along the axis VL is inclined. The angle θ [rad] is expressed by the following (formula 5).
θ = B / R (Formula 5)
The amount of change in the preload amount at this time depends on the inclination angle θ [rad] of the mounting surface 17 f at the position of the attachment hole 32. Here, if the average distance (hereinafter simply referred to as “average distance”) from the mounting surface 17 f to each rolling element row 62 is H [mm], the load rolling element guide surface 18 is deformed by the opening of the slider 16. The amount of movement ΔX [mm] in the horizontal direction is approximately expressed by the following (formula 6).
ΔX = Hθ (Formula 6)

The amount of change Δδ [mm] of the preload amount accompanying the movement of the load rolling element guide surface 18 is expressed by the following (Expression 7) with the contact angle α (deg) (see FIG. 4).
Δδ = ΔX · cos α (Formula 7)
Here, in a general linear guide, the preload amount is set in a range of about 0 [mm] to 0.02 [mm]. Therefore, if the amount of change Δδ of the preload is about 0.004 [mm] ≦ Δδ ≦ 0.020 [mm], the sliding resistance before and after the attachment can be adjusted in a sufficiently wide range. That is, when Δδ is within this range, the above-described (Expression 1) is obtained from (Expression 6) and (Expression 7).
(0.004 / Hcosα) ≦ θ ≦ (0.02 / Hcosα) (Formula 1)
Furthermore, the above (Formula 2) is obtained from (Formula 5).
(BH cos α / 0.02) ≦ R ≦ (BH cos α / 0.004) (Formula 2)

  In the present embodiment, based on the above consideration, the fixed distance B = 28.5 mm, the radius R = 70000 mm, the contact angle α = 50 °, and the average distance H = 18 mm are set. From (Expression 5), the inclination angle θ of the attachment hole 32 in the axis VL is θ = 0.00041 rad. Then, from (Equation 6) and (Equation 7), a change amount Δδ = 0.0047 mm = 4.7 μm of the preload amount is obtained.

Next, a method for manufacturing the slider having the inclined mounting surface 17f as described above will be described. FIG. 7 is a diagram for explaining a method of manufacturing the slider.
The shape of the mounting surface 17f inclined of the slider described above can be processed by the following inclined surface processing step. That is, in this inclined surface machining step, each of the portions where the attachment holes 32 are formed with respect to the surface to be machined as the mounting surface 17f is along the direction in which the rolling element guide surface 14 and the load rolling element guide surface 18 face each other. It is processed as a desired inclined surface inclined.

  Specifically, first, as shown in FIG. 5A, a slider body blank 17B is prepared in the same manner as in manufacturing a slider body that is normally manufactured. Here, the slider main body blank 17B is a slider material having a temporary mounting surface 17f '. Note that the temporary mounting surface 17f 'is a surface that is to be processed as the mounting surface 17f and that allows for a machining allowance necessary for removal processing.

  Next, as shown in FIG. 4B, the slider body blank 17B is mounted on a jig (not shown). At this time, the pair of sleeve portions 30 are pressed from the inner side toward the outer side in the axial direction of the guide rail 12 with the necessary pressing force based on the above-described consideration, and the pair of sleeve portions are pressed with the pressing force. Is elastically deformed so as to open outward (outward elastic deformation step). If the magnitude of the pressing force applied to the slider body blank 17B at this time is appropriately adjusted, the degree of inclination of the slider upper surface can be adjusted. In addition, the arrow shown by the code | symbol P1 in the same figure has shown the image pressed toward the outer side from the inner side in the axial direction of the guide rail 12 (hereinafter the same). As a result, the temporary mounting surface 17f 'becomes higher in the width direction outer side and is bent into a substantially arcuate shape with a recessed central portion.

Next, as shown in FIGS. 3C to 3D, the temporary attachment to be processed as the attachment surface 17f on the slider body blank 17B in the state of being elastically deformed outward in the outward elastic deformation process. The surface 17f ′ is ground by a necessary removal amount D based on the above-described consideration and processed into a flat surface (removal processing step).
Then, as shown in FIG. 5E, if the applied force to the slider body blank 17B is released after the grinding process, the mounting surface 17f is a substantially single circular arc with a desired convex shape. become.

Next, functions and effects of the linear guide 10 and the slider 16 will be described.
According to the linear guide 10 having the above-described configuration, the slider 16 has a portion in which the mounting hole 32 is formed along a direction in which the rolling element guide surface 14 and the load rolling element guide surface 18 face each other. For example, without providing a preload adjusting means such as a dedicated adjustment screw as illustrated above in the center of the slider, just by tightening the fixing bolt that fixes the table, In use, a preload amount different from that before use can be obtained.

  That is, the difference from the technique described in Patent Document 1 described above is that an inclined surface on the upper surface of the slider is provided around the mounting hole. As a result, an appropriate amount of preload can be automatically obtained simply by tightening a normal fixing bolt without providing a preload adjusting means such as a dedicated adjusting screw at the center of the slider. Therefore, the configuration is simple, and it is not necessary to set the preload using a dedicated adjustment screw.

  The inclined surface has a cross-sectional shape in the axial direction of the guide rail 12 formed from a single circular arc-shaped convex shape, and further toward the outside in the axial direction of the guide rail 12. Since the displacement amount is formed from a gradually increasing surface, when the fixing bolt is fixed to the table through the mounting hole 32 of the slider body 17, the mounting surface 17f is in contact with the surface on which the table is mounted at the position of the fixing bolt. As shown in FIG. 5, the two sleeve portions 30 are deformed so as to open outward as compared to the state before fixation (see FIG. 5A) (see FIG. 5B). )reference). Therefore, since the load rolling element guide surface 18 of the slider 16 moves in a direction away from the rolling element guide surface 14 of the guide rail 12, the amount of preload can be reduced during use compared to before use.

Thereby, even if it is a use which requires low sliding resistance at the time of use, a preload higher than at the time of use can be given before use. Therefore, it is possible to prevent the slider 16 from easily moving on the guide rail 12 during conveyance or assembly. Therefore, handling of the linear guide 10 can be facilitated.
Further, since the inclined surface is a surface having an inclination in a range satisfying the above (Equation 1), the amount of adjustment of the preload can be set in a range of 4 μm to 20 μm suitable for a general linear guide. Therefore, the angle of the inclined surface can be managed within a predetermined range, and an appropriate preload amount can be automatically given at each stage during use and before use.

Specifically, the relationship between the amount of preload and the sliding resistance in this embodiment is shown in FIG. In addition, the figure (a) shows the whole range of 0 [mm]-0.02 [mm], and the figure (b) expands and shows the principal part which concerns on this embodiment.
As described above, in the linear guide 10 of this embodiment, the fixed distance B = 28.5 mm, the radius R = 70000 mm, the contact angle α = 50 °, and the average distance H = 18 mm are set. , The inclination angle θ of the mounting hole 32 on the axis VL is 0.00041 rad, and from (Equation 6) and (Equation 7), Δδ = 0.0047 mm = 4.7 μm, so as shown in FIG. According to the linear guide 10, the preload amount can be reduced by about 5 μm after the attachment as compared with before the attachment.

  Therefore, as shown in FIG. 5B, if the preload amount before attachment is set to 6 μm, the sliding resistance before attachment is 2.7N. Thereby, according to this linear guide 10, it can suppress that the slider 16 moves on the guide rail 12 unexpectedly in the state before attachment. Furthermore, since the amount of preload is reduced to about 1 μm during use, the sliding resistance during use can be reduced to 0.5N. Therefore, the efficiency of the machine can be improved and the control performance can be improved.

In addition, as for the sliding resistance before attachment, about 2-20N is desirable. If the sliding resistance is narrower than this range, the slider 16 does not move unexpectedly on the guide rail 12, which may hinder handling such as conveyance. If it is larger than this range, it becomes difficult to manually move the slider 16.
Furthermore, according to the slider manufacturing method described above, the predetermined shape (single arc shape) described above is given to the temporary mounting surface 17f ′ to be processed as the mounting surface 17f of the slider body blank 17B. Easy to process. Then, the pair of sleeve portions 30 are pressed from the inside in the axial direction of the guide rail 12, and the pair of sleeve portions 30 are elastically deformed outward by the pressing force, and the slider in a state of being elastically deformed. Since the body blank 17B has been subjected to removal processing for the temporary mounting surface 17f ′, the inclined surface can be suitably processed. Therefore, the slider 16 in this embodiment can be manufactured suitably.

Next, the linear guide of the second embodiment of the linear motion guide device according to the present invention will be described. The configuration of the second embodiment differs from the first embodiment described above only in the configuration of the slider main body and its mounting surface, and the other configurations are the same. The description of other configurations is omitted.
9-11 is a figure explaining the linear guide of 2nd embodiment, and FIG. 9 has shown the front view, with a part broken away. FIG. 10 is a graph showing the result of measuring the shape of the mounting surface (inclined state) along the width direction of the slider, as in the first embodiment, and FIG. It is a figure explaining the state before and behind mounting | wearing to the table 100 used as a guide member, and in order to make an understanding easy, the state before and behind mounting | wearing is exaggerated and shown in the same figure.

As shown in FIG. 9, the slider 16 in the second embodiment does not have a portion protruding on both sides in the width direction. Then, on the mounting surface 17f formed on the upper surface of the slider body 17, a tap hole 32 is provided as an attachment hole for fixing the table 100 at a position above the pair of sleeve portions 30, respectively. It is formed in two places, a total of four places.
In this linear guide, the mounting surface 17f of the slider body 17 has a center concave shape formed by a single arc, as shown in an exaggerated manner in FIG. By being formed, it is formed as an inclined surface that inclines along the direction in which the rolling element guide surface 14 and the load rolling element guide surface 18 face each other. Thereby, this inclined surface is formed as a surface where the amount of displacement gradually increases as it goes inward in the axial direction of the guide rail 12. Here, the radius R of the single concave circular arc is radius R = 80000 mm.

  As in the first embodiment described above, when the slider 16 is attached to the table 100, the slider 16 is restrained by the table 100 at the position of the fixing bolt 90, as shown exaggeratedly in FIG. The And since this slider 16 is formed from the concave shape of the single circular arc, the state after mounting | wearing deform | transforms so that it may close inward compared with the state before mounting | wearing. For this reason, the load rolling element guide surface 18 of the slider 16 moves in a direction approaching the rolling element guide surface 14 of the guide rail 12, so that the amount of preload can be increased during use compared to before use.

Here, the inclined surface θ [rad] in the axis VL of the tap hole 32 can be expressed by the above (formula 5) as in the case of the middle convex shape in the first embodiment described above (however, The direction of the inclination is opposite, that is, the amount of displacement of the inclined surface in this example is the amount of depression from the position of the slider end).
Furthermore, in the linear guide of the second embodiment, as in the first embodiment, the amount of change Δδ of the preload is secured to about 0.004 mm to 0.020 mm, and before and after attachment to the table 100 The sliding resistance can be adjusted within a sufficiently wide range. Note that the range of the inclination angle θ and the radius R when the change amount Δδ of the preload is within this range is the same as the above (formula 6) and (formula 7).

  Based on the same consideration as described above, in this embodiment, the fixed distance B = 30 mm, the radius R = 80000 mm, the contact angle α = 50 °, and the average distance H = 39 mm are set. At this time, from (Equation 5), the inclination angle θ of the tap hole 32 in the axis VL is θ = 0.00038 rad. Then, from (Equation 6) and (Equation 7), a change amount Δδ = 0.0095 mm = 9.5 μm of the preload amount is obtained.

Next, a method for manufacturing the slider in the second embodiment will be described with reference to FIG.
The shape of the inclined mounting surface 17f of the slider described above can be processed by the following inclined surface processing step. That is, in this inclined surface machining step, each of the portions where the tap holes 32 are formed with respect to the surface to be processed as the mounting surface 17f is along the direction in which the rolling element guide surface 14 and the load rolling element guide surface 18 face each other. It is processed as an inclined surface inclined.
Specifically, first, as shown in FIG. 6A, a slider body blank 17B similar to that of the first embodiment is prepared. The slider body blank 17B is a slider material having a temporary mounting surface 17f ′.

  Next, as shown in FIG. 4B, the slider body blank 17B is mounted on a jig (not shown). At this time, the pair of sleeve portions 30 are pressed from the outer side in the axial direction of the guide rail 12 to the inner side with the necessary pressing force based on the above-described consideration, and the pair of sleeve portions are pressed with the pressing force. Is elastically deformed so as to close toward the inside (inward elastic deformation step). If the magnitude of the pressing force applied to the slider body blank 17B at this time is appropriately adjusted, the degree of inclination of the slider upper surface can be adjusted. In addition, the arrow shown by the code | symbol P2 in the same figure has shown the image which is pressing toward the inner side from the outer side in the axial direction of the guide rail 12 (hereinafter the same). As a result, the temporary mounting surface 17f 'is bent in a substantially arcuate shape having a lower outer side in the width direction and a bulged central portion.

Next, as shown in FIGS. 3C to 3D, the temporary attachment to be processed as the attachment surface 17f on the slider body blank 17B in the state of being elastically deformed inward in the inward elastic deformation step. The surface 17f ′ is ground by a necessary removal amount D2 based on the above-described consideration and processed into a planar shape (removal processing step).
Then, as shown in FIG. 5E, if the applied force to the slider body blank 17B is released after the grinding process, the mounting surface 17f becomes a substantially single circular arc having a desired concave shape. Can be processed.

  According to the linear guide of the second embodiment having the above-described configuration, the slider 16 has a portion in which the tap hole 32 is formed, between the rolling element guide surface 14 and the load rolling element guide surface 18. Since it is formed as an inclined surface that inclines along the opposite direction, it is different from that before use in use just by tightening the fixing bolt 90 that fixes the table 100 as in the first embodiment described above. A preload amount can be obtained.

  That is, also in the present embodiment, unlike the above-described technique described in Patent Document 1, the inclined surface of the upper surface of the slider 16 is provided around the tap hole 32, as in the first embodiment. Even if a preload adjusting means such as a dedicated adjusting screw is not provided at the center of the slider, an appropriate amount of preload can be automatically obtained only by tightening the normal fixing bolt 90. Therefore, the configuration is simple, and the effort for setting the preload using a dedicated adjustment screw can be eliminated.

  The inclined surface in the second embodiment is formed such that the cross-sectional shape in the direction perpendicular to the axis of the guide rail 12 is a single circular arc-shaped concave shape. Since the displacement amount is formed from a surface that gradually increases toward the inside in the direction, when the fixing bolt 90 is fixed to the table 100 through the tap hole 32 of the slider body 17, the mounting surface 17 f becomes the table 100 at the position of the fixing bolt. As shown in FIG. 11, the sleeves 30 are inward compared to the state before fixation (see FIG. 11A). (See FIG. 2B). Therefore, since the load rolling element guide surface 18 of the slider 16 moves in a direction approaching the rolling element guide surface 14 of the guide rail 12, the amount of preload can be increased during use compared to before use.

Thereby, even if it is a use which requires high rigidity at the time of use, the preload amount lower than at the time of use can be maintained before use. Therefore, the slider 16 can be moved with a light sliding resistance during assembly. Therefore, operations such as alignment of the slider 16 can be easily performed.
Here, the relationship between the amount of preload and the sliding resistance in this embodiment is shown in FIG.

  As described above, in the linear guide of this embodiment, the fixed distance B = 30 mm, the radius R = 80000 mm, the contact angle α = 50 °, and the average distance H = 39 mm are set. The inclination angle θ of 32 axes VL is 0.00038 rad, and the amount of change Δδ = 0.0095 mm = 9.5 μm from (Equation 6) and (Equation 7). As shown in the figure, the preload amount can be increased by about 10 μm after the attachment as compared to before the attachment. Therefore, if the preload amount before attachment is set to 6 μm, the sliding resistance before attachment is 2.9 N, and the slider can be easily moved manually. Furthermore, since the amount of preload is increased to 16 μm at the time of use, the sliding resistance can be increased to 24 N to increase the rigidity.

As described above, according to the slider according to the present invention and the linear guide provided with the slider, the amount of preload at the time of assembly and at the time of use can be changed without providing a dedicated preload adjusting screw.
The linear motion guide slider, the linear motion guide device, and the manufacturing method of the linear motion guide device slider according to the present invention are not limited to the above-described embodiments, and do not depart from the spirit of the present invention. Various modifications are possible.

  For example, in each of the above embodiments, the slider mounting surface has been described with an example in which the shape of the inclined surface is formed from a single arc-shaped middle concave shape and a middle convex shape. It does not have to be a strict single arc. That is, the mounting surface 17f is formed as an inclined surface in which a portion where the attachment hole (tap hole) 32 is formed is inclined along the direction in which the rolling element guide surface 14 and the load rolling element guide surface 18 face each other. For example, as shown in FIG. 14, it may be a planar shape having a fixed inclination angle on each side. Further, it is not necessarily symmetrical with respect to the slider center CL.

Further, in the linear guides of the above-described embodiments, the guide rail has been described as an example having a substantially rectangular cross section. However, the guide rail is not limited to this, and the guide rail has another shape. However, it is sufficient if the preload can be adjusted by deforming the guide rail or the slider in the direction in which the rolling element guide surface and the load rolling element guide surface face each other.
For example, as shown in another example in FIG. 15, the cross-sectional shape of the guide rail 12B can be formed in a substantially U-shape.

  Specifically, as shown in the figure, the guide rail 12B has a pair of left and right sleeve portions 12C and a connecting portion 12D that connects the pair of sleeve portions 12C to each other so that the opening side faces upward. It is comprised by the substantially U shape. Rolling member guide surfaces 14B extending along the direction in which the guided member should be conveyed are provided on the inner surfaces of the pair of sleeve portions 12C facing each other. The slider 17B in this example is configured in a substantially U shape with the opening side facing downward, as in the second embodiment described above, with respect to the cross-sectional shape, but the load rolling element guide surface 18B is Further, it is formed on the outer side surface of each sleeve portion 12C and at a position facing the rolling element guide surface 14B. And these rolling element guide surfaces 14B and load rolling element guide surfaces 18B constitute a rolling element track 26B. Further, the slider 17B is formed with a rolling element return passage 20 formed of a through hole having a circular cross section parallel to the load rolling element guide surface 18B in each sleeve portion 30B. Both ends of the moving body track 26B communicate with the direction change path (not shown) of the end cap to form an infinite circulation path as in the above embodiments. A mounting surface 17f is formed on the upper surface of the slider 17B, and mounting holes 32 for fixing the guided member are formed at positions on both sides in the width direction. The mounting surface 17f is an inclined surface similar to the configuration described in any of the above embodiments.

  Even in such a configuration, since the mounting surface 17f has an inclined surface similar to the configuration described in any of the above embodiments, the same operation and effect can be obtained. However, in the case of this example, contrary to the above-described embodiments, when the mounting surface 17f has a middle convex shape, the amount of preload increases when the slider 17B is fixed to the guided member. In the case of the concave shape, the amount of preload decreases when the slider 17B is fixed to the guided member.

In each of the above-described embodiments, the linear motion guide device is taken as an example of a transport device to which the present invention can be applied. Further, a linear guide is taken as an example of the transport device, but the transport device to which the present invention can be applied. Is not limited to this.
For example, the conveyance device according to the present invention can be applied to a so-called monocarrier that is a linear motion guide unit in which a ball screw and a linear guide are integrated.

Hereinafter, the schematic configuration of this type of monocarrier will be described.
FIG. 16 is a diagram showing a schematic configuration of a monocarrier which is another example of the transport apparatus according to the present invention, where FIG. 16 (a) is a plan view thereof, FIG. 16 (b) is a front view thereof, and FIG. FIG. 3C shows a ZZ cross section in FIG.
As shown in the figure, this monocarrier 70 is provided with a base 71 having a substantially U-shaped cross section upward as a guide member, and this base 71 is composed of a pair of sleeve portions 73 and a pair of sleeve portions 73. And a base base 72, which is a connecting portion that connects the two, is configured as an integral structure. The pair of sleeve portions 73 are erected on the both sides in the width direction of the base base portion 72 so as to face each other along the axial direction that is the direction in which the guided member is to be conveyed. In the pair of sleeve portions 73, as shown in FIG. 7C, semicircular arc rolling element guide surfaces 75 extending in the axial direction are respectively provided on the inner surface in the width direction of the substantially U-shaped recess 74. Is formed.

  Further, a movable member 80 that is movable in a predetermined movable region along the axial direction is disposed in the concave portion 74 of the base 71. The movable member 80 has load rolling element guide surfaces 76 facing the respective rolling element guide surfaces 75 of the pair of sleeve portions 73 on the outer surfaces on both sides in the width direction. The rolling element guide surface 75 and the load rolling element guide surface 76 opposed to the rolling element guide surface 75 constitute a rolling element track, and a plurality of rolling elements 77 are interposed in the rolling element track so that a pair The movable member 40 is movable relative to the sleeve portion 73.

  Further, a screw shaft 82 having a spiral thread groove on the outer peripheral surface and extending along the axial direction is disposed in the recess 74 of the base 71. The movable member 80 has a through hole having an inner diameter larger than the outer diameter of the screw shaft 82 at the center in the axial direction, and the screw shaft 82 is inserted into the through hole. The inner circumferential surface of the through hole of the movable member 80 is provided with a spiral thread groove corresponding to the lead of the screw shaft 82 so as to be opposed to the thread groove of the screw shaft 82, and between the opposing thread grooves. In addition, a ball screw mechanism is configured by interposing a large number of rolling elements so as to allow infinite circulation.

  In the monocarrier 70 having such a configuration, as shown in FIG. 16, a base 71 that is a guide member thereof is mounted on a machine base that is a fixing member to which the monocarrier 70 is fixed. The mounting surface 71f has a mounting surface 71f. The mounting surface 71f is formed with a pair of through holes 32 'for mounting on the machine base. Also in this monocarrier 70, as in each of the above-described embodiments, the configuration according to the present invention, that is, the mounting surface 71f, each portion where the paired through-holes 32 'are formed is a rolling element guide surface. It can be formed as an inclined surface that is inclined along the direction in which 75 and the load rolling element guide surface 76 face each other.

  In the case of such a mono carrier, the example of the linear guide of the above embodiment (the mounting surface 17f of the slider main body 17f is adjusted) in that the preload is adjusted by changing the inclination of the mounting surface 71f of the base 71. It is different from deforming by tilt. However, for example, the operation and effect relating to the preload adjustment such that an appropriate amount of preload can be automatically obtained simply by tightening the fixing bolt exhibits the same operation and effect as the example of the linear guide.

It is a perspective view explaining the linear guide of 1st embodiment of the linear motion guide apparatus which concerns on this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is a figure explaining the linear guide of 1st embodiment of the linear guide apparatus which concerns on this invention, the figure (a) is the top view, and the figure (b) shows the part fracture | ruptured and shown. A front view and the same figure (c) are the right side views. In FIG. 2B, an enlarged view is shown in order to make the main part easy to see. It is a figure explaining an infinite circuit, In the same figure, a part of infinite circuit is shown in sectional drawing of the YY part in FIG.2 (b). It is a figure explaining the part of a rolling element track, and the same figure has shown the enlarged view of Z part in FIG.2 (b). It is a graph which shows the result of having measured the shape (inclination state) of the mounting surface along the width direction of a slider like the arrow shown by the code | symbol X to Fig.2 (a). It is a figure explaining the state before and behind mounting | wearing with the table used as a to-be-guided member, and in this figure, in order to make an understanding easy, the state before and behind mounting | wearing is exaggerated and illustrated. It is a figure explaining the method to manufacture the slider in 1st embodiment. It is a graph which shows the relationship between the amount of preload and sliding resistance in 1st embodiment. It is a figure explaining the linear guide of 2nd embodiment of the linear guide apparatus which concerns on this invention, The front view is partially broken and shown. It is a graph which shows the result of having measured the shape (inclination state) of the mounting surface along the width direction of the slider in 2nd embodiment. It is a figure explaining the state before and behind mounting the slider in 2nd embodiment to the table used as a to-be-guided member, and in the same figure, in order to make an understanding easy, the state before and after mounting is exaggerated and it is a figure. Show. It is a figure explaining the method to manufacture the slider in 2nd embodiment. It is a graph which shows the relationship between the amount of preload and sliding resistance in 2nd embodiment. It is a figure explaining the modification of the slider which concerns on this invention. It is a schematic block diagram explaining the other example of the linear guide apparatus which concerns on invention, The figure has shown the cross section. It is a figure which shows schematic structure of the monocarrier which is another example of the conveying apparatus which concerns on this invention, The figure (a) is the top view, The figure (b) is the front view, The figure (c) These show the ZZ cross section in the figure (b).

Explanation of symbols

10 Linear guide (linear motion guide device, transport device)
12 Guide rail (guide member)
14 Rolling body guide surface 16 Slider (moving member)
17 Slider body 18 Load rolling element guide surface 20 Rolling element return path 22 End cap 24 Direction change path 26 Rolling element raceway 28 Infinite circulation path 30 Sleeve portion 31 Connecting portion 32 Mounting hole, tapped hole (attachment hole)
46 balls (rolling elements)
50 Rolling body accommodation belt 62 Rolling body row 70 Mono carrier (conveying device)
90 Fixing bolt 100 Guided member

Claims (12)

It is used in a linear motion guide device including guide rails having rolling element guide surfaces extending along the direction in which the guided member is to be conveyed on both sides in the axial direction, via a plurality of rolling elements facing the guide rail. And a load rolling element guide surface that forms a rolling element raceway together with the rolling element guide surface so as to face the rolling element guide surface of the guide rail. A mounting surface for mounting the guided member on a side opposite to the side facing the guide rail; and a connecting portion that connects the pair of sleeve portions to each other. And mounting holes for fixing the guided member are formed in pairs on the respective positions on both sides in the axial direction corresponding to the pair of sleeve portions. A slider,
The mounting surface is formed as an inclined surface in which each of the paired attachment holes is formed along an opposing direction of the rolling element guide surface and the load rolling element guide surface. A slider for a linear motion guide device characterized by the above.   2. The linear guide slider according to claim 1, wherein the inclined surface is formed so that a displacement amount increases toward an outer side of the guide rail in the axial direction. 3.   2. The linear guide slider according to claim 1, wherein the inclined surface is formed such that a displacement amount increases toward an inner side of the guide rail in an axial direction. 3. 4. The linear motion guide slider according to claim 2, wherein the inclined surface is a surface having an inclination in a range satisfying the following (Equation 1).
(0.004 / Hcosα) ≦ θ ≦ (0.02 / Hcosα) (Formula 1)
Where α is the contact angle (deg) of the rolling element with respect to the horizontal plane,
H is the average distance (mm) from the slider mounting surface to the center of each rolling element row,
θ is an inclination angle (rad) of the mounting surface of the slider on the axis of the mounting hole.   5. The linear motion guide device according to claim 2, wherein the inclined surface has a cross-sectional shape in a direction perpendicular to the axis of the guide rail formed from a single circular arc. Slider. 6. The linear motion guide slider according to claim 5, wherein the inclined surface is a surface having a radius within a range in which a single circular arc satisfies the following (Expression 2).
(BH cos α / 0.02) ≦ R ≦ (BH cos α / 0.004) (Formula 2)
Where α is the contact angle (deg) of the rolling element with respect to the horizontal plane,
H is the average distance (mm) from the slider mounting surface to the center of each rolling element row,
B is the distance (mm) from the center of the slider to the axis of the mounting hole,
R is the radius (mm) of a single arc on the slider mounting surface. A guide rail having a rolling element guide surface extending along a direction in which the guided member is to be conveyed, and a load rolling element guide surface that forms a rolling element raceway with the rolling element guide surface facing the rolling element guide surface. A linear motion guide device comprising: a slider in which a plurality of rolling elements are interposed in the rolling element raceway so as to be relatively movable with respect to the guide rail;
A linear motion guide device using the slider according to claim 1 as the slider. It is used in a linear motion guide device including guide rails having rolling element guide surfaces extending along the direction in which the guided member is to be conveyed on both sides in the axial direction, via a plurality of rolling elements facing the guide rail. And a load rolling element guide surface that forms a rolling element raceway together with the rolling element guide surface so as to face the rolling element guide surface of the guide rail. A mounting surface for mounting the guided member on a side opposite to the side facing the guide rail; and a connecting portion that connects the pair of sleeve portions to each other. In the mounting surface, mounting holes for fixing the guided member are formed in pairs at positions on both sides in the axial direction corresponding to the pair of sleeve portions. A method of manufacturing a slider, comprising:
Inclined surfaces for processing each portion where the attachment hole is formed as an inclined surface inclined along a direction in which the rolling element guide surface and the load rolling element guide surface face each other with respect to the surface to be processed as the mounting surface The manufacturing method of the slider for linear motion guide apparatuses characterized by including a process.   The inclined surface machining step includes outward elastic deformation in which the pair of sleeve portions are pressed from the inner side to the outer side in the axial direction, and the pair of sleeve portions are elastically deformed outward by the pressing force. And a removal processing step of performing removal processing on a surface to be processed as a mounting surface of the slider material in a state of being elastically deformed outward in the outward elastic deformation step. The manufacturing method of the slider for linear motion guide apparatuses of Claim 8.   The inclined surface machining step is an inward elastic deformation in which the pair of sleeve portions are pressed inward from the outside in the axial direction, and the pair of sleeve portions are elastically deformed inward by the pressing force. And a removal processing step of removing the surface of the slider material that has been elastically deformed inward in the inward elastic deformation step with respect to the surface to be processed as the mounting surface. The manufacturing method of the slider for linear motion guide apparatuses of Claim 8. A guide member used in a transport device that transports a guided member to a fixed member to which the device is fixed,
A movable member having a load rolling element guide surface extending along the direction in which the guided member is to be conveyed is arranged on both sides in the axial direction so as to be relatively movable in the axial direction via a plurality of rolling elements. And
A pair of sleeve portions each having a rolling element guide surface that forms a rolling element track with the load rolling element guide surface facing the load rolling element guide surface of the movable member, and a connection that connects the pair of sleeve portions to each other And comprising
The connecting portion has a mounting surface for mounting the fixing member on a side opposite to the side facing the movable member, and the mounting surface has a mounting hole for fixing the guided member. , Corresponding to the pair of sleeve portions, formed in pairs on both sides in the axial direction,
The mounting surface is formed as an inclined surface in which each of the paired attachment holes is formed along an opposing direction of the rolling element guide surface and the load rolling element guide surface. A guide member for a conveying device characterized by the above. A guide member having a rolling element guide surface extending along a direction in which the guided member is to be conveyed, and a load rolling element guide surface that forms a rolling element raceway along with the rolling element guide surface facing the rolling element guide surface. A plurality of rolling elements provided in the rolling element raceway and a movable member provided so as to be relatively movable with respect to the guide member,
A transport device using the guide member according to claim 11 as the guide member.

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