JP2007297196A - Measuring unit and conveying system having the measuring unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To automatically measure the flow velocity of clean air and the size and quantity of particles at a shelf of a rack. <P>SOLUTION: A mist generating part 8 and a mist releasing pipe 10, a laser beam source 12, and a high-speed camera 14 are installed in a measuring unit 2 of the generally same size as the cassette of the boards of a liquid crystal display. The direction of the flow of the clean air and the distribution of the flow velocities are measured by the movement of the mist illuminated by laser beam. The size and quantity of the particles are detected by a particle sensor 16. A vibration applied to the unit 2 is measured by an acceleration sensor 18. The unit 2 is drawn from and stored into the rack 22 by a stacker crane. While the unit is stored in the rack, the cleanliness of the environment is measured, and the vibration is measured during the conveyance. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to measurement of a clean environment in a clean room and measurement of vibration of an article being conveyed by a conveyance device.

  There is a demand to measure the degree of clean environment in a clean room, for example, the density of particles in the air divided according to their size, the flow rate and distribution of clean air. In the following, the level of clean environment is simply referred to as clean environment, and measuring the level of clean environment is referred to as measurement of clean environment. In the case of an automatic warehouse for substrates such as liquid crystal displays and plasma panels, it is necessary to measure the clean environment in the rack of the automatic warehouse. And clean environment measurement is done manually. However, with the increase in size of panels, individual shelves in automated warehouses have also increased in size, and measurement is not possible unless a scaffold is assembled. In this case, it is difficult to measure the clean environment without stopping the automatic warehouse after the start of operation even if the inspection can be performed before the automatic warehouse is in operation. The clean environment is not limited to racks in automatic warehouses, but measurements can also be made on buffers near the travel path of transport devices such as stacker cranes and overhead traveling vehicles, or load ports on which the travel path itself or semiconductor cassettes are placed. is necessary. It is difficult to manually measure the clean environment when there are buffers and shelves at high places, and it is troublesome to manually measure the clean environment in the clean room one by one, and work such as semiconductor processing in the clean room It can be a hindrance.

An object of the invention of claim 1 is to enable easy measurement and output of a clean environment of a space where articles are stored.
An additional object of the invention of claim 2 is to provide a specific configuration for measuring a clean environment.
An object of the invention of claim 3 is to enable easy measurement of vibration applied to an article during conveyance.
An additional problem in the invention of claim 4 is to make it possible to easily collect measurement results.
An additional problem in the invention of claim 5 is to easily switch the measurement object to an item suitable for measurement.

The measurement unit of the present invention includes a housing that can be transported by being supported by an article support portion of a transport device, a clean environment measurement sensor mounted on the housing, and an output for outputting the sensor to the outside. Output means.
Preferably, the sensor for measuring the clean environment includes a particle sensor for measuring the number of particles in the surrounding air, preferably the number for each particle size, and a sensor for measuring the flow velocity of the surrounding air. The measurement unit according to claim 1, wherein

  In addition, the measurement unit of the present invention includes a housing that can be transported by being supported by the article support portion of the transport device, a vibration detection sensor mounted on the housing, and an output of the sensor to the outside. Output means for performing.

  Preferably, the output means transmits the output to a transport device that transports the measurement unit.

  Further, the transport system of the present invention includes a housing that can be transported by being supported by the article support portion of the transport device, a clean environment measurement sensor and a vibration detection sensor mounted on the housing, A measurement unit including an output means for transmitting the output of the sensor to the transport device, and a shelf for storing the measurement unit. The unit is transported to the measurement unit in accordance with transport or storage. A conveying device provided with means for instructing a measurement object is provided.

In the present invention, the measurement unit is transported by the transport device, and the measurement unit is stored in a rack or a shelf such as a buffer or a load port, and a clean environment can be measured during this time. Therefore, the clean environment at any position can be measured as long as the position can be transported by the transport device and the unit can be stored. Furthermore, the measurement results can be output from the output means and easily collected. Therefore, the measurement of the clean environment in the clean room can be almost automated, and the original processing in the clean room is hardly hindered.
As a measurement of the clean environment, counting the number of particles in the air with a particle sensor and measuring the flow rate of the air reveals whether the clean air is sufficiently supplied from the flow rate of the air, and contaminated air is mixed in from the number of particles. I can see if it ’s not there. Here, when the number divided for each particle size is obtained, it can be understood how much size particles are contained in what density.

  In the present invention, the vibration of the casing of the measurement unit is measured while being transported by the transport device and is output from the output means, so that the vibration received by the article in the transport path can be easily measured.

  Further, in the present invention, if the sensor output is transmitted to the transport device, the measurement result can be transmitted more reliably than in the case where it is directly transmitted from the measurement unit to the control unit on the ground side. When the sensor output is transmitted to the transport device, the transmission range is minimized to reduce radio noise to the surroundings compared to the case of transmitting from the ground side control unit, and further, output from the measurement unit in response to a request from the transport device. So that the transmission protocol can be simplified.

  In the transport system of the present invention, the measurement unit measures the clean environment of the shelf for storing the article, measures the vibration during transport, and instructs the measurement target according to the state of transport or storage from the transport device. Therefore, the clean environment on the shelf in the clean room can be measured almost automatically, and the vibration of the transfer path can be measured almost automatically.

  In the following, an optimum embodiment for carrying out the present invention will be shown.

  1 to 5 show an embodiment and its modification. 1 to 4, reference numeral 2 denotes a measurement unit, which has the same size as a cassette for storing a substrate for a liquid crystal display and a substrate for a plasma panel. 4 is the frame, 6 is the plate, and the part other than the frame 4 and the plate 6, and the measurement unit 2 has a skeleton shape without an outer wall so that the airflow can freely pass through the measurement unit 2 as much as possible. A quadrangular cylinder may be used. The measuring unit 2 has directionality, and when the clean air flows in on the upstream side and the clean air exit side on the downstream side, the mist generating section 8 on the upstream side and a mist discharge pipe for discharging the generated mist. 10 is provided, and the mist discharge pipe 10 is arranged in a gate shape on the upstream side of the measurement unit 2, for example.

  Reference numeral 12 denotes a laser light source, which is irradiated with laser light in a thick fan shape as indicated by a chain line in the figure. Reference numeral 14 denotes a high-speed camera, which captures about 1000 to 10,000 frames per second and is irradiated with the laser light source 12. The reflected light from the mist is photographed while the mist (fine water droplet) passes through the part, and its position and movement are monitored. The direction of the air flow (clean air) in the measurement unit 2 and the distribution of the flow velocity are measured by the mist generator 8 to the high-speed camera 14. Reference numeral 15 denotes a support portion of the high-speed camera 14. A particle sensor 16 sucks ambient air and uses the fact that light from the built-in laser light source is scattered by particles in the sucked air to determine the size and number of particles.

  The plate 6 of the measurement unit 2 is a portion supported by the slide fork 43 of the stacker crane in FIG. 3, and the acceleration sensor 18 is provided in this portion. The acceleration sensor 18 measures the vibration of the measurement unit 2 and its position is arbitrary. Further, the circuit unit 20 drives the mist generating unit 8 to the high-speed camera 14, the particle sensor 16, and the acceleration sensor 18, and transmits the detection result to the communication unit 48 of the stacker crane in FIG.

  A pair of racks 22 is provided, for example, on the left and right of the traveling rail 30 of the stacker crane, and 24 is a shelf support, which is a part that supports a cassette of the same size as the measurement unit 2. Reference numerals 25 and 26 denote support columns, and 28 denotes a fan filter unit, which supplies clean air into the rack 22. An automatic warehouse is constituted by the rack 22, the stacker crane 40 of FIG. 3, the measurement unit 2, and a cassette (not shown). The clean air indicated by the white arrow flows from the fan filter unit 28 and the mist emitted from the mist emission pipe 10 reflects the laser light from the laser light source 12 and is photographed by the high-speed camera 14. For example, if an image of about 1000 frames to 10000 frames per second is captured, the motion of the mist can be captured.

  FIG. 3 shows the measurement unit 2 mounted on the lifting platform 42 of the stacker crane 40. 44 is a mast, 46 is a cart provided at the lower part, 43 is a slide fork, and supports the plate 6 of the measuring unit 2 and transfers it to and from a rack shelf holder. The elevator 42 is provided with a communication unit 48 to communicate with the circuit unit 20 of the measurement unit 2. For example, the circuit unit 20 is input with a status such as being transported / transferred / scheduled to be stored in the rack after the transfer is completed. And specify the measurement item. The measurement items include the direction and speed distribution of clean air and the number of particles when stored in a rack, and vibration detection by the acceleration sensor 18 during transfer and transportation. The vibration may be detected during storage in the rack, and the direction of clean air, the flow velocity distribution, the number of particles, and the like may be measured during transfer and transportation.

  FIG. 4 shows the relationship between the circuit unit 20 of the measurement unit and the sensor. The control unit 50 of the circuit unit 20 communicates with the communication unit 48 of the stacker crane 40 via the communication unit 52, and receives the state of the measurement unit during transportation and storage, and the measurement instruction (measurement item). In addition, a measurement result transmission instruction is received from the communication unit 48, and the measurement result is transmitted from the communication unit 52 to the communication unit 48. The storage unit 54 stores the state of the measurement unit and also stores measurement data. The driving unit 56 drives the mist generating unit 8, the laser light source 12, and the high-speed camera 14, and operates them in a short-time pulse in order to avoid the consumption of the battery 68. The number of operations is as compared with one storage in the rack. About 1 to 3 times. When measuring the clean environment in a place where there is no fan filter unit such as a station, use the measurement unit to transfer the measurement unit to the station, etc., and instruct the stacker crane to measure the clean environment according to the travel of the stacker crane. It is instructed to repeat measurement asynchronously with the driving.

  In the measurement, the laser light source 12 is operated and the high-speed camera 14 is operated in synchronization with the generation of mist by the mist generator 8. The high-speed camera 14 captures an image that visualizes the flow of clean air by capturing the motion of the mist, and the image recognition unit 58 obtains the position of the mist, the motion direction, and the speed, and stores them in the storage unit 60. The particle sensor 16 obtains the number of particles in the sucked air for each particle size. Further, the signal of the acceleration sensor 18 is processed by the vibration detection unit 66, and the waveform of the vibration applied to the measurement unit, for example, greater than a predetermined acceleration is stored. Alternatively, the vibration waveform is stored in an arrangement such as acceleration, frequency, and the number of waves. These data are stored as measurement data in the storage unit 54, and power is supplied from the battery 68 to each unit of the circuit unit 20. When the measurement unit is mounted on the lifting platform of the stacker crane, it receives an output command from the communication unit 48 and transmits measurement data to the communication unit 48. In addition, the communication unit 48 uses the communication function between the ground side control unit 70 and the stacker crane of the automatic warehouse to transmit measurement data to the ground side control unit 70 and gives instructions such as the measurement position, measurement object, and measurement conditions. Receive.

  The data transmitted to the ground side control unit 70 includes the flow direction and speed distribution of the clean air on the rack shelves, the size and number of particles, the vibration during the transfer of the measurement unit, and the vibration during the transfer. The measurement target and measurement conditions in the measurement unit are transmitted from the communication unit 48 on the stacker crane 40. Instead of inputting the measurement result to the ground-side control unit 70 via the communication unit 48, an antenna may be provided on the rack to communicate between the rack and the communication unit 52.

  The operation of the embodiment will be described. When the measurement unit 2 is transported by the stacker crane 40, the communication unit 48 instructs the control unit 50 about the state of the measurement unit, the measurement object, and the measurement conditions. Accordingly, the measurement unit 2 measures vibration during conveyance and vibration during transfer, or measures the flow direction and flow velocity distribution of clean air stored in the rack, and the size and number of particles. The measurement result is stored in the storage unit 54, and is output to the communication unit 48 when the measurement unit 2 is transferred to the lift 42 of the stacker crane 40. In the rack 22, clean air from the fan filter unit 28 flows in the measurement unit 2 from the upstream side to the downstream side. This flow is visualized with mist and laser light and photographed with the high-speed camera 14. Note that the direction of clean air and the method of measuring the flow velocity distribution are arbitrary.

  Since the measurement unit 2 is the same size as the cassette of the substrate of the liquid crystal display and the substrate of the plasma panel, it can be transported by the stacker crane 40 and transferred to and from the rack 22. As a result, it is possible to automatically measure the position of the rack 22 and the clean environment (the direction of the flow of clean air, the distribution of the flow velocity, and the size and number of particles) on the travel path between the stations and the racks 22 and 22. It is not necessary to perform manual measurement at the site and can measure vibration during transport and transfer.

  FIG. 5 shows a modified example, and the same reference numerals as those in the embodiments of FIGS. Moreover, the description regarding the Example of FIGS. 1-4 is applicable also to the modification of FIG. 5, unless there is particular notice. Reference numeral 80 is an overhead traveling vehicle, 82 is a traveling rail, 84 is a traveling carriage that travels within the traveling rail 82, and 86 is a power supply carriage that receives power from the traveling rail 82. Reference numeral 88 denotes a lateral feed unit that feeds a transported article such as a rotating unit 90 to a measurement unit 96 or a semiconductor cassette. Reference numeral 90 denotes a rotary unit that rotates the elevating drive unit 92 to the measurement unit 96 in a horizontal plane. 92 is an elevating drive unit that elevates the elevating platform 94.

  The measurement unit 96 has a skeleton-like rectangular parallelepiped shape like the measurement unit 2, and clean air can freely pass through its six surfaces. Further, a flange 97 is provided on the upper part of the measuring unit 96 so that it can be chucked / released by the lifting platform 94. In the case of FIG. 5, clean air flows downward from above, so for example, the mist discharge pipe 10 is provided on the upper side of the measurement unit 96, the laser light source 12 irradiates laser light, and the high-speed camera 14 images the mist movement. The particle sensor 16 detects the size and number of particles, and the acceleration sensor 18 detects acceleration. Reference numeral 98 denotes a side buffer, which stores these at the same height as the measurement unit 96 being conveyed by the overhead traveling vehicle 80 or a semiconductor cassette (not shown). A buffer may be provided on the lower side of the traveling rail 82 to measure the clean environment at that position. Reference numeral 99 denotes a processing apparatus, which has a load port 100 below the traveling rail 82 and measures the clean environment on the load port 100.

  The overhead traveling vehicle 80 instructs the measurement unit 96 on the measurement conditions such as the measurement object and the number of measurements. In the process in which the overhead traveling vehicle 80 transports the measurement unit 96, the acceleration sensor 18 measures the vibration of the measurement unit 96. Further, the particle sensor 16 measures the size and number of particles on the travel route, and if necessary, stops and measures the flow direction and flow velocity distribution of the clean air. Since the semiconductor cassette is placed on the side buffer 98 and the load port 100 in addition to the stocker shelf, it is necessary to measure the clean environment at these positions. Therefore, the measurement unit 96 is transferred to these positions by the lateral feed unit 88 and the elevation drive unit 92, and the clean environment is measured. Then, after the measurement, the measurement unit 96 is chucked by the lifting platform 94 and collected, and the measurement result is transmitted to the overhead traveling vehicle 80. Instead of transferring the measurement unit 96 to the buffer 98 or the load port 100, the clean environment may be measured by moving the measurement unit 96 to the vicinity thereof by the lateral feed unit 88 or the elevation drive unit 92.

In the modification, when a semiconductor cassette or the like is transported in the overhead traveling vehicle system, it is possible to measure the clean environment of the transport path and the clean environment near the buffer and the load port. Furthermore, it is possible to measure the vibration that the conveyed article receives during conveyance.

Plan view of main part of measurement unit and rack of example Side view of main parts of measurement unit and rack of example Plan view of the main part of the lifting unit of the measurement unit and stacker crane of the example Block diagram showing sensors and control system of measurement unit of embodiment Front view of modified measurement unit, overhead traveling vehicle, surrounding load port and buffer

Explanation of symbols

2 Measurement Unit 4 Frame 6 Plate 8 Mist Generation Unit 10 Mist Release Pipe 12 Laser Light Source 14 High-Speed Camera 15 Supporting Unit 16 Particle Sensor 18 Acceleration Sensor 20 Circuit Unit 22 Rack 24 Shelf Holders 25 and 26 Supports 28 Fan Filter Unit 30 Traveling Rail 40 Stacker crane 42 Lift platform 43 Slide fork 44 Mast 46 Bogie 48 Communication unit 50 Control unit 52 Communication unit 54 Storage unit 56 Drive unit 58 Image recognition unit 60 Storage unit 66 Vibration detection unit 68 Battery 70 Ground side control unit 80 Overhead traveling vehicle 82 Traveling rail 84 Traveling carriage 86 Power supply carriage 88 Cross feed section 90 Rotating section 92 Lifting drive section 94 Lifting stage 96 Measuring unit 97 Flange 98 Side buffer 99 Processing device 100 Load port

Claims (5)

Measurement provided with a casing that can be transported by being supported by the article support portion of the transport apparatus, a clean environment measurement sensor mounted on the casing, and an output means for outputting the output of the sensor to the outside unit. The measurement according to claim 1, wherein the clean environment measurement sensor includes a particle sensor for measuring the number of particles in the surrounding air and a sensor for measuring the flow velocity of the surrounding air. unit. A housing that can be transported by being supported by an article support section of the transport device, a vibration detection sensor mounted on the housing, and an output means for outputting the output of the sensor to the outside Measuring unit. The measurement unit according to claim 1, wherein the output unit transmits the output to a transport device that transports the measurement unit. A case that can be conveyed by being supported by the article support part of the conveyance device, a clean environment measurement sensor and a vibration detection sensor mounted on the case, and the output of each sensor are transmitted to the conveyance device. An output means for performing a measurement unit,
A shelf for storing the measurement unit,
A transport system provided with a transport device having means for transporting the unit and instructing the measurement unit of a measurement object in accordance with transport or storage.

Images