KR20090105810A - Automatic warehouse and controlling method for clean environment of automatic warehouse - Google Patents

Abstract

PURPOSE: An automatic warehouse and a method for controlling a clean environment of the same are provided to keep a lathe clean over a fixed level by feeding back an openness of a fan filter unit or an exhaust pipe. CONSTITUTION: The exhaust pipe has controllable openness. A clean environment measuring unit(24) is delivered between lathes(22) or returned with an in-out unit and measures the clean degree of the lathe. The environment of the lathe is kept clean by controlling an open degree of the exhaust pipe and a fan filter unit(18).

Description

AUTOMATIC WAREHOUSE AND CONTROLLING METHOD FOR CLEAN ENVIRONMENT OF AUTOMATIC WAREHOUSE}

The present invention relates to an automated warehouse for a clean room, and more particularly to environmental measurements in an automated warehouse.

MEANS TO SOLVE THE PROBLEM This inventor proposed that the measurement unit equipped with the sensor for measuring the cleanliness was provided, it mounted on the shelf of an automatic warehouse with an input / output device, and measured the environment in a shelf (patent document 1: Unexamined-Japanese-Patent Publication). Publication No. 2007-297196). Thereby, the environment of each shelf and the environment in which the goods conveyed by the entrance and exit device are put can be measured. The present inventors further studied the feedback of the results of environmental measurement to the control of the clean air, and came to complete the present invention.

An object of the present invention is to maintain a clean environment in an automatic warehouse and to effectively prevent contamination of stored articles.

Another object of the present invention is to maintain the vibration received by the article during the conveyance at a predetermined level or less, and to effectively prevent adverse effects on the article.

The present invention provides a shelf, an input and output device, a fan filter unit for supplying a clean air, an exhaust port whose opening degree can be adjusted, and a clean environment measurement unit that can be transferred between the shelf and the shelf by the input and output device. It is equipped with automatic warehouse,

By measuring the clean environment of the shelf by the measuring unit,

According to the measurement result, by controlling at least one of the opening degree of the fan filter unit and the exhaust port, it characterized in that the control means for maintaining the clean environment of the shelf at a predetermined level or more.

The present invention also provides a shelf, an input and output device, a fan filter unit for supplying a clean air, an exhaust port whose opening degree can be adjusted, and a clean environment measurement unit that can be transferred between a shelf and a shelf by the input and output device. In order to control the clean environment in the automatic warehouse equipped with,

Measuring the clean environment of the shelf by the measuring unit;

According to the measurement result, by controlling at least one of the opening degree of the fan filter unit and the exhaust port, it is characterized in that the step for maintaining the clean environment of the shelf above a predetermined level.

Preferably, according to a predetermined predetermined rule, the measuring unit is delivered by the entry / exit device only to a part of the shelves in the automatic warehouse to measure the clean environment of the delivered shelves.

More preferably, a vibration sensor is provided in the measuring unit to measure the vibration received by the measuring unit during transportation by the entry and exit device,

According to the measurement result of the vibration sensor, the operation of the loading and unloading device is regulated, and a regulating means is provided for maintaining the vibration received by the conveyed article at a predetermined level or less during conveyance.

In addition, the present invention is an automatic warehouse provided with a vibration measuring unit that can be transported and transferred between the shelf and the shelf by an input and output device,

The vibration during conveyance by the input and output device is measured by the vibration measuring unit,

It is characterized by providing a regulating means for regulating the operation of the loading and unloading device according to the measurement result of the vibration measuring unit and for maintaining the vibration received by the conveyed article at a predetermined level or less during conveyance.

Preferably, an electrostatic sensor is provided in the vibration measuring unit, and the operation of the storage device is regulated according to the measurement result of the electrostatic sensor.

In the present invention, since one or a few measuring units can measure the clean environment of the entire automatic warehouse, it is efficient. In addition, since the measurement results are fed back to the opening degree of the fan filter unit or the exhaust port, each shelf can be maintained at a clean level of a predetermined level or more.

Here, according to a predetermined rule, if the clean environment of only a part of shelves in the automatic warehouse is sequentially measured, and the clean environment of the surrounding shelves is estimated, the clean environment can be efficiently obtained throughout the automatic warehouse.

In addition, by installing a vibration sensor in the measuring unit and restricting the operation of the loading and unloading device according to the vibration measurement result, the vibration received by the conveyed article is kept below a predetermined level during conveyance, thereby preventing adverse effects on the conveyed article due to the vibration. can do.

In addition, by installing an electrostatic sensor in the measuring unit and restricting the operation of the loading and unloading device, it is possible to maintain the charging amount of the article being conveyed at a predetermined level or less.

1 to 6 show an automatic warehouse 2 according to an embodiment. The automatic warehouse 2 is installed in a clean room, and in FIG. 1, 4 and 5 are racks, 6 are stacker cranes as an input and output device, and other conveying apparatuses, such as a conveyor, may be sufficient. 8 is a traveling rail of the stacker crane 6, and 10 is a traveling space of the stacker crane 6. In addition, a rack may be provided only on one side of the travel space 10, and a part of the racks 4 and 5 may be replaced with a processing apparatus such as a semiconductor or a flat panel display.

As shown in FIG. 2 and the like, the stacker crane 6 includes a lift table 14 that moves up and down along the trolley 12 and the mast 15, and the lift table 14 includes a slide fork or a slide fork. The transfer device 16, such as a scalar arm, is provided. A turntable or the like for rotating the transfer device 16 together with the article may be provided between the lift table 14 and the transfer device 16. A fan filter unit (FFU) 18 is provided on the ceiling of the automatic warehouse 2 and on the rear side of the lowest shelf, for example, on the side of the automatic warehouse 2 to supply clean air. In FIG. 1, the FFU 18 is shown installed at the same pitch as the shelf 22, but the actual arrangement of the FFU 18 is arbitrary. The reason why the FFU 18 is installed on the rear side of the lowest shelf is because the air flow of the clean air from the ceiling FFU cannot reach the bottom of the rack, and the running wind of the stacker crane 6 ) To prevent intrusion.

The charging station 19 is installed in, for example, one of the racks 4 and 5 so that the measuring unit 24 can be charged. In addition, the charging station 19 may be provided with a communication interface with the measurement unit to acquire data from the measurement unit. 20 is a ground side controller, which controls the opening degree of the FFU 18 or the exhaust valve described later, the stacker crane 6, and the like. 22 is a shelf, for example, a cassette such as a semiconductor cassette or a flat panel display is stored, and the kind of stored article is arbitrary. In the embodiment, the flat panel display was stored, and the number of stages of the shelf 22 was about 2 to 3 stages. 26 is an exhaust valve provided near the bottom surface of the automatic warehouse 2, and the opening degree is adjustable, 28 is a return flow path, and supplies the air refluxed from the exhaust valve 26 to the FFU 18. .

3 shows the configuration of the measuring unit 24. 29 is a suitable frame, for example, the measurement unit 24 is partitioned in two stages up and down. In addition, you may remove the partition of the upper and lower sides of the measuring unit 24, or partition into three or more steps. By the partition, the air flow change at each height position can be detected, and the air flow can be horizontally adjusted by suppressing the air flow in the height direction. In each of the upper and lower stages of the measuring unit 24, the tracer 30 is suspended from the upper side, and the tracer 30 is composed of a seal 32 and a windshield 34 and a reflector 36 provided at the lower end thereof. The windshield 34 is, for example, a conical shape in which the opening 35 is provided, and moves together with the reflector 36. In the tracer 30, the weak airflow on the inside of the shelf and the platform is received by the windshield 34, and is greatly displaced to accurately determine the direction and intensity of the airflow. The shape of the windshield 34 is not limited to a conical shape, but may be cylindrical or the like, and the seal 32 may extend below the windshield 34 or the reflector 36. In addition, you may image the position of the windshield 34 itself, without providing the reflector 36.

38 is a camera to which a speed light is attached, and since the space in the automatic warehouse 2 is generally dark, a speed light is installed. In addition, the speed light may be provided separately from the camera 38. Then, the camera 38 with the speedlite is imaged with the reflector 36, for example, from the bottom to the top or from the top to the bottom. Since the range in which the reflector 36 moves by clean air is a range which does not deviate from the visual field of the same camera 38, the individual reflector 36 can be distinguished from a camera image. Further, for example, a plurality of reflectors 36 are picked up by one camera 38.

40 is a particle counter, for example, measures the number and size of the particles flowing through the upper and lower stages of the measurement unit 24. 42 is a distance sensor which measures the distance to the support column of the shelf on which the measuring unit 24 is placed, and detects the precision of the transmission position of the measuring unit 24.

44 is a vibration sensor, although it is provided in the lower end center of the measuring unit 24, for example, You may install in each stage. The vibration sensor 44 is made of, for example, an acceleration sensor, and preferably measures the vibration received by the measuring unit 24 in each of the x, y, and z directions. The 46 is an electrostatic sensor that does not need to be installed. The static electricity sensor 46 detects the charging situation of the glass substrate of the flat panel display which is a stored article, and the like. The glass substrate is charged by contact with clean air containing ions or by friction with the glass support member of the cassette (not shown) during transportation. When the glass substrate is charged, circuits, transistors, and the like on the glass substrate may be damaged. An electric field is generated around the glass substrate by charging, and the electric field is measured by the electrostatic sensor 46. Although the electrostatic sensor 46 may measure even the direction of an electric field, etc., in the Example, only the intensity of an electric field is measured.

48 is a power supply unit, which is a power source of the camera 38 and the particle counter 40, the vibration sensor 44, the electrostatic sensor 46, and the like, and is charged in the charging station 19 described above. 50 is a communication interface, for example, a communication between a wireless LAN (not shown) installed in an automatic warehouse or a stacker crane when placed on a platform of a stacker crane. Alternatively, you may communicate with the communication interface provided in the charging station. In communication, a measurement result is sent out from the measuring unit 24 side, and an instruction regarding a measurement is received from the counterpart side.

4 shows the configuration of the crane controller 52. The crane controller 52 is a controller on the stacker crane, which controls the traveling of the stacker crane, the lifting and lowering of the lifting platform, and the transfer of the transfer device, and the conveying to the lathe to be measured in order to convey the measuring unit to the lathe to be measured. Remember the pattern. The whole shelf check pattern storage unit 54 stores the conveying pattern of the measuring unit so that the measuring units are delivered to all the shelves in the automatic warehouse and the clean environment of all the shelves is measured. In addition, the measurement of a clean environment includes the count of particles, the measurement of the flow rate and direction of the air flow, and the measurement of vibration and static electricity.

The selection check pattern storage unit 56 stores the pattern of the shelves for measuring the clean environment so as to be distributed throughout the automatic warehouse and to measure the clean environment for only some of the shelves instead of all the shelves. The shelf measured by the selection check pattern is not fixed but may be different each time. The peripheral shelf check pattern storage unit 58 memorizes a pattern of which shelves in the vicinity are to be measured when a shelf having a problem in a clean environment is detected.

The crane operation check storage unit 60 stores a pattern for checking how the clean environment is changed by traveling and accelerating and decelerating the trolley, moving up and down the platform, and moving the transfer device. In the above pattern, the stacker crane is repeatedly operated around the shelf on which the measuring unit is placed, for example, while the measuring unit is placed on the shelf and the conditions such as running and lifting, operation of the transfer device, and the like are changed. In addition, the stacker crane is repeatedly operated while placing the measuring unit on a lifting platform and changing conditions such as running and lifting, operation of the transfer device, and the like. In the meantime, the measuring unit measures the clean environment. The unit communication interface 62 is an interface for communicating with the measurement unit, but does not need to be provided in particular. The crane restricting section 64 regulates the operation speed and acceleration / deceleration of the crane according to the measurement results such as vibration and static electricity.

Next, the operation of the embodiment will be described. The clean environment is measured for all shelves at the time of completion of the automatic warehouse (2) or at the time of large-scale maintenance. The measuring unit is placed on each shelf by a stacker crane, and the number and distribution of particles on the shelf, the air flow distribution and its speed, the mounting accuracy of the measuring unit, and the degree of static electricity are measured. In addition, at the time of conveyance and transfer of the measurement unit by the stacker crane, the number and distribution of particles, the distribution and speed of the airflow, the positional accuracy of the measurement unit, and the vibration and static electricity received by the measurement unit are measured.

The above measurement results are sent to the terrestrial controller from a wireless LAN or the like, and if there is data of a problem level, maintenance is performed and adjusted. Then, based on the measurement result of the particle counter and the measurement result of the direction and the wind speed of the air flow, the blowing amount of the fan filter unit and the opening degree of the exhaust valve are adjusted, so that all the shelves are kept at a predetermined cleanness or higher. In addition, when the airflow is too strong, an article such as a glass substrate may be charged, so that the degree of opening of the fan filter unit and the exhaust valve is adjusted according to the measurement result of the static electricity. The operation of the crane is regulated in accordance with the degree of vibration and static electricity of the measuring unit being conveyed. Here, when there are particles above the allowable level, when there is an abnormality in the direction and intensity of the airflow, or when there is abnormal vibration, abnormal static electricity, etc., it is determined as a trouble and the stacker crane is adjusted. In order to elucidate such a cause, the operation condition of a stacker crane is changed and the relationship between the operation of a stacker crane and an abnormality is demonstrated.

6 shows the pattern at the time of inspection. After the completion of the automatic warehouse, the inspection is carried out regularly at an appropriate timing, for example, and the measurement unit is placed on a predetermined shelf according to the check pattern generated in the selection check pattern storage unit, and the degree of cleanliness, vibration and static electricity is measured. In addition, the measurement accuracy of the measurement unit is measured. Then, for example, with the measurement unit mounted on one shelf, the change of air flow and the number and size of particles according to the movement and deceleration of the trolley, the elevation and deceleration of the platform, the movement of the transfer device, and the like are measured. Then, the influence on the clean environment according to the operation of the crane is measured. In addition, a measuring unit is conveyed by a stacker crane, and the vibration, the cleanliness, the degree of static electricity, etc. during conveyance are measured.

If there is data in question, the cause is solved. In particular, the measurement unit is also placed on the shelf around the shelf where the problem occurred. Then, maintenance and the like are carried out according to the explanation result. Moreover, even if there is no trouble, the air flow amount of the fan filter unit and the opening degree of the exhaust valve are adjusted so that each shelf is kept at a uniform clean degree. In addition, according to the vibration degree during conveyance, the degree of static electricity, and the like, the crane restricting section regulates the maximum traveling speed and maximum acceleration / deceleration speed of the trolley, the maximum lifting speed and the maximum lifting acceleration / deceleration speed, and the moving speed of the platform.

According to the embodiment, the following effects can be obtained.

(1) By using one measuring unit 24, all the clean environments in the automatic warehouse 2 can be measured.

(2) Since the measurement result is fed back to the opening degree of the fan filter unit and the exhaust valve, the clean environment of each shelf can be maintained above a predetermined level.

(3) By measuring the degree of vibration received by the stacker crane during transportation, the degree of static electricity, the direction and speed of the airflow, the number of particles, and the like, and regulating the traveling speed of the crane, etc. The influence can be made small.

(4) The clean environment can be measured efficiently by measuring the clean environment for all shelves at the completion of the automatic warehouse, etc., and afterwards measuring only a part of the shelves.

1 is a plan view of an automatic warehouse according to an embodiment.

2 is a front view of the embodiment.

3 is a side view of the measuring unit used in the embodiment.

4 is a block diagram of a crane control unit in the embodiment.

5 is a flowchart showing the entire shelf check algorithm in the embodiment.

6 is a flowchart showing an algorithm at the time of inspection in the embodiment.

Explanation of symbols on the main parts of the drawings

2: automatic warehouse 4, 5: rack

6: stacker crane 8: running rail

10: running space 12: bogie

14: platform 15: mast

16: transfer device 18: fan filter unit (FFU)

19: charging station 20: ground side controller

22 lathe 24 measuring unit

26: exhaust valve 28: return flow path

29: Frame 30: Tracer

32: thread 34: windshield

36: Reflector 38: Camera with Speedlite

40: particle counter 42: distance sensor

44: vibration sensor 46: electrostatic sensor

48: power supply unit 50: communication interface

52: crane controller 54: full shelf check pattern storage

56: thinning out check pattern storage unit

58: Peripheral shelf check pattern storage unit 60: Crane operation check pattern storage unit

62 unit communication interface 64 crane control unit

Claims (6)

Automated warehouse with shelves, entry and exit device, fan filter unit for clean air supply, exhaust opening with adjustable opening degree, and unit for clean environment measurement that can be transported to and from the shelf by the entry and exit device as, By measuring the clean environment of the shelf by the measuring unit, And a control means for maintaining at least a predetermined level of the clean environment of the shelf by controlling at least one of the opening degree of the fan filter unit and the exhaust port in accordance with the measurement result. The method of claim 1, The automated warehouse according to a predetermined predetermined rule, wherein the measuring unit is delivered to only a part of the shelves in the automatic warehouse by the entry / exit device, so as to measure the clean environment of the transferred shelf. The method of claim 2, By installing a vibration sensor on the measuring unit, while measuring the vibration received by the measuring unit during conveyance by the input and output device, An automatic warehouse, characterized in that a control means is provided for regulating the operation of the loading and unloading device according to the measurement result of the vibration sensor and for maintaining the vibration received by the conveyed article at a predetermined level or less during transportation. An automatic warehouse having a vibration measuring unit that can be transported to and from the shelves by an input and output device, The vibration during conveyance by the input and output device is measured by the vibration measuring unit, An automatic warehouse according to the measurement result of the vibration measuring unit, which regulates the operation of the loading and unloading device, and is provided with a regulating means for maintaining the vibration received by the conveyed article at a predetermined level or less. The method of claim 4, wherein And an electrostatic sensor installed in the vibration measuring unit, and controlling the operation of the entry and exit device by the regulating means in accordance with the measurement result of the electrostatic sensor. Automated warehouse with shelves, entry and exit device, fan filter unit for clean air supply, exhaust opening with adjustable opening degree, and unit for clean environment measurement that can be transported to and from the shelf by the entry and exit device To control the clean environment in Measuring the clean environment of the shelf by the measuring unit; And a step for maintaining the clean environment of the shelf above a predetermined level by controlling at least one of the opening degree of the fan filter unit and the exhaust port in accordance with the measurement result.

Images