JP3505601B2 - Plate inspection equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technical field of a plate material inspection device for inspecting an edge defect of a brittle plate material such as a liquid crystal glass substrate.

[0002]

2. Description of the Related Art In general, in the inspection of a plate material made of a liquid crystal glass substrate performed in a clean room, inspection of defects inside the plate material, inspection of edge defects of the plate material, inspection of defects on the front surface (back surface) of the plate material, etc. Is being carried out continuously.

Conventionally, as a technique for inspecting the edge of a plate material,
For example, it is known that a worker (inspector) holds a plate material by hand and visually inspects it.

[0004]

In the above-described conventional edge material inspection technique for plate materials, the inspection results may differ depending on the ability, experience, etc. of the operator, and thus there is a problem that the inspection accuracy is unstable. is there.

Incidentally, in the plate material inspection system which has recently been carried out inside a clean room, it is aimed to continuously perform various kinds of inspections while conveying the plate material. Therefore, it is required to develop a technique for precisely inspecting the edge of the conveyed plate material for defects.

The present invention has been made in view of the above problems, and an object of the present invention is to provide a plate material inspection apparatus capable of precisely and stably inspecting an edge defect of a conveyed plate material. To do.

[0007]

Means for Solving the Problems In order to solve the above problems, the plate material inspection apparatus according to the present invention employs the following means.

That is, in claim 1, a conveying means for conveying the plate material in a fixed direction, a first inspection mechanism for irradiating and inspecting the edge of the conveyed plate material with a laser beam from a fixed position, and a conveyer. Introduction of Bei and stopping by plate material a second inspection mechanism which is irradiated with a laser beam inspection while traveling in a direction perpendicular to the conveying direction of the sheet in the transport direction perpendicular to the edge of,該搬
The feeding means is arranged along the conveying direction and flows onto the conveyed plate material.
Fluid ejection mechanism that ejects the body to raise the plate material and fluid ejection
The lower end surface of the upright plate placed under the mechanism is supported below.
Transport unit that has a moving mechanism for moving in the transport direction while
It is made of knit.

According to this means, the inspection accuracy is improved by inspecting the edge of the plate material for defects by transmitting the laser beam.
Inspecting with two systems, the inspection mechanism and the second inspection mechanism, makes it possible to carry the plate material.

(Delete)

Further, with this means, the plate material to be inspected is erected and conveyed.

According to a second aspect of the present invention, in the plate material inspection apparatus according to the first aspect, a plurality of transport units are connected in the transport direction, and the first inspection mechanism and the second inspection mechanism are installed between adjacent transport units. It is characterized by

With this means, the first inspection mechanism and the second inspection mechanism are installed by utilizing the space between the adjacent transport units.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a plate material inspection apparatus according to the present invention will be described below with reference to the drawings.

FIGS. 1 to 12 show an embodiment (1) of a plate material inspection apparatus according to the present invention.

In this embodiment, the plate material P made of a liquid crystal glass substrate is inspected in the clean room for defects inside the plate material, for edge defects of the plate material, and for defects on the front surface (back surface) of the plate material. It is shown that the three types of inspections described above are continuously performed.

As shown in FIG. 1, this embodiment comprises a carrying unit 1 which is a carrying means, and an inspection mechanism 2 which carries out the above-mentioned three kinds of inspections.

As shown in detail in FIGS. 2 to 5, the transport unit 1 moves the plate material P by supporting the lower end surface of the plate material P and the fluid ejecting mechanism 11 for injecting the fluid A onto the plate material P. The mechanism 12 is a main part.

The fluid ejecting mechanism 11 has a large number of fluid ejecting holes 11b in a plurality of rows in which the fluid A is ejected at regular intervals on one surface of the prismatic main body 11a through which the pressurized fluid A flows. It is provided. The body 11a has a hose 11c.
An air blower 11e, which is a supply source of the fluid A, is connected via the filter 11d.

The fluid ejecting mechanism 11 is attached to the upper and lower central portions of a rectangular frame member 13 by mounting brackets 14, and a part of the fluid ejecting mechanism 11 is arranged so as to project from the frame member 13 along the carrying direction (lateral direction). There is. Frame member 1
3 is a frame-structured frame 15 installed on the installation floor F
Is supported at an inclined angle a of about 5 degrees.
The air blower 11e of the fluid ejection mechanism 11 is installed on the pedestal 15.

In the moving mechanism 12, a conveyor belt 12d is looped endlessly between a drive pulley 12b rotatably driven by a motor 12a and a driven pulley 12c separated from the drive pulley 12b. A groove 12e for preventing the lower end surface of the plate material P from slipping off is formed in the longitudinal direction of the surface of the conveyor belt 12d. Between the drive pulley 12b, the driven pulley 12c, and the conveyor belt 12d, the conveyor belt 1
A guide 12f for preventing the bending of 2d is provided.

The moving mechanism 12 is attached by a mounting bracket 16 near the lower end of the frame member 13 described above.
A part of the frame member 13 is arranged so as to protrude (almost the same length as the fluid ejection mechanism 11) along the transport direction (lateral direction).

As shown in FIG. 1, this carrying unit 1 has a connecting bracket 17 mounted between pedestals 15 and a plurality of units are connected in the carrying direction through a small space to carry the plate material P over a long distance. A transport line (inspection line) for possible inspection is configured. A space is also secured between the fluid ejecting mechanisms 11 and the moving mechanisms 12 of the adjacent transport units 1. Further, the vertical position of the fluid ejection mechanism 11 is different between the fourth transport unit 1 and the fifth transport unit 1 of the configured transport line.

As shown in FIG. 6, the transport unit 1 at the forefront of the connection of the transport lines is a dedicated stand for receiving the plate material P from the supply side 3 to which the plate material P is supplied to the transport line. The transport unit 1 at the end of the transport line connection is
As shown in FIG. 7, it is a dedicated stand for delivering the plate material P to the recovery side 4 where the plate material P is recovered from the transport line. As shown in FIG. 8, a supply / delivery mechanism 5 including a multi-axis robot that delivers the plate material P is arranged between the transport unit 1 and the supply side 3 at the forefront of the connection of the transport lines. As shown in FIG. 8, a collection / delivery mechanism 6 for delivering the plate material P is arranged between the transportation unit 1 and the collection side 4 at the end of the coupling of the transportation lines.

The inspection mechanism 2 is composed of three types of internal inspection mechanism 21, edge inspection mechanism 22 and surface inspection mechanism 23.

The internal inspection mechanism 21 is for inspecting defects inside the plate material P, and includes a xenon lamp 21a for transmitting light to the plate material P and a screen 21b for projecting an image of the plate material P by the light transmitted through the plate material P. And a camera 21c for capturing an image of the plate material P projected on the screen 21b.

In this internal inspection mechanism 21, the plate material P has the transport unit 1 (fluid ejecting mechanisms 11 and moving mechanisms 12).
Light is transmitted to the plate material P at a position where there is no obstacle around the plate material P while being conveyed between them.

The edge inspection mechanism 22 is for inspecting the edge of the plate P for defects, and includes a first inspection mechanism 221 for inspecting the edge of the plate P being conveyed by irradiating it with laser light from a fixed position. The second inspection mechanism 222 that irradiates and inspects with laser light while traveling in a direction orthogonal to the transport direction of the plate material P at an edge orthogonal to the transport direction of the plate material P whose transport has been stopped.

The edge inspection mechanism 22 is installed in the space between the transport units 1. Therefore,
The equipment of the edge inspection mechanism 22 does not hinder the transport of the plate material P.

The first inspection mechanism 221 of the edge inspection mechanism 2
Is a bracket 221a that is hung between the adjacent transport units 1, a base 221b that is supported by the bracket 221a and extends vertically (with the aforementioned angle a) between the adjacent transport units 1, and a base 221b. And a detection portion 221c which is supported by 221b and is formed in a U shape so as to sandwich the edge of the plate material P. The detection unit 221c, as shown in detail in FIG. 11, projects the laser light.
1c ′ and a light receiving portion 221c ″ that receives the laser light are opposed to each other.

The second inspection mechanism 222 of the edge inspection mechanism 2
Is a bracket 222a that is hung between the adjacent transport units 1, a base 222b that is supported by the bracket 222a and extends vertically (with the aforementioned angle a) between the adjacent transport units 1, and a base 222b. A traveling rail 222c disposed in the length direction (up and down direction) of 222b, and traveling
It is provided with a detection portion 222d which is movably supported by the rail 222c and which is formed in a U shape so as to sandwich the edge of the plate P facing the front and rear in the transport direction of the plate P respectively. As shown in detail in FIG. 11, the detection unit 222d has a light projecting unit 222d ′ that emits a laser beam and a light receiving unit 222d ″ that receives the laser beam face each other.

The front surface inspection mechanism 23 inspects the front surface (back surface) of the plate material P for defects.
It is provided with a halogen lamp 23a for irradiating light to the plate, a moving portion 23b for moving the halogen lamp 23 with respect to the plate P, and a handle 23c for gripping and operating the moving portion 23b.

The surface inspection mechanism 23 is for visually inspecting by moving the halogen lamp 23a manually by an operator, and the fourth and fifth transportation lines in which the vertical position of the fluid ejecting mechanism 11 is different. It is installed in the transport unit 1 (see FIG. 1). 4th and 5th on the transfer line
In the second transport unit 1, different areas are shared by the surface inspection mechanism 23 for inspection, and the fluid ejecting mechanism 11 is excluded from the area to be inspected so as not to obstruct the visual inspection.
In addition, in order to avoid unnecessary inspection work on the plate material P in which the defect is found by the internal inspection mechanism 21 and the edge inspection mechanism 22, the fourth and fifth transportation units 1 of this transportation line are instructed to the worker. A display unit 7 is provided for making visual and auditory announcements.

According to this embodiment, the transport unit 1
Since it has a frame structure or the like, it can be manufactured inexpensively and lightweight, and the mounting structure for the equipment of the inspection mechanism 2 is simplified. Further, the transport unit 1 is connected via a small space and the fluid ejecting mechanism 1 is connected to the plate material P.
Since only 1 has a structure to face each other, there is no restriction on the equipment of the inspection mechanism 2.

In this embodiment, the plate material P supplied from the supply side 3 is placed on the foremost carrying unit 1 of the carrying line by the feeding / delivery mechanism 5, and the board material P is conveyed by the carrying unit 1. Inspection mechanism 2 during transportation
The plate material P that has been inspected by the inspection and has been inspected is recovered by the recovery delivery mechanism 6 from the rearmost transfer unit 1 of the transfer line to the recovery side 4. Therefore, it is possible to continuously perform different types of inspections on the plate P while the plate P is being transferred on the transfer line (although there is a temporary stop), and all inspections of the plate P are completed in a short time. be able to.

In the inspection of the edge of the plate material P by the edge inspection mechanism 22, as shown in FIG. 9, the upper and lower edges of the plate material P conveyed between the adjacent conveyance units 1 by the first inspection mechanism 221 are fixed as they are. Inspect by position. That is, as shown in FIG. 11, the laser light emitted from the detection unit 221c of the first inspection mechanism 221 basically passes through the plate material P,
The light is not received by the light receiving portion 222d ″ due to the edge (chamfered portion) of the plate material P, a chip near the edge, a crack, etc., and the light is not received by the light receiving portion 222d ″ . Therefore, as shown in FIG. Then, the inspection data is created and compared with the reference data of the design edge of the plate material P to judge whether the quality is good or not.The judgment of good or bad is executed based on a judgment algorithm including an allowable value. Result (good or bad)
Is displayed on the display unit 7 described above.

As shown in FIG. 10, the second inspection mechanism 222 inspects the front and rear edges of the front and rear plate materials P by traveling along the plate material P whose conveyance is stopped between the adjacent transfer units 1. . For details of laser light irradiation, etc.
It is similar to the inspection mechanism 221.

As a result, in the inspection by the edge inspection mechanism 22, the edge defect of the plate material P is precisely and stably inspected.

In the carrying line, the plate material P placed on the carrying belt 12d of the moving mechanism 12 of the carrying unit 1 is carried while being prevented from falling by the fluid A ejected from the fluid ejecting holes 11b of the fluid ejecting mechanism 11. become. Therefore, since the plate material P is conveyed in an upright state, the installation floor area can be reduced, and installation is not difficult even if the plate material P becomes large.

Further, the plate material P to be conveyed has a large part of the load supported by the lower end surface thereof, and a part of the load (overturning force) is laterally supported by the injection pressure of the fluid A on the back surface thereof.
Fall is prevented. Therefore, when the edge inspection mechanism 22 of the inspection mechanism 2 inspects the edge defect of the plate material P, the plate material P does not bend and the precise inspection is not performed.

It should be noted that the plate material P is prevented from bending and falling.
Since the majority of the load on the lower end surface of the plate is supported by the side support of a part (overturning force) of the load due to the injection pressure of the fluid A on the back surface, the injection pressure of the fluid A merely causes the plate material P to fall. Since it suffices to make adjustment so as to be blocked and it is not necessary to precisely adjust the injection pressure of the fluid A, the operation adjustment corresponding to the size of the plate material P becomes easy. In addition, since the plate material P is not in contact with the peripheral members other than the peripheral member supporting the lower end surface, the plate material P is prevented from being damaged or broken during the transportation.

FIG. 13 shows an embodiment (2) of the plate material inspection apparatus according to the present invention.

In this embodiment, the fluid ejecting mechanism 11 and the frame member 13 of the transport unit 1 are arranged horizontally opposite to each other. The moving mechanism 12 of the transport unit 1 is attached to one frame member 13. In addition, the pedestal 15 of the transport unit 1 is formed in a dolly type having a low height.

According to this embodiment, the surface of the plate material P,
The fluid A is jetted to both sides of the back surface at an angle substantially orthogonal to each other to maintain the plate material P in a vertical standing state.
Will be supported while being supported by the lower end surface. Therefore, the jet pressure of the fluid A is applied to both the front and back surfaces of the plate material P to strongly maintain the vertical standing state, so that the plate material P being conveyed may be shaken by the airflow of the air conditioning in the clean room. Disappears.

As described above, in addition to the illustrated embodiment, the present invention can be applied to the transportation of the plate material P made of a material other than the liquid crystal glass substrate.

Furthermore, the fluid A to be jetted corresponding to the material of the plate material P can be another gas such as an inert gas or a liquid such as water.

[0047]

As described above, the plate material inspection apparatus according to the present invention increases the inspection accuracy by inspecting the edge defects of the plate material by transmitting the laser light, and the first inspection mechanism and the second inspection mechanism can be used. Since the inspection of the system corresponds to the conveyance of the plate material, there is an effect that the edge defect of the conveyed plate material can be precisely and stably inspected.

Further, since the plate material is conveyed in an upright state, there is an effect that the installation floor area is reduced. Further, due to this effect, there is an effect that installation is not difficult even if the plate material is increased in size.

Further, since only the fluid ejecting mechanism of the transport unit faces the transported plate material to open the periphery of the plate material widely, there is an effect that the facility of the inspection mechanism is not restricted.

Further, since the load of the upright plate material is supported and the overturning of the plate material is prevented by the jet pressure of the fluid, there is an effect that the bending and sliding of the plate material conveyed without making precise adjustment can be prevented. Further, due to this effect, operation adjustment corresponding to the size of the plate material is facilitated.

Furthermore, since the inspection mechanism is installed by utilizing the space between the transfer units, there is an effect that the inspection mechanism can be installed without obstructing the transfer of the plate material.

[Brief description of drawings]

FIG. 1 is a front view showing an embodiment (1) of a plate material inspection device according to the present invention.

FIG. 2 is an enlarged side view of FIG.

FIG. 3 is an enlarged view of a main part of FIG.

4 is an enlarged cross-sectional view of another main part of FIG.

FIG. 5 is a front view of FIG.

FIG. 6 is a side view showing an example of supplying a plate material to FIG. 1.

FIG. 7 is a side view showing an example of collecting the plate material from FIG. 1.

8 is a plan view of FIGS. 6 and 7. FIG.

FIG. 9 is an enlarged view showing the operation of the main part of FIG. 1.

10 is another operation diagram of FIG. 9. FIG.

FIG. 11 is an enlarged cross-sectional view of the main parts of FIGS. 9 and 10.

FIG. 12 is a flowchart showing the inspection process of the embodiment (1) of the plate material inspection apparatus according to the present invention.

FIG. 13 is a side view showing an embodiment (2) of the plate material inspection device according to the present invention.

[Explanation of symbols]

1 Transport unit (transport means) 11 Fluid ejection mechanism 12 Moving mechanism 2 Inspection mechanism 22 Edge inspection mechanism 221 First inspection mechanism 222 Second inspection mechanism A fluid P plate material

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP 2001-41905 (JP, A) JP 10-132758 (JP, A) JP 5-301710 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) G01N 21/84-21/958 G01B 11/00-11/30 B65G 49/00-49/08 B65G 51/00-51/03

Claims (2)

(57) [Claims] 1. A conveying means for conveying a plate material in a fixed direction, a first inspection mechanism for irradiating an edge of the conveyed plate material in a conveying direction with a laser beam from a fixed position, and a plate material for which conveyance has been stopped. second Bei example an inspection mechanism, conveying means conveying direction conveying direction to be irradiated with laser light while traveling in a direction perpendicular to the conveying direction of the plate to the edge perpendicular to inspect the
A plate material that is placed along and is ejected from a plate material
The fluid ejecting mechanism that stands up and is placed below the fluid ejecting mechanism
In the transport direction while supporting the lower end surface of the upright plate
It consists of a transport unit with a moving mechanism to move it.
A board material inspection device characterized by: 2. The plate material inspection apparatus according to claim 1 , wherein a plurality of transport units are connected in the transport direction, and the first inspection mechanism and the second inspection mechanism are provided between adjacent transport units. Plate material inspection device.