JP2007294688A5 - - Google Patents
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- Publication number
- JP2007294688A5 JP2007294688A5 JP2006121014A JP2006121014A JP2007294688A5 JP 2007294688 A5 JP2007294688 A5 JP 2007294688A5 JP 2006121014 A JP2006121014 A JP 2006121014A JP 2006121014 A JP2006121014 A JP 2006121014A JP 2007294688 A5 JP2007294688 A5 JP 2007294688A5
- Authority
- JP
- Japan
- Prior art keywords
- shaped
- plate
- pipe
- hollow pipe
- serpentine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- WYTGDNHDOZPMIW-UHOFOFEASA-O Serpentine Natural products O=C(OC)C=1[C@@H]2[C@@H]([C@@H](C)OC=1)C[n+]1c(c3[nH]c4c(c3cc1)cccc4)C2 WYTGDNHDOZPMIW-UHOFOFEASA-O 0.000 claims 8
- 238000001704 evaporation Methods 0.000 claims 7
- 238000010438 heat treatment Methods 0.000 claims 5
- 238000002791 soaking Methods 0.000 claims 4
- 230000001808 coupling Effects 0.000 claims 2
- 238000010168 coupling process Methods 0.000 claims 2
- 238000005859 coupling reaction Methods 0.000 claims 2
- 239000012530 fluid Substances 0.000 claims 2
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006121014A JP4942385B2 (ja) | 2006-04-25 | 2006-04-25 | 均熱処理装置 |
KR1020060130391A KR100841830B1 (ko) | 2006-04-25 | 2006-12-19 | 균열 장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006121014A JP4942385B2 (ja) | 2006-04-25 | 2006-04-25 | 均熱処理装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007294688A JP2007294688A (ja) | 2007-11-08 |
JP2007294688A5 true JP2007294688A5 (it) | 2009-06-18 |
JP4942385B2 JP4942385B2 (ja) | 2012-05-30 |
Family
ID=38765006
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006121014A Expired - Fee Related JP4942385B2 (ja) | 2006-04-25 | 2006-04-25 | 均熱処理装置 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4942385B2 (it) |
KR (1) | KR100841830B1 (it) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5536224B2 (ja) * | 2010-10-01 | 2014-07-02 | 東芝三菱電機産業システム株式会社 | 均熱処理装置 |
KR101683724B1 (ko) * | 2016-03-21 | 2016-12-07 | 엠에스티코리아(주) | 스팀 세정용 스팀 발생기 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63154964A (ja) * | 1986-12-19 | 1988-06-28 | Hitachi Ltd | 探触子駆動装置 |
JPH0924322A (ja) * | 1995-07-11 | 1997-01-28 | Toray Ind Inc | 基板加熱処理用均温プレート |
JP3527032B2 (ja) * | 1996-04-11 | 2004-05-17 | 三菱電機株式会社 | 均熱装置 |
TW452826B (en) * | 1997-07-31 | 2001-09-01 | Toshiba Ceramics Co | Carbon heater |
US5983644A (en) * | 1997-09-29 | 1999-11-16 | Applied Materials, Inc. | Integrated bake and chill plate |
JP3895498B2 (ja) * | 1999-04-28 | 2007-03-22 | 古河スカイ株式会社 | 金属部材を接合したヒートプレート及びその製造方法 |
JP3624131B2 (ja) * | 2000-01-19 | 2005-03-02 | 東京エレクトロン株式会社 | 基板熱処理装置 |
JP3589929B2 (ja) * | 2000-02-22 | 2004-11-17 | 東京エレクトロン株式会社 | 加熱処理装置 |
KR100363062B1 (ko) * | 2000-05-04 | 2002-12-02 | 한빛 세마텍(주) | 웨이퍼 가열장치 |
JP2002023860A (ja) * | 2000-07-12 | 2002-01-25 | Komatsu Ltd | 温度調整システム |
JP3649127B2 (ja) * | 2001-01-04 | 2005-05-18 | 東京エレクトロン株式会社 | 加熱処理装置 |
US6744020B2 (en) * | 2001-01-04 | 2004-06-01 | Tokyo Electron Limited | Heat processing apparatus |
JP3791432B2 (ja) * | 2002-02-27 | 2006-06-28 | 住友電気工業株式会社 | 半導体製造用加熱装置 |
JP4129206B2 (ja) * | 2003-07-01 | 2008-08-06 | 大日本スクリーン製造株式会社 | 熱処理装置 |
JP2006100461A (ja) * | 2004-09-29 | 2006-04-13 | Dainippon Screen Mfg Co Ltd | 熱処理装置 |
KR101164186B1 (ko) * | 2004-10-08 | 2012-07-10 | 후루카와 스카이 가부시키가이샤 | 히터 플레이트 및 히터 플레이트 제조방법 |
-
2006
- 2006-04-25 JP JP2006121014A patent/JP4942385B2/ja not_active Expired - Fee Related
- 2006-12-19 KR KR1020060130391A patent/KR100841830B1/ko active IP Right Grant
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