JP2007294688A5 - - Google Patents

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Publication number
JP2007294688A5
JP2007294688A5 JP2006121014A JP2006121014A JP2007294688A5 JP 2007294688 A5 JP2007294688 A5 JP 2007294688A5 JP 2006121014 A JP2006121014 A JP 2006121014A JP 2006121014 A JP2006121014 A JP 2006121014A JP 2007294688 A5 JP2007294688 A5 JP 2007294688A5
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JP
Japan
Prior art keywords
shaped
plate
pipe
hollow pipe
serpentine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006121014A
Other languages
English (en)
Japanese (ja)
Other versions
JP4942385B2 (ja
JP2007294688A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006121014A priority Critical patent/JP4942385B2/ja
Priority claimed from JP2006121014A external-priority patent/JP4942385B2/ja
Priority to KR1020060130391A priority patent/KR100841830B1/ko
Publication of JP2007294688A publication Critical patent/JP2007294688A/ja
Publication of JP2007294688A5 publication Critical patent/JP2007294688A5/ja
Application granted granted Critical
Publication of JP4942385B2 publication Critical patent/JP4942385B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006121014A 2006-04-25 2006-04-25 均熱処理装置 Expired - Fee Related JP4942385B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2006121014A JP4942385B2 (ja) 2006-04-25 2006-04-25 均熱処理装置
KR1020060130391A KR100841830B1 (ko) 2006-04-25 2006-12-19 균열 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006121014A JP4942385B2 (ja) 2006-04-25 2006-04-25 均熱処理装置

Publications (3)

Publication Number Publication Date
JP2007294688A JP2007294688A (ja) 2007-11-08
JP2007294688A5 true JP2007294688A5 (it) 2009-06-18
JP4942385B2 JP4942385B2 (ja) 2012-05-30

Family

ID=38765006

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006121014A Expired - Fee Related JP4942385B2 (ja) 2006-04-25 2006-04-25 均熱処理装置

Country Status (2)

Country Link
JP (1) JP4942385B2 (it)
KR (1) KR100841830B1 (it)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5536224B2 (ja) * 2010-10-01 2014-07-02 東芝三菱電機産業システム株式会社 均熱処理装置
KR101683724B1 (ko) * 2016-03-21 2016-12-07 엠에스티코리아(주) 스팀 세정용 스팀 발생기

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63154964A (ja) * 1986-12-19 1988-06-28 Hitachi Ltd 探触子駆動装置
JPH0924322A (ja) * 1995-07-11 1997-01-28 Toray Ind Inc 基板加熱処理用均温プレート
JP3527032B2 (ja) * 1996-04-11 2004-05-17 三菱電機株式会社 均熱装置
TW452826B (en) * 1997-07-31 2001-09-01 Toshiba Ceramics Co Carbon heater
US5983644A (en) * 1997-09-29 1999-11-16 Applied Materials, Inc. Integrated bake and chill plate
JP3895498B2 (ja) * 1999-04-28 2007-03-22 古河スカイ株式会社 金属部材を接合したヒートプレート及びその製造方法
JP3624131B2 (ja) * 2000-01-19 2005-03-02 東京エレクトロン株式会社 基板熱処理装置
JP3589929B2 (ja) * 2000-02-22 2004-11-17 東京エレクトロン株式会社 加熱処理装置
KR100363062B1 (ko) * 2000-05-04 2002-12-02 한빛 세마텍(주) 웨이퍼 가열장치
JP2002023860A (ja) * 2000-07-12 2002-01-25 Komatsu Ltd 温度調整システム
JP3649127B2 (ja) * 2001-01-04 2005-05-18 東京エレクトロン株式会社 加熱処理装置
US6744020B2 (en) * 2001-01-04 2004-06-01 Tokyo Electron Limited Heat processing apparatus
JP3791432B2 (ja) * 2002-02-27 2006-06-28 住友電気工業株式会社 半導体製造用加熱装置
JP4129206B2 (ja) * 2003-07-01 2008-08-06 大日本スクリーン製造株式会社 熱処理装置
JP2006100461A (ja) * 2004-09-29 2006-04-13 Dainippon Screen Mfg Co Ltd 熱処理装置
KR101164186B1 (ko) * 2004-10-08 2012-07-10 후루카와 스카이 가부시키가이샤 히터 플레이트 및 히터 플레이트 제조방법

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