JP2007281597A - 圧電デバイス及びその製造方法 - Google Patents
圧電デバイス及びその製造方法 Download PDFInfo
- Publication number
- JP2007281597A JP2007281597A JP2006102096A JP2006102096A JP2007281597A JP 2007281597 A JP2007281597 A JP 2007281597A JP 2006102096 A JP2006102096 A JP 2006102096A JP 2006102096 A JP2006102096 A JP 2006102096A JP 2007281597 A JP2007281597 A JP 2007281597A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electronic component
- piezoelectric
- piezoelectric vibrator
- conductive pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 15
- 239000000758 substrate Substances 0.000 claims abstract description 175
- 239000000463 material Substances 0.000 claims description 30
- 238000000034 method Methods 0.000 claims description 16
- 238000005452 bending Methods 0.000 claims description 10
- 239000004020 conductor Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 description 13
- 239000011347 resin Substances 0.000 description 13
- 230000000694 effects Effects 0.000 description 10
- 230000002411 adverse Effects 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000005520 cutting process Methods 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 230000010355 oscillation Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 239000011889 copper foil Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 238000010295 mobile communication Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910000679 solder Inorganic materials 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16245—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Oscillators With Electromechanical Resonators (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006102096A JP2007281597A (ja) | 2006-04-03 | 2006-04-03 | 圧電デバイス及びその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006102096A JP2007281597A (ja) | 2006-04-03 | 2006-04-03 | 圧電デバイス及びその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007281597A true JP2007281597A (ja) | 2007-10-25 |
JP2007281597A5 JP2007281597A5 (enrdf_load_stackoverflow) | 2009-05-07 |
Family
ID=38682641
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006102096A Withdrawn JP2007281597A (ja) | 2006-04-03 | 2006-04-03 | 圧電デバイス及びその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2007281597A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010226397A (ja) * | 2009-03-23 | 2010-10-07 | Seiko Epson Corp | 圧電デバイス、電子機器および圧電デバイスの製造方法 |
JP2010226396A (ja) * | 2009-03-23 | 2010-10-07 | Seiko Epson Corp | 圧電デバイスおよび圧電デバイスの製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09172325A (ja) * | 1995-12-20 | 1997-06-30 | Daishinku Co | 表面実装型圧電発振器 |
JP2005244512A (ja) * | 2004-02-25 | 2005-09-08 | Toyo Commun Equip Co Ltd | 圧電発振器 |
-
2006
- 2006-04-03 JP JP2006102096A patent/JP2007281597A/ja not_active Withdrawn
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09172325A (ja) * | 1995-12-20 | 1997-06-30 | Daishinku Co | 表面実装型圧電発振器 |
JP2005244512A (ja) * | 2004-02-25 | 2005-09-08 | Toyo Commun Equip Co Ltd | 圧電発振器 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010226397A (ja) * | 2009-03-23 | 2010-10-07 | Seiko Epson Corp | 圧電デバイス、電子機器および圧電デバイスの製造方法 |
JP2010226396A (ja) * | 2009-03-23 | 2010-10-07 | Seiko Epson Corp | 圧電デバイスおよび圧電デバイスの製造方法 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4742938B2 (ja) | 圧電デバイス及びその製造方法 | |
KR100837453B1 (ko) | 압전 디바이스 | |
JP3841304B2 (ja) | 圧電発振器、及びその製造方法 | |
JP2001196488A (ja) | 電子部品装置及びその製造方法 | |
TW200414471A (en) | Semiconductor device and manufacturing method for the same | |
JP2005252335A (ja) | 集積回路装置およびその製造方法 | |
KR20010020699A (ko) | 전자 부품 | |
JP2008005471A (ja) | 圧電発振器およびその製造方法 | |
JP5056885B2 (ja) | 集積回路装置 | |
JP2006074736A (ja) | 圧電発振器およびその製造方法 | |
JP2007243536A (ja) | 圧電デバイス及びその製造方法 | |
JP2012134792A (ja) | 表面実装型圧電発振器 | |
JP2007281597A (ja) | 圧電デバイス及びその製造方法 | |
JP2007013444A (ja) | 圧電振動デバイス及びその製造方法 | |
JP5252007B2 (ja) | 電子部品の製造方法 | |
JP2005341045A (ja) | 圧電発振器 | |
JP2008259004A (ja) | 圧電デバイスおよびその製造方法 | |
JP3760622B2 (ja) | 圧電デバイス | |
JP2008205672A (ja) | 圧電デバイスおよび電子部品モジュール | |
JP5071035B2 (ja) | 圧電デバイス | |
JP2008311347A (ja) | 半導体モジュール及びその製造方法 | |
JP2005318524A (ja) | 圧電発振器とその製造方法 | |
JP2008010922A (ja) | 圧電発振器 | |
JP2013026949A (ja) | 圧電デバイス、圧電デバイスの製造方法 | |
JP2009218783A (ja) | 圧電デバイス |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090323 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20090323 |
|
A711 | Notification of change in applicant |
Free format text: JAPANESE INTERMEDIATE CODE: A712 Effective date: 20110729 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20110729 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110819 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20111025 |
|
A761 | Written withdrawal of application |
Free format text: JAPANESE INTERMEDIATE CODE: A761 Effective date: 20111206 |