JP2007271456A - Thermocouple fixture and temperature control device for object of temperature measurement - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a thermocouple fixture and a temperature control device for object of temperature measurement, allowing mounting of a workpiece above a thermocouple, fixed to an object of temperature measurement, and facilitating replacement of the thermocouple. <P>SOLUTION: A heat conducting part (3n1) is inserted into a through hole (2n), provided in the object of temperature measurement (1), and is provided with a hole (3n3) as a holding part for the thermocouple (4n) and a plurality of elastically deformable leg parts (3n2); and the leg parts (3n2) are inserted into the through-hole (2n) to allow the heat conducting part (3n1) to be supported by the through-hole (2n) by their elastic force, thereby fixing the thermocouple (4n) to the object of temperature measurement (1). <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  TECHNICAL FIELD The present invention relates to a thermocouple fixture and a temperature control device for an object to be measured, and more particularly, to a fixture for fixing a thermocouple to an object to be measured, and to the object to be measured using the fixture. The present invention relates to a temperature control device that controls the temperature of a temperature-measured object based on a detected value of a thermocouple.

Conventionally, screwing or welding has been used for fixing a thermocouple (specifically, a strand of a coated thermocouple) to an object to be measured (temperature measurement target) (see, for example, Patent Document 1). In addition, the thermocouple is fixed to the object to be measured by using an adhesive, tape, or soldering.
JP-A-9-33360 (paragraphs 0012 to 0015, FIGS. 1 to 3)

  As shown in FIG. 2 of Patent Document 1 above, when the thermocouple is screwed to the object to be measured, the screw head protrudes from the surface of the object to be measured. There is a problem that the object to be heated) cannot be placed. This problem is also valid when a thermocouple is fixed on the surface of the object to be measured by adhesive, tape, or soldering. Further, when welding or an adhesive is used, there is a problem that it is difficult to replace the thermocouple. Problems related to the placement of these workpieces and the exchange of thermocouples are particularly noticeable when a plurality of thermocouples are attached to the object to be measured.

  Accordingly, the object of the present invention is to solve the above-mentioned problems, and to place a work on the upper part of the thermocouple fixed to the temperature measurement object, and to make it possible to easily replace the thermocouple. It is an object of the present invention to provide a fixture and a temperature control device for an object to be measured.

  In order to solve the above-described problems, in the thermocouple fixture according to the present invention, the heat conduction part inserted into the hole provided in the object to be measured and the thermoelectric provided in the heat conduction part. A pair of holding portions and a plurality of elastically deformable feet continuously formed on the heat conducting portion, and inserting the feet into the hole portion and elastically deforming the heat conducting portion. The thermocouple is fixed to the object to be measured by being supported in the hole.

  Here, it is preferable that the foot portion is made of a metal material whose annealing temperature is higher than the target temperature of the object to be measured.

  Further, in the thermocouple fixture according to the present invention, a tapered heat conducting part inserted into and fitted into a tapered through hole provided in the object to be measured, and the heat conducting part are provided. And a thermocouple holding part, and the thermocouple is fixed to the temperature-measured object by inserting the heat conducting part into the through hole.

  Further, in the thermocouple fixture according to the present invention, a through hole with a countersunk hole provided in the object to be measured provided in the object to be measured or a heat conducting part inserted only in the countersunk hole; And a thermocouple holding part provided in the heat conduction part, and the thermocouple is fixed to the object to be measured by inserting the heat conduction part into the through hole with counterbore or the counterbore hole. It is characterized by that.

  Further, in the temperature control device for a temperature-measured object according to the present invention, a plurality of thermocouples are fixed to the temperature-measured object using a plurality of the above-described fixtures, and the plurality of thermocouples Average value calculating means for calculating an average value of the detected values, target temperature setting means for setting a target temperature of the temperature-measured object according to a user's operation, the calculated average value and the set target temperature And a temperature control means for controlling the temperature of the object to be measured based on the temperature.

  In the thermocouple fixture according to the present invention, a thermocouple holding portion and a plurality of elastically deformable feet are inserted into a heat conducting portion inserted into a hole provided in the object to be measured. Since the thermocouple is fixed to the object to be measured by inserting the foot part into the hole part and supporting the heat conducting part in the hole part by its elastic force, Fixing tools (heat conduction part and foot part) do not protrude from the surface of the temperature measurement object, so that the workpiece can be placed on the upper part of the thermocouple fixed to the temperature measurement object. Moreover, since the fixing tool is fixed to the temperature-measured object by the elastic force of the foot, the exchanging operation of the thermocouple can be easily performed.

  If the feet are made of a metal material whose annealing temperature is higher than the target temperature of the object to be measured, the Young's modulus will be the initial value (value at room temperature) if the feet are heated to normal temperature. Return to. Accordingly, the fixture can be more stably fixed by the temperature measurement object.

  Further, in the thermocouple fixture according to the present invention, the thermocouple holding portion is inserted into the tapered heat conducting portion which is inserted into and fitted into the tapered through hole provided in the temperature-measured object. Since the thermocouple is fixed to the object to be measured by providing and inserting the heat conducting part into the through hole, a fixture (heat conducting part) protrudes from the surface of the object to be measured. Therefore, it is possible to place the workpiece on the upper part of the thermocouple fixed to the object to be measured. In addition, since the thermocouple is fixed to the object to be measured by inserting the fitting into the through hole and fitting together, it is possible to easily replace the thermocouple.

  Further, in the thermocouple fixture according to the present invention, a thermocouple holding part is provided in a through hole with a countersunk hole provided in a temperature-measured object or a heat conduction part inserted only in the countersunk hole. Since the thermocouple is fixed to the object to be measured by inserting the heat conducting portion into the through hole with counterbore or the counterbore, the fixture (heat Therefore, the work can be placed on top of the thermocouple fixed to the object to be measured. In addition, since the thermocouple is fixed to the object to be measured by inserting the fixing tool into the through-hole with counterbore or the counterbore, the thermocouple can be easily replaced.

  Further, in the temperature control device for a temperature-measured object according to the present invention, a plurality of thermocouples are fixed to the temperature-measured object using a plurality of the above-described fixtures, and the plurality of thermocouples Average value calculating means for calculating an average value of the detected values, target temperature setting means for setting a target temperature of the temperature-measured object according to a user's operation, the calculated average value and the set target temperature Temperature control means for controlling the temperature of the object to be measured based on the temperature measuring region of the object to be measured (fixed position of each thermocouple) The average temperature in the region defined by (1) can be accurately controlled to the target temperature.

  BEST MODE FOR CARRYING OUT THE INVENTION The best mode for carrying out a thermocouple fixture and a temperature measuring device for a temperature measurement object according to the present invention will be described below with reference to the drawings.

  FIG. 1 is a plan view showing a thermocouple fixture and an object to be measured according to the first embodiment of the present invention. 2 is a cross-sectional view taken along line II-II in FIG.

  In FIG. 1 and FIG. 2, the code | symbol 1 shows a to-be-measured object. The object to be measured 1 is a carbon heater, for example, and its target temperature (target maximum temperature) is set to about 500 ° C. The object to be measured 1 is provided with a plurality of through holes (holes). In this embodiment, the total number of through-holes is 5, which are denoted by reference numerals 21, 22, 23, 24, and 25, respectively.

  A thermocouple fixture 31, 32, 33, 34, 35 is fixed to each of the through holes 21, 22, 23, 24, 25, and each of the fixtures 31, 32, 33, 34, 35 is fixed. The thermocouples 41, 42, 43, 44, 45 are held (attached). Each thermocouple 41, 42, 43, 44, 45 is a coated thermocouple, and the wire is held by each fixture 31, 32, 33, 34, 35. As described above, the plurality of thermocouples 41, 42, 43, 44, 45 are fixed to the temperature-measured object 1 using the plurality of fixtures 31, 32, 33, 34, 35.

  A workpiece (heating object) 5 is placed on the top of the object to be measured 1. The workpiece 5 is made of, for example, a metal material, and in the present embodiment, the workpiece 5 has a rectangular shape in plan view. Among the through holes 21, 22, 23, 24, 25, the through hole 21 is provided so as to be located at the center of the work 5 mounting position. Further, the remaining through holes 22, 23, 24, 25 are provided around the workpiece 5 (more specifically, near the corners).

  Here, the fixtures 31, 32, 33, 34, and 35 will be described in detail. In addition, since each fixing tool is the same shape, in the following description, they are named generically by the code | symbol 3n. Further, the through holes 21, 22, 23, 24, and 25 are collectively referred to as 2n, and the thermocouples 41, 42, 43, 44, and 45 are collectively referred to as 4n.

  FIG. 3 is a plan view of the fixture 3n, and FIG. 4 is a side view of the fixture 3n. As shown in FIGS. 3 and 4, the fixing tool 3n includes a heat conducting portion 3n1 and a plurality of elastically convertible (for example, four) pieces formed continuously (integrally) above the heat conducting portion 3n1. Foot part 3n2. The heat conducting portion 3n1 has a circular shape in plan view, and a hole 3n3 (holding portion) is provided at the center thereof. That is, the heat conducting portion 3n1 has a cylindrical shape.

  The diameter of the heat conducting portion 3n1 is set to be approximately the same as the diameter of the through hole 2n. For example, when the diameter of the through hole 2n is 3.5 mm, the diameter of the heat conducting portion 3n1 is set to 3.4 mm. The diameter of the hole 3n3 is set to a value that allows the strand of the thermocouple 4n to be inserted.

  The foot portion 3n2 is formed by forming a cross groove on the top of the heat conducting portion 3n1. Further, a tapered portion 3n4 is provided on the lower surface edge portion of the heat conducting portion 3n1. When the height of the heat conducting portion 3n1 is α, the height β of the foot portion 3n2 is set to about twice as large as α.

  Next, with reference to FIG. 5 and FIG. 6, a fixing method of the fixing tool 3n to the through hole 2n will be described. 5 and 6 are cross-sectional views of the object to be measured 1 and the fixture 3n.

  First, as shown in FIG. 5, the thermocouple 4 n is inserted into the through hole 2 n from the lower side of the object to be measured 1. And above the to-be-measured object 1, the thermocouple 4n is inserted into the hole 3n3 from the lower surface side of the fixture 3n. The thermocouple 4n inserted through the hole 3n3 is fixed to the heat conducting unit 3n1 by caulking the heat conducting unit 3n1. Next, each foot portion 3n2 of the fixture 3n is spread outward, and the distance D between the tip edge portions of each foot portion 3n2 is made larger than the diameter of the through hole 2n (for example, in the through hole 2n of 3.5 mm). On the other hand, the distance D is 4 mm). The order of fixing the thermocouple 4n to the heat conducting portion 3n1 and increasing the diameter of each foot portion 3n2 may be reversed.

  And as shown in FIG. 6, the fixing tool 3n is inserted in the through-hole 2n from the lower surface side (the lower surface side of the heat conduction part 3n1). As described above, since the tapered portion 3n4 is provided on the lower surface edge of the heat conducting portion 3n1, it is easy to insert the fixture 3n into the through hole 2n.

  When the insertion of the heat conducting portion 3n1 into the through hole 41 is completed, the foot portion 3n2 is then inserted while elastically deforming along the inner surface of the through hole 2n (distance D is reduced in diameter). The fixing tool 3n (heat conducting portion 3n1) is supported on the inner surface of the through hole 2n by the elastic force (spring property) of the foot portion 3n2. Thereby, the thermocouple 4n is fixed to the temperature-measured object 1. Note that the total height of the fixture 21 (α + β described above) is set to be the same as or slightly smaller than the thickness of the object to be measured 1. Accordingly, the fixture 3n does not protrude from the surface of the object to be measured 1 (the side on which the workpiece 5 is placed). The heat of the to-be-measured object 1 is transmitted to the thermocouple 4n through the heat conducting portion 3n1 and the foot portion 3n2 of the fixture 3n.

Here, selection of the material of the fixture 3n will be described. In selecting the material for the fixture 3n, the following five points should be considered, for example.
1) Tensile strength 2) Young's modulus (longitudinal elastic modulus)
3) Thermal expansion coefficient 4) Annealing temperature 5) Thermal conductivity The above five points will be described below.

1) About tensile strength In order to support the fixture 3n in the through hole 2n by the elastic force (spring property) of the foot 3n2, a material having a high elastic limit should be selected. Since the elastic limit has a substantially parallel relationship with the tensile strength, a metal material having a high tensile strength is selected.

2) About Young's modulus When Young's modulus is small (that is, when deformation against stress is large), even if the elastic limit (tensile strength) is large, the weight 3n is supported when the fixture 3n is attached to the object to be measured 1. There is a possibility of falling off without being able to finish. Therefore, a metal material having a large Young's modulus is selected.

3) Thermal expansion coefficient Since the fixture 3n is inserted into the through-hole 2n provided in the object to be measured 1, if the coefficient of thermal expansion is large, an unnecessary stress is applied to the object to be measured 1 when the temperature rises. There is a risk of acting. Therefore, a metal material having a low coefficient of thermal expansion should be selected.

4) Annealing temperature Generally, when a metal material is heated and annealed (softened), the tensile strength is significantly reduced. In addition, although the Young's modulus decreases as the metal material is heated, the Young's modulus value returns to the initial value when the temperature returns to room temperature within the temperature range below the annealing temperature. Therefore, a metal material whose annealing temperature is higher than the target temperature of the object to be measured 1 (target maximum temperature; 500 ° C. in this embodiment) should be selected.

5) About thermal conductivity The heat of the to-be-measured object 1 is transmitted to the thermocouple 4n through the heat conduction part 3n1 (and the foot part 3n2) of the fixture 3n. Therefore, when selecting the material of the fixture 3n, the thermal conductivity is considered as one of the items that should be taken into consideration. However, when the diameter of the fixture 3n is about 3 mm as in the present embodiment and the target temperature of the object to be measured 1 is about 500 ° C., the detection value of the thermocouple 4n can be obtained with a general metal material. The inventors have found through experiments that the thermal conductivity has little effect.

  From the above conditions, in this embodiment, the fixture 3n is made of a nickel iron alloy, more specifically, a 36% nickel iron alloy. If the material of the fixture is, for example, copper with an emphasis on thermal conductivity, the tensile strength is about 310 MPa and the Young's modulus is about 130 GPa. On the other hand, the tensile strength and Young's modulus of the 36% nickel iron alloy are 411 MPa and 142 GPa, respectively, which exceeds that of copper. In addition, since the annealing temperature of the 36% nickel iron alloy is 600 ° C., the condition is sufficiently satisfied even with respect to 500 ° C. which is the target temperature of the object to be measured 1.

  In addition, when the target temperature of the object to be measured is 300 ° C. or less, for example, copper having high thermal conductivity may be used. Copper is unsuitable for high temperature measurement because the annealing temperature is about 350 ° C., but is suitable for measurement at a relatively low temperature because of its high thermal conductivity. On the other hand, if the target temperature of the object to be measured is, for example, about 600 to 1000 ° C., it is preferable to use a copper tungsten alloy having an annealing temperature of about 1000 ° C., for example.

  Next, a temperature control device for a temperature-measured object according to the present invention will be described. In the temperature control device for a temperature-measured object according to the present invention, the thermocouples 41, 42, 43, which are fixed to the temperature-measured object 1 using the fixtures 31, 32, 33, 34, 35 described above. Based on the detected values of 44 and 45, the temperature control of the object to be measured 1 is performed.

  FIG. 7 is a block diagram showing the configuration of the apparatus. In addition, in FIG. 7, the to-be-measured object 1 is represented from the lower surface side.

  As shown in FIG. 7, the temperature control device includes a control unit 10 made of, for example, a microcomputer, a target temperature setting unit 11 connected to the control unit 10, and a display unit 12. Each thermocouple 41, 42, 43, 44, 45 fixed to the object to be measured 1 is connected to the control unit 10. In addition, terminals 1 a and 1 b are provided at both ends of the object to be measured 1, and the terminals 1 a and 1 b are connected to the control unit 10 through current lines 13 and 14.

  The target temperature setting unit 11 sets the target temperature Td according to the operation of the user (temperature measuring person). Describing in detail the setting of the target temperature Td, the user operates the target temperature setting unit 11 so that the target temperature Td and the time until the target temperature Td is reached (hereinafter referred to as “target temperature arrival time t1”), The time for maintaining the target temperature Td (hereinafter referred to as “target temperature maintenance time t2”) can be set (input). The target temperature Td, the target temperature arrival time t1, and the target temperature maintenance time t2 set by the target temperature setting unit 11 are input to the control unit 10.

  Each thermocouple 41, 42, 43, 44, 45 detects the temperature of each part of the object to be measured 1. The detection values of the thermocouples 41, 42, 43, 44, 45 are input to the control unit 10, respectively. The control unit 10 controls the temperature of the object to be measured 1 based on the inputs Td, t1, t2 from the target temperature setting unit 11 and the inputs from the thermocouples 41, 42, 43, 44, 45.

  FIG. 8 is a flowchart showing the temperature control process of the temperature-measured object 1 executed by the control unit 10.

  The flowchart of FIG. 8 will be described. First, in S1, an average value Tave of detection values of each thermocouple is calculated. That is, the average temperature of the temperature measurement region (region defined by the fixed position of each thermocouple) of the object to be measured 1 is calculated. In the present embodiment, since the thermocouples 41, 42, 43, 44, 45 are arranged directly under the work 5 or around the work 5, the process of S1 is performed in the temperature-measured object 1, This corresponds to calculating the average temperature of the region in contact with the workpiece 5.

  The thermocouple 41 is installed immediately below the work 5, whereas the remaining thermocouples 42, 43, 44, 45 are installed around the work 5, so that the thermocouple 41 and other thermocouples are installed. Then, a temperature difference occurs. Specifically, the detection value of the thermocouple 41 measuring the temperature immediately below the work 5 having a large amount of heat conduction to the work 5 is lower than the detection values of the other thermocouples 42, 43, 44, and 45. . Moreover, since the temperature of the object to be measured 1 tends to increase as it approaches the terminals 1a and 1b, the occurrence of the temperature difference described above is easily promoted.

Here, when the detection value of the thermocouple 41 is L and the detection values of the other thermocouples 42, 43, 44, and 45 are H, the average value Tave can be calculated by the following equation 1.
Tave = (4H + L) / 5 Formula 1

However, since the difference occurs between the detection value H and the detection value L as described above, when the average value Tave is calculated by the equation 1, the average value Tave is deviated from the detection value L (on the H side). Value). Therefore, when temperature control of the temperature-measured object 1 is performed based on the average value Tave, a part of the workpiece 5 (near the center) may be insufficiently heated. Therefore, in this embodiment, the average value Tave is calculated by the following equation 2.
Tave = {(ΣH / 4) + L} / 2 Equation 2

  Thereby, since the deviation between the average value Tave and the detected value L is reduced, it is possible to prevent a part of the work 5 from being insufficiently heated.

  If the explanation of the flowchart of FIG. 8 is continued, the process proceeds to S2, and it is determined whether or not the average value Tave exceeds the target temperature Td. As shown in FIG. 9, the target temperature Td is sequentially changed until the target temperature arrival time t1 elapses. Specifically, an intermediate Td is determined according to a temperature increase gradient (gradient of Td in FIG. 9) determined from the difference between the initial temperature T0 of the object to be measured 1 and the target temperature Td and the target temperature arrival time t1. The temperature is gradually increased toward the final Td (that is, the set target temperature). Here, the initial temperature T0 is an initial temperature of the object to be measured 1, and for example, an initial value of the average value Tave is used.

  When the result in S2 is positive, the current supplied to the temperature-measured object 1 is decreased in S3, and the average value Tave is decreased to the target temperature Td. On the other hand, when the result in S2 is negative, the program proceeds to S4, in which it is determined whether or not the average value Tave is lower than the target temperature Td. When the result is affirmative in S4, the current supplied to the object to be measured 1 is increased in S5 to increase the average value Tave to the target temperature Td, while when the result is negative in S4 (that is, Tave and Td are equal to each other). If so, the current is maintained at S6.

  Next, in S7, it is determined whether or not the target temperature maintenance time t2 has elapsed. When the result in S7 is negative, the process returns to S1. On the other hand, when the result in S7 is affirmative, the process proceeds to S8, and the supply of current to the temperature-measured object 1 is stopped (the heating of the workpiece 5 is finished).

  Returning to the description of FIG. 7, the control unit 10 calculates the average value Tave calculated as described above, the detected values of the thermocouples 41, 42, 43, 44, and 45, and the elapsed time (remaining time) of t 1 and t 2. Time), the target temperature Td, and the like are displayed on the display unit (display) 12. The user can recognize whether or not a desired overheat treatment has been performed on the workpiece 5 by confirming the display.

  As described above, in the thermocouple fixture according to the first embodiment of the present invention, the heat conduction part 3n1 inserted into the through hole (hole part) 2n provided in the object to be measured 1 A hole 3n3 serving as a holding portion of the thermocouple 4n and a plurality of elastically deformable feet 3n2 are provided. The feet 3n2 are inserted into the through holes 2n, and the heat conducting portions 3n1 are inserted into the through holes by the elastic force (spring property). Since the thermocouple 4n is fixed to the object to be measured 1 by supporting it to 2n, the fixture 3n does not protrude from the surface of the object to be measured 1, so The workpiece 5 can be placed on top of the fixed thermocouple 41.

  Furthermore, since the fixture 3n is fixed to the temperature-measured object 1 by the elastic force of the foot 3n2, the exchanging operation of the thermocouple 4n (removal of the fixture 3n from the temperature-measured object 1) can be easily performed. it can.

  In addition, since the foot 3n2 (fixing tool 3n) is made of a metal material whose annealing temperature is higher than the target temperature Td of the object 1 to be measured, even if the foot 3n2 is heated, it returns to room temperature. Young's modulus returns to the initial value (value at normal temperature). Therefore, the fixture 3n can be more stably fixed by the temperature-measured object 1.

  By the way, when the thermocouple is fixed using the tapes mentioned as one of the prior arts, if the temperature is measured repeatedly, there is a possibility that the adhesive force is reduced and the temperature measurement accuracy of the thermocouple is lowered. Moreover, when fixing a thermocouple by soldering, the material of a to-be-measured object is restricted. However, in the present invention, since the thermocouple 4n is fixed to the object to be measured 1 by inserting the fixing tool 3n into the through hole 2n, the measurement as seen when using tapes is used. The temperature accuracy does not deteriorate, and the thermocouple 4n can be fixed to the measured object 1 regardless of the material of the measured object 1.

  Moreover, in the temperature control apparatus for a temperature-measured object according to the first embodiment of the present invention, a plurality of thermocouples 4n are fixed to the temperature-measurement 1 using a plurality of fixtures 3n. The average value calculating means (control unit 10) for calculating the average value Tave of the detected values of each thermocouple 4n, and the target temperature setting means (target temperature for setting the target temperature Td of the temperature-measured object 1 according to the user's operation) Since the setting unit 11) and temperature control means (control unit 10) for controlling the temperature of the object to be measured 1 based on the average value Tave and the target temperature Td are provided, the temperature of the object to be measured 1 is measured. The average temperature in the temperature region (region defined by the fixed position of each thermocouple 4n) can be accurately controlled to the target temperature Td. Therefore, a desired heat treatment can be performed on the workpiece 5 regardless of the shape and heat capacity of the workpiece 5.

  In the first embodiment, the number of the foot portions 3n2 is four. However, for example, as shown in FIG. 10 and FIG. 11, it may be two or three, or any other number. Good.

  In the above description, the fixture 3n is inserted from above the object to be measured 1, but it may be inserted from below. In this case, as shown in FIG. 12, the vertical direction of the fixture 3n is reversed from the case where the fixture 3n is inserted from above the object to be measured (that is, the foot 3n2 is lower than the heat conducting unit 3n1). To be arranged). Then, below the object to be measured 1, the thermocouple 4n is inserted into the hole 3n3 from the lower surface side (foot 3n2 side) of the fixture 3n, and the heat conducting part 3n1 is caulked to thereby connect the thermocouple 4n to the heat conducting part. After fixing to 3n1, each foot 3n2 is spread outward. It is to be noted that the order of fixing the thermocouple 4n to the heat conducting portion 3n1 and increasing the diameter of each foot portion 3n2 may be reversed as described above.

  Then, as shown in FIG. 13, the fixture 3n is inserted into the through hole 2n from the upper surface side (the heat conducting portion 3n1 side), and the fixture 3n is inserted into the through hole 2n by the elastic force (spring property) of the foot portion 3n2. Support the inner surface. Thus, by inserting the fixture 3n from the lower side of the object to be measured 1, it is not necessary to insert the thermocouple 4n into the through hole 2n in advance as compared with the case of inserting from the upper side, and the work is further simplified. Is done. Further, when the fixture 3n is inserted from the lower side of the object to be measured 1, it is not always necessary to insert the fixture 3n into the through-hole, and a hole portion (recessed portion: indicated by reference numeral 15) as shown in FIG. There may be.

  Next, a thermocouple fixture according to a second embodiment of the present invention will be described with reference to FIG. FIG. 15 is a cross-sectional view of the object to be measured and the fixture.

  As shown in the figure, in the second embodiment, the temperature-measured object 1 is provided with a tapered through hole 2bn. The taper of the through hole 2bn is formed so that the diameter of the through hole 2bn decreases from the upper surface to the lower surface of the object to be measured 1.

  A fixing tool 3bn made of a metal material is inserted into the through hole 2bn. The fixture 3bn as a whole consists of a heat conducting part 3bn1 that conducts the heat of the object to be measured 1 to the thermocouple 4n, and a hole 3bn3 that is a holding part for the thermocouple 4n is provided at the center. After being inserted into the hole 3bn3, the thermocouple 4n is attached to the heat conducting unit 3bn1 by caulking the heat conducting unit 3bn1. The subscript “n” of the through-hole 2bn, the fixture 3bn, and the thermocouple 4n means that a plurality of them are provided in the object to be measured 1 as in the first embodiment.

  As illustrated, the heat conducting portion 3bn1 is formed in a tapered shape corresponding to the through hole 2bn. That is, the heat conducting portion 3bn1 is formed so that its diameter increases from the lower surface toward the upper surface. Therefore, by inserting the heat conducting portion 3bn1 (fixing tool 3bn) into the through-hole 2bn from above the object to be measured 1, the fixing tool 3bn is fitted into the through-hole 2bn, and the thermocouple 4n is attached to the object to be measured 1. Fixed. The height of the fixture 3bn is set to be the same as or slightly smaller than the thickness of the object to be measured 1.

  As described above, in the thermocouple fixture 3bn according to the second embodiment of the present invention, the taper-shaped fitting that is inserted and fitted into the tapered through-hole 2bn provided in the object 1 to be measured. Since the heat conducting portion 3bn1 is provided with a hole 3bn3 which is a holding portion of the thermocouple 4n, and the heat conducting portion 3bn3 is inserted into the through hole 2bn, the thermocouple 4n is fixed to the object to be measured 1. The fixture 3bn does not protrude from the surface of the temperature-measuring object 1, so that a work (not shown in FIG. 15) can be placed on the thermocouple 1 fixed to the object-to-be-measured 1.

  In addition, since the thermocouple 4n is fixed to the temperature-measured object 1 by inserting the fitting 3bn into the through-hole 2bn and fitting together, it is easy to replace the thermocouple 4n (remove the fixing tool 3bn). It can be carried out. Furthermore, the temperature measurement accuracy of the thermocouple 4n does not decrease even when the temperature is measured repeatedly, and the thermocouple 4n can be fixed to the temperature-measured object 1 regardless of the material of the object 1 to be measured.

  Further, the through hole 2bn is formed in a tapered shape whose diameter is reduced from the upper surface to the lower surface of the object to be measured 1, and the heat conduction portion 3bn1 is increased in diameter from the lower surface to the upper surface. Therefore, the fixture 3bn can be prevented from falling from the temperature-measured object 1.

  Even when the thermocouple 4n is fixed to the temperature-measured object 1 using the fixing tool 3bn, the configuration of the temperature control device is the same as that of the first embodiment, and the description thereof is omitted.

  Next, a thermocouple fixture according to a third embodiment of the present invention will be described with reference to FIGS. 16 and 17. 16 and 17 are cross-sectional views of the object to be measured and the fixture.

  As shown in FIG. 16, in the third embodiment, the object to be measured 1 is provided with a through hole 2 cn with a counterbore hole. In other words, the to-be-measured object 1 is provided with a step-like through-hole whose diameter gradually decreases from the upper surface to the lower surface of the to-be-measured object 1.

  A fixing tool 3cn made of a metal material is inserted into the counterbored hole 2cn1 of the counterbored through hole 2cn. The fixture 3cn as a whole consists of a heat conducting part 3cn1 that conducts the heat of the object to be measured 1 to the thermocouple 4n, and a hole 3cn3 that is a holding part of the thermocouple 4n is provided at the center. The thermocouple 4n is attached to the heat conduction part 3cn1 by being inserted into the hole 3cn3 and then caulking the heat conduction part 3cn1. The subscript “n” of the through hole 2cn, the fixture 3cn, and the thermocouple 4n means that a plurality of them are provided as in the previous embodiment.

  By inserting the heat conducting portion 3cn1 (fixing tool 3cn) into the counterbore hole 2cn1 from above the object to be measured 1, the fixing tool 3cn is fitted into the counterbore hole 2cn1, and the thermocouple 4n is fixed to the object to be measured 1. The The height of the fixture 3cn is set to be the same as or slightly smaller than the depth of the counterbore hole 2cn1.

  In addition, as shown in FIG. 17, the fixture 3 cn (heat conducting portion 3 cn 1) is T-shaped in cross-section (in other words, a stepped shape whose diameter gradually decreases from the upper surface to the lower surface of the fixture 3 cn. And the fixing tool 3cn may be inserted into the entire region of the through hole 2cn with counterbore.

  As described above, in the thermocouple fixture 3cn according to the third embodiment of the present invention, it is inserted only into the through hole 2cn with counterbore provided in the object to be measured 1 or the counterbore hole 2cn1. A hole 3cn3 serving as a holding part of the thermocouple 4n is provided in the heat conducting part 3cn1, and the thermocouple 4n is fixed to the temperature-measured object 1 by inserting the heat conducting part 3cn1 into the through hole 2cn with counterbore or the counterbored hole 2cn1. Since the fixture 3 cn (heat conduction part 3 cn 1) does not protrude from the surface of the object to be measured 1, the workpiece (FIG. 16) is fixed on the thermocouple 4 n fixed to the object to be measured 1. And (not shown in FIG. 17) can be placed.

  Further, since the thermocouple 4n is fixed to the object to be measured 1 by inserting the fixing tool 3cn into the through hole 2cn with counterbore or the counterbored hole 2cn1, replacement work of the thermocouple 4n (removal of the fixing tool 3cn) ) Can be easily performed. Furthermore, the temperature measurement accuracy of the thermocouple 4n does not decrease even when the temperature is measured repeatedly, and the thermocouple 4n can be fixed to the temperature-measured object 1 regardless of the material of the object 1 to be measured. Further, the fixture 3cn does not fall from the temperature-measured object 1.

  Even when the thermocouple 4n is fixed to the temperature-measured object 1 using the fixing tool 3cn, the configuration of the temperature control device is the same as that of the first embodiment, and thus the description thereof is omitted.

  Further, in the third embodiment, a taper may be provided on the lower surface edge of the fixture 3cn so that the fixture 3cn can be easily inserted into the through hole 2cn with counterbore. Furthermore, the number of steps of the counterbore through-hole 2cn and the fixture 3cn is not necessarily limited to the two illustrated steps, and may be three or more.

  Further, in the first to third embodiments, five through holes are provided in the object to be measured 1 and five thermocouples are fixed, but the number of through holes provided in the object to be measured is The position (the number of thermocouples attached and the attachment position) may be changed as appropriate according to the size and shape of the workpiece. Moreover, although the carbon heater was mentioned as an example as the to-be-measured object 1, the temperature measurement object is not limited thereto. Furthermore, although the specific name of the material of the fixture was given in the first embodiment, these are merely examples, and may be appropriately changed according to the application.

  Moreover, when attaching a plurality of thermocouples to the object to be measured, the fixture according to the present invention and the conventional fixing means may be used in combination. For example, the fixing device according to the present invention may be used to attach the thermocouple located directly under the workpiece, and the thermocouple not located directly under the workpiece may be fixed by conventional screwing or the like.

It is a top view which shows the fixture of a thermocouple which concerns on 1st Example of this invention, and a to-be-measured object. It is the II-II sectional view taken on the line of FIG. It is a top view of the fixing tool shown in FIG. It is a side view of the fixing tool shown in FIG. It is sectional drawing of the to-be-measured object and fixing tool shown in FIG. It is sectional drawing of the to-be-measured object and fixing tool shown in FIG. It is a block diagram showing the temperature control apparatus of the to-be-measured object which concerns on 1st Example of this invention. It is a flowchart showing the process of the temperature control performed with the control part shown in FIG. It is explanatory drawing showing transition of the target temperature used by the process of the flowchart of FIG. It is a top view showing the modification of the fixing tool shown in FIG. It is a top view showing the modification of the fixing tool shown in FIG. It is sectional drawing of the to-be-measured object and a fixture showing the modification of the attachment direction of the fixture shown in FIG. It is sectional drawing of the to-be-measured object and a fixture showing the modification of the attachment direction of the fixture shown in FIG. It is sectional drawing of the to-be-measured object and a fixture showing the modification of the through-hole shown in FIG. It is sectional drawing of a to-be-measured object and a fixture showing the thermocouple fixture which concerns on 2nd Example of this invention. It is sectional drawing of a to-be-measured object and a fixture showing the thermocouple fixture which concerns on 3rd Example of this invention. It is sectional drawing of a to-be-measured object and a fixture showing the modification of the fixture shown in FIG.

Explanation of symbols

  1: object to be measured, 2n (21, 22, 23, 24, 25): through hole (hole), 2bn: through hole (according to the second embodiment), 2cn: (according to the third embodiment) Through hole with counterbore hole, 2cn1: counterbore hole, 3n (31, 32, 33, 34, 35): fixture, 3bn: fixture (according to second embodiment), 3cn: (according to third embodiment) 3n1: heat conduction part, 3bn1: heat conduction part (according to the second example), 3cn1: heat conduction part (according to the third example), 3n2: foot part, 3n3: hole (holding part), 3bn3: hole (holding portion) (according to the second embodiment), 3cn3: hole (holding portion) (according to the third embodiment), 4n (41, 42, 43, 44, 45): thermocouple, 5: 10: Control unit (average value calculating means, temperature control means), 11: Target temperature setting unit (target) Degree setting means)

Claims (5)

A heat conduction part to be inserted into a hole provided in the object to be measured;
A thermocouple holding part provided in the heat conducting part;
A plurality of elastically deformable legs formed continuously with the heat conducting part;
The thermocouple is fixed to the object to be measured by inserting the foot portion into the hole portion and supporting the heat conducting portion in the hole portion by its elastic force. Twin fixture. A tapered heat-conducting portion inserted into a tapered through-hole provided in the object to be measured;
A thermocouple holding part provided in the heat conducting part;
And fixing the thermocouple to the object to be measured by inserting the heat conducting portion into the through hole. A through-hole with a counterbore provided in the object to be measured or a heat conduction part inserted only in the counterbore,
A thermocouple holding part provided in the heat conducting part;
And fixing the thermocouple to the object to be measured by inserting the heat conducting part into the through hole with counterbore or the counterbore.   2. The thermocouple fixture according to claim 1, wherein the foot portion is made of a metal material having an annealing temperature higher than a target temperature of the object to be measured. A temperature control device for an object to be measured using the thermocouple fixture according to any one of claims 1 to 4,
A plurality of the thermocouples are fixed to the object to be measured using a plurality of the fixtures, and the temperature control device includes:
An average value calculating means for calculating an average value of detection values of the plurality of thermocouples;
Target temperature setting means for setting a target temperature of the object to be measured in accordance with a user operation;
Temperature control means for controlling the temperature of the temperature-measured object based on the calculated average value and the set target temperature;
A temperature control device for an object to be measured, comprising:

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