JP2007248064A - 半導体素子検査装置 - Google Patents
半導体素子検査装置 Download PDFInfo
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- JP2007248064A JP2007248064A JP2006068050A JP2006068050A JP2007248064A JP 2007248064 A JP2007248064 A JP 2007248064A JP 2006068050 A JP2006068050 A JP 2006068050A JP 2006068050 A JP2006068050 A JP 2006068050A JP 2007248064 A JP2007248064 A JP 2007248064A
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- pad
- probe
- bonding pad
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/4813—Connecting within a semiconductor or solid-state body, i.e. fly wire, bridge wire
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/484—Connecting portions
- H01L2224/48463—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond
- H01L2224/48465—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a ball bond the other connecting portion not on the bonding area being a wedge bond, i.e. ball-to-wedge, regular stitch
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/4917—Crossed wires
Landscapes
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
【解決手段】プローブが実装された基板上に設けられた、上記プローブに接続された第1のボンディングパッドと、入力側あるいは出力側の第2のボンディングパッドを導電線により接続し、上記導電線によりボンディングパッド間を空中配線する。
【選択図】図1
Description
2 メイン基板
3 第1のボンディングパッド
4 第2のボンディングパッド
5 第3のボンディングパッド
6 プローブ
7 Auワイヤ
8 Auワイヤ
9 中間パッド
10 第4のボンディングパッド
Claims (5)
- プローブが実装された基板上に設けられた、上記プローブに接続された第1のボンディングパッドと、入力側あるいは出力側の第2のボンディングパッドを導電線により接続し、上記導電線によりボンディングパッド間を空中配線することを特徴とする半導体素子検査装置。
- プローブが実装された基板上に設けられた、上記プローブに接続された第1のボンディングパッドと、入力側あるいは出力側の第2のボンディングパッドの間に中間パッドを設け、上記パッド間を各々導電線により接続し、上記導電線により上記パッド間を空中配線することを特徴とする半導体素子検査装置。
- プローブが実装された基板上に設けられた、上記プローブに接続された第1のボンディングパッドと、入力側あるいは出力側の第2のボンディングパッドの間に中間パッドを設け、上記プローブに接続された上記第1のボンディングパッドと入力側あるいは出力側の上記第2のボンディングパッドを1本の導電線により接続し、1本の上記導電線をその中間部で上記中間パッドに接続させ、上記1本の導電線により各パッド間を空中配線することを特徴とする半導体素子検査装置。
- 上記導電線が互いに立体交差していることを特徴とする請求項1から3のいずれかに記載の半導体素子検査装置。
- 上記導電線がウェッジボンド、リボンボンド、ボールボンドのいずれで上記各パッドに接続されていることを特徴とする請求項1から4のいずれかに記載の半導体素子検査装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006068050A JP2007248064A (ja) | 2006-03-13 | 2006-03-13 | 半導体素子検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006068050A JP2007248064A (ja) | 2006-03-13 | 2006-03-13 | 半導体素子検査装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2007248064A true JP2007248064A (ja) | 2007-09-27 |
Family
ID=38592562
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006068050A Pending JP2007248064A (ja) | 2006-03-13 | 2006-03-13 | 半導体素子検査装置 |
Country Status (1)
Country | Link |
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JP (1) | JP2007248064A (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0472626U (ja) * | 1990-11-05 | 1992-06-26 | ||
JP2001135668A (ja) * | 1999-11-02 | 2001-05-18 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP2004309441A (ja) * | 2003-02-18 | 2004-11-04 | Yamaha Corp | プローブヘッド及びその組立方法並びにプローブカード |
JP2005518105A (ja) * | 2002-02-19 | 2005-06-16 | 株式会社アドバンテスト | シリコンフィンガーコンタクタを有するコンタクトストラクチャ |
US20060040417A1 (en) * | 2004-08-19 | 2006-02-23 | Formfactor, Inc. | Method to build a wirebond probe card in a many at a time fashion |
-
2006
- 2006-03-13 JP JP2006068050A patent/JP2007248064A/ja active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0472626U (ja) * | 1990-11-05 | 1992-06-26 | ||
JP2001135668A (ja) * | 1999-11-02 | 2001-05-18 | Hitachi Ltd | 半導体装置およびその製造方法 |
JP2005518105A (ja) * | 2002-02-19 | 2005-06-16 | 株式会社アドバンテスト | シリコンフィンガーコンタクタを有するコンタクトストラクチャ |
JP2004309441A (ja) * | 2003-02-18 | 2004-11-04 | Yamaha Corp | プローブヘッド及びその組立方法並びにプローブカード |
US20060040417A1 (en) * | 2004-08-19 | 2006-02-23 | Formfactor, Inc. | Method to build a wirebond probe card in a many at a time fashion |
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