JP2007242848A5 - - Google Patents

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Publication number
JP2007242848A5
JP2007242848A5 JP2006062495A JP2006062495A JP2007242848A5 JP 2007242848 A5 JP2007242848 A5 JP 2007242848A5 JP 2006062495 A JP2006062495 A JP 2006062495A JP 2006062495 A JP2006062495 A JP 2006062495A JP 2007242848 A5 JP2007242848 A5 JP 2007242848A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006062495A
Other languages
Japanese (ja)
Other versions
JP2007242848A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006062495A priority Critical patent/JP2007242848A/ja
Priority claimed from JP2006062495A external-priority patent/JP2007242848A/ja
Priority to TW096102450A priority patent/TW200735373A/zh
Priority to KR1020070021808A priority patent/KR100879038B1/ko
Priority to CN200710085723.6A priority patent/CN101034659A/zh
Publication of JP2007242848A publication Critical patent/JP2007242848A/ja
Publication of JP2007242848A5 publication Critical patent/JP2007242848A5/ja
Withdrawn legal-status Critical Current

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JP2006062495A 2006-03-08 2006-03-08 基板の製造方法及び基板処理装置 Withdrawn JP2007242848A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006062495A JP2007242848A (ja) 2006-03-08 2006-03-08 基板の製造方法及び基板処理装置
TW096102450A TW200735373A (en) 2006-03-08 2007-01-23 Substrate manufacturing method and substrate processing device
KR1020070021808A KR100879038B1 (ko) 2006-03-08 2007-03-06 기판의 제조 방법 및 기판 처리장치
CN200710085723.6A CN101034659A (zh) 2006-03-08 2007-03-08 基板的制造方法及基板处理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006062495A JP2007242848A (ja) 2006-03-08 2006-03-08 基板の製造方法及び基板処理装置

Publications (2)

Publication Number Publication Date
JP2007242848A JP2007242848A (ja) 2007-09-20
JP2007242848A5 true JP2007242848A5 (enExample) 2009-02-26

Family

ID=38588105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006062495A Withdrawn JP2007242848A (ja) 2006-03-08 2006-03-08 基板の製造方法及び基板処理装置

Country Status (4)

Country Link
JP (1) JP2007242848A (enExample)
KR (1) KR100879038B1 (enExample)
CN (1) CN101034659A (enExample)
TW (1) TW200735373A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5794194B2 (ja) * 2012-04-19 2015-10-14 東京エレクトロン株式会社 基板処理装置
KR102436641B1 (ko) 2015-10-23 2022-08-26 삼성디스플레이 주식회사 표시 장치 및 그 제조방법
CN106711231A (zh) * 2017-01-13 2017-05-24 京东方科技集团股份有限公司 薄膜晶体管及其制备方法、显示基板及其制备方法
WO2018181296A1 (ja) * 2017-03-29 2018-10-04 シャープ株式会社 チャネルエッチ型薄膜トランジスタの製造方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3081954B2 (ja) * 1995-06-13 2000-08-28 日本プレシジョン・サーキッツ株式会社 Ｍｏｓ型トランジスタの製造方法
US5935648A (en) 1997-03-28 1999-08-10 The United States Of America As Represented By The Secretary Of The Air Force High surface area molybdenum nitride electrodes
US6291282B1 (en) * 1999-02-26 2001-09-18 Texas Instruments Incorporated Method of forming dual metal gate structures or CMOS devices
KR100604804B1 (ko) * 2000-04-17 2006-07-28 삼성전자주식회사 몰리브데늄 박막 및 실리콘 박막을 포함하는 다층막 제조방법

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