JP2007240189A - 湿度センサ - Google Patents
湿度センサ Download PDFInfo
- Publication number
- JP2007240189A JP2007240189A JP2006059620A JP2006059620A JP2007240189A JP 2007240189 A JP2007240189 A JP 2007240189A JP 2006059620 A JP2006059620 A JP 2006059620A JP 2006059620 A JP2006059620 A JP 2006059620A JP 2007240189 A JP2007240189 A JP 2007240189A
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- JP
- Japan
- Prior art keywords
- humidity sensor
- moisture
- group
- humidity
- hydrophilic group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- AWXZYCSSPFFRCA-UHFFFAOYSA-N Cc(cc1)cc2c1[o]c(cc1)c2cc1Oc(cc1)ccc1S(c(cc1)ccc1OC)(=O)=O Chemical compound Cc(cc1)cc2c1[o]c(cc1)c2cc1Oc(cc1)ccc1S(c(cc1)ccc1OC)(=O)=O AWXZYCSSPFFRCA-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
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- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biochemistry (AREA)
- Electrochemistry (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Polymers With Sulfur, Phosphorus Or Metals In The Main Chain (AREA)
Abstract
【解決手段】親水基が少なくとも一つの疎水基を介して他の親水基と結合する高分子を用いて形成された感湿膜を備えてなる。
【選択図】図1
Description
4 下側電極
6 下側電極用パッド
8 感湿膜
10 上側電極
12 上側電極用パッド
14 絶縁性基板
16 下側電極
18 下側電極用パッド
20 感湿膜
22 上側電極
24 上側電極用パッド
26、28 電極パッド
30 半導体装置
32 半導体基板
34、36 電極櫛歯部
38 感湿材料
40 感湿層
42 上部感湿膜
44 出力回路
46 パッド
48 温度計測回路
Claims (12)
- 親水基が少なくとも一つの疎水基を介して他の親水基と結合する高分子を用いて形成された感湿膜を備えてなり、前記疎水基が多員環からなる湿度センサ。
- 前記親水基はカルボニル基であることを特徴とする請求項1記載の湿度センサ。
- 前記親水基はスルホニル基であることを特徴とする請求項1記載の湿度センサ。
- ガラス転移温度が240℃〜500℃であることを特徴とする請求項1乃至3のいずれかに記載の湿度センサ。
- 親水基が少なくとも一つの疎水基を介して他の親水基と結合する高分子を用いて形成された感湿膜を備えてなり、前記疎水基が多員環からなる半導体装置。
- 前記親水基はカルボニル基であることを特徴とする請求項6記載の半導体装置。
- 前記親水基はスルホニル基であることを特徴とする請求項6記載の半導体装置。
- ガラス転移温度が240℃〜500℃であることを特徴とする請求項6乃至8のいずれかに記載の湿度センサ。
- さらに温度センサが併設されてなることを特徴とする請求項6乃至10のいずれかに記載の半導体装置。
- さらにセンサ出力回路が併設されてなることを特徴とする請求項6乃至11のいずれかに記載の半導体装置。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006059620A JP5112639B2 (ja) | 2006-03-06 | 2006-03-06 | 湿度センサ |
EP06833402.8A EP1992941A4 (en) | 2006-03-06 | 2006-11-27 | HUMIDITY SENSOR |
US12/281,956 US20090056439A1 (en) | 2006-03-06 | 2006-11-27 | Sensor for humidity |
KR1020087021663A KR101316128B1 (ko) | 2006-03-06 | 2006-11-27 | 습도 센서 |
CN2006800544875A CN101438149B (zh) | 2006-03-06 | 2006-11-27 | 湿度传感器 |
PCT/JP2006/323598 WO2007102262A1 (ja) | 2006-03-06 | 2006-11-27 | 湿度センサ |
TW096102536A TWI420101B (zh) | 2006-03-06 | 2007-01-23 | Humidity sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006059620A JP5112639B2 (ja) | 2006-03-06 | 2006-03-06 | 湿度センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007240189A true JP2007240189A (ja) | 2007-09-20 |
JP5112639B2 JP5112639B2 (ja) | 2013-01-09 |
Family
ID=38474704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006059620A Active JP5112639B2 (ja) | 2006-03-06 | 2006-03-06 | 湿度センサ |
Country Status (7)
Country | Link |
---|---|
US (1) | US20090056439A1 (ja) |
EP (1) | EP1992941A4 (ja) |
JP (1) | JP5112639B2 (ja) |
KR (1) | KR101316128B1 (ja) |
CN (1) | CN101438149B (ja) |
TW (1) | TWI420101B (ja) |
WO (1) | WO2007102262A1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5488534B2 (ja) * | 2011-06-06 | 2014-05-14 | 株式会社デンソー | 湿度センサ及びその製造方法 |
CN103528603A (zh) * | 2012-07-05 | 2014-01-22 | 北斗电子工业株式会社 | 静电电容式水分检测装置 |
JP6098724B2 (ja) * | 2013-08-13 | 2017-03-22 | 株式会社村田製作所 | 温湿度センサ |
CN107533027B (zh) * | 2015-02-17 | 2020-05-12 | 霍尼韦尔国际公司 | 湿度传感器 |
EP3078964B1 (en) * | 2015-04-09 | 2017-05-24 | Honeywell International Inc. | Relative humidity sensor and method |
EP3211408B1 (en) * | 2016-02-29 | 2019-04-10 | Honeywell International Inc. | Relative humidity sensor and method |
CN106950261A (zh) * | 2017-03-03 | 2017-07-14 | 上海事凡物联网科技有限公司 | 一种可燃物含水率的测量方法及测量传感器 |
EP3401674B1 (en) * | 2017-05-09 | 2020-07-15 | ams International AG | Capacitive-type humidity sensor with superhydrophobic top surface and corresponding fabrication method |
CN111919111A (zh) * | 2018-03-30 | 2020-11-10 | 住友化学株式会社 | 传感器和其制造方法 |
US20220128501A1 (en) * | 2019-02-15 | 2022-04-28 | National Institute Of Advanced Industrial Science And Technology | Humidity-sensitive composite material and humidity sensor |
CN113075165B (zh) * | 2021-03-18 | 2022-10-18 | 重庆理工大学 | 一种u形湿敏光纤传感器及制作方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02190754A (ja) * | 1989-01-20 | 1990-07-26 | Canon Inc | 湿度センサ |
JPH0692953B2 (ja) * | 1989-04-27 | 1994-11-16 | 山武ハネウエル株式会社 | 感湿素子 |
JP2000290402A (ja) * | 1999-04-09 | 2000-10-17 | Toray Ind Inc | フィルム |
JP2002005867A (ja) * | 2000-03-16 | 2002-01-09 | Mitsui Chemicals Inc | 静電容量型湿度センサー |
JP2005241576A (ja) * | 2004-02-27 | 2005-09-08 | Denso Corp | 容量式湿度センサ |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4143177A (en) * | 1977-01-31 | 1979-03-06 | Panametrics, Inc. | Absolute humidity sensors and methods of manufacturing humidity sensors |
US4755556A (en) * | 1985-02-13 | 1988-07-05 | Amoco Corporation | Thermoplastic composites comprising a polyaryl ether sulphone matrix resin |
CN85100146B (zh) * | 1985-04-01 | 1987-06-10 | 清华大学 | 热--湿--气多功能敏感陶瓷元件及其制造方法 |
EP0268765B1 (en) * | 1986-11-20 | 1993-04-14 | Dainippon Ink And Chemicals, Inc. | Resin comprising a polyphenylene sulfide/polyphenylene sulfone block copolymer, process for preparing the copolymer and molded article |
EP0395349B2 (en) * | 1989-04-26 | 1998-06-10 | Yamatake-Honeywell Co. Ltd. | Moisture sensitive element |
US5621669A (en) * | 1990-07-27 | 1997-04-15 | Bjornsson; Eyjolf S. | Moisture sensor probe and control mechanism |
JPH0599877A (ja) * | 1991-06-25 | 1993-04-23 | Yamatake Honeywell Co Ltd | 感湿装置 |
US6193077B1 (en) * | 1999-02-08 | 2001-02-27 | Osmonics, Inc. | Non-cracking hydrophilic polyethersulfone membranes |
CA2402840C (en) * | 2000-03-22 | 2010-10-05 | Victrex Manufacturing Limited | Composite ion exchange material |
DE10051558C2 (de) * | 2000-10-18 | 2003-04-17 | Sitronic Elektrotech Ausruest | Sensoreinheit mit einem Luftfeuchte-Sensor und mit einem Lufttemperatur-Sensor |
EP1262767B1 (en) * | 2001-05-31 | 2011-02-16 | Ngk Spark Plug Co., Ltd | Humidity sensor |
JP2003232765A (ja) * | 2002-02-08 | 2003-08-22 | Nippon Soken Inc | 湿度センサ用感湿素子 |
CN1182386C (zh) * | 2002-05-24 | 2004-12-29 | 杨慕杰 | 复合高分子电阻型薄膜湿敏元件及其制作方法 |
JP2004177405A (ja) * | 2002-11-11 | 2004-06-24 | Tdk Corp | 電気容量式湿度検知素子及び電気容量式湿度検知素子の製造方法 |
JP2004301766A (ja) * | 2003-03-31 | 2004-10-28 | Tdk Corp | 感湿材用組成物、感湿材料および湿度センサ素子 |
US6938482B2 (en) * | 2003-06-03 | 2005-09-06 | General Electric Co. | Humidity sensor element containing polyphenylsulfone |
JP4215051B2 (ja) * | 2005-12-21 | 2009-01-28 | トヨタ自動車株式会社 | ハイブリッド車両およびその制御方法 |
JP5051858B2 (ja) * | 2010-07-16 | 2012-10-17 | 住友ベークライト株式会社 | 表示装置用カラーフィルタの製造方法 |
-
2006
- 2006-03-06 JP JP2006059620A patent/JP5112639B2/ja active Active
- 2006-11-27 EP EP06833402.8A patent/EP1992941A4/en not_active Withdrawn
- 2006-11-27 KR KR1020087021663A patent/KR101316128B1/ko active IP Right Grant
- 2006-11-27 CN CN2006800544875A patent/CN101438149B/zh active Active
- 2006-11-27 US US12/281,956 patent/US20090056439A1/en not_active Abandoned
- 2006-11-27 WO PCT/JP2006/323598 patent/WO2007102262A1/ja active Application Filing
-
2007
- 2007-01-23 TW TW096102536A patent/TWI420101B/zh active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02190754A (ja) * | 1989-01-20 | 1990-07-26 | Canon Inc | 湿度センサ |
JPH0692953B2 (ja) * | 1989-04-27 | 1994-11-16 | 山武ハネウエル株式会社 | 感湿素子 |
JP2000290402A (ja) * | 1999-04-09 | 2000-10-17 | Toray Ind Inc | フィルム |
JP2002005867A (ja) * | 2000-03-16 | 2002-01-09 | Mitsui Chemicals Inc | 静電容量型湿度センサー |
JP2005241576A (ja) * | 2004-02-27 | 2005-09-08 | Denso Corp | 容量式湿度センサ |
Also Published As
Publication number | Publication date |
---|---|
TWI420101B (zh) | 2013-12-21 |
CN101438149B (zh) | 2012-06-13 |
US20090056439A1 (en) | 2009-03-05 |
WO2007102262A1 (ja) | 2007-09-13 |
TW200741200A (en) | 2007-11-01 |
EP1992941A1 (en) | 2008-11-19 |
CN101438149A (zh) | 2009-05-20 |
EP1992941A4 (en) | 2016-01-06 |
JP5112639B2 (ja) | 2013-01-09 |
KR20080106918A (ko) | 2008-12-09 |
KR101316128B1 (ko) | 2013-10-11 |
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