JP2007227596A - 半導体モジュール及びその製造方法 - Google Patents
半導体モジュール及びその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 154
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 229920005989 resin Polymers 0.000 claims abstract description 50
- 239000011347 resin Substances 0.000 claims abstract description 50
- 239000000758 substrate Substances 0.000 claims abstract description 33
- 238000007789 sealing Methods 0.000 claims abstract description 22
- 230000002093 peripheral effect Effects 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 5
- 230000004048 modification Effects 0.000 description 5
- 238000003384 imaging method Methods 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
【解決手段】配線基板10の中央主要部の配線層14aに受動部品20が接続されて実装され、受動部品20が実装された領域に受動部品20を封止する樹脂部18が選択的に形成され、樹脂部18の上に、配線基板10の周縁側の配線層14bにワイヤ24で接続された半導体チップ30が実装されている。半導体チップ30は封止樹脂26で封止されるか、キャップによって気密封止される。
【選択図】図4
Description
図2及び図3は本発明の第1実施形態の半導体モジュールの製造方法を示す断面図、図4及び図5は同じく半導体モジュールを示す断面図である。
図6は本発明の第2実施形態の半導体モジュールの製造方法を示す断面図、図7及び図8は同じく半導体モジュールを示す断面図である。
Claims (10)
- 配線層を備えた配線基板と、
前記配線基板の中央主要部の前記配線層に接続されて実装された受動部品と、
前記配線基板の周縁側の前記配線層を除く領域に選択的に形成されて前記受動部品を封止する樹脂部と、
前記樹脂部の上に実装され、ワイヤを介して前記配線基板の周縁側の前記配線層に接続された半導体チップとを有することを特徴とする半導体モジュール。 - 前記半導体チップ、前記ワイヤ及びそれに接続された前記配線層を封止する封止樹脂をさらに有することを特徴とする請求項1に記載の半導体モジュール。
- 前記配線基板にはキャビティを備えたキャップが設けられており、前記半導体チップは前記キャップの前記キャビティの中に収容されて気密封止されていることを特徴とする請求項1に記載の半導体モジュール。
- 前記受動部品を封止する樹脂部の面積は前記半導体チップの大きさに対応していることを特徴とする請求項1乃至3のいずれか一項に記載の半導体モジュール。
- 前記配線基板の中央主要部には、前記受動部品の横方向の前記配線層に下側半導体チップがフリップチップ接続されて実装されており、前記受動部品と前記下側半導体チップが前記樹脂部で封止されていることを特徴とする請求項1乃至3のいずれか一項に記載の半導体モジュール。
- 配線基板の中央主要部の配線層に受動部品を接続して実装する工程と、
前記配線基板の周縁側の前記配線層を除く領域に前記受動部品を封止する樹脂部を選択的に形成する工程と、
前記樹脂部の上に半導体チップを固着し、前記半導体チップをワイヤで前記配線基板の周縁側に露出する前記配線層に接続して実装する工程とを有することを特徴とする半導体モジュールの製造方法。 - 前記半導体チップを実装する工程の後に、前記半導体チップ、前記ワイヤ及びそれに接続された前記配線層を封止する封止樹脂を形成する工程をさらに有することを特徴とする請求項6に記載の半導体モジュールの製造方法。
- 前記半導体チップを実装する工程の後に、前記配線基板の上に、キャビティを備えたキャップを設けて、前記半導体チップを前記キャップの前記キャビティの中に収容して気密封止する工程をさらに有することを特徴とする請求項6に記載の半導体モジュールの製造方法。
- 前記配線基板の上に受動部品を実装する工程は、前記受動部品の横方向の前記配線層に下側半導体チップをフリップチップ接続することを含み、
前記樹脂部を選択的に形成する工程において、前記受動部品及び前記下側半導体チップを前記樹脂部で封止することを特徴とする請求項6乃至8のいずれか一項に記載の半導体モジュールの製造方法。 - 前記樹脂部を形成する工程において、前記樹脂部の面積が前記半導体チップの大きさに対応するように形成することを特徴とする請求項6乃至8のいずれか一項に記載の半導体モジュールの製造方法。
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JP2006046398A JP2007227596A (ja) | 2006-02-23 | 2006-02-23 | 半導体モジュール及びその製造方法 |
TW096105211A TW200739857A (en) | 2006-02-23 | 2007-02-13 | Semiconductor module and method of manufacturing the same |
US11/709,137 US20070194419A1 (en) | 2006-02-23 | 2007-02-22 | Semiconductor module and method of manufacturing the same |
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JP2012129464A (ja) * | 2010-12-17 | 2012-07-05 | Toshiba Corp | 半導体装置およびその製造方法 |
JP2013093456A (ja) * | 2011-10-26 | 2013-05-16 | Nippon Dempa Kogyo Co Ltd | 電子モジュールとその製造方法 |
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US9955582B2 (en) * | 2008-04-23 | 2018-04-24 | Skyworks Solutions, Inc. | 3-D stacking of active devices over passive devices |
US8934052B2 (en) * | 2010-11-02 | 2015-01-13 | Stmicroelectronics Pte Ltd | Camera module including an image sensor and a laterally adjacent surface mount device coupled at a lower surface of a dielectric material layer |
US20190287881A1 (en) | 2018-03-19 | 2019-09-19 | Stmicroelectronics S.R.L. | Semiconductor package with die stacked on surface mounted devices |
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TW200739857A (en) | 2007-10-16 |
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