JP2007217782A - 希土類元素のフッ化物皮膜を有する耐食性皮膜およびその製造方法 - Google Patents
希土類元素のフッ化物皮膜を有する耐食性皮膜およびその製造方法 Download PDFInfo
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- JP2007217782A JP2007217782A JP2006043012A JP2006043012A JP2007217782A JP 2007217782 A JP2007217782 A JP 2007217782A JP 2006043012 A JP2006043012 A JP 2006043012A JP 2006043012 A JP2006043012 A JP 2006043012A JP 2007217782 A JP2007217782 A JP 2007217782A
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- rare earth
- film
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- earth element
- resistant
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Landscapes
- Coating By Spraying Or Casting (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006043012A JP2007217782A (ja) | 2006-02-20 | 2006-02-20 | 希土類元素のフッ化物皮膜を有する耐食性皮膜およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006043012A JP2007217782A (ja) | 2006-02-20 | 2006-02-20 | 希土類元素のフッ化物皮膜を有する耐食性皮膜およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007217782A true JP2007217782A (ja) | 2007-08-30 |
| JP2007217782A5 JP2007217782A5 (https=) | 2009-01-15 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006043012A Abandoned JP2007217782A (ja) | 2006-02-20 | 2006-02-20 | 希土類元素のフッ化物皮膜を有する耐食性皮膜およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007217782A (https=) |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013147691A (ja) * | 2012-01-18 | 2013-08-01 | Tocalo Co Ltd | フッ化物膜被覆サーメット複合皮膜被覆部材およびその製造方法 |
| JP2014109066A (ja) * | 2012-12-04 | 2014-06-12 | Nippon Yttrium Co Ltd | 溶射材料 |
| US8896210B2 (en) | 2011-12-05 | 2014-11-25 | Tokyo Electron Limited | Plasma processing apparatus and method |
| US10186400B2 (en) | 2017-01-20 | 2019-01-22 | Applied Materials, Inc. | Multi-layer plasma resistant coating by atomic layer deposition |
| US10443126B1 (en) | 2018-04-06 | 2019-10-15 | Applied Materials, Inc. | Zone-controlled rare-earth oxide ALD and CVD coatings |
| CN110382730A (zh) * | 2017-03-01 | 2019-10-25 | 信越化学工业株式会社 | 喷镀被膜、喷镀用粉、喷镀用粉的制造方法和喷镀被膜的制造方法 |
| US10676819B2 (en) | 2016-06-23 | 2020-06-09 | Applied Materials, Inc. | Non-line of sight deposition of erbium based plasma resistant ceramic coating |
| US10755900B2 (en) | 2017-05-10 | 2020-08-25 | Applied Materials, Inc. | Multi-layer plasma erosion protection for chamber components |
| US10858741B2 (en) | 2019-03-11 | 2020-12-08 | Applied Materials, Inc. | Plasma resistant multi-layer architecture for high aspect ratio parts |
| US20210317572A1 (en) * | 2020-04-14 | 2021-10-14 | Entegris, Inc. | Yttrium fluoride films and methods of preparing and using yttrium fluoride films |
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2006
- 2006-02-20 JP JP2006043012A patent/JP2007217782A/ja not_active Abandoned
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