JP2007214554A5 - - Google Patents

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Publication number
JP2007214554A5
JP2007214554A5 JP2007003072A JP2007003072A JP2007214554A5 JP 2007214554 A5 JP2007214554 A5 JP 2007214554A5 JP 2007003072 A JP2007003072 A JP 2007003072A JP 2007003072 A JP2007003072 A JP 2007003072A JP 2007214554 A5 JP2007214554 A5 JP 2007214554A5
Authority
JP
Japan
Prior art keywords
optical system
lens
point
laser oscillator
beam expander
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2007003072A
Other languages
English (en)
Japanese (ja)
Other versions
JP5100127B2 (ja
JP2007214554A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2007003072A priority Critical patent/JP5100127B2/ja
Priority claimed from JP2007003072A external-priority patent/JP5100127B2/ja
Publication of JP2007214554A publication Critical patent/JP2007214554A/ja
Publication of JP2007214554A5 publication Critical patent/JP2007214554A5/ja
Application granted granted Critical
Publication of JP5100127B2 publication Critical patent/JP5100127B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2007003072A 2006-01-12 2007-01-11 レ−ザー光照射装置 Expired - Fee Related JP5100127B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007003072A JP5100127B2 (ja) 2006-01-12 2007-01-11 レ−ザー光照射装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2006005210 2006-01-12
JP2006005210 2006-01-12
JP2007003072A JP5100127B2 (ja) 2006-01-12 2007-01-11 レ−ザー光照射装置

Publications (3)

Publication Number Publication Date
JP2007214554A JP2007214554A (ja) 2007-08-23
JP2007214554A5 true JP2007214554A5 (cg-RX-API-DMAC10.html) 2010-02-18
JP5100127B2 JP5100127B2 (ja) 2012-12-19

Family

ID=38492671

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007003072A Expired - Fee Related JP5100127B2 (ja) 2006-01-12 2007-01-11 レ−ザー光照射装置

Country Status (1)

Country Link
JP (1) JP5100127B2 (cg-RX-API-DMAC10.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5210574B2 (ja) * 2006-09-14 2013-06-12 株式会社半導体エネルギー研究所 レーザ照射装置
JP6848337B2 (ja) * 2016-10-25 2021-03-24 株式会社リコー レーザ装置、点火装置、及び内燃機関
WO2024018785A1 (ja) * 2022-07-19 2024-01-25 住友重機械工業株式会社 ビーム調整装置、レーザアニール装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11162868A (ja) * 1997-12-02 1999-06-18 Toshiba Corp レ−ザ照射装置
JP2003053578A (ja) * 2001-08-15 2003-02-26 Sumitomo Heavy Ind Ltd レーザビームのプロファイル調整方法及び装置
DE10144244A1 (de) * 2001-09-05 2003-03-20 Zeiss Carl Zoom-System, insbesondere für eine Beleuchtungseinrichtung
JP4610201B2 (ja) * 2004-01-30 2011-01-12 住友重機械工業株式会社 レーザ照射装置

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