JP2007206643A5 - - Google Patents

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Publication number
JP2007206643A5
JP2007206643A5 JP2006028789A JP2006028789A JP2007206643A5 JP 2007206643 A5 JP2007206643 A5 JP 2007206643A5 JP 2006028789 A JP2006028789 A JP 2006028789A JP 2006028789 A JP2006028789 A JP 2006028789A JP 2007206643 A5 JP2007206643 A5 JP 2007206643A5
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JP
Japan
Prior art keywords
link mechanism
optical axis
optical element
element driving
axis direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2006028789A
Other languages
English (en)
Japanese (ja)
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JP2007206643A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006028789A priority Critical patent/JP2007206643A/ja
Priority claimed from JP2006028789A external-priority patent/JP2007206643A/ja
Publication of JP2007206643A publication Critical patent/JP2007206643A/ja
Publication of JP2007206643A5 publication Critical patent/JP2007206643A5/ja
Withdrawn legal-status Critical Current

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JP2006028789A 2006-02-06 2006-02-06 光学素子駆動装置、露光装置およびデバイス製造方法 Withdrawn JP2007206643A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006028789A JP2007206643A (ja) 2006-02-06 2006-02-06 光学素子駆動装置、露光装置およびデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006028789A JP2007206643A (ja) 2006-02-06 2006-02-06 光学素子駆動装置、露光装置およびデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2007206643A JP2007206643A (ja) 2007-08-16
JP2007206643A5 true JP2007206643A5 (ru) 2009-03-26

Family

ID=38486136

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006028789A Withdrawn JP2007206643A (ja) 2006-02-06 2006-02-06 光学素子駆動装置、露光装置およびデバイス製造方法

Country Status (1)

Country Link
JP (1) JP2007206643A (ru)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5406437B2 (ja) 2007-06-22 2014-02-05 キヤノン株式会社 露光装置及びデバイス製造方法
WO2009024192A1 (en) * 2007-08-23 2009-02-26 Carl Zeiss Smt Ag Optical element module with minimized parasitic loads
DE102009044957A1 (de) * 2008-09-30 2010-04-08 Carl Zeiss Smt Ag Stützelemente für ein optisches Element
JP2010219080A (ja) * 2009-03-13 2010-09-30 Canon Inc 光学装置、ステージ装置、光学系及び露光装置
JP5863358B2 (ja) * 2011-09-22 2016-02-16 株式会社トプコン 光学素子保持装置
JP5848470B2 (ja) * 2015-02-05 2016-01-27 カール・ツァイス・エスエムティー・ゲーエムベーハー 寄生負荷最小化光学素子モジュール
CN109270552B (zh) * 2018-11-07 2022-12-30 山东理工大学 一种直升机载激光雷达激光扫描姿态角稳定方法与装置

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