JP2007206643A5 - - Google Patents
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- Publication number
- JP2007206643A5 JP2007206643A5 JP2006028789A JP2006028789A JP2007206643A5 JP 2007206643 A5 JP2007206643 A5 JP 2007206643A5 JP 2006028789 A JP2006028789 A JP 2006028789A JP 2006028789 A JP2006028789 A JP 2006028789A JP 2007206643 A5 JP2007206643 A5 JP 2007206643A5
- Authority
- JP
- Japan
- Prior art keywords
- link mechanism
- optical axis
- optical element
- element driving
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000003287 optical effect Effects 0.000 claims 22
- 230000007246 mechanism Effects 0.000 claims 16
- 238000006073 displacement reaction Methods 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006028789A JP2007206643A (ja) | 2006-02-06 | 2006-02-06 | 光学素子駆動装置、露光装置およびデバイス製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006028789A JP2007206643A (ja) | 2006-02-06 | 2006-02-06 | 光学素子駆動装置、露光装置およびデバイス製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007206643A JP2007206643A (ja) | 2007-08-16 |
JP2007206643A5 true JP2007206643A5 (ru) | 2009-03-26 |
Family
ID=38486136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006028789A Withdrawn JP2007206643A (ja) | 2006-02-06 | 2006-02-06 | 光学素子駆動装置、露光装置およびデバイス製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2007206643A (ru) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5406437B2 (ja) | 2007-06-22 | 2014-02-05 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
WO2009024192A1 (en) * | 2007-08-23 | 2009-02-26 | Carl Zeiss Smt Ag | Optical element module with minimized parasitic loads |
DE102009044957A1 (de) * | 2008-09-30 | 2010-04-08 | Carl Zeiss Smt Ag | Stützelemente für ein optisches Element |
JP2010219080A (ja) * | 2009-03-13 | 2010-09-30 | Canon Inc | 光学装置、ステージ装置、光学系及び露光装置 |
JP5863358B2 (ja) * | 2011-09-22 | 2016-02-16 | 株式会社トプコン | 光学素子保持装置 |
JP5848470B2 (ja) * | 2015-02-05 | 2016-01-27 | カール・ツァイス・エスエムティー・ゲーエムベーハー | 寄生負荷最小化光学素子モジュール |
CN109270552B (zh) * | 2018-11-07 | 2022-12-30 | 山东理工大学 | 一种直升机载激光雷达激光扫描姿态角稳定方法与装置 |
-
2006
- 2006-02-06 JP JP2006028789A patent/JP2007206643A/ja not_active Withdrawn
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