JP2007206643A5 - - Google Patents
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- Publication number
- JP2007206643A5 JP2007206643A5 JP2006028789A JP2006028789A JP2007206643A5 JP 2007206643 A5 JP2007206643 A5 JP 2007206643A5 JP 2006028789 A JP2006028789 A JP 2006028789A JP 2006028789 A JP2006028789 A JP 2006028789A JP 2007206643 A5 JP2007206643 A5 JP 2007206643A5
- Authority
- JP
- Japan
- Prior art keywords
- link mechanism
- optical axis
- optical element
- element driving
- axis direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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- 230000003287 optical effect Effects 0.000 claims 22
- 230000007246 mechanism Effects 0.000 claims 16
- 238000006073 displacement reaction Methods 0.000 claims 9
- 238000004519 manufacturing process Methods 0.000 claims 1
Claims (8)
光軸と垂直な方向に変位するリニアアクチュエータと、
前記リニアアクチュエータの変位方向における両端に設けられた第１リンク機構と、
前記第１リンク機構に連結され、前記第１リンク機構によって取り出された変位を前記光軸方向に変換する第２リンク機構と、
前記リニアアクチュエータの両端に設けられた前記第１リンク機構を弾性ヒンジを介して連結し、前記リニアアクチュエータと略平行に配置された固定リンクとを備え、
前記弾性ヒンジは、前記光軸方向および前記変位方向の両方向と垂直な方向における前記固定リンクの中心線に対して所定のオフセットをもって取り付けられることを特徴とする光学素子駆動装置。 An optical element driving apparatus for driving an optical element in the optical axis direction,
A linear actuator that is displaced in a direction perpendicular to the optical axis;
First link mechanisms provided at both ends in the displacement direction of the linear actuator;
A second link mechanism connected to the first link mechanism and converting the displacement taken out by the first link mechanism into the optical axis direction;
The first link mechanism provided at both ends of the linear actuator is connected via an elastic hinge, and includes a fixed link disposed substantially parallel to the linear actuator,
The optical element driving device according to claim 1, wherein the elastic hinge is attached to the center line of the fixed link in a direction perpendicular to both the optical axis direction and the displacement direction.
−０．４５×ｗ１ ＜
ｅ１ ＜ ０．４５×ｗ１
で表されることを特徴とする請求項１に記載の光学素子駆動装置。 The offset amount e1 is, when the width of the fixed link in the direction perpendicular to both the optical axis direction and the displacement direction is w1,
−0.45 × w1 <
e1 <0.45 × w1
The optical element driving apparatus according to claim 1, wherein:
−０．１×ｗ２ ＜
ｅ２ ＜ ０．１×ｗ２
で表されることを特徴とする請求項４に記載の光学素子駆動装置。 The offset amount e2 is, when the width of the second link mechanism in the direction perpendicular to both the optical axis direction and the displacement direction is w2,
-0.1 × w2 <
e2 <0.1 × w2
The optical element driving apparatus according to claim 4, wherein:
光軸と垂直な方向に変位するリニアアクチュエータと、
前記リニアアクチュエータの変位方向における両端に設けられた第１リンク機構と、
前記第１リンク機構に連結され、前記第１リンク機構によって取り出された変位を前記光軸方向に変換する第２リンク機構と、
前記第１リンク機構と前記第２リンク機構とを連結する弾性ヒンジとを備え、
前記弾性ヒンジは、光軸方向および変位方向の両方向と垂直な方向における前記第２リンク機構の中心線に対して所定のオフセットをもって取り付けられることを特徴とする光学素子駆動装置。 An optical element driving apparatus for driving an optical element in the optical axis direction,
A linear actuator that is displaced in a direction perpendicular to the optical axis;
First link mechanisms provided at both ends in the displacement direction of the linear actuator;
A second link mechanism connected to the first link mechanism and converting the displacement taken out by the first link mechanism into the optical axis direction;
An elastic hinge connecting the first link mechanism and the second link mechanism;
The optical element driving apparatus according to claim 1, wherein the elastic hinge is attached with a predetermined offset with respect to a center line of the second link mechanism in a direction perpendicular to both the optical axis direction and the displacement direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006028789A JP2007206643A (en) | 2006-02-06 | 2006-02-06 | Optical element driving apparatus, exposure apparatus, and method of manufacturing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006028789A JP2007206643A (en) | 2006-02-06 | 2006-02-06 | Optical element driving apparatus, exposure apparatus, and method of manufacturing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007206643A JP2007206643A (en) | 2007-08-16 |
| JP2007206643A5 true JP2007206643A5 (en) | 2009-03-26 |
Family
ID=38486136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006028789A Withdrawn JP2007206643A (en) | 2006-02-06 | 2006-02-06 | Optical element driving apparatus, exposure apparatus, and method of manufacturing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007206643A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5406437B2 (en) | 2007-06-22 | 2014-02-05 | キヤノン株式会社 | Exposure apparatus and device manufacturing method |
| WO2009024192A1 (en) * | 2007-08-23 | 2009-02-26 | Carl Zeiss Smt Ag | Optical element module with minimized parasitic loads |
| DE102009044957A1 (en) * | 2008-09-30 | 2010-04-08 | Carl Zeiss Smt Ag | Support elements for an optical element |
| JP2010219080A (en) * | 2009-03-13 | 2010-09-30 | Canon Inc | Optical device, stage device, optical system, and exposure apparatus |
| JP5863358B2 (en) * | 2011-09-22 | 2016-02-16 | 株式会社トプコン | Optical element holding device |
| JP5848470B2 (en) * | 2015-02-05 | 2016-01-27 | カール・ツァイス・エスエムティー・ゲーエムベーハー | Parasitic load minimizing optical element module |
| CN109270552B (en) * | 2018-11-07 | 2022-12-30 | 山东理工大学 | Helicopter-mounted laser radar laser scanning attitude angle stabilizing method and device |
-
2006
- 2006-02-06 JP JP2006028789A patent/JP2007206643A/en not_active Withdrawn
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