JP2007184569A5 - - Google Patents
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- Publication number
- JP2007184569A5 JP2007184569A5 JP2006330875A JP2006330875A JP2007184569A5 JP 2007184569 A5 JP2007184569 A5 JP 2007184569A5 JP 2006330875 A JP2006330875 A JP 2006330875A JP 2006330875 A JP2006330875 A JP 2006330875A JP 2007184569 A5 JP2007184569 A5 JP 2007184569A5
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- JP
- Japan
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006330875A JP4467556B2 (ja) | 2005-12-09 | 2006-12-07 | プラズマプロセス装置 |
US11/999,731 US20080156266A1 (en) | 2006-12-07 | 2007-12-06 | Plasma processing apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005356256 | 2005-12-09 | ||
JP2006330875A JP4467556B2 (ja) | 2005-12-09 | 2006-12-07 | プラズマプロセス装置 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007184569A JP2007184569A (ja) | 2007-07-19 |
JP2007184569A5 true JP2007184569A5 (ja) | 2008-02-14 |
JP4467556B2 JP4467556B2 (ja) | 2010-05-26 |
Family
ID=38340343
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2006330875A Active JP4467556B2 (ja) | 2005-12-09 | 2006-12-07 | プラズマプロセス装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4467556B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4937037B2 (ja) * | 2007-08-07 | 2012-05-23 | 積水化学工業株式会社 | プラズマ処理装置 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3899543B2 (ja) * | 1996-02-05 | 2007-03-28 | セイコーエプソン株式会社 | 表面処理方法及び装置 |
JP2002353000A (ja) * | 2001-05-23 | 2002-12-06 | Matsushita Electric Works Ltd | プラズマ処理装置及びプラズマ処理方法 |
JP4157785B2 (ja) * | 2003-03-20 | 2008-10-01 | 積水化学工業株式会社 | プラズマ処理装置 |
JP3686662B1 (ja) * | 2003-05-14 | 2005-08-24 | 積水化学工業株式会社 | プラズマ処理装置 |
JP2007080688A (ja) * | 2005-09-14 | 2007-03-29 | Sekisui Chem Co Ltd | プラズマ処理装置の電極構造 |
-
2006
- 2006-12-07 JP JP2006330875A patent/JP4467556B2/ja active Active
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