JP2007147583A - ワークピースを光学的に検査するテストヘッド - Google Patents

ワークピースを光学的に検査するテストヘッド Download PDF

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Publication number
JP2007147583A
JP2007147583A JP2006033044A JP2006033044A JP2007147583A JP 2007147583 A JP2007147583 A JP 2007147583A JP 2006033044 A JP2006033044 A JP 2006033044A JP 2006033044 A JP2006033044 A JP 2006033044A JP 2007147583 A JP2007147583 A JP 2007147583A
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JP
Japan
Prior art keywords
workpiece
lens
light
detector
platter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2006033044A
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English (en)
Japanese (ja)
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JP2007147583A5 (enExample
Inventor
David Treves
トリーヴス ディヴィッド
Thomas O'dell
オーデル トーマス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WD Media LLC
Original Assignee
Komag Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Komag Inc filed Critical Komag Inc
Publication of JP2007147583A publication Critical patent/JP2007147583A/ja
Publication of JP2007147583A5 publication Critical patent/JP2007147583A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9506—Optical discs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N2021/8411—Application to online plant, process monitoring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2006033044A 2005-01-13 2006-01-13 ワークピースを光学的に検査するテストヘッド Pending JP2007147583A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US64374805P 2005-01-13 2005-01-13
US11/113,258 US7184139B2 (en) 2005-01-13 2005-04-23 Test head for optically inspecting workpieces

Publications (2)

Publication Number Publication Date
JP2007147583A true JP2007147583A (ja) 2007-06-14
JP2007147583A5 JP2007147583A5 (enExample) 2009-04-09

Family

ID=36652910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006033044A Pending JP2007147583A (ja) 2005-01-13 2006-01-13 ワークピースを光学的に検査するテストヘッド

Country Status (3)

Country Link
US (1) US7184139B2 (enExample)
JP (1) JP2007147583A (enExample)
MY (1) MY137596A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011159330A (ja) * 2010-01-29 2011-08-18 Hitachi High-Technologies Corp 磁気ディスク検査方法及びその装置
JP2014199198A (ja) * 2013-03-29 2014-10-23 株式会社日立ハイテクノロジーズ 磁気メディアの光学式検査装置及び光学式検査方法

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JP5117895B2 (ja) 2008-03-17 2013-01-16 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気記録媒体及びその製造方法
JP2009238299A (ja) 2008-03-26 2009-10-15 Hoya Corp 垂直磁気記録媒体および垂直磁気記録媒体の製造方法
JP5453666B2 (ja) * 2008-03-30 2014-03-26 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスク及びその製造方法
WO2010038773A1 (ja) 2008-09-30 2010-04-08 Hoya株式会社 磁気ディスク及びその製造方法
US8877359B2 (en) 2008-12-05 2014-11-04 Wd Media (Singapore) Pte. Ltd. Magnetic disk and method for manufacturing same
WO2010116908A1 (ja) 2009-03-28 2010-10-14 Hoya株式会社 磁気ディスク用潤滑剤化合物及び磁気ディスク
JP2010257567A (ja) 2009-03-30 2010-11-11 Wd Media Singapore Pte Ltd 垂直磁気記録媒体およびその製造方法
US20100300884A1 (en) 2009-05-26 2010-12-02 Wd Media, Inc. Electro-deposited passivation coatings for patterned media
US8496466B1 (en) 2009-11-06 2013-07-30 WD Media, LLC Press system with interleaved embossing foil holders for nano-imprinting of recording media
US9330685B1 (en) 2009-11-06 2016-05-03 WD Media, LLC Press system for nano-imprinting of recording media with a two step pressing method
JP5643516B2 (ja) 2010-01-08 2014-12-17 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気記録媒体
JP5574414B2 (ja) 2010-03-29 2014-08-20 ダブリュディ・メディア・シンガポール・プライベートリミテッド 磁気ディスクの評価方法及び磁気ディスクの製造方法
JP5634749B2 (ja) 2010-05-21 2014-12-03 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP5645476B2 (ja) 2010-05-21 2014-12-24 ダブリュディ・メディア・シンガポール・プライベートリミテッド 垂直磁気ディスク
JP2011248968A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2011248969A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスク
JP2011248967A (ja) 2010-05-28 2011-12-08 Wd Media (Singapore) Pte. Ltd 垂直磁気ディスクの製造方法
JP2012009086A (ja) 2010-06-22 2012-01-12 Wd Media (Singapore) Pte. Ltd 垂直磁気記録媒体及びその製造方法
US8889275B1 (en) 2010-08-20 2014-11-18 WD Media, LLC Single layer small grain size FePT:C film for heat assisted magnetic recording media
US8743666B1 (en) 2011-03-08 2014-06-03 Western Digital Technologies, Inc. Energy assisted magnetic recording medium capable of suppressing high DC readback noise
US8711499B1 (en) 2011-03-10 2014-04-29 WD Media, LLC Methods for measuring media performance associated with adjacent track interference
US8491800B1 (en) 2011-03-25 2013-07-23 WD Media, LLC Manufacturing of hard masks for patterning magnetic media
US9028985B2 (en) 2011-03-31 2015-05-12 WD Media, LLC Recording media with multiple exchange coupled magnetic layers
JP5581282B2 (ja) * 2011-08-31 2014-08-27 株式会社日立ハイテクノロジーズ 表面形状計測装置
US8565050B1 (en) 2011-12-20 2013-10-22 WD Media, LLC Heat assisted magnetic recording media having moment keeper layer
US9029308B1 (en) 2012-03-28 2015-05-12 WD Media, LLC Low foam media cleaning detergent
US9269480B1 (en) 2012-03-30 2016-02-23 WD Media, LLC Systems and methods for forming magnetic recording media with improved grain columnar growth for energy assisted magnetic recording
US8941950B2 (en) 2012-05-23 2015-01-27 WD Media, LLC Underlayers for heat assisted magnetic recording (HAMR) media
US8993134B2 (en) 2012-06-29 2015-03-31 Western Digital Technologies, Inc. Electrically conductive underlayer to grow FePt granular media with (001) texture on glass substrates
JP2014035316A (ja) * 2012-08-10 2014-02-24 Hitachi High-Technologies Corp ダブルレシピ処理機能を有する表面検査装置及びその方法
US9034492B1 (en) 2013-01-11 2015-05-19 WD Media, LLC Systems and methods for controlling damping of magnetic media for heat assisted magnetic recording
US10115428B1 (en) 2013-02-15 2018-10-30 Wd Media, Inc. HAMR media structure having an anisotropic thermal barrier layer
US9153268B1 (en) 2013-02-19 2015-10-06 WD Media, LLC Lubricants comprising fluorinated graphene nanoribbons for magnetic recording media structure
US9183867B1 (en) 2013-02-21 2015-11-10 WD Media, LLC Systems and methods for forming implanted capping layers in magnetic media for magnetic recording
US9196283B1 (en) 2013-03-13 2015-11-24 Western Digital (Fremont), Llc Method for providing a magnetic recording transducer using a chemical buffer
US9190094B2 (en) 2013-04-04 2015-11-17 Western Digital (Fremont) Perpendicular recording media with grain isolation initiation layer and exchange breaking layer for signal-to-noise ratio enhancement
US9093122B1 (en) 2013-04-05 2015-07-28 WD Media, LLC Systems and methods for improving accuracy of test measurements involving aggressor tracks written to disks of hard disk drives
US8947987B1 (en) 2013-05-03 2015-02-03 WD Media, LLC Systems and methods for providing capping layers for heat assisted magnetic recording media
US8867322B1 (en) 2013-05-07 2014-10-21 WD Media, LLC Systems and methods for providing thermal barrier bilayers for heat assisted magnetic recording media
US9296082B1 (en) 2013-06-11 2016-03-29 WD Media, LLC Disk buffing apparatus with abrasive tape loading pad having a vibration absorbing layer
US9406330B1 (en) 2013-06-19 2016-08-02 WD Media, LLC Method for HDD disk defect source detection
US9607646B2 (en) 2013-07-30 2017-03-28 WD Media, LLC Hard disk double lubrication layer
US9389135B2 (en) 2013-09-26 2016-07-12 WD Media, LLC Systems and methods for calibrating a load cell of a disk burnishing machine
US9177585B1 (en) 2013-10-23 2015-11-03 WD Media, LLC Magnetic media capable of improving magnetic properties and thermal management for heat-assisted magnetic recording
US9581510B1 (en) 2013-12-16 2017-02-28 Western Digital Technologies, Inc. Sputter chamber pressure gauge with vibration absorber
US9382496B1 (en) 2013-12-19 2016-07-05 Western Digital Technologies, Inc. Lubricants with high thermal stability for heat-assisted magnetic recording
US9824711B1 (en) 2014-02-14 2017-11-21 WD Media, LLC Soft underlayer for heat assisted magnetic recording media
US9447368B1 (en) 2014-02-18 2016-09-20 WD Media, LLC Detergent composition with low foam and high nickel solubility
US9431045B1 (en) 2014-04-25 2016-08-30 WD Media, LLC Magnetic seed layer used with an unbalanced soft underlayer
US9042053B1 (en) 2014-06-24 2015-05-26 WD Media, LLC Thermally stabilized perpendicular magnetic recording medium
US9159350B1 (en) 2014-07-02 2015-10-13 WD Media, LLC High damping cap layer for magnetic recording media
US10054363B2 (en) 2014-08-15 2018-08-21 WD Media, LLC Method and apparatus for cryogenic dynamic cooling
US9082447B1 (en) 2014-09-22 2015-07-14 WD Media, LLC Determining storage media substrate material type
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US9685184B1 (en) 2014-09-25 2017-06-20 WD Media, LLC NiFeX-based seed layer for magnetic recording media
US9449633B1 (en) 2014-11-06 2016-09-20 WD Media, LLC Smooth structures for heat-assisted magnetic recording media
US9818442B2 (en) 2014-12-01 2017-11-14 WD Media, LLC Magnetic media having improved magnetic grain size distribution and intergranular segregation
US9401300B1 (en) 2014-12-18 2016-07-26 WD Media, LLC Media substrate gripper including a plurality of snap-fit fingers
US9218850B1 (en) 2014-12-23 2015-12-22 WD Media, LLC Exchange break layer for heat-assisted magnetic recording media
US9257134B1 (en) 2014-12-24 2016-02-09 Western Digital Technologies, Inc. Allowing fast data zone switches on data storage devices
US9990940B1 (en) 2014-12-30 2018-06-05 WD Media, LLC Seed structure for perpendicular magnetic recording media
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US10236026B1 (en) 2015-11-06 2019-03-19 WD Media, LLC Thermal barrier layers and seed layers for control of thermal and structural properties of HAMR media
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JPH01313741A (ja) * 1988-06-13 1989-12-19 Fuji Photo Film Co Ltd ディスク表面検査方法及び装置
JPH041955A (ja) * 1990-04-18 1992-01-07 Nec Corp 光磁気ディスク装置
JPH0461050A (ja) * 1990-06-29 1992-02-27 Toshiba Corp 光磁気ディスク装置
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JPS56121150U (enExample) * 1980-02-18 1981-09-16
JPH01313741A (ja) * 1988-06-13 1989-12-19 Fuji Photo Film Co Ltd ディスク表面検査方法及び装置
JPH041955A (ja) * 1990-04-18 1992-01-07 Nec Corp 光磁気ディスク装置
JPH0461050A (ja) * 1990-06-29 1992-02-27 Toshiba Corp 光磁気ディスク装置
JPH07320306A (ja) * 1994-05-27 1995-12-08 Sanyo Electric Co Ltd 光学ディスクの保護コート膜検査方法及びそれを使用した検査装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011159330A (ja) * 2010-01-29 2011-08-18 Hitachi High-Technologies Corp 磁気ディスク検査方法及びその装置
JP2014199198A (ja) * 2013-03-29 2014-10-23 株式会社日立ハイテクノロジーズ 磁気メディアの光学式検査装置及び光学式検査方法

Also Published As

Publication number Publication date
US20060152714A1 (en) 2006-07-13
US7184139B2 (en) 2007-02-27
MY137596A (en) 2009-02-27

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