JP2007144244A - 放電プラズマ処理装置 - Google Patents

放電プラズマ処理装置 Download PDF

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Publication number
JP2007144244A
JP2007144244A JP2005338131A JP2005338131A JP2007144244A JP 2007144244 A JP2007144244 A JP 2007144244A JP 2005338131 A JP2005338131 A JP 2005338131A JP 2005338131 A JP2005338131 A JP 2005338131A JP 2007144244 A JP2007144244 A JP 2007144244A
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JP
Japan
Prior art keywords
discharge
dielectric
plasma processing
processing apparatus
electrode
Prior art date
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Withdrawn
Application number
JP2005338131A
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English (en)
Japanese (ja)
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JP2007144244A5 (enExample
Inventor
Masato Kurahashi
正人 倉橋
Minoru Sato
稔 佐藤
Akira Shiragami
昭 白神
Hiroaki Nakamune
浩昭 中宗
Yasutaka Inanaga
康隆 稲永
Koji Ota
幸治 太田
Noboru Wada
昇 和田
Masaki Kuzumoto
昌樹 葛本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP2005338131A priority Critical patent/JP2007144244A/ja
Publication of JP2007144244A publication Critical patent/JP2007144244A/ja
Publication of JP2007144244A5 publication Critical patent/JP2007144244A5/ja
Withdrawn legal-status Critical Current

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  • Treating Waste Gases (AREA)
  • Exhaust Gas Treatment By Means Of Catalyst (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
  • Exhaust Gas After Treatment (AREA)
JP2005338131A 2005-11-24 2005-11-24 放電プラズマ処理装置 Withdrawn JP2007144244A (ja)

Priority Applications (1)

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JP2005338131A JP2007144244A (ja) 2005-11-24 2005-11-24 放電プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005338131A JP2007144244A (ja) 2005-11-24 2005-11-24 放電プラズマ処理装置

Publications (2)

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JP2007144244A true JP2007144244A (ja) 2007-06-14
JP2007144244A5 JP2007144244A5 (enExample) 2008-02-28

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ID=38206290

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JP2005338131A Withdrawn JP2007144244A (ja) 2005-11-24 2005-11-24 放電プラズマ処理装置

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JP (1) JP2007144244A (enExample)

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008140584A (ja) * 2006-11-30 2008-06-19 National Institute Of Advanced Industrial & Technology 高温場用フレキシブル電極
JP2009078266A (ja) * 2007-09-09 2009-04-16 Kazuo Shimizu プラズマを用いた流体浄化方法および流体浄化装置
JP2009191739A (ja) * 2008-02-14 2009-08-27 Ngk Insulators Ltd プラズマ反応器、及びプラズマ反応装置
JP2010142758A (ja) * 2008-12-19 2010-07-01 Daihatsu Motor Co Ltd 排気ガス浄化装置
WO2014083623A1 (ja) * 2012-11-28 2014-06-05 株式会社日立製作所 プラズマ処理装置
JP5638678B1 (ja) * 2013-09-10 2014-12-10 Ｐｍディメンションズ株式会社 液中誘電体バリア放電プラズマ装置および液体浄化システム
CN104640338A (zh) * 2015-02-01 2015-05-20 华南理工大学 一种遥控式介质阻挡放电电极装置及使用方法
CN104756334A (zh) * 2012-07-13 2015-07-01 Sp技术有限公司 在电极上设有导电体突出部的介质阻挡放电式的等离子产生电极结构
EP3002428A1 (en) * 2014-10-02 2016-04-06 Toyota Jidosha Kabushiki Kaisha Oil removal apparatus
WO2016051798A1 (en) * 2014-10-02 2016-04-07 Toyota Jidosha Kabushiki Kaisha Oil removal apparatus
CN107306472A (zh) * 2016-04-22 2017-10-31 车熙蒋 等离子体产生装置和利用它的新居综合症去除方法
EP3389345A4 (en) * 2015-12-09 2019-05-01 NGK Spark Plug Co., Ltd. PLASMA REACTOR AND PLASMA ELECTROPLATE
KR102279607B1 (ko) * 2020-09-16 2021-07-20 한국생산기술연구원 양면 방전 플라즈마 발생 장치 및 시스템
WO2021171462A1 (ja) 2020-02-27 2021-09-02 東芝三菱電機産業システム株式会社 活性ガス生成装置

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008140584A (ja) * 2006-11-30 2008-06-19 National Institute Of Advanced Industrial & Technology 高温場用フレキシブル電極
JP2009078266A (ja) * 2007-09-09 2009-04-16 Kazuo Shimizu プラズマを用いた流体浄化方法および流体浄化装置
JP2009191739A (ja) * 2008-02-14 2009-08-27 Ngk Insulators Ltd プラズマ反応器、及びプラズマ反応装置
EP2091305A3 (en) * 2008-02-14 2011-11-09 NGK Insulators, Ltd. Plasma reactor and plasma reaction apparatus
JP2010142758A (ja) * 2008-12-19 2010-07-01 Daihatsu Motor Co Ltd 排気ガス浄化装置
CN104756334B (zh) * 2012-07-13 2017-05-10 Sp技术有限公司 在电极上设有导电体突出部的介质阻挡放电式的等离子产生电极结构
CN104756334A (zh) * 2012-07-13 2015-07-01 Sp技术有限公司 在电极上设有导电体突出部的介质阻挡放电式的等离子产生电极结构
JP2015527701A (ja) * 2012-07-13 2015-09-17 エスピー テック 電極上に導電体突出部を有する誘電体障壁放電方式のプラズマ発生電極構造体
WO2014083623A1 (ja) * 2012-11-28 2014-06-05 株式会社日立製作所 プラズマ処理装置
JP5638678B1 (ja) * 2013-09-10 2014-12-10 Ｐｍディメンションズ株式会社 液中誘電体バリア放電プラズマ装置および液体浄化システム
EP3002428A1 (en) * 2014-10-02 2016-04-06 Toyota Jidosha Kabushiki Kaisha Oil removal apparatus
WO2016051798A1 (en) * 2014-10-02 2016-04-07 Toyota Jidosha Kabushiki Kaisha Oil removal apparatus
CN104640338A (zh) * 2015-02-01 2015-05-20 华南理工大学 一种遥控式介质阻挡放电电极装置及使用方法
EP3389345A4 (en) * 2015-12-09 2019-05-01 NGK Spark Plug Co., Ltd. PLASMA REACTOR AND PLASMA ELECTROPLATE
CN107306472A (zh) * 2016-04-22 2017-10-31 车熙蒋 等离子体产生装置和利用它的新居综合症去除方法
CN107306472B (zh) * 2016-04-22 2019-07-30 车熙蒋 等离子体产生装置和利用它的新居综合症去除方法
WO2021171462A1 (ja) 2020-02-27 2021-09-02 東芝三菱電機産業システム株式会社 活性ガス生成装置
KR20210124393A (ko) 2020-02-27 2021-10-14 도시바 미쓰비시덴키 산교시스템 가부시키가이샤 활성 가스 생성 장치
US12295089B2 (en) 2020-02-27 2025-05-06 Tmeic Corporation Active gas generation apparatus
KR102279607B1 (ko) * 2020-09-16 2021-07-20 한국생산기술연구원 양면 방전 플라즈마 발생 장치 및 시스템

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