JP2007136254A - Head unit, liquid droplet discharge device equipped with the same and a manufacturing method of electo-optical apparatus, electo-optical apparatus, and electronic device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a head unit which can perform position adjustment of a functional liquid droplet discharge head loaded in a head plate, in a self-completion manner and to provide a liquid droplet discharge device equipped with the same. <P>SOLUTION: The head unit is provided with a pair of piezoelectric element units 33, 33 to finely transfer the functional liquid droplet discharge head 22 to X axis direction and Y axis direction, which are brought in contact with both end parts 31a, 31a of the head holding member 31, and a pair of head fixing mechanisms 34, 34 to fix the head holding member 31 to a head plate 32. Each head fixing mechanism 34 has a stator 58 to fix each end part 31a of the head holding member 31 to the head plate 32 and a stator transferring means 59 to transfer the stator 58 between the fixing position which fixes each end part 31a of the head holding member 31 to the head plate 32 and the half-fixing position which half fixes the stator 58 so that it is transferable. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a head unit in which a functional liquid droplet ejection head is attached to a head plate via a head holding member fixed to the functional liquid droplet ejection head, the liquid droplet ejection apparatus having the head unit, and a method of manufacturing an electro-optical device The present invention relates to an electro-optical device and an electronic apparatus.

As a conventional head unit, one in which a plurality of functional liquid droplet ejection heads are fixed to a single sub-carriage (head plate) is known (for example, see Patent Document 1). The head unit can be assembled by a dedicated assembly device. The assembly device engages with a mounting base for supporting the head plate and the functional liquid droplet ejection head so that the functional liquid droplet ejection head is in the X-axis direction. A motor-driven head position adjustment unit that moves in the Y-axis direction and the θ direction and an image acquisition unit that captures an image of the functional liquid droplet ejection head are provided.
When assembling the functional liquid droplet ejection head to the head plate, the functional liquid droplet ejection head is temporarily fixed to the head plate previously aligned on the installation table, and the functional liquid droplet ejection head is obtained by the image acquisition means. These two reference points are imaged, and the head portion position adjusting means is driven so that the imaging result matches the reference position on the data. As a result, the functional liquid droplet ejection head is positioned on the positioned sub-carriage. Further, in this state, the functional liquid droplet ejection head is temporarily fixed to the sub-carriage with an adhesive, and then permanently fixed by screwing.
JP 2001-162892 A

  However, in such a conventional head unit, since the position adjustment of the functional liquid droplet ejection head relative to the head plate can be performed only by the assembly apparatus, for example, after the head unit is mounted on the liquid droplet ejection apparatus, When the position of the functional liquid droplet ejection head is distorted (particularly in the θ direction) due to thermal expansion or the like, there is no way to deal with it.

  The present invention relates to a head unit capable of performing self-contained position adjustment of a functional droplet discharge head mounted on a head plate, a droplet discharge device including the head unit, a method of manufacturing an electro-optical device, and an electro-optical device. It is an object to provide electronic devices.

  The head unit of the present invention is a head unit in which a functional liquid droplet ejection head is attached to a head plate via a head holding member fixed to the functional droplet discharge head so as to be freely adjustable. A pair of piezoelectric element units that slightly move the droplet discharge head in the X-axis direction and the Y-axis direction in the plane of the head plate, and a pair of head holding members that are fixed to the head plate, facing both ends of the head holding member. A head fixing mechanism, and each head fixing mechanism includes a stator that fixes each end of the head holding member to the head plate, and a fixing position that fixes each end of the head holding member to the head plate. And a stator moving means that moves between a semi-fixed position that is semi-fixed so as to be movable.

  In this case, the stator moving means has an actuator, and the controller further controls the driving of the stator moving means, and the two piezoelectric element units are placed in a state where the stator is in the semi-fixed position by the stator moving means. It is preferable to drive.

  According to this configuration, the stator of the stator moving means is moved to the semi-fixed position, the head holding member is semi-fixed, the pair of piezoelectric element units are driven simultaneously or alternately, and both ends of the head holding member Is appropriately finely moved in the X-axis direction and the Y-axis direction. Accordingly, the position of the functional liquid droplet ejection head can be freely adjusted in the X axis direction, the Y axis direction, and the θ direction without using an external device. That is, the position adjustment of the functional liquid droplet ejection head mounted on the head plate can be performed in a self-contained manner. Therefore, with this mounted on a droplet discharge device or the like, the position of the functional droplet discharge head can be corrected and the angle of the functional droplet discharge head can be positively changed.

The actuator of the stator moving means is preferably any of a motor, a solenoid, a pneumatic cylinder, and a hydraulic cylinder. More specifically,
The stator moving means is composed of a lead screw that moves the stator between a fixed position and a semi-fixed position, and a motor that rotates the lead screw forward and backward,
Alternatively, the stator moving means is constituted by a solenoid that moves the stator between a fixed position and a semi-fixed position,
Or it is preferable to comprise a stator moving means with the pneumatic cylinder or hydraulic cylinder which moves a stator between a fixed position and a semi-fixed position.

  In this case, each piezoelectric element unit is in contact with each end of the head holding member in the Z-axis direction, and the X-axis piezoelectric element is incorporated in the contact head and vibrates the contact head in the X-axis direction. A Y-axis piezoelectric element that is incorporated in the contact head and vibrates the contact head in the Y-axis direction, a Z-axis piezoelectric element that is incorporated in the contact head and vibrates the contact head in the Z-axis direction, and an X-axis A controller that individually drives the piezoelectric element, the Y-axis piezoelectric element, and the Z-axis piezoelectric element, and the controller simultaneously drives the Z-axis piezoelectric element and the X-axis piezoelectric element with respect to the head holding member. It is preferable to perform forward / reverse movement adjustment in the X-axis direction and simultaneously drive the Z-axis piezoelectric element and the Y-axis piezoelectric element and perform forward / reverse movement adjustment in the Y-axis direction based on the phase difference.

  According to this configuration, by driving the Z-axis piezoelectric element and simultaneously driving the X-axis piezoelectric element and adjusting the phase difference between the vibration periods of the two, a small forward / reverse thrust is applied to the contact head. The For this reason, each end of the head holding member with which the abutting head abuts slightly moves in the forward and reverse directions in the X-axis direction. That is, the abutting head vibrates in the Z-axis direction by driving the Z-axis piezoelectric element and comes into contact with the head holding member, but at the timing of contact, the positive displacement of the vibration by the X-axis piezoelectric element is changed. When operated, the head holding member is slightly moved in the positive direction by the contact head. If a displacement in the direction opposite to the vibration caused by the X-axis piezoelectric element is applied at the subsequent separation timing, this displacement is not transmitted to the head holding member, and the head holding member maintains the same position. Since this operation is repeated as a vibration cycle, the head holding member moves slightly in the positive direction intermittently. Further, if the phase is shifted by 90 ° from this state, the head holding member moves slightly intermittently in the reverse direction. Similarly, by driving the Z-axis piezoelectric element and simultaneously driving the Y-axis piezoelectric element and adjusting the phase difference between the vibration periods of the two, each end of the head holding member with which the contact head abuts is A slight intermittent movement in the forward and reverse directions will occur. Thereby, the position adjustment of the functional liquid droplet ejection head can be performed accurately and freely. In order to impart vibration to the contact head in a well-balanced manner, it is preferable to incorporate a pair of X-axis piezoelectric elements and Y-axis piezoelectric elements respectively at positions facing the contact head. Further, it is preferable that the controller can change the vibration period, amplitude, applied voltage, and the like, and can control the moving amount (displacement amount) and speed of the intermittent movement.

  Similarly, each piezoelectric element unit is incorporated in a first abutting head that abuts each end of the head holding member in the Z-axis direction, and the first abutting head, and the first abutting head is disposed in the X-axis direction. An X-axis piezoelectric element unit that includes an X-axis piezoelectric element that vibrates, a Z-axis piezoelectric element that is incorporated in the first contact head and vibrates the first contact head in the Z-axis direction, and each end of the head holding member A second abutting head that abuts against the Z-axis direction, a Y-axis piezoelectric element that is incorporated in the second abutting head and vibrates in the Y-axis direction, and is incorporated in the second abutting head. A Y-axis piezoelectric element unit including a Z-axis piezoelectric element that vibrates the second contact head in the Z-axis direction, and a controller that individually drives the X-axis piezoelectric element, the Y-axis piezoelectric element, and both Z-axis piezoelectric elements. The controller has an X axis relative to the head holding member. The Z-axis piezoelectric element of the electric element unit and the X-axis piezoelectric element are simultaneously driven, and the movement of the Z-axis piezoelectric element of the Y-axis piezoelectric element unit and the Y-axis piezoelectric element are adjusted according to the phase difference. It is preferable to drive the two at the same time and perform forward / reverse movement adjustment in the Y-axis direction with the phase difference.

  According to this configuration, the first abutting head abuts by driving the Z-axis piezoelectric element of the X-axis piezoelectric element unit and simultaneously driving the X-axis piezoelectric element and adjusting the phase difference between the vibration periods of the two. Each end of the head holding member moves slightly in the forward and reverse directions in the X-axis direction. Similarly, by driving the Z-axis piezoelectric element of the Y-axis piezoelectric element unit and simultaneously driving the Y-axis piezoelectric element and adjusting the phase difference between the vibration periods of the two, the head holding member that contacts the second contact head Each of the end portions moves slightly in the forward and reverse directions in the Y-axis direction. Thereby, the position adjustment of the functional liquid droplet ejection head can be performed accurately and freely. In order to impart vibration to the contact heads in a balanced manner, it is preferable to incorporate a pair of X-axis piezoelectric elements and Y-axis piezoelectric elements one by one at positions facing each contact head. Further, it is preferable that the controller can change the vibration period, amplitude, applied voltage, and the like, and can control the moving amount (displacement amount) and speed of the intermittent movement.

  Another head unit according to the present invention is a head unit in which a functional liquid droplet ejection head is attached to a head plate via a head holding member fixed to the functional liquid droplet ejection head, and the functional liquid droplet ejection head is disposed via the head holding member. A micro-movement mechanism that slightly moves the ejection head in the X-axis direction and the Y-axis direction within the plane of the head plate, and a pair of head fixing mechanisms that face both ends of the head holding member and fix the head holding member to the head plate The fine movement mechanism is in contact with both ends of one long side of the head holding member and moves the functional liquid droplet ejection head slightly in the X-axis direction, and the other of the head holding member A pair of X-axis springs that urge the head holding member against each X-axis piezoelectric module and one short side of the head holding member. A Y-axis piezoelectric module that slightly moves the droplet discharge head in the Y-axis direction, a Y-axis spring that abuts against the other short side of the head holding member and biases the head holding member against the Y-axis piezoelectric module; A controller that individually drives both the X-axis piezoelectric module and the Y-axis piezoelectric module and controls the amount of displacement of both the X-axis piezoelectric module and the amount of displacement of the Y-axis piezoelectric module, and each head fixing mechanism includes: A stator for fixing each end of the head holding member to the head plate, and a stator between a fixing position for fixing each end of the head holding member to the head plate and a semi-fixed position for semi-movably fixing the stator. And a stator moving means for moving.

  In this case, the stator moving means has an actuator, and the controller further controls the driving of the stator moving means, and the stator moving means sets the pair of X-axis piezoelectric elements in the semi-fixed position. It is preferable to drive the module and the Y-axis piezoelectric module.

  According to this configuration, the stator of the stator moving means is moved to the semi-fixed position, the head holding member is semi-fixed, the minute movement mechanism is driven simultaneously or alternately, and both ends of the head holding member are moved to X A small amount is appropriately moved in the axial direction and the Y-axis direction. Specifically, by driving both X-axis piezoelectric modules based on the set displacement amount, the head holding member is slightly moved forward and backward in the X-axis direction by the X-axis spring or against the X-axis spring. Similarly, by driving the Y-axis piezoelectric module based on the set amount of displacement, the head holding member is slightly moved forward and backward in the Y-axis direction by the Y-axis spring or against the Y-axis spring. Further, the angle of the head holding member is changed in the θ direction by changing the displacement amount between the two X-axis piezoelectric modules. Accordingly, the position of the functional liquid droplet ejection head can be freely adjusted in the X axis direction, the Y axis direction, and the θ direction without using an external device. That is, the position adjustment of the functional liquid droplet ejection head mounted on the head plate can be performed in a self-contained manner. Therefore, with this mounted on a droplet discharge device or the like, the position of the functional droplet discharge head can be corrected and the angle of the functional droplet discharge head can be positively changed.

The actuator of the stator moving means is preferably any of a motor, a solenoid, a pneumatic cylinder, and a hydraulic cylinder. More specifically,
The stator moving means is composed of a lead screw that moves the stator between a fixed position and a semi-fixed position, and a motor that rotates the lead screw forward and backward,
Alternatively, the stator moving means is constituted by a solenoid that moves the stator between a fixed position and a semi-fixed position,
Or it is preferable to comprise a stator moving means with the pneumatic cylinder or hydraulic cylinder which moves a stator between a fixed position and a semi-fixed position.

  The liquid droplet ejection apparatus according to the present invention moves the head unit relative to the workpiece in synchronization with the above-described head unit, head driving means for driving the functional liquid droplet ejection head, and driving of the functional liquid droplet ejection head. And moving means.

  According to this configuration, the position of the functional liquid droplet ejection head in the X axis direction, the Y axis direction, and the θ direction can be adjusted with the head unit mounted on the liquid droplet ejection apparatus. Thus, the functional liquid droplet ejection head can be mounted with high accuracy. For this reason, the drawing accuracy by the functional liquid droplet ejection head can be increased, and the productivity can be improved.

  In this case, the image recognizing means for recognizing the functional liquid droplet ejection head and the recognition result of the image recognition are compared with the reference position data of the functional liquid droplet ejection head, so that the X axis direction and the Y axis direction of the functional liquid droplet ejection head It is preferable that a displacement amount obtaining unit for obtaining the displacement amount is further provided, and the pair of piezoelectric element units correct the position of the functional liquid droplet ejection head based on the displacement amount.

  According to this configuration, the pair of piezoelectric element units are driven simultaneously or alternately with respect to the deviation amount of the functional liquid droplet ejection head obtained by image recognition, and the functional liquid droplet ejection head is moved in the X axis direction, the Y axis direction, The position of the functional liquid droplet ejection head can be corrected with high accuracy by appropriately moving it in the θ direction. In addition, the minute movement of the liquid droplet ejection head that accompanies the position correction is based on vibration, so high accuracy is not required for each component device including the piezoelectric element unit, and the entire device is simple and compact. Can be configured. The shift amount may be corrected while recognizing the image in real time, or after correcting based on the shift amount at the initial stage of recognition, the image may be recognized again to check the correction result. Good.

  In these cases, it is preferable that the image recognition means is composed of a pair of imaging cameras that are positioned with respect to each other and simultaneously recognize two spaced points on the functional liquid droplet ejection head.

  According to this configuration, image recognition can be performed quickly and accurately, and as a result, the positioning accuracy of the functional liquid droplet ejection head can be increased.

  In these cases, the short-side direction of the functional liquid droplet ejection head is the X-axis direction and the long-side direction is the Y-axis direction, and in the θ-direction position correction, the Z-axis piezoelectric element and the X piezoelectric element of one piezoelectric element unit It is preferable to drive only the Z-axis piezoelectric element of the other piezoelectric element unit while driving the element.

  According to this configuration, since the other piezoelectric element unit vibrates in the Z direction, the frictional force of the contact head of this piezoelectric element unit against the functional liquid droplet ejection head is reduced, so that the position of the functional liquid droplet ejection head is corrected. (Θ correction) can be performed smoothly and efficiently.

  In these cases, the reference position data of the functional liquid droplet ejection head is set in place of the head plate, and can be obtained by image recognition of an alignment mask on which the reference position of the functional liquid droplet ejection head is patterned. preferable.

  This configuration is particularly useful when a plurality of functional liquid droplet ejection heads are accurately positioned on a single head plate.

  Another droplet discharge device of the present invention is configured to move the head unit relative to the workpiece in synchronization with the above-described head unit, a head drive unit that drives the functional droplet discharge head, and the drive of the functional droplet discharge head. And moving means for moving to.

  According to this configuration, the position of the functional liquid droplet ejection head in the X axis direction, the Y axis direction, and the θ direction can be adjusted with the head unit mounted on the liquid droplet ejection apparatus. Thus, the functional liquid droplet ejection head can be mounted with high accuracy. For this reason, the drawing accuracy by the functional liquid droplet ejection head can be increased, and the productivity can be improved.

  In this case, the image recognizing means for recognizing the functional liquid droplet ejection head and the recognition result of the image recognition are compared with the reference position data of the functional liquid droplet ejection head. And a displacement amount obtaining means for obtaining a displacement amount in the θ direction, and the minute movement mechanism preferably corrects the position of the functional liquid droplet ejection head based on the displacement amount.

  According to this configuration, the pair of the X-axis piezoelectric module and the Y-axis piezoelectric module of the minute movement mechanism are appropriately driven with respect to the deviation amount of the functional droplet discharge head obtained by image recognition, and the functional droplet discharge head is moved to X. The position of the active liquid droplet ejection head can be accurately corrected by appropriately moving it in the axial direction, the Y-axis direction, and the θ direction. In addition, since the minute movement of the liquid droplet ejection head accompanying the position correction is based on a minute displacement, high accuracy is required for each component device including the pair of X-axis piezoelectric module and Y-axis piezoelectric module. Therefore, the entire apparatus can be configured simply and compactly. The shift amount may be corrected while recognizing the image in real time, or after correcting based on the shift amount at the initial stage of recognition, the image may be recognized again to check the correction result. Good.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film forming portion is formed by a functional liquid on a workpiece using the above-described droplet discharge device.

  In addition, an electro-optical device according to the present invention is characterized in that the above-described droplet discharge device is used, and a film-forming portion made of a functional liquid is formed on a workpiece.

  According to these configurations, it is possible to manufacture a highly reliable electro-optical device by using a droplet discharge device that can improve productivity. As an electro-optical device (flat panel display: FPD), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. The electron emission device is a concept including a so-called FED (Field Emission Display) or SED (Surface-conduction Electron-Emitter Display) device. Further, as the electro-optical device, devices including metal wiring formation, lens formation, resist formation, light diffuser formation, and the like are conceivable.

  An electronic apparatus according to an aspect of the invention includes the electro-optical device manufactured by the above-described method for manufacturing the electro-optical device or the above-described electro-optical device.

  In this case, examples of the electronic device include a mobile phone and a personal computer equipped with a so-called flat panel display, and various electric products.

  Hereinafter, with reference to the accompanying drawings, a liquid droplet ejection apparatus to which a head unit according to an embodiment of the present invention is applied will be described. The droplet discharge device is incorporated in a production line such as a flat panel display, and a color filter or an organic EL device of a liquid crystal display device by a printing technique (inkjet method) using a functional droplet discharge head which is an inkjet head. A light emitting element or the like to be each pixel is formed.

  As shown in FIG. 1, the droplet discharge device 1 is an XY comprising a machine base 2 and a Y-axis table 9 that is widely mounted on the whole area of the machine base 2 and orthogonal to the X-axis table 8. A drawing unit 4 movably attached to a moving mechanism (moving means) 3 and a Y-axis table 9 and equipped with a functional liquid droplet ejection head 22, and a suction unit 5 attached to the drawing unit 4 on the machine base 2 And a control device 6 (see FIG. 2) for overall control of these constituent devices.

  In this case, the suction unit 5 performs maintenance processing (function maintenance / recovery) of the functional liquid droplet ejection head 22, and the drawing unit 4 ejects functional liquid droplets on the substrate W (work) based on the drawing data. Perform drawing operations. The control device 6 controls the driving of the drawing unit 4 including the driving of the functional liquid droplet ejection head 22 (head driving means), the driving of the XY moving mechanism 3 and the driving of the suction unit 5, and a head unit 21 described later. The drive system mounted on is controlled (see FIG. 2).

  The X-axis table 8 has a motor-driven X-axis slider 10 that constitutes a drive system in the X-axis direction, and a set table 13 including a suction table 11 and a substrate θ table 12 is movably mounted thereon. It is configured. The Y-axis table 9 constitutes a drive system in the Y-axis direction and includes a motor-driven Y-axis slider 14 on which the drawing unit 4 is movably mounted. The X-axis table 8 is directly supported on the machine base 2, while the Y-axis table 9 is supported by left and right support columns 16, 16 erected on the machine base 2. It extends to straddle five.

  The Y-axis table 9 includes the drawing unit 4 mounted on the Y-axis table 9 between the drawing area 17 positioned immediately above the X-axis table 8 and the maintenance area 18 positioned directly above the suction unit 5. Move as appropriate. That is, the Y-axis table 9 is used when performing the drawing operation on the substrate W introduced into the X-axis table 8, when the drawing unit 4 faces the drawing area 17 and the maintenance process of the functional liquid droplet ejection head 22 is performed. Causes the drawing unit 4 to face the maintenance area 18.

  The drawing unit 4 includes a carriage 20 that is movably attached to the Y-axis table 9 and a head unit 21 that is suspended from the carriage 20. A functional droplet discharge head 22 is mounted on the head unit 21. In the present embodiment, a single functional droplet discharge head 22 is mounted, but the number thereof is arbitrary.

On the other hand, although not shown in FIG. 1, a substrate recognition device for recognizing the position of the substrate W from above is mounted on the end of the X-axis table 8, and the substrate recognition device is composed of a pair of substrate recognition cameras positioned relative to each other. Has been. The pair of substrate recognition cameras are disposed at positions corresponding to the two reference positions (alignment marks) of the substrate W, and recognize the position of the substrate W by recognizing the two reference positions.
Similarly, although omitted in FIG. 1, the X-axis table 8 has a head recognition device (image recognition means) 24 that is positioned immediately below the head unit 21 that has moved to the home position and recognizes the substrate W from below. It is installed. The head recognizing device 24 is composed of a pair of head recognizing cameras (imaging cameras) 25 and 25 positioned in close proximity to each other (see FIG. 2). The pair of head recognition cameras 25 and 25 recognize the position of the functional liquid droplet ejection head 22 by recognizing images of two alignment marks 52 and 52 of the functional liquid droplet ejection head 22 described later. When a plurality of functional liquid droplet ejection heads 22 are mounted on the head unit 21, the head recognition device 24 is movable.

The recognition result of the substrate recognition device and the recognition result of the head recognition device 24 are compared with the reference position data stored in the memory 6a of the control device 6 described above. The amount of deviation is acquired. Based on these deviation amounts, the substrate W is subjected to physical angle correction by the substrate θ table 12 and correction of drawing data in the X-axis direction and Y-axis direction. Similarly, the functional liquid droplet ejection head 22 performs physical position correction in the X-axis direction, the Y-axis direction, and the θ-direction by a pair of piezoelectric element units 33 and 33 described later.
On the other hand, the reference position data stored in the control device 6 is obtained from the alignment pattern of the alignment mask mounted on the carriage 20 instead of the head unit 21.

  In the droplet discharge device 1 configured as described above, the substrate recognition device and the head recognition device 24 perform position correction of the substrate W and the functional droplet discharge head 22 and enter a driving standby state. In the drawing operation on the substrate W, the set table 13 on which the substrate W is mounted is moved in the X-axis direction, and the functional liquid droplet ejection head 22 is driven in synchronization with this, thereby causing the substrate W to be driven based on the drawing data. Scanning (discharge of functional liquid droplets) is performed. Next, the functional liquid droplet ejection head 22 is sub-scanned by moving the carriage 20 in the Y-axis direction. Then, desired drawing based on the drawing data is performed on the substrate W by repeating this main scanning and sub-scanning.

  Next, the head unit 21 will be described in detail with reference to FIGS. 2 and 3. The head unit 21 includes a functional liquid droplet ejection head 22, a head holding member 31 to which the functional liquid droplet ejection head 22 is fixed, and a head in which the functional liquid droplet ejection head 22 is attached via the head holding member 31 so that the position can be adjusted. A pair of piezoelectric element units 33 and 33 that move the functional liquid droplet ejection head 22 in the X-axis direction and the Y-axis direction with respect to the head plate 32, and a head holding member 31 fixed to the head plate 32. A pair of head fixing mechanisms 34, 34.

  As shown in FIG. 4, the functional liquid droplet ejection head 22 includes a functional liquid introduction unit 42 having two connection needles 41, a double head substrate 43 connected to the functional liquid introduction unit 42, and a functional liquid introduction. The head main body 44 is provided below the portion 42 and has an in-head flow path filled with a functional liquid. Each connection needle 41 is connected to a liquid supply tank via a liquid supply tube (not shown), and supplies the functional liquid to the flow path in the head of the functional liquid droplet ejection head 22. The head substrate 43 is provided with a pair of connectors 45 and 45 connected to the control device 6 by a flexible flat cable.

  The head main body 44 includes a pump unit 47 formed of a piezoelectric element or the like, and a nozzle plate 49 having a nozzle surface 49a in which two nozzle rows 48 are formed in parallel to each other. In each nozzle row 48, a plurality of discharge nozzles 51 are arranged at an equal pitch, and the discharge nozzles 51 of both nozzle rows 48 are arranged so as to be shifted from each other by a half pitch. Then, by applying the drive waveform generated by the control device 6 to the pump unit 47 via the connector 45, functional droplets are ejected from each ejection nozzle 51. Further, the nozzle plate 49 is made of stainless steel or the like, and the nozzle surface 49a has each of the discharge nozzles 51 open, and is positioned in the vicinity of both end portions of the one nozzle row 48. 52 is formed. Then, the position of the functional liquid droplet ejection head 22 is recognized by recognizing the images of the two alignment marks 52 and 52 by the pair of head recognition cameras 25 and 25 of the head recognition device 24. However, when the alignment mark 52 is not provided, the two discharge nozzles 51 and 51 located at the outermost end portion of the nozzle row 48 may be image-recognized. Reference numeral 53 in the drawing is a pair of screw holes (only one is shown) for fixing the functional liquid droplet ejection head 22 to the head holding member 31.

As shown in FIG. 2 and FIG. 3, the head holding member 31 is formed of a stainless steel plate or the like having a rectangular shape in a top view in which an intermediate portion in the long side direction is bent in a “U” shape. A square opening 56 into which the functional liquid droplet ejection head 22 is loosely fitted is formed at the center of. The functional liquid droplet ejection head 22 is screwed and fixed to the head holding member 31 while being loosely fitted downward in the rectangular opening 56.
The head plate 32 is formed of a rectangular thick plate such as stainless steel, and a mounting opening 57 in which the “U” -shaped portion 55 of the head holding member 31 is mounted is formed at the center thereof. The head holding member 31 is attached to the attachment opening 57 so that the functional liquid droplet ejection head 22 faces downward, and the upper surface of the head plate 32 is formed by the pair of head fixing mechanisms 34 and 34 at both ends 31a and 31a. It is fixed to.

  The pair of head fixing mechanisms 34, 34 are disposed so as to hold down both end portions 31a, 31a of the head holding member 31, and are driven by the control means 6 in synchronism with each other. Each head fixing mechanism 34 includes a stator 58 that fixes each end 31 a of the head holding member 31 to the head plate 32, and a stator 58 that fixes each end 31 a of the head holding member 31 to the head plate 32. And a stator moving means 59 that moves between a position and a semi-fixed position that is semi-fixed so as to be movable.

  Although not shown, the stator moving means 59 includes, for example, a lead screw that moves the stator 58 between a fixed position and a semi-fixed position, and a motor that rotates the lead screw forward and backward. The stator moving means 59 is composed of a solenoid that moves the stator 58 between a fixed position and a semi-fixed position. Alternatively, the stator moving means 59 is configured such that the stator 58 is fixed to a fixed position and a semi-fixed position. You may make it comprise with the pneumatic cylinder or hydraulic cylinder moved between. In this case, when the stator 58 is moved to the fixed position, the head holding member 31 is fixedly fixed to the head plate 32, and when the stator 58 is moved to the semi-fixed position, the head holding member 31 is movable with respect to the head plate 32. Temporarily fixed. Then, the position of the head holding member 31 can be adjusted by driving the pair of piezoelectric element units 33 and 33 in the temporarily fixed state.

  The pair of piezoelectric element units 33 and 33 are located in the vicinity of the mounting opening 57 and are embedded in the upper surface of the head plate 32, and are in contact with both end portions 31 a and 31 a of the head holding member 31 from below. . As shown in FIG. 5, each piezoelectric element unit 33 includes an abutting head 61 including a head body 62 and an oscillating body 63 that abut against each end 31 a of the head holding member 31 from the lower side (Z-axis direction). A pair of X-axis piezoelectric elements 64 and 64 that are incorporated in the vibrating body 63 and vibrate the abutting head 61 in the X-axis direction, and a pair of Y-axis piezoelectric elements that are incorporated in the vibrating body 63 and vibrate the abutting head 61 in the Y-axis direction. Elements 65, 65, a Z-axis piezoelectric element 66 that is incorporated in the vibrating body 63 and vibrates the contact head 61 in the Z-axis direction, and a housing 67 that houses these piezoelectric elements 64, 65, 66 and the contact head 61. And the above-described control device (part) 6 for individually driving both the X-axis piezoelectric elements 64, both the Y-axis piezoelectric elements 65, and the Z-axis piezoelectric elements 66.

  The head main body 62 and the vibrating body 63 are formed integrally or separately from a metal or the like that easily propagates vibration, and the contact surface 62a of the head main body 62 is moved between the head holding member 31 and the head main body 62. The surface is roughened in order to exhibit sufficient frictional force. The vibrating body 63 is formed in a rectangular parallelepiped block shape, a pair of X-axis piezoelectric elements 64, 64 on both side surfaces in the X-axis direction, a pair of Y-axis piezoelectric elements 65, 65 on both side surfaces in the Y-axis direction, and a lower surface. Z-axis piezoelectric elements 66 are respectively attached. In this case, each X-axis piezoelectric element 64, each Y-axis piezoelectric element 65, and Z-axis piezoelectric element 66 are all formed in a thick plate shape, and vibration due to displacement (amplitude) in the thickness direction is applied to the vibrating body 63. It is supposed to be. Each X-axis piezoelectric element 64, each Y-axis piezoelectric element 65, and Z-axis piezoelectric element 66 can also be configured by a plurality of piezoelectric elements. In addition, one of the pair of X-axis piezoelectric elements 64 and 64 and one of the pair of Y-axis piezoelectric elements 65 and 65 may be omitted.

  In this case, the contact head 61 vibrates in the Z-axis direction (vertical direction) by driving the Z-axis piezoelectric element 66 at a predetermined cycle. As a result, the contact surface 62 a of the contact head 61 is minutely separated from the surface of the head holding member 31. Further, by driving both the X-axis piezoelectric elements 64, 64 in a predetermined cycle and in synchronization, the contact head 61 vibrates in the X-axis direction. Similarly, by driving both Y-axis piezoelectric elements 65, 65 in a predetermined cycle and in synchronization, the contact head 61 vibrates in the Y-axis direction.

  Here, when the Z-axis piezoelectric element 66 and the two X-axis piezoelectric elements 64 and 64 are simultaneously driven with an appropriate phase difference in their periods, each end of the head holding member 31 that is in contact with the contact head 61 is used. The portion 31a can be moved forward and backward slightly (intermittent movement) in the X-axis direction. Specifically, the positive displacement of the X-axis vibration is synchronized with the timing when the contact head 61 that vibrates in the Z-axis contacts the head holding member 31, and the reverse direction of the X-axis vibration is synchronized with the separation timing. Synchronize the displacement. Since the power transmission of the contact head 61 to the head holding member 31 is only in contact, the head holding member 31 performs a slight intermittent movement in the positive direction of the X axis. In contrast to the above, if the X-axis vibration has a phase difference of 90 °, the head holding member 31 moves slightly in the reverse direction of the X-axis. In exactly the same manner, when the Z-axis piezoelectric element 66 and the two Y-axis piezoelectric elements 65 and 65 are simultaneously driven with an appropriate phase difference in their periods, each of the head holding members 31 that are in contact with the contact head 61 will be described. The end 31a can be moved forward and backward slightly (intermittent movement) in the Y-axis direction.

  Therefore, when the head holding member 31 is moved and adjusted in the X-axis direction, the control device 6 of the embodiment drives the Z-axis piezoelectric element 66 and the two X-axis piezoelectric elements 64 and 64 of both the piezoelectric element units 33 and 33. In addition, the forward and reverse directions are controlled by adjusting the phase. Similarly, when moving and adjusting the head holding member 31 in the Y-axis direction, the Z-axis piezoelectric element 66 and the two Y-axis piezoelectric elements 65 and 65 of both the piezoelectric element units 33 and 33 are driven and their phases are adjusted. By doing so, the forward and reverse directions are controlled. Further, when adjusting the angle of the head holding member 31 in the θ direction, the Z-axis piezoelectric element 66 and the X-axis piezoelectric element 64 of the other piezoelectric element unit 33 are moved with the driving of one piezoelectric element unit 33 stopped. I try to drive it. However, in order to smoothly adjust the angle, only the Z-axis piezoelectric element 66 may be driven without stopping one of the piezoelectric element units 33. In addition, if the Z-axis piezoelectric element 66, the X-axis piezoelectric element 64, and the Y-axis piezoelectric element 65 are simultaneously driven, the head holding member 31 can be moved and adjusted in a direction that makes 45 ° with the X-axis direction (Y-axis direction). Needless to say. It is more preferable to adjust the vibration period, amplitude, applied voltage, and the like in order to adjust the moving speed, the pitch of intermittent movement, and the like.

  Next, a case where the functional liquid droplet ejection head 22 is aligned in a state where the above-described head unit is mounted on the liquid droplet ejection apparatus 1 will be described. As shown in FIG. 2, the head unit 21 is moved directly above the head recognition device 24 in advance. In this state, first, the pair of head fixing mechanisms 34 are driven to change the head holding member 31 from the permanently fixed state to the temporarily fixed state. Next, the two alignment marks 52 and 52 of the functional liquid droplet ejection head 22 are image-recognized by the pair of head recognition cameras 25 and 25. This recognition result is input to the control device 6, and is compared with the reference position data of the alignment marks 52, 52 stored in the memory 6a by the CPU (deviation amount acquisition means) 6b, and the X of the functional liquid droplet ejection head 22 is compared. The shift amounts in the axial direction, the Y-axis direction, and the θ direction are grasped.

  Based on these deviation amounts, the control device 6 appropriately drives the pair of piezoelectric element units 33 and 33 as described above, and corrects the position of the functional liquid droplet ejection head 22 via the head holding member 31. When the position correction is completed, the confirmation image recognition is performed again by the both head recognition cameras 25 and 25, and the correction operation is completed if the position correction result matches the target value. If the position correction result does not match the target value, the above operation is repeated. In this manner, when the correction operation is completed, the pair of head fixing mechanisms 34 and 34 are driven again to return the head holding member 31 from the temporarily fixed state to the permanently fixed state.

  In such a configuration, the pair of piezoelectric element units 33 and 33 can accurately position (align) the functional liquid droplet ejection head 22 via the head holding member 31. Further, since the minute movement of the active liquid droplet ejection head 22 accompanying the position correction is based on vibration, high accuracy is not required for each component device itself including the piezoelectric element unit 33, and the entire device is simplified. And it can comprise compactly. Moreover, since the positioning of the functional liquid droplet ejection head 22 mounted on the head plate 32 can be performed in a self-contained manner as an operation in the head unit 21, a head assembly that separately incorporates the functional liquid droplet ejection head 22 into the head plate 32. There is no need for equipment.

Next, a piezoelectric element unit 33 according to a modification of the first embodiment will be described with reference to FIG. The piezoelectric element unit 33 individually drives the X-axis piezoelectric element unit 33A, the Y-axis piezoelectric element unit 33B, the casing 67 that accommodates both the piezoelectric element units 33A and 33B, and both the piezoelectric element units 33A and 33B. And a part of the control device 6 described above.
The X-axis piezoelectric element unit 33 </ b> A includes a first contact head 61 </ b> A composed of a head body 62 and a vibrating body 63 that contact each end 31 a of the head holding member 31 from the lower side (Z-axis direction), and a vibrating body 63. A pair of X-axis piezoelectric elements 64 and 64 that are incorporated to vibrate the first abutting head 61A in the X-axis direction, and a Z-axis piezoelectric element 66 that is incorporated in the vibrating body 63 and vibrates in the Z-axis direction. And is composed of.
Similarly, the Y-axis piezoelectric element unit 33B includes a second abutting head 61B composed of a head body 62 and a vibrating body 63 that abut each end 31a of the head holding member 31 from the lower side (Z-axis direction), and a vibration body 63B. A pair of Y-axis piezoelectric elements 65 and 65 that are incorporated in the body 63 and vibrate the second contact head 61B in the Y-axis direction, and a Z-axis that is incorporated in the vibration body 63 and vibrates the second contact head 61B in the Z-axis direction. And a piezoelectric element 66.

In this case, the Z-axis piezoelectric element 66 and both X-axis piezoelectric elements 64 and 64 of the X-axis piezoelectric element unit 33A are driven simultaneously, and the forward / reverse movement adjustment in the X-axis direction is performed by the phase difference, and the Y-axis The Z-axis piezoelectric element 66 and both Y-axis piezoelectric elements 65, 65 of the piezoelectric element unit 33B are driven simultaneously, and the forward / reverse movement adjustment in the Y-axis direction is performed by the phase difference.
Even in such a configuration, similarly to the piezoelectric element unit 33 of the first embodiment, by using the pair of piezoelectric element units 33 and 33, the functional liquid droplet ejection head 22 is accurately positioned via the head holding member 31. (Alignment).

  Next, a head unit 21A according to the second embodiment will be described with reference to FIGS. The head unit 21A of this embodiment includes a functional liquid droplet ejection head 22, a head holding member 31, a head plate 32, and a pair of head fixing mechanisms 34, 34, as in the first embodiment, and the head unit 21A of the first embodiment. Instead of the pair of piezoelectric element units 33, 33, a minute movement mechanism 70 is provided. Each head fixing mechanism 34 in this case is arranged so as to straddle the end portion 31a of the head holding member 31 in the transverse direction (X-axis direction), and the stator 58 and the stator moving means similar to those in the first embodiment. 59 is built-in.

  The minute movement mechanism 70 is in contact with both long sides 31b and 31b of one long side of the head holding member 31, and a pair of X-axis piezoelectric modules 71 and 71 that slightly move the functional liquid droplet ejection head 22 in the X-axis direction. A pair of X-axis springs 72, 72 that abut against both ends 31 b, 31 b of the other long side of the head holding member 31 and bias the head holding member 31 against each X-axis piezoelectric module 71, and the head holding member A Y-axis piezoelectric module 73 that makes contact with one short side 31c of the head 31 and moves the functional liquid droplet ejection head 22 slightly in the Y-axis direction, and a Y-axis piezoelectric module 73 that makes contact with the other short side of the head holding member 31. And a Y-axis spring 74 that urges the head holding member 31 against the above, and the control device (part) 6 that individually drives both the X-axis piezoelectric modules 71 and 71 and the Y-axis piezoelectric module 74. Been That.

  Each of the X-axis piezoelectric module 71 and the Y-axis piezoelectric module 73 has a module main body 76 and a push rod 77 protruding from the module main body 76, and is fixed to the upper surface of the head plate 32 by the module main body 76. The tip is in contact with the head holding member 31. The protrusion (displacement amount) of the push rod 77 is controlled by the control device 6 within a predetermined range. Each X-axis spring 72 and Y-axis spring 74 is constituted by a coil spring or the like, and is fixed to the upper surface of the head plate 32 at one end and abuts against the head holding member 31 at the other end.

  In this case, by driving both the X-axis piezoelectric modules 71 based on the displacement amount serving as the control amount, the head holding member 31 moves forward and backward in the X-axis direction by the X-axis spring 72 or against the X-axis spring 72. Move a little. That is, as the push rods 77 advance and retreat, the end portions 31a of the head holding member 31 that are in contact with the push rods 77 can be slightly moved forward and backward in the X-axis direction. Similarly, by driving the Y-axis piezoelectric module 73 based on the amount of displacement, the head holding member 31 moves slightly forward and backward in the Y-axis direction by the Y-axis spring 74 or against the Y-axis spring 74. That is, as the push rod 77 advances and retreats, the end portion 31a of the head holding member 31 in contact with the push rod 77 can be moved forward and backward slightly in the Y-axis direction. Further, the head holding member 31 can be angle-changed in the θ direction by changing the displacement amount between the two X-axis piezoelectric modules 71 and 71. In this case as well, if the X-axis piezoelectric module 71 and the Y-axis piezoelectric module 73 are driven simultaneously, the head holding member 31 can be moved and adjusted in the direction of 45 ° with the X-axis direction (Y-axis direction). .

  Next, the case where the functional liquid droplet ejection head 22 is aligned in a state where the head unit 21A of the second embodiment is mounted on the liquid droplet ejection apparatus 1 will be described. As shown in FIG. 7, first, the pair of head fixing mechanisms 34, 34 are driven to change the head holding member 31 from the permanently fixed state to the temporarily fixed state, and the pair of head recognition cameras 25, 25 discharges functional liquid droplets. The two alignment marks 52 and 52 of the head 22 are image-recognized. This recognition result is input to the control device 6, and is compared with the reference position data of the alignment marks 52, 52 stored in the memory 6a by the CPU (deviation amount acquisition means) 6b, and the X of the functional liquid droplet ejection head 22 is compared. The shift amounts in the axial direction, the Y-axis direction, and the θ direction are grasped. Based on these deviation amounts, the control device 6 appropriately drives the minute movement mechanism 70 as described above, and corrects the position of the functional liquid droplet ejection head 22 via the head holding member 31. The subsequent operations are the same as those in the first embodiment.

  In such a configuration, the functional liquid droplet ejection head 22 can be accurately positioned (aligned) via the head holding member 31 by the minute movement mechanism 70 having both the X and Y axis piezoelectric modules 71 and 73. In addition, high accuracy is not required for each component device including the X and Y axis piezoelectric modules 71 and 73, and the entire device can be configured simply and compactly. In addition, since the functional liquid droplet ejection head 22 mounted on the head plate 21A can be positioned in a self-contained manner, it is necessary to separately provide a head assembly apparatus that incorporates the functional liquid droplet ejection head 22 into the head plate 32. Absent.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device or the like will be described. FIG. 9 is a flowchart showing the manufacturing process of the color filter, and FIG. 10 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 10B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 10C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the partition wall 507b partitioning each pixel region 507a, and in the subsequent colored layer forming process, the colored liquid layers (film forming portions) 508R, 508G, When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 10 (d), functional droplets are ejected by the functional droplet ejection head 22 and each pixel region 507a is surrounded by the partition wall portion 507b. Make it land. In this case, the functional liquid droplet ejection head 22 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 10E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 11 is a cross-sectional view of a principal part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 10, the corresponding parts are denoted by the same reference numerals, and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 (liquid crystal layer side) of the color filter 500, a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 11 are formed at a predetermined interval. A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. In addition, the above-described sealing material 529 can be printed by the functional liquid droplet ejection head 22. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 22.

FIG. 12 is a cross-sectional view of a principal part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 13 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 14 is a cross-sectional view of a main part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 15, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), and a counter It is manufactured through an electrode forming step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 16, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film by a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, an organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to the lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by, for example, plasma treatment using oxygen as a treatment gas. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b, and the surface is fluorinated (treated to be liquid repellent) by plasma treatment using, for example, tetrafluoromethane as a processing gas. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 22, the functional liquid droplets can be landed more reliably on the pixel area, and can be landed on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 13 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 18, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 22 to each opening 619 that is a pixel region. Discharge inside. After that, as shown in FIG. 19, a drying process and a heat treatment are performed, the polar solvent contained in the first composition is evaporated, and a hole injection / transport layer 617a is formed on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 20, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 20)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process or the like, the discharged second composition is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 21, the hole injection / transport layer 617a A light emitting layer 617b is formed thereon. In this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 22, as shown in FIG. 22, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 23, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as an electrode, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 24 is an exploded perspective view of an essential part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are disposed at the bottom of the blue discharge chamber 705B and the bottom, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 13 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 22. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode forming regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional droplet ejection head 22, and corresponding. Land in the color discharge chamber 705.

Next, FIG. 25 is a cross-sectional view of an essential part of an electron emission device (also referred to as an FED device or an SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 26A, and when these are formed, as shown in FIG. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the above-described droplet discharge device 1 for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is a schematic plan view of a droplet discharge device according to an embodiment. It is a side surface schematic diagram of the head unit concerning an embodiment. It is a plane schematic diagram of the head unit concerning an embodiment. It is an external perspective view of a functional liquid droplet ejection head mounted on the liquid droplet ejection apparatus. 1 is a structural diagram of a piezoelectric element unit according to a first embodiment. FIG. 6 is a structural diagram of a piezoelectric element unit according to a modification of the first embodiment. It is a side surface schematic diagram of the head unit concerning a 2nd embodiment. FIG. 6 is a schematic plan view of a head unit according to a second embodiment. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 Droplet discharge device, 3 XY movement mechanism, 4 Drawing unit, 6 Control apparatus, 6a Memory, 6b CPU, 13 Set table, 20 Carriage, 21, 21A head unit, 22 Function droplet discharge head, 24 Head recognition apparatus 25 Head recognition camera, 31 head holding member, 31a end, 31b end, 31c short side, 32 head plate, 33 piezoelectric element unit, 33A X axis piezoelectric element unit, 33B Y axis piezoelectric element unit, 34 head fixing mechanism, 51 Discharge nozzle, 52 alignment mark, 58 stator, 59 stator moving means, 61 contact head, 61A first contact head, 61B second contact head, 64 X axis piezoelectric element, 65 Y axis piezoelectric element, 66 Z Axis Piezoelectric Element, 70 Minute Movement Mechanism, 71 X-Axis Piezoelectric Module, 72 X Axial spring, 73 Y-axis piezoelectric module, 74 Y-spring, W substrate

Claims (16)

A head unit in which a functional liquid droplet ejection head is attached to a head plate through a head holding member fixed to the functional liquid droplet ejection head so as to be adjustable in position.
A pair of piezoelectric element units that are in contact with both ends of the head holding member and slightly move the functional liquid droplet ejection head in the X-axis direction and the Y-axis direction in the plane of the head plate;
A pair of head fixing mechanisms facing both ends of the head holding member, and fixing the head holding member to the head plate,
Each of the head fixing mechanisms includes a stator that fixes each end of the head holding member to the head plate, a stator, and a fixed position that moves each end of the head holding member to the head plate. And a stator moving means for moving between a semi-fixed position where it can be semi-fixed. Each piezoelectric element unit includes a contact head that contacts each end of the head holding member in the Z-axis direction;
An X-axis piezoelectric element that is incorporated in the contact head and vibrates the contact head in the X-axis direction;
A Y-axis piezoelectric element that is incorporated in the contact head and vibrates the contact head in the Y-axis direction;
A Z-axis piezoelectric element that is incorporated in the contact head and vibrates the contact head in the Z-axis direction;
A controller that individually drives the X-axis piezoelectric element, the Y-axis piezoelectric element, and the Z-axis piezoelectric element;
The controller drives the Z-axis piezoelectric element and the X-axis piezoelectric element simultaneously with respect to the head holding member to perform forward / reverse movement adjustment in the X-axis direction based on the phase difference between the Z-axis piezoelectric element and the Z-axis piezoelectric element. 2. The head unit according to claim 1, wherein the Y-axis piezoelectric element is driven at the same time, and forward / reverse movement adjustment in the Y-axis direction is performed based on the phase difference. Each piezoelectric element unit is incorporated in a first abutting head that abuts each end of the head holding member in the Z-axis direction, and the first abutting head. An X-axis piezoelectric element unit including: an X-axis piezoelectric element that vibrates in a first direction; and a Z-axis piezoelectric element that is incorporated in the first contact head and vibrates the first contact head in the Z-axis direction;
A second abutting head that abuts each end of the head holding member in the Z-axis direction, and a Y-axis piezoelectric element that is incorporated in the second abutting head and vibrates in the Y-axis direction. A Y-axis piezoelectric element unit that includes a Z-axis piezoelectric element that is incorporated in the second abutting head and vibrates the second abutting head in the Z-axis direction;
A controller that individually drives the X-axis piezoelectric element, the Y-axis piezoelectric element, and both the Z-axis piezoelectric elements,
The controller drives the Z-axis piezoelectric element and the X-axis piezoelectric element of the X-axis piezoelectric element unit simultaneously with respect to the head holding member, and performs forward / reverse movement adjustment in the X-axis direction based on the phase difference. 2. The head according to claim 1, wherein the Z-axis piezoelectric element and the Y-axis piezoelectric element of the Y-axis piezoelectric element unit are driven at the same time, and forward / reverse movement adjustment in the Y-axis direction is performed based on the phase difference. unit. The stator moving means has an actuator,
The controller further controls the driving of the stator moving means;
4. The head unit according to claim 2, wherein the piezoelectric element units are driven by the stator moving means in a state where the stator is in the semi-fixed position. 5. A head unit in which a functional liquid droplet ejection head is attached to a head plate through a head holding member fixed to the functional liquid droplet ejection head so as to be adjustable in position.
A minute movement mechanism that minutely moves the functional liquid droplet ejection head in the X-axis direction and the Y-axis direction in the plane of the head plate via the head holding member;
A pair of head fixing mechanisms facing both ends of the head holding member, and fixing the head holding member to the head plate,
The micro movement mechanism is in contact with both ends of one long side of the head holding member, and moves the functional liquid droplet ejection head in the X axis direction, and the other of the head holding member. A pair of X-axis springs that abut against both end portions of the long side, urge the head holding member against each of the X-axis piezoelectric modules, and a short side of one of the head holding members; A Y-axis piezoelectric module that slightly moves the droplet discharge head in the Y-axis direction, and a Y-axis that abuts against the other short side of the head holding member and biases the head holding member against the Y-axis piezoelectric module And a controller that individually drives the X-axis piezoelectric module and the Y-axis piezoelectric module, and controls the displacement amount of the X-axis piezoelectric module and the displacement amount of the Y-axis piezoelectric module, respectively. Have,
Each of the head fixing mechanisms includes a stator that fixes each end of the head holding member to the head plate, a stator, and a fixed position that moves each end of the head holding member to the head plate. And a stator moving means for moving between a semi-fixed position where it can be semi-fixed. The stator moving means has an actuator,
The controller further controls the driving of the stator moving means;
6. The head unit according to claim 5, wherein the pair of X-axis piezoelectric module and the Y-axis piezoelectric module are driven by the stator moving means in a state where the stator is in the semi-fixed position. A head unit according to any one of claims 1 to 4,
Head driving means for driving the functional liquid droplet ejection head;
And a moving means for moving the head unit relative to the work in synchronization with the driving of the functional liquid droplet discharging head. Image recognition means for recognizing the functional liquid droplet ejection head;
A deviation amount acquisition means for comparing a recognition result of image recognition with reference position data of the functional liquid droplet ejection head to obtain a deviation amount of the functional liquid droplet ejection head in the X axis direction, the Y axis direction, and the θ direction; In addition,
The liquid droplet ejection apparatus according to claim 7, wherein the pair of piezoelectric element units corrects the position of the functional liquid droplet ejection head based on the shift amount.   9. The liquid according to claim 7, wherein the image recognizing unit includes a pair of imaging cameras that are positioned with respect to each other and simultaneously recognize two spaced apart points in the functional liquid droplet ejection head. Drop ejection device. The short side direction of the functional liquid droplet ejection head is the X-axis direction and the long side direction is the Y-axis direction,
The position correction in the θ direction drives the Z-axis piezoelectric element and the X piezoelectric element of one of the piezoelectric element units and drives only the Z-axis piezoelectric element of the other piezoelectric element unit. The droplet discharge device according to any one of 7 to 9.   The reference position data of the functional liquid droplet ejection head is set in place of the head plate, and is obtained by image recognition of an alignment mask in which the reference position of the functional liquid droplet ejection head is patterned. The droplet discharge device according to claim 7. The head unit according to claim 5 or 6,
Head driving means for driving the functional liquid droplet ejection head;
And a moving means for moving the head unit relative to the work in synchronization with the driving of the functional liquid droplet discharging head. Image recognition means for recognizing the functional liquid droplet ejection head;
A deviation amount acquisition means for comparing a recognition result of image recognition with reference position data of the functional liquid droplet ejection head to obtain a deviation amount of the functional liquid droplet ejection head in the X axis direction, the Y axis direction, and the θ direction; In addition,
The liquid droplet ejection apparatus according to claim 12, wherein the minute movement mechanism corrects a position of the functional liquid droplet ejection head based on the shift amount.   14. A method of manufacturing an electro-optical device, wherein the droplet discharge device according to claim 7 is used to form a film forming portion with a functional liquid on a workpiece.   An electro-optical device using the droplet discharge device according to claim 7, wherein a film-forming portion made of a functional liquid is formed on a workpiece.   An electronic apparatus comprising the electro-optical device manufactured by the method for manufacturing the electro-optical device according to claim 14 or the electro-optical device according to claim 15.

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