JP4325483B2 - Work processing apparatus, droplet discharge apparatus, and electro-optical device manufacturing method - Google Patents

Description

The present invention, the workpiece such as a substrate, work processing equipment to discharge-landed functional liquid droplet by the function liquid droplet ejection head, a droplet discharge equipment, as well as about the preparation how the electro-optical device.

Conventionally, various electro-optical devices (flat panel displays) represented by color filters such as liquid crystal display devices and organic EL devices are manufactured using a functional droplet discharge head that can discharge minute droplets from nozzles. It has been proposed to perform work processing such as metal wiring formation. For example, when manufacturing a color filter, each color filter material (functions on a substrate on which a plurality of colored layer forming regions (pixel regions) that are partitioned by bank layers and processed to be lyophilic (hydrophilic) are formed. While the functional liquid droplet discharge head introduced with the functional liquid dissolved in the liquid solvent is relatively moved, a plurality of shots of functional liquid droplets are ejected and landed on each colored layer forming region to form a plurality of colored layers (film forming portions). It is thought to form (refer patent document 1).
JP 2003-275647 A

  By the way, the landing diameter of the functional droplet that has landed on the workpiece is determined by the amount of the functional droplet and the contact angle with the workpiece surface (wetting property of the workpiece surface). Therefore, when manufacturing a color filter, for example, with a conventional droplet discharge device, the peripheral portion of each colored layer forming region becomes lyophobic (hydrophobic) due to the influence of the residue of the resist layer constituting the bank layer. When the liquid droplets are landed, the functional droplets that have landed do not wet and spread around the periphery of each colored layer forming region and do not contact the side wall portion of the bank layer, so that the entire colored layer forming region may not be filled with the functional liquid. there were. On the other hand, when the planar dimension of each colored layer forming region formed on the substrate is relatively small (pixel definition is high), the functional liquid droplets that have landed in the lyophilic-treated colored layer forming region are spread and spread. There is a possibility that the functional droplets overflow from the colored layer forming region.

The present invention relates to a workpiece process that can make the landing diameter of a functional droplet landed on a workpiece larger and / or smaller than the landing diameter determined by the liquid amount of the functional droplet and the contact angle with the surface of the workpiece. equipment, and to provide a droplet discharging equipment, and a manufacturing how the electro-optical device.

Work processing apparatus of the present invention, against the word click, the functional liquid droplet ejection head having a nozzle, a work processing system for discharge-landing as functional liquid droplets of a plurality shots overlap, the functional liquid droplet ejecting heads And a control means for controlling the discharge timing of the nozzle, and for the periodic deformation behavior of functional droplets immediately after landing, which repeatedly repeats a short change that tends to flatten on the workpiece and a long change that tends to increase the control unit is characterized in that at a timing that matches the short change those of the first functional liquid droplet landed on a workpiece, it is landed on the second functional liquid droplet.

According to this configuration, the landing diameter of the functional liquid droplet that has landed on the workpiece (the combination of the first functional liquid droplet and the second functional liquid droplet) is determined based on the liquid amount of the functional liquid droplet and the contact with the workpiece surface. It can be made larger than the impact diameter determined by the angle. This is because when the first functional droplet is deforming with a short change, that is, when the first functional droplet is about to flatten on the workpiece, the second functional droplet is When the second functional liquid droplet lands on the first functional liquid droplet, the combined functional liquid droplet forms a flat shape on the workpiece, and the first functional liquid droplet lands on the first functional liquid droplet. Since the energy at which the second functional droplet lands on the first functional droplet is added to the energy at which the first functional droplet becomes flat on the workpiece, the combined functional droplet is on the workpiece. It seems that this is because it is going to become even flatter.
The first functional droplet and the second functional droplet are preferably ejected from the same nozzle.

Here, the deformation behavior in which the vertical axis of the landed functional droplet changes long and short is the behavior (short change) in which the landed functional droplet tends to become flat on the workpiece for several tens of microseconds after landing. This refers to a periodic behavior that repeats the behavior (long change) of trying to stretch. When the next functional droplet does not land during the deformation behavior, the behavior width decreases, and after several tens of microseconds from the landing, a spherical crown (dome shape) is formed on the workpiece due to the surface tension of the functional droplet. State) and a stable state.
Moreover, as a workpiece processing apparatus, for example, an apparatus including metal wiring formation, lens formation, resist formation, and light diffuser formation is conceivable.

Other work processing apparatus of the present invention, against the word click, the functional liquid droplet ejection head having a nozzle, a work processing system for discharge-landing as functional liquid droplets of a plurality shots overlap the functional liquid droplet ejection Periodic deformation behavior of functional liquid droplets immediately after landing , which includes a head and a control means for controlling the discharge timing of the nozzles, and repeats a short change to be flattened on the workpiece and a long change to be extended to the control means, characterized in that at a timing that matches the length change of those of the first functional liquid droplet on it landed on the workpiece, to land the second functional liquid droplet.

According to this configuration, the landing diameter of the functional liquid droplets that have landed on the work can be made smaller than the landing diameter determined by the liquid amount of the functional liquid droplets and the contact angle with the work surface. This is because when the first functional droplet is deforming with a long change, that is, when the first functional droplet is about to expand on the workpiece, the second functional droplet is In order to land on the first functional liquid droplet, when the second functional liquid droplet lands on the first functional liquid droplet, the combined functional liquid droplets are formed on the workpiece, Since the energy at which the first functional droplet is about to grow on the workpiece and the energy at which the second functional droplet is landed on the first functional droplet are canceled, the combined functional droplet is This is considered to be for maintaining a stretched shape without performing deformation behavior.
In this case as well, the first functional droplet and the second functional droplet are preferably ejected from the same nozzle.

Another work processing system of the present invention, against the word click, the functional liquid droplet ejection head having a nozzle, a work processing system for discharge-landing as functional liquid droplets of a plurality shots overlap the functional liquid A droplet discharge head, storage means for storing temporal displacement of a periodic deformation behavior of a functional droplet immediately after landing, which repeatedly repeats a short change to be flattened on a workpiece and a long change to be extended ; Control means for controlling the discharge timing, and the control means is arranged on the first functional liquid droplet that has landed on the workpiece and has a deformation behavior based on the temporal displacement of the deformation behavior stored in the storage means. In addition, the timing of landing the second functional droplet is controlled.

  According to this configuration, the second functional liquid droplet can be landed on the first functional liquid droplet that has been deformed by landing on the workpiece at a timing that matches the length change of the deformation behavior. The second functional droplet can be landed at a timing that matches the short change in the deformation behavior. Therefore, the landing diameter of the landed functional droplet can be made larger and smaller than the landing diameter determined by the amount of the functional liquid droplet and the contact angle with the workpiece surface.

The liquid droplet ejection apparatus according to the present invention has a plurality of shots of functional liquid droplets in each pixel area while relatively moving a functional liquid droplet ejection head having a nozzle with respect to a substrate having a plurality of pixel areas in a bank portion. Is a liquid droplet ejection apparatus that performs a drawing operation to fill the entire area of each pixel region with a functional liquid, and is equipped with a functional liquid droplet ejection head, a functional liquid droplet ejection head, and a functional liquid on a substrate. A moving means for relatively moving the droplet discharge head and a control means for controlling the moving means and controlling the discharge timing of the nozzles are provided, and a short change and an attempt to increase the flatness on the substrate are made. to cyclic deformation behavior of the function liquid droplet immediately after landing repeating the length change, the control means, upon drawing operation to land the functional liquid droplet in contact with the side wall portion of the bank portion, first landed on the substrate 1 function At a timing that matches the short change in droplet, characterized in that to land the second functional liquid droplet.

According to this configuration, when the first functional liquid droplet is deformed with a short change, the second functional liquid droplet lands on the first functional liquid droplet. The landing diameter of the landed functional droplet can be made larger than the landing diameter determined by the liquid amount of the functional droplet and the contact angle with the substrate surface. Therefore, even when the periphery of each pixel region is lyophobic (hydrophobic), the landed functional liquid droplets are spread at the periphery of each pixel region and come into contact with the side wall portion of the bank portion. And the entire area of each pixel region can be filled with the functional liquid.
In addition, when the planar dimension of each pixel region is relatively small, the drawing method described above is performed so that the functional droplet that has landed contacts the side wall portion of the bank layer with respect to all of one or more points of each pixel region. The functional droplet is discharged by the above. On the other hand, when the planar dimension of each pixel region is relatively large, the functional droplets that have landed on at least a plurality of points located at the peripheral edge among the many points on which the functional droplets land are side wall portions of the bank layer. The functional liquid droplets may be discharged by the above drawing method so as to come into contact with the liquid crystal.

Another droplet discharge device according to the present invention has a function of performing a plurality of shots in each pixel region while relatively moving a functional droplet discharge head having a nozzle with respect to a substrate having a plurality of pixel regions in a bank unit. A droplet discharge device that performs a drawing operation of discharging and landing droplets to fill the entire area of each pixel region with a functional liquid. The droplet discharge device includes a functional droplet discharge head, a functional droplet discharge head, and a substrate. A moving means for relatively moving the functional liquid droplet ejection head, and a control means for controlling the moving means and controlling the ejection timing of the nozzles, are provided, and the short change and the elongation to be flattened on the substrate are provided. In response to the periodic deformation behavior of functional droplets immediately after landing, which repeatedly repeats a long change to be attempted, the control means lands on the substrate during a drawing operation to land the functional droplets in contact with the side wall portion of the bank. the first was At a timing that matches the length change in Noekishizuku, characterized in that to land the second functional liquid droplet.

  According to this configuration, since the second functional droplet lands on the first functional droplet when the first functional droplet is deforming with a long change, as described above, the first functional droplet is applied to the substrate. The landing diameter of the landed functional droplet can be made smaller than the landing diameter determined by the liquid amount of the functional droplet and the contact angle with the substrate surface. Therefore, even when the planar size of each pixel area formed on the substrate is relatively small, the functional liquid droplets that have landed in the lyophilic-processed pixel area are not excessively wetted and spread. There is no overflow from the area.

In addition, another droplet discharge device of the present invention has a plurality of shots in each pixel region while moving a functional droplet discharge head having a nozzle relative to a substrate having a plurality of pixel regions in a bank portion. Is a droplet discharge device that performs a drawing operation to fill and fill the entire area of each pixel region with a functional liquid by discharging and landing the functional liquid droplets on the substrate. Periodic deformation behavior of functional liquid droplets immediately after landing, which is composed of a moving means for moving the functional liquid droplet ejection head relative to the surface, and a short change that tends to flatten on the substrate and a long change that tends to elongate. Storage means for storing the time displacement, and control means for controlling the moving means and controlling the discharge timing of the nozzles, and the control means landes the functional liquid droplets so as to be in contact with the side wall portion of the bank portion. Drawing behavior At this time, based on the temporal displacement of the deformation behavior stored by the storage means, the timing for landing the second functional droplet on the first functional droplet that has landed on the substrate and is performing the deformation behavior is set. It is characterized by controlling.

  According to this configuration, the second functional liquid droplet can be landed on the first functional liquid droplet that is deformed by landing on the substrate at a timing that matches the length change of the deformation behavior. The second functional droplet can be landed at a timing that matches the short change in the deformation behavior. For this reason, the landing diameter of the landed functional droplet can be made larger and smaller than the landing diameter determined by the amount of the functional liquid droplet and the contact angle with the substrate surface. Accordingly, the landed functional liquid droplets can be wetted and spread at the peripheral edge of each pixel region, and can be brought into contact with the side wall portion of the bank layer, and the landed functional liquid droplets can be prevented from overflowing from the pixel region. Can do.

  A method for manufacturing an electro-optical device according to the present invention is characterized in that a film-forming portion made of functional droplets is formed on a substrate using the above-described droplet discharge device.

According to this configuration, since it is manufactured using a highly reliable droplet discharge device, a high-quality electro-optical device can be manufactured. As the electro-optical device (flat panel display), a color filter, a liquid crystal display device, an organic EL device, a PDP device, an electron emission device, and the like are conceivable. Electron emission devices include so-called FED (Field Emission Display) and SED (Surface-conduction Electron-Emitter).
It is a concept including a display device.

  Hereinafter, embodiments of a droplet discharge device according to the present invention will be described with reference to the accompanying drawings. This droplet discharge device introduces a functional liquid such as special ink or luminescent resin liquid into a functional droplet discharge head, and discharges and lands functional droplets on a substrate such as a color filter. The film forming part is formed. Therefore, first, the behavior of the functional droplet that has landed on the substrate and the substrate that is a functional droplet ejection target (drawing target) by the droplet ejection device will be described.

  As shown in FIG. 1, the substrate W (workpiece) is composed of a glass plate (quartz glass), polyimide resin, or the like, and the introduced droplet discharge device 1 (see FIG. 4), a plurality of pixel regions 507a partitioned by partition wall portions 507b (bank portions) are formed in a range excluding the peripheral portion. They are arranged in a matrix. Each pixel region 507a is a concave portion having a square shape in plan view surrounded by a partition wall portion 507b. The functional liquid droplet ejection head 16 described later has three colors of R (red), G (green), and B (blue). When the film forming portions (colored layers 508R, 508G, and 508B) are formed, they become the landing areas of the functional liquid droplets (see FIG. 16). The color arrangement pattern of a plurality of pixels is a stripe arrangement in which all the columns in the matrix have the same color. However, any three pixels arranged in the columns and rows of the matrix have three colors of R, G, and B. A mosaic arrangement may be used. Further, a delta arrangement in which a plurality of pixels form a staggered pattern may be used.

  Each pixel region 507a is lyophilic (hydrophilic) due to surface treatment. Therefore, the landed functional liquid droplet has a spherical crown shape (dome shape) that forms a contact angle φ of about 10 ° with respect to the substrate W (see FIG. 2C), for example. On the other hand, since the partition wall portion 507b (bank 503, see figure *) is made of a lyophobic (hydrophobic) resin material, even if the functional liquid droplets land on the partition wall portion 507b, the functional liquid droplets It flows into the adjacent pixel region 507a.

  In addition, the planar dimensions Da and Db of each pixel region 507a are, for example, 38 μm × 38 μm. Therefore, for example, in order to form a film-forming portion having a final film thickness of 1.4 μm after the drying process using a functional liquid having a solid content (filter material) concentration of 10%, approximately 20 picograms for each pixel region 507a. A functional droplet of 1 liter will be landed. That is, a plurality of shots (two shots) of approximately 10 picoliters of functional droplets are ejected from each nozzle 75 (see FIG. 4) of the functional droplet discharge head 16 to approximately the same point (the center of each pixel region 507a). It becomes.

  As shown in FIG. 2, the functional liquid droplets ejected from the nozzles 75 of the functional liquid droplet ejection head 16 to the respective pixel regions 507a are flattened on the substrate W for several tens of microseconds after landing. It has a periodic behavior that repeats (short change) and a behavior (long change) that tends to elongate, that is, a deformation behavior in which the vertical axis changes long and short (see (a) and (b) of the figure). Then, the behavior width is attenuated, and after several tens of microseconds from landing, it becomes a spherical crown on the substrate W due to the surface tension of the functional liquid droplet and is stabilized (see 2 (c)). In addition, the code | symbol L of the figure shows the length of the vertical axis | shaft of the functional droplet which is carrying out the deformation | transformation behavior on the board | substrate W. FIG.

  FIG. 3A is a graph showing the time displacement of the behavior of the functional liquid droplets that have landed on the substrate W. FIG. The time displacement of the deformation behavior varies depending on the type of functional liquid. Therefore, the time displacement of the deformation behavior of the functional liquid used for the drawing process is measured in advance using an image processing device, a laser distance meter, or the like, and the measurement result is described later with the control unit 120 (see FIG. 8).

  Further, the landing diameter RD of the functional droplet that has landed on the substrate W is determined by the amount of the functional droplet and the contact angle φ with the surface of the substrate W. Therefore, as shown in FIG. 3, when approximately 10 picoliters of functional liquid droplets are landed, it becomes approximately 30 μm (see FIG. 3B), and when approximately 20 picoliters of functional liquid droplets are landed, it is approximately 40 μm. (Refer to (c) in the figure). In addition, when the second functional droplet is landed on the first functional droplet after the deformation behavior is finished, the functional droplet (the first functional droplet and the second functional droplet) ) Is approximately 40 μm (see FIG. 4D).

  However, when the second functional droplet is landed on the first functional droplet at a timing that matches the short change in the deformation behavior, the landing diameter RD of the functional droplet becomes approximately 53 μm (FIG. )), Even with the same approximately 20 picoliter functional droplet, the impact diameter (determined by the contact amount φ (approximately 10 °) with the surface of the substrate W and the surface of the substrate W (approximately 10 picoliter) Compared to about 40 μm), the contact angle φ decreases and the landing diameter RD increases. This means that when the first functional droplet is deforming with a short change, that is, when the first functional droplet is about to become flat on the substrate W, the second functional droplet is In order to land on the first functional liquid droplet, when the second functional liquid droplet lands on the first functional liquid droplet, the combined functional liquid droplet forms a flat shape on the substrate W, and Since the energy for the second functional droplet to land on the first functional droplet is added to the energy for the first functional droplet to become flat on the substrate W, the combined functional droplet is This is considered to be for further flattening on the substrate W. In other words, since the positive acceleration in the second functional droplet is added to the positive acceleration in the first functional droplet, the shape is considered to be flat.

  On the other hand, when the second functional droplet is landed on the first functional droplet at a timing that matches the length change of the deformation behavior, the landing diameter RD of the functional droplet becomes approximately 32 μm (fig. (F) )), Even with the same approximately 20 picoliter functional droplet, the impact diameter (determined by the contact amount φ (approximately 10 °) with the surface of the substrate W and the surface of the substrate W (approximately 10 picoliter) In comparison with (approximately 40 μm), the contact angle φ increases and the landing diameter RD decreases. This is because when the first functional droplet is deforming with a long change, that is, when the first functional droplet is about to expand on the substrate W, the second functional droplet is In order to land on the first functional liquid droplet, when the second functional liquid droplet lands on the first functional liquid droplet, the combined functional liquid droplet is formed on the substrate W, In addition, since the energy at which the first functional liquid droplets are intended to extend on the substrate W and the energy at which the second functional liquid droplets land on the first functional liquid droplets are canceled out, the combined function It is considered that the droplet does not perform deformation behavior and maintains the stretched shape. In other words, since the negative acceleration in the first functional droplet and the positive acceleration in the second functional droplet are offset, it is considered that the shape becomes an extended shape.

  The droplet discharge device according to the present invention can increase the landing diameter RD of the functional droplet by controlling the timing at which the second functional droplet is landed on the first functional droplet. And it is comprised so that it can also be made small. Hereinafter, the droplet discharge device of this embodiment will be described.

  As shown in FIG. 4, the droplet discharge device 1 includes a machine base 2, a drawing device 3 widely placed on the whole area of the machine base 2, and a head function recovery installed at an end on the machine base 2. And a maintenance system moving table 5 on which various units of the head function recovery device 4 are collectively mounted and moved on the machine base 2, and the function recovery of the functional liquid droplet ejection head 16 is performed by the head function recovery device 4. In addition to performing the processing, a drawing operation for discharging and landing functional droplets on the substrate W is performed by the drawing apparatus 3. Furthermore, although not shown in the figure, the liquid droplet ejection apparatus 1 includes a functional liquid supply mechanism 6 (see FIG. 8) including a liquid supply tank that supplies functional liquid to each functional liquid droplet ejection head 16, and the like. A controller 7 (the control unit 120, see FIG. 8) and the like for integrated control of each component device such as the drawing device 3 and the head function recovery device 4 are incorporated.

  First, the drawing device 3 of the droplet discharge device 1 and the drawing operation by this will be described. The drawing apparatus 3 includes an X-axis table 12 and an XY moving mechanism 11 including a Y-axis table 13 orthogonal to the X-axis table 12, and a main carriage 14 that is movably attached to the Y-axis table 13 and has a head θ-axis table 32. And a head unit 15 suspended from the main carriage 14. The functional liquid droplet ejection head 16 is mounted on the head unit 15 via a head plate (not shown). The substrate W is mounted in a state of being positioned on the X-axis table 12 by a pair of substrate recognition cameras 17 and 17 facing the end of the X-axis table 12.

The X-axis table 12 includes a set table 22 including a suction table 23 on which a substrate W is sucked and mounted, a substrate θ-axis table 24, and the like, and an X-axis slider that slidably supports the set table 22 in the X-axis direction (main scanning direction). 21, a pair of X-axis linear motors (not shown) that extend in the main scanning direction and move the substrate W in the main scanning direction via the set table 22, and a pair of X-axis linear motors. And a pair of X-axis guide rails (not shown) for guiding the movement of the X-axis slider 21. When the pair of X-axis linear motors are driven, the X-axis slider 21 moves in the main scanning direction while using the pair of X-axis guide rails as guides, and the substrate W set on the set table 22 moves in the main scanning direction.
The moving speed of the X-axis table 12 on which the substrate W is mounted with respect to the functional liquid droplet ejection head 16 is approximately 200 mm / second. Although not shown in FIG. 4, a head recognition camera 25 (see FIG. 8) is fixed to the substrate θ-axis table 24, and the position of the head unit 15 can be corrected with respect to the set table 22. Yes.

  In addition, an X-axis linear scale (not shown) is provided between the pair of X-axis guide rails, and based on this, the position of the set table 22 that moves the X-axis table 12 is accurately grasped. Then, the reference pulse (trigger pulse) for ejection timing supplied to the drive signal generation circuit 126 (see FIG. 8) of the control unit 120 is obtained. When the ejection timing reference pulse is supplied, the drive signal generation circuit 126 generates an ejection drive signal and outputs it to the head driver 111. When the ejection drive signal is input, the head driver 111 receives a drive waveform. Is applied to the functional liquid droplet ejection head 16 (details will be described later).

  On the other hand, the Y-axis table 13, like the X-axis table 12, has a bridge plate (not shown) that suspends the main carriage 14, a Y-axis slider 31 that supports the bridge plate, and a Y-axis direction (sub-scanning direction). A pair of Y-axis linear motors (not shown) that move the bridge plate in the sub-scanning direction via the Y-axis slider 31 and a pair of Y-axis linear motors are arranged in parallel to guide the movement of the bridge plate. A pair of Y-axis guide rails (not shown) and a Y-axis linear scale (not shown) for detecting the movement position of the bridge plate. When the Y-axis linear motor is driven, the Y-axis slider 31 translates in the sub-scanning direction using the Y-axis guide rail as a guide, and moves the bridge plate in the sub-scanning direction.

  The X-axis table 12 is directly supported on the machine base 2, while the Y-axis table 13 is supported by left and right columns 33, 33 erected on the machine base 2. The X-axis table 12 and the maintenance system moving table 5 are arranged in parallel to each other in the main scanning direction, and the Y-axis table 13 extends so as to straddle the X-axis table 12 and the maintenance system moving table 5. is doing.

  The Y-axis table 13 includes the head unit 15 mounted on the Y-axis table 13 between the drawing area 41 positioned immediately above the X-axis table 12 and the function recovery area 42 positioned directly above the maintenance system moving table 5. Move appropriately between. That is, when drawing on the substrate W introduced into the X-axis table 12, the Y-axis table 13 causes the head unit 15 to face the drawing area 41 and performs a function recovery process of the functional liquid droplet ejection head 16 described later. In this case, the head unit 15 is made to face the function recovery area 42.

  On the other hand, one end of the X-axis table 12 serves as a substrate introduction area 43 for setting the substrate W on the X-axis table 12. The substrate introduction area 43 includes the pair of substrate recognition cameras 17, 17 is disposed. The pair of substrate recognition cameras 17 and 17 simultaneously recognize the two substrate alignment marks Wm and Wm of the substrate W supplied on the suction table 23, and the alignment of the substrate W is performed based on the recognition result. Made.

  The head unit 15 includes a head plate, a functional liquid droplet ejection head 16 attached to the head plate, and a head holding member (not shown) for fixing each functional liquid droplet ejection head 16 to the head plate. The functional liquid droplet ejection head 16 has two nozzle rows 74 and 74 composed of a plurality (180) of nozzles 75, and when mounted on the main carriage 14, each nozzle row 74 is a sub-row. It is parallel to the scanning direction.

As shown in FIG. 5, the functional liquid droplet ejection head 16 has a so-called double structure, and includes a functional liquid introduction part 61 having two connection needles 62 and 62, and two series of functional liquid introduction parts 61 connected to the functional liquid introduction part 61. A head substrate 63 and a head main body 64 which is connected to the lower side (upper side in the figure) of the functional liquid introducing portion 61 and has an in-head flow path filled with the functional liquid therein. Each connection needle 62 is connected to a functional liquid supply mechanism 6 (a liquid supply tank) for storing the functional liquid via a functional liquid supply tube (not shown). Is supplied with functional fluid. The head body 64 includes a double pump unit 71 composed of piezoelectric elements and a nozzle plate 72 having a nozzle surface 73 in which two nozzle rows 74 and 74 are formed in parallel to each other. ing. Each nozzle row 74 is configured by arranging a plurality (180) of nozzles 75 at an equal pitch (for example, approximately 140 μm). The two nozzle rows 74, 74 are formed so as to be displaced from each other in the nozzle row direction (sub-scanning direction) by a length that is 1/2 times the nozzle pitch. The drawing lines are formed at a pitch of about 70 μm in the sub-scanning direction.
The pump unit 71 may have another configuration as long as it is an element that causes a pressure fluctuation in a pressure generation chamber (not shown) that forms a flow path in the head according to a signal given from the outside. In addition to the piezoelectric element, other elements such as a magnetostrictive element may be used. Further, the functional liquid may be heated by a heat source such as a heater, and the pressure may be changed by bubbles generated by the heating.

  However, in order to reduce the nozzle pitch of the plurality of nozzles 75 in the sub-scanning direction, the head unit 15 includes a plurality of functional liquid droplet ejection heads 16, and the plurality of functional liquid droplet ejection heads 16 are slightly positioned in the sub scanning direction. It is preferable that they are shifted and arranged in the main scanning direction, and the functional liquid droplet ejection head 16 may be disposed at a predetermined angle in the sub-scanning direction. In this way, an appropriate application density of functional droplets can be ensured for each pixel region 507a, and appropriate for a plurality of types of substrates W having different pixel pitches in the sub-scanning direction. Functional droplets can be selectively ejected by the nozzle 75.

  On the other hand, the head substrate 63 is provided with two connectors 76, 76, and each connector 76 is connected to the head driver 111 (see FIG. 8) via a flexible flat cable. The drive waveform generated by the head driver 111 is supplied to each pump unit 71 via each connector 76.

A driving waveform as shown in FIG. 6 is applied to the functional liquid droplet ejection head 16, and so-called “pulling” is commonly used in which a pressure generating chamber containing a functional liquid is expanded and then contracted. That is, in the state at the intermediate potential Vm, the meniscus is slightly pulled from the discharge surface of the nozzle 75 (reverse concave shape) due to the surface tension between the water repellent film formed on the nozzle plate 72 and the functional liquid. is there. Then, after maintaining the intermediate potential Vm for a predetermined time (for example, 6.5 microseconds to 26.5 microseconds) (P11), the potential increases to the maximum potential Vh with a predetermined voltage gradient (for example, over 5.5 microseconds). (P12), the maximum potential Vh is maintained for a predetermined time (for example, 2.5 microseconds) (P13). At this time, the meniscus of each nozzle 75 is once pulled. Next, the voltage value of the drive waveform drops from the maximum potential Vh to the minimum potential Vl with a predetermined voltage gradient (for example, over 3.5 microseconds) (P14). Due to the voltage change from the maximum voltage Vh to the minimum voltage Vl, the meniscus protrudes from the nozzle surface 73 and functional droplets are ejected. Then, after the minimum potential Vl is held for a predetermined time (for example, 1 microsecond) (P15), the drive waveform rises again to the intermediate potential Vm with a predetermined voltage gradient (for example, over 1 microsecond) (P16). As a result, the meniscus returns to the initial state (reverse concave shape).
As described above, the droplet discharge amount from each nozzle 75 is approximately 10 picoliters, but the droplet discharge amount can be controlled by controlling the maximum potential Vh and the minimum potential Vl of the drive waveform. .

  Then, for example, by selecting one data from a plurality of different intermediate potential time data stored in advance in the control unit 120, the time for maintaining the intermediate potential Vm at P11 (intermediate potential maintenance time) is changed. By doing so, the cycle of the drive waveform can be changed, and the ejection timing of the functional liquid droplets can be controlled. That is, in this embodiment, the period of the drive waveform can be controlled in the range of 20 to 40 microseconds by controlling the intermediate potential maintaining time in the range of 6.5 to 26.5 microseconds. ing.

  FIG. 7 is a timing chart showing ejection timing reference pulses supplied to the drive signal generation circuit 126 of the control unit 120 and drive waveforms applied from the head driver 111 to the functional liquid droplet ejection head 16. The ejection timing reference pulse is supplied to the drive signal generation circuit 126 at a cycle of 8 kHz (125 microseconds), for example. Then, one or a plurality of (four in the figure) drive waveforms are applied to the functional liquid droplet ejection head 16 in accordance with the ejection timing reference pulse. The number of drive waveforms generated in response to this single ejection timing reference pulse is set based on the drawing data within a range in which the period of the drive waveform can be secured (details will be described later).

  Here, with reference to FIG. 4, the discharge operation | movement to the board | substrate W by the drawing apparatus 3, ie, a drawing operation | movement, is demonstrated easily. First, as a preparation before discharging functional droplets, the position correction of the substrate W set on the suction table 23 includes the position correction in the θ-axis direction by the substrate θ-axis table 24, the main scanning direction and the sub-scanning of the substrate W. The position correction of the head unit 15 set on the main carriage 14 is performed by the position correction in the θ axis direction by the head θ axis table 32 and the main scanning direction of the functional liquid droplet ejection head 16. The correction is performed by correcting the position data in the sub-scanning direction.

Then, the drawing apparatus 3 moves the substrate W forward in the main scanning direction (X-axis direction) by the X-axis table 12 while being controlled by the control unit 120, and the functional liquid droplet ejection head 16 is moved in synchronism with this. By selectively driving, the functional liquid is discharged onto the substrate W. Then, the substrate W is moved backward, and the head unit 15 is moved in the sub-scanning direction (Y-axis direction) by the Y-axis table 13, and then the reciprocating movement of the substrate W in the main scanning direction and the functional liquid droplet ejection head are performed again. 16 driving is performed. Then, by repeating this a plurality of times, drawing is performed from end to end of the substrate W.
In the droplet discharge device 1 of the present embodiment, the drawing operation is performed with the movement of the substrate W in the X-axis direction as main scanning and the movement of the head unit 15 in the Y-axis direction as sub-scanning. The unit 15 may be moved in the main scanning direction. Further, the substrate W may be fixed and the head unit 15 may be moved in the X axis direction and the Y axis direction. Furthermore, in the present embodiment, functional droplets are ejected only during forward movement, but functional droplet ejection (reciprocal drawing operation) may be performed during both forward movement and backward movement.

  Next, with reference to FIG. 4, the head function recovery device 4 in the droplet discharge device 1 and the function recovery processing of the function droplet discharge head 16 by this will be briefly described. The function recovery process of the functional droplet discharge head 16 is performed by moving the various units of the head function recovery device 4 placed on the maintenance system moving table 5 to the function recovery area 42 and using the Y-axis table 13 as described above. This is performed by moving the head unit 15 to the function recovery area 42.

  The maintenance system moving table 5 extends in the longitudinal direction (main scanning direction) of the main body 2 and has a common base 91 on which various units of the head function recovery device 4 that performs function recovery processing are distributed and placed. And a pair of guide rails 92 that slidably support the common base 91 in the main scanning direction, and a motor-driven X-axis moving mechanism (not shown), which are dispersedly placed on the common base 91. Various units of the head function recovery device 4 are moved in the main scanning direction to be positioned in the function recovery area 42.

The head function recovery device 4 is placed adjacent to each other on the maintenance system moving table 5 and is used to prevent drying of the nozzles 75 of the functional droplet discharge head 16 when the operation of the droplet discharge device 1 is stopped. The storage unit 81 to be sealed, the suction unit 82 that performs suction (cleaning) for removing the functional liquid thickened in the functional liquid droplet ejection head 16, and the nozzle surface 73 of the functional liquid droplet ejection head 16 are wiped off. And a wiping unit 83.
In addition, the suction by the suction unit 82 introduces the functional liquid into the functional liquid flow path from the liquid supply tank to the functional liquid droplet ejection head 16 by replacing the functional liquid droplet ejection head 16 in addition to the above function recovery processing. It is also done when you do.

  Next, the control system of the entire droplet discharge device 1 will be described with reference to FIG. The control system of the droplet discharge device 1 basically includes a host computer 100 such as a personal computer, and a drive unit having various drivers for driving the function droplet discharge head 16, the XY moving mechanism 11, the head function recovery device 4, and the like. 110 and a control unit 120 (controller 7) that performs overall control of the entire droplet discharge device 1 including the drive unit 110.

  The host computer 100 is configured by connecting a computer 102 connected to the controller 7 to a keyboard 102 and a display 103 for displaying an image of an input result or the like by the keyboard 102.

  The drive unit 110 includes a head driver 111 that controls the ejection of the functional liquid droplet ejection head 16, a drawing system movement driver 112 that drives and controls each motor of the X-axis table 12 and the Y-axis table 13, and a maintenance system movement table. And a maintenance driver 114 for driving and controlling the suction unit 82 and the wiping unit 83 of the head function recovery device 4.

  The control unit 120 includes a CPU 121, a ROM 122, a RAM 123, and a P-CON 124, which are connected to each other via a bus 125 and generate a drive signal for generating an ejection drive signal to be supplied to the head driver 111. A circuit 126 is provided. The ROM 122 has a control program area for storing a control program to be processed by the CPU 121, and a control data area for storing control data for performing a drawing operation, a function recovery process, and the like.

  In addition to the various register groups, the RAM 123 stores a displacement storage unit 131 that stores the time displacement of the deformation behavior in which the vertical axis of the functional droplet changes at the time of landing described above, and intermediate potential time data regarding the intermediate potential maintaining time of the drive waveform. Various data such as an intermediate potential storage unit 132 for storing, a drawing data storage unit 133 for storing drawing data for drawing on the substrate W, a position data storage unit 134 for storing position data of the substrate W and the functional liquid droplet ejection head 16, etc. It has a storage unit and is used as various work areas for control processing.

  In addition to the various drivers of the drive unit 110, the substrate recognition camera 17, the head recognition camera 25, the functional liquid supply mechanism 6, and the like are connected to the P-CON 124 to supplement the functions of the CPU 121 and to connect with peripheral circuits. A logic circuit for handling interface signals is constructed and incorporated. When the discharge timing reference pulse is supplied as the X-axis table 12 is moved as described above, the drive signal generation circuit 126 generates a discharge drive signal and drives the head driver 111 to discharge via the P-CON 124. Output a signal.

  The CPU 121 inputs various detection signals, various commands, various data, etc. via the P-CON 124 according to the control program in the ROM 122, processes various data, etc. in the RAM 123, and then drives via the P-CON 124. The entire droplet discharge device 1 is controlled by outputting various control signals to the unit 110 and the like.

  Here, the control process for the ejection operation of the drawing apparatus 3 by the control unit 120 will be described in detail. When the drawing device 3 performs a drawing operation in which two shots of functional liquid droplets are ejected and landed on each drawing region 507a by the drawing device 3, the control unit 120 has a deformation behavior in which the vertical axis changes in length by landing on the substrate W. The second functional droplet is landed on the first functional droplet at a timing that matches the short change in the deformation behavior.

  First, the control unit 120 refers to the time displacement of the deformation behavior of the functional droplet stored in the displacement storage unit 131 of the RAM 123, reads arbitrary intermediate potential time data from the intermediate potential storage unit 132, and draws the drawing data of the RAM 123. Based on the drawing data stored in the storage unit 133, the number of functional droplet shots to be ejected to each pixel region 507a (ejection point) is read. Specifically, the time (for example, 35 microseconds after landing, see FIG. 3) when the functional liquid droplet is deformed with a short change is recognized, and the intermediate potential time data (intermediate time) corresponding to the time is recognized. And the number of drive waveforms to be generated for one ejection timing reference pulse is set to two. Then, the control unit 120 outputs an ejection drive signal for generating two drive waveforms in which the intermediate potential maintaining time is set to 21.5 microseconds from the drive signal generation circuit 126 to the head driver 111, and the head driver 111 Two drive waveforms having a period of 35 microseconds are applied to the functional liquid droplet ejection head 16.

  FIG. 9A is a timing chart showing the ejection timing reference pulse supplied to the drive signal generation circuit 126 and the two drive waveforms having a 35 microsecond period set in this way. Then, as shown in FIG. 4B, when two drive waveforms with a period of 35 microseconds are applied to the functional liquid droplet ejection head 16, each nozzle 75 has two shots. Functional droplets are ejected at intervals of 35 microseconds. Therefore, at the timing 35 microseconds after the landing of the first functional droplet on the first functional droplet, that is, at the timing at which the first functional droplet is deforming with a short change, The second functional droplet lands. Therefore, as described above, the landing diameter RD of the functional liquid droplet that has landed on the substrate W is determined by the liquid volume of the functional liquid droplet (approximately 20 picoliters) and the contact angle φ (approximately 10 °) with the surface of the substrate W. Compared to the impact diameter (40 μm), it can be increased (53 μm).

  In this case, since the moving speed of the substrate W (X-axis table 12) is 200 mm / second as described above, the moving distance of the substrate W during the landing of both functional droplets (35 microseconds). Is 7 μm, and the first functional droplet and the second functional droplet are ejected and landed at substantially the same point (the center of each pixel region 507a). Further, in the present embodiment, since the period of the drive waveform is 20 microseconds at the shortest, at the timing (after 35 microseconds) when the first functional liquid droplet has the second short deformation behavior, Although the second functional liquid droplet has landed, if the period of the drive waveform is shorter, the timing when the first functional liquid droplet has the first short-change deformation behavior (for example, The second functional droplet may land after 10 microseconds (see FIG. 3).

  FIG. 10 is a diagram illustrating a case where the second functional liquid droplet is landed on the first functional liquid droplet after the deformation behavior is completed on the pixel area 507a. As shown in the figure, when the peripheral portion of each pixel region 507a is lyophobic (hydrophobic), the landed functional liquid droplet does not spread out at the peripheral portion of each pixel region 507a, and the pixel region 507a The whole area may not be filled with the functional liquid.

  FIG. 11 is a diagram illustrating a case where the second functional liquid droplet is landed on the first functional liquid droplet in the pixel region 507a at a timing that matches a short change in the deformation behavior. As shown in the figure, even when the peripheral portion of each pixel region 507a is lyophobic (hydrophobic), the impacted functional liquid droplets are spread and spread at the peripheral portion of each pixel region 507a, The partition wall portion 507b can be in contact with the side wall portion, and the entire area of each pixel region 507a can be filled with the functional liquid.

  Further, in the case where functional droplets are ejected and landed on a large number of points in each pixel region 507a, at least when the functional droplets are landed so as to be in contact with the side wall portion of the partition wall portion 507b, at the above timing. By continuously ejecting and landing the two-shot functional liquid droplets, the landed functional liquid droplets can be wetted and spread around the periphery of each pixel area 507a, and the entire area of each pixel area 507a can be filled with the functional liquid. That is, when the planar dimensions Da and Db are relatively large, for example, 100 μm × 100 μm, among the many points (for example, 16 points) for landing the functional liquid droplets, the functional liquid is in contact with at least the side wall portion of the partition wall portion 507b. When the droplets are landed, that is, when the functional liquid droplets are landed at a plurality of points (about 12 points) located on the peripheral edge, the two-shot functional liquid droplets may be continuously ejected and landed at the above timing.

  On the other hand, the control unit 120 performs the deformation behavior on the first functional liquid droplet that is performing the deformation behavior in the drawing operation in which the drawing apparatus 3 ejects and lands two shots of the functional liquid droplets on each drawing area 507a. It is also possible to land the second functional liquid droplets at a timing that matches the change in length of the second functional droplet. That is, the control unit 120 refers to the temporal displacement of the deformation behavior of the functional droplet stored in the displacement storage unit 131 and the drawing data stored in the drawing data storage unit 133, so that the functional droplet exhibits a deformation behavior with a long change. Is recognized (for example, 25 microseconds after landing, see FIG. 3A), and intermediate potential time data corresponding to that time (intermediate potential maintenance time is 11.5 microseconds) At the same time as reading, the number of drive waveforms generated for one ejection timing reference pulse is set to two. As a result, the control unit 120 outputs, from the drive signal generation circuit 126 to the head driver 111, an ejection drive signal for generating two drive waveforms in which the intermediate potential maintaining time is set to 11.5 microseconds. , Two drive waveforms having a period of 25 microseconds are applied to the functional liquid droplet ejection head 16.

  FIG. 12A is a timing chart showing the ejection timing reference pulse supplied to the drive signal generation circuit 126 and the two drive waveforms having a period of 25 microseconds set in this way. Then, as shown in FIG. 4B, when two drive waveforms with a period of 25 microseconds are applied to the functional liquid droplet ejection head 16, each nozzle 75 has two shots. Functional droplets are ejected at intervals of 20 microseconds. Therefore, at the timing 20 microseconds after the first functional droplet has landed on the first functional droplet, that is, at the timing when the first functional droplet has a long-changing deformation behavior, The second functional droplet lands. Therefore, as described above, the landing diameter RD of the functional liquid droplet that has landed on the substrate W is determined by the liquid volume of the functional liquid droplet (approximately 20 picoliters) and the contact angle φ (approximately 10 °) with the surface of the substrate W. Compared to the impact diameter (40 μm), it can be made smaller (32 μm).

  FIG. 13 is a diagram illustrating a case where the second functional liquid droplet is landed on the first functional liquid droplet after the deformation behavior is completed on the pixel area 507a. As shown in the figure, when the planar dimensions Da and Db of each pixel area are relatively small, for example, 30 μm × 30 μm, the functional liquid droplets that have landed in the lyophilic pixel area will spread excessively. , Functional droplets may overflow from the pixel area.

  FIG. 14 is a diagram illustrating a case where the second functional liquid droplet is landed on the first functional liquid droplet in the pixel region 507a at a timing corresponding to the length change of the deformation behavior. As shown in the figure, even when the planar dimensions Da and Db of each pixel area are relatively small, for example, 30 μm × 30 μm, the functional liquid droplets that have landed in the lyophilic pixel area are excessively wet spread. Therefore, the functional liquid droplet does not overflow from the pixel region.

  As described above, according to the droplet discharge device 1 of this embodiment, the functional liquid landed on the substrate W is controlled by controlling the timing at which the second functional droplet is landed on the first functional droplet. The landing diameter RD of the droplet can be made larger and smaller than the landing diameter RD determined by the liquid amount of the functional liquid droplet and the contact angle φ with the surface of the substrate W.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device, or the like will be described. FIG. 15 is a flowchart showing the manufacturing process of the color filter, and FIG. 16 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix forming step (S101), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S102), a bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 16B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 16C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the bank 503 serve as partition wall portions 507b that partition the pixel regions 507a. When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S103), as shown in FIG. 16 (d), functional droplets are ejected by the functional droplet ejection head 16 and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 16 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the three-color arrangement pattern of R, G, and B includes a stripe arrangement, a mosaic arrangement, and a delta arrangement.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. If the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S104), and as shown in FIG. 16 (e), the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 17 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 16, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 17 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 16. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 16.

FIG. 18 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 19 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 20 is a cross-sectional view of an essential part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a formed of an inorganic material such as SiO, SiO ₂ , TiO _{2, and the} like, and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 21, the display device 600 includes a bank part forming step (S111), a surface treatment step (S112), a hole injection / transport layer forming step (S113), a light emitting layer forming step (S114), and an opposing surface. It is manufactured through an electrode formation step (S115). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S111), as shown in FIG. 22, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film using a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, the organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S112), a lyophilic process and a lyophobic process are performed. The regions to be subjected to lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a treatment gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 16, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the set table 22 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S113) and light emitting layer forming step (S114) are performed. .

  As shown in FIG. 24, in the hole injection / transport layer forming step (S113), the first composition containing the hole injection / transport layer forming material is transferred from the functional liquid droplet ejection head 16 to each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 25, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S114) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 26, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 26)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process and the like, the second composition after discharge is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 27, a hole injection / transport layer 617a is obtained. A light emitting layer 617b is formed thereon. In this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 16, as shown in FIG. 28, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. In addition, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S115).

In the counter electrode forming step (S115), as shown in FIG. 29, a cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
At the top of the cathode 604, Al film as the electrode, Ag film and a protective layer of SiO _2, SiN, or the like for its antioxidant is appropriately provided.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 30 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the set table 22 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 16. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 16 to cope with it. Land in the color discharge chamber 705.

Next, FIG. 31 is a cross-sectional view of an essential part of an electron emission device (also referred to as FED device or SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 that is formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 32A, and when these are formed, as shown in FIG. 32B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

Furthermore, the work processing such as the metal wiring formation described above may be performed using a work processing apparatus (not shown) configured similarly to the droplet discharge device 1. According to this work processing apparatus, in the same manner as the droplet discharge device 1, the second functional liquid is formed on the first functional liquid droplet at the timing at which the functional liquid droplet is deformed in a short change or a long change. Since the droplet can be landed, the landing diameter RD of the functional droplet landed on the workpiece W is larger than the landing diameter RD determined by the amount of the functional droplet and the contact angle φ with the surface of the workpiece W. Can be made smaller. Therefore, for example, the line width of the metal wiring can be increased and can be reduced.
In the work processing described above, there are cases where the functional liquid droplets are landed only on one place of the work W. In such a case, unlike the droplet discharge device 1, the work processing apparatus may not include a moving unit that moves the functional droplet discharge head 16 relative to the workpiece W.

It is the top view which represented the board | substrate typically. It is a figure explaining the behavior of the functional droplet which landed on the board | substrate. (A) is a graph showing the time displacement of the behavior of the functional droplet landed on the substrate, and (b) to (f) are diagrams showing the landing diameter of the functional droplet landed on the substrate. It is a plane schematic diagram of a droplet discharge device. It is an external appearance perspective view of a functional droplet discharge head. It is explanatory drawing of a drive waveform. 6 is a timing chart showing ejection timing reference pulses and drive waveforms. It is a block diagram explaining the control system of a droplet discharge apparatus. (A) is a timing chart showing a reference pulse for ejection timing and a drive waveform when the second functional droplet is landed on the first functional droplet at a timing that matches a short change in deformation behavior, (b). FIG. 5 is a diagram showing the landing diameter of functional droplets that have landed on a substrate. It is a figure which shows the case where a 2nd functional droplet is made to land after a deformation | transformation behavior is complete | finished on a 1st functional droplet with respect to a pixel area. It is a figure which shows the case where a 2nd functional droplet is made to land on the 1st functional droplet with respect to a pixel area at the timing according to the short change of a deformation | transformation behavior. (A) is a timing chart showing a reference pulse for ejection timing and a driving waveform when the second functional liquid droplet is landed on the first functional liquid droplet at a timing that matches the length change of the deformation behavior, (b). FIG. 5 is a diagram showing the landing diameter of functional droplets that have landed on a substrate. The figure which shows the case where a 2nd functional droplet is made to land after a deformation | transformation behavior is complete | finished on a 1st functional droplet with respect to a comparatively small pixel area | region. The figure which shows the case where the 2nd functional droplet is made to land on the 1st functional droplet with the timing which matches the length change of a deformation | transformation behavior with respect to a comparatively small pixel area. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 7 ... Controller 11 ... XY movement mechanism 16 ... Functional droplet discharge head 75 ... Nozzle

Claims (7)

Against the word click, the functional liquid droplet ejection head having a nozzle, a work processing system for discharge-landing as functional liquid droplets of a plurality shots overlap,
The functional liquid droplet ejection head;
Control means for controlling the discharge timing of the nozzle,
For the periodic deformation behavior of functional droplets immediately after landing, which repeatedly repeats a short change to flatten and a long change to increase on the workpiece,
It said control means, a work processing apparatus, characterized in that the said definitive First the functional liquid droplet that has landed on a workpiece at a timing that matches the short change, be landed the second the functional liquid droplets. Against the word click, the functional liquid droplet ejection head having a nozzle, a work processing system for discharge-landing as functional liquid droplets of a plurality shots overlap,
The functional liquid droplet ejection head;
Control means for controlling the discharge timing of the nozzle,
For the periodic deformation behavior of functional droplets immediately after landing, which repeatedly repeats a short change to flatten and a long change to increase on the workpiece,
It said control means, a work processing apparatus, wherein the first of the long match the change timing of definitive to the functional liquid droplet on landed on the workpiece, to land the second the functional liquid droplets. Against the word click, the functional liquid droplet ejection head having a nozzle, a work processing system for discharge-landing as functional liquid droplets of a plurality shots overlap,
The functional liquid droplet ejection head;
Storage means for storing a temporal displacement of the periodic deformation behavior of the functional liquid droplet immediately after landing, which repeatedly repeats a short change to be flattened and a long change to be extended on the workpiece;
Control means for controlling the discharge timing of the nozzle,
The control means, on the first functional liquid droplet that has landed on the workpiece and is in the deformation behavior based on the time displacement of the deformation behavior stored in the storage means, A work processing apparatus that controls timing of landing of functional droplets. A plurality of shots of functional liquid droplets are ejected and landed in each pixel area while moving the functional liquid droplet ejection head having a nozzle relative to a substrate having a plurality of pixel areas in the bank portion. A droplet discharge device that performs a drawing operation to fill the entire pixel region with a functional liquid,
The functional liquid droplet ejection head;
A moving means for mounting the functional liquid droplet ejection head and moving the functional liquid droplet ejection head relative to the substrate;
Control means for controlling the moving means and controlling the discharge timing of the nozzles,
For the periodic deformation behavior of functional droplets immediately after landing, which repeats a short change to become flat on the substrate and a long change to rise,
In the drawing operation for landing the functional liquid droplets so as to contact the side wall portion of the bank unit, the control means has a timing that matches the short change in the first functional liquid droplets landed on the substrate. A droplet discharge device for landing the second functional droplet. A plurality of shots of functional liquid droplets are ejected and landed in each pixel area while moving the functional liquid droplet ejection head having a nozzle relative to a substrate having a plurality of pixel areas in the bank portion. A droplet discharge device that performs a drawing operation to fill the entire pixel region with a functional liquid,
The functional liquid droplet ejection head;
A moving means for mounting the functional liquid droplet ejection head and moving the functional liquid droplet ejection head relative to the substrate;
Control means for controlling the moving means and controlling the discharge timing of the nozzles,
For the periodic deformation behavior of functional droplets immediately after landing, which repeats a short change to become flat on the substrate and a long change to rise,
The control means, at the time of the drawing operation for landing the functional liquid droplets so as to contact the side wall portion of the bank portion, at a timing that matches the length change in the first functional liquid droplets landed on the substrate, A droplet discharge device for landing the second functional droplet. A plurality of shots of functional liquid droplets are ejected and landed in each pixel area while moving the functional liquid droplet ejection head having a nozzle relative to a substrate having a plurality of pixel areas in the bank portion. A droplet discharge device that performs a drawing operation to fill the entire pixel region with a functional liquid,
The functional liquid droplet ejection head;
A moving means for mounting the functional liquid droplet ejection head and moving the functional liquid droplet ejection head relative to the substrate;
Storage means for storing a temporal displacement of a periodic deformation behavior of a functional droplet immediately after landing, which repeatedly repeats a short change to be flattened and a long change to be extended on the substrate;
Control means for controlling the moving means and controlling the discharge timing of the nozzles,
The control means lands on the substrate based on the time displacement of the deformation behavior stored by the storage means during the drawing operation for landing the functional liquid droplet so as to contact the side wall portion of the bank portion. And a timing at which the second functional droplet is landed on the first functional droplet having the deformation behavior. Method of manufacturing an electro-optical device characterized by claims 4 to using the liquid droplet ejecting apparatus according to any one of 6, to form a film-forming portion by the functional liquid droplet on the substrate.

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