JP4228910B2 - Functional droplet discharge inspection method, functional droplet discharge inspection device, and droplet discharge device equipped with the same - Google Patents

Description

The present invention, the functional liquid droplet functional liquid droplet ejection inspecting method for inspecting an ejection state of the nozzles of the ejection head, in which about the functional liquid droplet ejection inspecting apparatus and a droplet discharge equipment having the same.

Conventionally, ink droplets (functional droplets) ejected from nozzles using an optical inspection device consisting of a camera and a strobe to an inkjet head (functional droplet ejection head) provided in a color filter manufacturing apparatus (droplet ejection apparatus) ) To detect the flying state of the ink droplets, that is, the flying bend, the presence of satellites (fine particles floating in a mist due to the ejected liquid), non-ejection (dot missing), etc. A method for inspecting the discharge state is known (for example, see Patent Document 1).
JP-A-10-206624

  In the conventional inspection method, in-flight ink droplets ejected from the nozzles are observed, so it is necessary to eject ink droplets from the nozzles, and ink is wasted every time inspection is performed. Particularly, in a color filter manufacturing apparatus that manufactures a color filter or the like by discharging an expensive functional liquid, if the functional liquid is wasted by executing the above inspection method, the manufacturing cost of the color filter or the like is increased. It was a problem because it was a factor. Furthermore, a part for receiving the ejected ink droplets is required, and there is a trouble of cleaning or replacing the part. Therefore, by applying a micro-vibration waveform that is not accompanied by functional droplet ejection from the nozzle to the functional droplet ejection head, and measuring the displacement of the meniscus of the rhythmic nozzle at a plurality of measurement positions of the meniscus. It is conceivable to inspect the discharge characteristics of the nozzles without wasting the functional liquid by grasping the deformation state (three-dimensional displacement) of the meniscus that is rhythmic on the surface.

  However, in such an inspection method, if the three-dimensional displacement is obtained directly from the meniscus displacement at each displacement measurement position, the non-rhythmic meniscus is not flat at the plurality of displacement measurement positions (usually a reverse concave shape). ), The calculated three-dimensional displacement of the meniscus is different from the actual three-dimensional displacement of the meniscus.

The present invention aims to provide a rhythmic function liquid droplet ejection test method capable of accurately obtain three-dimensional displacement of the meniscus is, functional liquid droplet ejection inspecting apparatus and a droplet discharge equipment having the same To do.

The functional liquid droplet ejection inspection method of the present invention applies a micro-vibration waveform not accompanied by functional liquid droplet ejection from a nozzle to a functional liquid droplet ejection head, and measures the displacement of the meniscus of the rhythmic nozzle. In the functional liquid droplet ejection inspection method for inspecting the ejection characteristics of the nozzle, a fine vibration waveform is applied to the functional liquid droplet ejection head to rhythmize the meniscus, and the meniscus displacement measuring means detects the rhythmic meniscus displacement. A meniscus displacement measurement step for measuring at a plurality of displacement measurement positions, a distance measurement step for measuring a separation distance from the meniscus at the time of non-rhythm by a distance measurement means, and a separation measured at each displacement measurement position Based on the distance, a displacement correction process for correcting the displacement of the meniscus measured at each displacement measurement position, a maximum amount of meniscus displacement corrected, and a plurality of displacements Based on the distribution of the position measurement location, and maximum displacement plane data synthesizing step of synthesizing the maximum displacement surface data representing a three-dimensional displacement of the meniscus at the maximum displacement,
It is provided with.
It is preferable to further include a still image display step for displaying a meniscus stereoscopic image based on the combined maximum displacement plane data.

In addition, the functional liquid droplet ejection inspection apparatus of the present invention applies a micro-vibration waveform that is not accompanied by functional liquid droplet ejection from the nozzle to the functional liquid droplet ejection head, and measures the displacement of the meniscus of the rhythmic nozzle. In the functional liquid droplet ejection inspection apparatus for inspecting the ejection characteristics of the nozzle, a fine vibration waveform applying means for pulsing the meniscus by applying a fine vibration waveform to the functional liquid droplet ejection head, and the displacement of the rhythmic meniscus Measures the separation distance between the meniscus at a plurality of displacement measurement positions, the control means for controlling the fine vibration waveform applying means and the meniscus displacement measurement means, and the meniscus at the time of non-rhythming at the plurality of displacement measurement positions. A distance measuring means, a displacement correcting means for correcting the displacement of the meniscus measured at each displacement measuring position based on the separation distance measured at each displacement measuring position, and a correction Maximum displacement surface data combining means for combining maximum displacement surface data representing the three-dimensional displacement of the meniscus at the maximum displacement based on the maximum displacement amount of the measured meniscus displacement and the distribution of the plurality of displacement measurement positions. It is characterized by having.
Preferably, still image display means for displaying a meniscus stereoscopic image based on the combined maximum displacement plane data is further provided.

According to these configurations, the maximum displacement plane data representing the three-dimensional displacement at the maximum displacement of the rhythmic meniscus is synthesized from the meniscus displacement corrected based on the separation distances at a plurality of displacement measurement positions. Thus, even when the meniscus at the time of non-rhythming is not flat at a plurality of displacement measurement positions, the three-dimensional displacement of the meniscus that is rhythmic can be obtained with high accuracy. That is, at each displacement measurement position, based on the separation distance between the distance measuring means and the non-rhythmic meniscus, the displacement correction means corrects the measurement result of the meniscus displacement to obtain the elapsed time displacement amount. A change in the absolute height position of the meniscus at the measurement position can be grasped from the elapsed time displacement amount. Since a three-dimensional still image of the meniscus is displayed based on the maximum displacement plane data, it is possible to visually recognize the deformed state of the meniscus at the maximum displacement. Therefore, even when the meniscus is not rhythmically symmetric with respect to the center point, the abnormality can be accurately grasped.
The meniscus rhythm means a periodic fine vibration of the meniscus when a fine vibration waveform is applied to the functional liquid droplet ejection head. It is a concept that also includes The non-rhythmic state means a meniscus state before applying the fine vibration waveform (or after the rhythm by the application of the fine vibration waveform is completely converged).

Further, in the above functional droplet discharge inspection method, instead of the maximum displacement surface data synthesis step, a plurality of elapsed time displacement amounts in a plurality of elapsed times after the start of measurement of the meniscus displacement among the corrected meniscus displacements, It is preferable to provide an elapsed time plane data synthesis step of synthesizing elapsed time plane data representing the three-dimensional displacement of the meniscus at each elapsed time based on the distribution of the plurality of displacement measurement positions.
And it is preferable to further include a moving image display step of displaying an image by animating the rhythm of the meniscus based on a plurality of synthesized elapsed time plane data.

Further, in the functional liquid droplet ejection inspection apparatus, instead of the maximum displacement surface data synthesizing means, a plurality of elapsed time displacement amounts in a plurality of elapsed times after the start of measurement of the meniscus displacement among the corrected meniscus displacements, and Preferably, the apparatus includes an elapsed time plane data synthesizing unit that synthesizes elapsed time plane data representing the three-dimensional displacement of the meniscus at each elapsed time based on the distribution of the plurality of displacement measurement positions.
And it is preferable to further include a moving image display means for animating the meniscus rhythm based on a plurality of synthesized elapsed time plane data and displaying the image.

  According to these configurations, the maximum displacement plane data representing the three-dimensional displacement at the maximum displacement of the rhythmic meniscus is synthesized from the meniscus displacement corrected based on the separation distances at a plurality of displacement measurement positions. Thus, even when the meniscus at the time of non-rhythming is not flat at a plurality of displacement measurement positions, the three-dimensional displacement of the meniscus that is rhythmic can be accurately grasped for each elapsed time. Since the meniscus rhythm is animated and displayed as a three-dimensional moving image based on a plurality of elapsed time plane data, the three-dimensional displacement of the meniscus can be recognized in more detail. Therefore, even when the meniscus is not rhythmically symmetric with respect to the center point, the abnormality can be grasped accurately and easily.

In the functional droplet discharge inspection apparatus, the apparatus further includes a timing signal supply unit that supplies a timing signal to the control unit,
The control means controls the fine vibration waveform applying means to apply the fine vibration waveform in synchronization with the supplied timing signal, and controls the meniscus displacement measuring means to measure in synchronization with the supplied timing signal. Is preferably initiated.

  According to this configuration, since the measurement of the meniscus displacement by the meniscus displacement measuring means can be started in accordance with the start of the meniscus rhythm by the application of the fine vibration waveform, the displacement of the rhythmic meniscus can be accurately measured. it can.

In the above-described functional liquid droplet ejection inspection method, it is preferable that in the meniscus displacement measurement step, the application of a fine vibration waveform and the measurement of the meniscus displacement are performed at each displacement measurement position.
And the meniscus displacement measuring means is constituted by a laser Doppler vibrometer that measures the displacing speed of the meniscus over a plurality of times over time and obtains the meniscus displacement from the measurement results of the plurality of times. Is preferred.

In the above-described functional liquid droplet ejection inspection apparatus, measurement in which the meniscus displacement measuring unit is moved relative to the functional liquid droplet ejection head so that the meniscus displacement measuring unit sequentially measures the meniscus displacement at a plurality of displacement measurement positions. A system moving means, and the control means controls the fine vibration waveform applying means and the meniscus displacement measuring means so that the fine vibration waveform is applied and the meniscus displacement is measured at each displacement measurement position. Is preferred.
The meniscus displacement measuring means is constituted by a laser Doppler vibrometer that measures the displacing speed of the meniscus over a plurality of times over time and obtains the meniscus displacement from the measurement results of the plurality of times. Is preferred.

  According to these configurations, since the meniscus is rhythmic in a dark and narrow nozzle, it is difficult to image and observe this using a CCD camera or the like. The laser Doppler vibrometer is used to convert laser light into the meniscus. By irradiating, the displacement of the meniscus can be measured easily.

  In the above-described functional liquid droplet ejection inspection method, the measurement over a plurality of times is performed by applying a micro vibration waveform a plurality of times in the meniscus displacement measurement step, and measuring each application by shifting the timing by a predetermined time. Is preferred.

  In the functional liquid droplet ejection inspection apparatus, the control means controls the fine vibration waveform applying means, applies the fine vibration waveform a plurality of times, controls the meniscus displacement measuring means, and controls the timing for each application for a predetermined time. It is preferable that the displacement speed of the rhythmic meniscus is measured several times over time by shifting each time.

  According to these configurations, even when the meniscus displacement measuring means is constituted by a laser Doppler vibrometer whose sampling period is longer than the period of microvibration of the meniscus, the displacement speed of the rhythmic meniscus is determined. It becomes possible to appropriately measure over a plurality of times over time.

  In the above functional droplet discharge inspection method, it is preferable that the plurality of displacement measurement positions include the center point of the meniscus and are distributed on one or more concentric circles centered on the center point.

  According to this configuration, since the plurality of displacement measurement positions are evenly distributed on the center point of the meniscus and its concentric circles, it is possible to appropriately capture the three-dimensional displacement of the meniscus that is slightly vibrating.

  In the above-described functional liquid droplet ejection inspection apparatus, center point detecting means for imaging the nozzle to detect the center point of the meniscus, the imaged nozzle, and a grid pattern that equally divides the nozzle around the detected center point It is preferable to further include nozzle image display means for displaying the ruled lines, and selection means for selecting a plurality of displacement measurement positions on the nozzle images divided by the ruled lines.

According to this configuration, since a plurality of displacement measurement positions can be selected on the nozzle image divided by the ruled lines, the plurality of displacement measurement positions can be appropriately distributed at arbitrary positions.
In general, it is preferable to select a plurality of displacement measurement positions so as to be evenly distributed on the center point of the meniscus and its concentric circles.

  According to another aspect of the present invention, there is provided a liquid droplet ejection apparatus including the above-described functional liquid droplet ejection inspection apparatus and a drawing apparatus that ejects functional liquid droplets while moving the functional liquid droplet ejection head relative to the workpiece. And

  According to this configuration, since the functional liquid droplet ejection inspection capable of grasping the three-dimensional displacement of the rhythmic meniscus is provided, whether the nozzle of the functional liquid droplet ejection head can normally eject the functional liquid droplets. It is possible to properly check whether or not. Further, the inspection can be performed without discharging the functional liquid, and the running cost of the droplet discharge device can be reduced.

  In this case, a head maintenance unit that performs maintenance of the functional liquid droplet ejection head is further provided, and the control unit controls the head maintenance unit based on the inspection result by the functional liquid droplet ejection inspection device to control the functional liquid droplet ejection head. It is preferable to perform maintenance.

  According to this configuration, it is possible to perform the maintenance operation of the functional liquid droplet ejection head according to the ejection state of the nozzle. That is, since the maintenance operation can be performed only when the nozzle cannot normally eject the functional liquid droplet, the maintenance operation is not performed wastefully when the nozzle can normally eject the functional liquid droplet. The droplet discharge device can be operated efficiently.

  According to the functional liquid droplet ejection inspection method and the apparatus of the present invention, the state of the rhythmic meniscus can be grasped in three dimensions, and the ejection characteristics of the nozzles of the functional liquid droplet ejection head can be appropriately inspected. it can.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view schematically showing a droplet discharge device 1 to which the present invention is applied. The droplet discharge device 1 introduces a functional liquid such as special ink or a light-emitting resin liquid into the functional droplet discharge head 16 to form a film forming portion using functional droplets on a workpiece W such as a substrate. Is.

  The droplet discharge device 1 includes a machine base 2, a drawing device 3 widely placed over the entire area of the machine base 2, a head function recovery device 4 installed at an end of the machine base 2, and a head function recovery. A maintenance system moving table 5 for placing various units of the apparatus 4 together and moving them on the machine base 2; a functional liquid droplet ejection inspection apparatus 6 disposed between the drawing apparatus 3 and the head function recovery apparatus 4; , And the functional liquid droplet ejection inspection device 6 inspects the ejection characteristics of the functional liquid droplet ejection head 16, and the head function recovery device 4 performs a maintenance operation on the functional liquid droplet ejection head 16 based on the inspection result. The drawing apparatus 3 performs drawing with functional droplets on the workpiece W. Further, although not shown in FIG. 1, the liquid droplet ejection apparatus 1 includes a functional liquid supply mechanism 7 (see FIG. 3) including a liquid supply tank that supplies functional liquid to each functional liquid droplet ejection head 16, and the like. A control device 8 (see FIG. 3) for integrated control of the constituent devices such as the drawing device 3 and the functional liquid droplet ejection inspection device 6 is incorporated.

  The drawing apparatus 3 includes an XY movement mechanism 11 including an X-axis table 12 and a Y-axis table 13 orthogonal to the X-axis table 12, a main carriage 14 that is movably attached to the Y-axis table 13, and a main carriage 14 that is suspended from the main carriage 14. The head unit 15 is provided. A functional liquid droplet ejection head 16 is mounted on the head unit 15 via a sub-carriage (not shown). In this case, the workpiece W, which is a substrate, is mounted in a state of being positioned on the X-axis table 12 by a pair of workpiece recognition cameras 17, 17 facing the end of the X-axis table 12. The functional liquid droplet ejection head 16 can be disposed at a predetermined angle with respect to the sub-scanning direction (Y-axis direction) in order to ensure a sufficient application density of functional liquid droplets with respect to the workpiece W. is there. In addition, although one functional liquid droplet ejection head 16 is mounted on the illustrated head unit 15, a plurality of functional liquid droplet ejection heads 16 may be provided.

  The X-axis table 12 has a motor-driven X-axis slider 21 that constitutes a drive system in the X-axis direction, and a work table 22 including a suction table 23 on which a work W is suction-mounted and a work θ-axis table 24 is provided. It is mounted and configured to move freely. Similarly, the Y-axis table 13 has a motor-driven Y-axis slider 31 that constitutes a drive system in the Y-axis direction, and the main carriage 14 is movably mounted thereon via a head θ-axis table 32. Configured.

  In this case, the X-axis table 12 is directly supported on the machine base 2, while the Y-axis table 13 is supported by left and right columns 33, 33 erected on the machine base 2. The X-axis table 12 and the maintenance system moving table 5 are arranged in parallel to each other in the X-axis direction, and the Y-axis table 13 extends so as to straddle the X-axis table 12 and the maintenance system moving table 5. is doing.

  The Y-axis table 13 includes the head unit 15 mounted on the Y-axis table 13, a drawing area 41 positioned right above the X-axis table 12, a function recovery area 42 positioned right above the maintenance system moving table 5, and a function It is appropriately moved between the ejection inspection area 43 located immediately above the droplet ejection inspection apparatus 6. That is, the Y-axis table 13 is used when performing drawing on the workpiece W introduced into the X-axis table 12 when the head unit 15 faces the drawing area 41 and the function recovery process of the functional liquid droplet ejection head 16 is performed. When the head unit 15 faces the function recovery area 42 and the ejection characteristics of the nozzles 65 of the functional liquid droplet ejection head 16 are inspected, the head unit 15 faces the ejection inspection area 43.

  On the other hand, one end of the X-axis table 12 serves as a work introduction area 44 for setting the work W on the X-axis table 12, and the work introduction area 44 includes the pair of work recognition cameras 17, 17 is disposed. The pair of workpiece recognition cameras 17 and 17 simultaneously recognize two reference marks of the workpiece W supplied on the suction table 23, and the workpiece W is aligned based on the recognition result.

  As shown in FIG. 2, the functional liquid droplet ejection head 16 has a so-called double structure, and includes a functional liquid introduction part 51 having two connection needles 52 and 52, and two series of functional liquid introduction parts 51 connected to the functional liquid introduction part 51. A head substrate 53 and a head main body 54 which is connected to the lower side (upper side in the figure) of the functional liquid introducing portion 51 and has an in-head flow path filled with the functional liquid therein. Each connection needle 52 is connected to a functional liquid supply mechanism 7 (a liquid supply tank) for storing the functional liquid via a piping adapter (not shown), and the functional liquid introduction unit 51 functions from each connection needle 52. It is designed to receive liquid supply. The head body 54 includes a dual pump unit 61 composed of a piezoelectric vibrator or the like, and a nozzle plate 62 having a nozzle surface 63 in which two nozzle rows 64 and 64 are formed in parallel to each other. is doing. Each nozzle row 64 is configured by arranging a large number (180) of nozzles 65 at an equal pitch.

  The nozzle plate 62 is made of stainless steel or the like, and a water repellent film is formed by eutectic plating on the nozzle surfaces 63 and the inner surfaces of the nozzles 65 so as not to be eroded by the functional liquid. Moreover, the diameter of each nozzle 65 is 25 micrometers, for example.

  The head substrate 53 is provided with two connectors 66 and 66, and each connector 66 is connected to a head driver 211 (see FIG. 3) via a flexible flat cable (not shown). Then, a timing signal output from a timing signal supply unit 121 (see FIG. 3), which will be described later, is supplied to the control device 8, whereby a drive waveform is applied to each pump unit 61 via the head driver 211. Although details will be described later, in the present embodiment, the timing signal supply unit 121 generates two types of drive waveforms, that is, a drive waveform in the case of performing the main discharge and a fine vibration waveform for inspection.

For example, a piezoelectric element having a longitudinal vibration and lateral effect is used for the piezoelectric vibrator constituting the pump unit 61. The piezoelectric vibrator contracts when charged, expands when discharged, and causes pressure fluctuation in the pressure generating chamber constituting the flow path in the head. It is supposed to be generated. Then, so-called “pulling” is commonly used, in which the pressure generating chamber containing the functional liquid is expanded and then contracted so as to reduce the weight of the ejected functional liquid droplets and reduce the drawing dot diameter. When a pressure fluctuation occurs in the pressure generation chamber, the meniscus M (see FIG. 7) of each nozzle 65 is once drawn, and then protrudes from the discharge surface (nozzle surface 63) of the nozzle 65, and functional droplets are discharged. (Details will be described later). In this way, the driving of the functional liquid droplet ejection head 16 is controlled by the control device 8 via the head driver 211.
The pump unit 61 may have another configuration as long as it is an element that causes a pressure fluctuation in the pressure generation chamber in accordance with a signal given from the outside. For example, the piezoelectric vibrator is not limited to a piezoelectric element having a longitudinal vibration and a lateral effect, but may be a flexural vibration type piezoelectric element. In addition to the piezoelectric vibrator, other elements such as a magnetostrictive element may be used. Further, the functional liquid may be heated by a heat source such as a heater, and the pressure may be changed by bubbles generated by the heating.

  Here, with reference to FIG. 1, the discharge operation | movement to the workpiece | work W by the drawing apparatus 3, ie, a drawing operation | movement, is demonstrated easily. First, as preparation before discharging functional droplets, the position correction of the workpiece W set on the suction table 23 is performed by correcting the position in the X-axis direction by the X-axis table 12 and the position in the θ-axis direction by the workpiece θ-axis table 24. In addition to correction, position correction of the head unit 15 set on the main carriage 14 is performed by position correction in the Y-axis direction by the Y-axis table 13 and position correction in the θ-axis direction by the head θ-axis table 32.

Next, the work W is reciprocated in the main scanning direction (X-axis direction) by the X-axis table 12, and the functional liquid droplet ejection head 16 is selectively driven in synchronism with this so that the functional liquid with respect to the work W is discharged. Discharging is performed. Then, after the work W is moved backward, the head unit 15 is moved in the sub-scanning direction (Y-axis direction) by the Y-axis table 13, and the reciprocating movement of the work W in the main scanning direction and the functional liquid droplet ejection head 16 are performed again. Is driven. Then, by repeating this a plurality of times, drawing is performed from end to end of the workpiece W.
In the droplet discharge device 1 of the present embodiment, the drawing operation is performed with the movement of the workpiece W in the X-axis direction as main scanning and the movement of the head unit 15 in the Y-axis direction as sub-scanning. The unit 15 may be moved in the main scanning direction. Alternatively, the work W may be fixed and the head unit 15 may be moved in the X-axis direction and the Y-axis direction.

  The maintenance system moving table 5 extends in the longitudinal direction (X-axis direction) of the main body 2, and includes a common base 71 on which various units of the head function recovery device 4 are placed in a distributed manner, and a common base 71. The head function recovery device 4 is provided with a pair of guide rails 72 that are slidably supported in the X-axis direction and a motor-driven X-axis moving mechanism (not shown), which are dispersedly placed on the common base 71. Are moved in the X-axis direction.

  The head function recovery device 4 includes a storage unit 81, a suction unit 82, a wiping unit 83, and a flushing unit 84 disposed on the work table 22. And. The function recovery process (maintenance operation) of the functional droplet discharge head 16 by the head function recovery device 4 is performed based on the inspection result of the functional droplet discharge inspection device 6 as described above, and also periodically. Is.

  The storage unit 81 seals this to prevent the nozzle 65 of the functional droplet discharge head 16 from drying when the operation of the droplet discharge apparatus 1 is stopped. That is, the storage unit 81 is provided with a sealing cap 91 corresponding to the functional liquid droplet ejection head 16 and an elevating mechanism (not shown) for raising and lowering the cap, and faces the head unit 15 when the operation of the apparatus is stopped. The sealing cap 91 is brought into close contact with the nozzle surface 63 of the functional liquid droplet ejection head 16 to seal it. Thereby, vaporization of the solvent of the functional liquid on the nozzle surface 63 of the functional liquid droplet ejection head 16 is suppressed, and so-called nozzle clogging is prevented.

  The suction unit 82 sucks the functional liquid droplet ejection head 16 from the nozzle 65 side, and is used when performing suction (cleaning) for removing the functional liquid thickened in the functional liquid droplet ejection head 16. . That is, the suction unit 82 is positioned corresponding to the functional liquid droplet ejection head 16 and has a suction cap 101 in which a liquid absorbent material is laid at the bottom portion, and a functional liquid droplet is ejected through the suction cap 101 (not shown). A suction pump for sucking the head 16 and a lifting mechanism for raising and lowering the suction cap 101 are provided. The suction cap 101 is lifted and brought into close contact with the nozzle surface 63 of the functional liquid droplet ejection head 16 to perform pump suction. . Then, the sucked functional liquid is guided to a recovery tank 121 of the functional liquid recovery apparatus 7 described later.

  The wiping unit 83 includes a sheet supply unit 111 and a wiping unit 112, and a wiping sheet 113 is provided so as to be fed out and wound up. Further, although not shown, a cleaning liquid supply device that supplies a cleaning liquid (such as a solvent for the functional liquid) stored in the cleaning liquid tank to the wiping sheet 113 via the cleaning liquid spray nozzle is provided. The sheet supply unit 111 and the wiping unit 112 are arranged on the maintenance system moving table 5 side by side in the X-axis direction with the wiping unit 112 positioned on the suction unit 82 side. The wiping unit 112 moves to one of the wiping directions in the X-axis direction (upward in FIG. 1) integrally with the sheet supply unit 111 by the movement of the maintenance system moving table 5 toward the existing head unit 15 and soaks the cleaning liquid. The nozzle surface 63 of the functional liquid droplet ejection head 16 of the head unit 15 is wiped through the wiping sheet 113.

  When the functional recovery of the functional liquid droplet ejection head 16 is performed by each of these units, the suction unit 82 is moved to the functional recovery area 42 by the maintenance system moving table 5 and the head unit is moved by the Y-axis table 13 as described above. 15 is moved to the function recovery area 42, and the functional liquid droplet ejection head 16 is cleaned (pump suction). When cleaning is performed, the wiping unit 83 is subsequently moved to the function recovery area 42 by the maintenance system moving table 5, and the functional liquid droplet ejection head 16 in which the nozzle surface 63 becomes dirty by cleaning is wiped.

  On the other hand, in the flushing unit 84, when the drawing apparatus 3 performs a drawing operation, if a considerable time has passed since the previous drawing operation, the functional liquid in the nozzle 65 thickens due to drying, and the nozzle is clogged. In addition, there is a risk that ejection failure such as ejection of an excessively small-sized functional droplet may occur, so that the functional droplet is flushed (discarded ejection) immediately before being ejected onto the workpiece W. The flushing unit 84 has a pair of flushing boxes 116 and 116 in which a liquid absorbent material is laid, and the pair of flushing boxes 116 and 116 attaches the suction table 23 of the work table 22 to the X axis. It is arranged so as to be sandwiched in the direction. That is, the pair of flushing boxes 116 and 116 are moved together with the work table 22 (work W) by the X-axis table 12.

  In the drawing operation on the work W described above, when the flushing unit 84 moves forward together with the work table 22 on which the work W is set, the upper flushing box 116 shown in the drawing first passes directly below the head unit 15. At this time, the functional liquid droplet ejection head 16 performs flushing of a large number of functional liquid droplets, and the functional liquid droplet ejection head 16 proceeds to a normal liquid droplet ejection operation as it is. Similarly, when the flushing unit 84 moves backward, the lower flushing box 116 in the drawing first passes directly under the head unit 15. At this time, the functional liquid droplet ejection head 16 performs flushing, and the functional liquid droplet ejection head 16 proceeds to a normal liquid droplet ejection operation as it is. Thus, nozzle clogging or the like of the nozzle 65 can be prevented by appropriately performing flushing during the reciprocating motion for main scanning.

Further, when the discharge of the functional liquid to the workpiece W is temporarily stopped as in the exchange of the workpiece W, the suction cap 101 is used as a flushing box and is slightly separated from the functional droplet discharge head 16. And perform flushing. Thereby, nozzle clogging is prevented or functional recovery of the functional liquid droplet ejection head 16 in which nozzle clogging occurs is achieved.
As described above, in the flushing, the pre-discharge flushing performed on the flushing box 116 immediately before the functional liquid is discharged to the workpiece W, and the suction cap 101 are periodically performed when the functional liquid discharge is stopped. And regular flushing.

  Here, a control system of the droplet discharge device 1 constituted by the control device 8 will be described. As shown in FIG. 3, the control system of the droplet discharge apparatus 1 basically has an input unit 201 having a keyboard, a mouse, and the like for inputting various data by its operation, and an inspection result of the functional droplet discharge inspection apparatus 6. And the like, a display unit 202 having a monitor 203 for displaying the screen and the like, a drive unit 204 having various drivers for driving the functional liquid droplet ejection head 16, the monitor 203, and the like, and a control for comprehensively controlling the droplet ejection apparatus 1 including these units. Unit 205.

  The drive unit 204 includes a head driver 211 that controls the ejection of the functional liquid droplet ejection head 16, a monitor driver 212 that controls the drive of the monitor 203, and a drawing system movement driver 213 that drives and controls each motor of the XY movement mechanism 11. The maintenance system moving driver 214 for driving and controlling the maintenance system moving table 5, the maintenance driver 215 for driving and controlling the suction unit 82 and the wiping unit 83 of the head function recovery device 4, and the laser of the functional liquid droplet ejection inspection device 6 Vibrometer driver 216, distance meter driver 217, imaging driver 218, and measurement system moving driver for driving and controlling the Doppler vibrometer 131, laser distance meter 132, imaging unit 133, and XY stage 134 (measurement system moving means), respectively. 219.

  The control unit 205 includes a CPU 221, a ROM 222, a RAM 223, and a P-CON 224, which are connected to each other via a bus 225. The ROM 222 has a control program area for storing control programs and control data to be processed by the CPU 221, and a control data area for storing control data for performing inspection work and drawing work. The RAM 223 includes various register groups and a storage unit that stores various data input by the operator through the input unit 201, and is used as various work areas for control processing.

  In addition to the various drivers of the drive unit 204 and the input unit 201, the functional liquid supply mechanism 7 and the like are connected to the P-CON 224. In the P-CON 224, a logic circuit for supplementing the function of the CPU 221 and handling an interface signal with a peripheral circuit is configured by a gate array or a custom LSI. For this reason, the P-CON 224 receives various commands, image data, and the like from the input unit 201 as they are or are processed and fetched into the bus, and in conjunction with the CPU 221, data and control signals output from the CPU 221 and the like to the bus 225. Is output to the drive unit 204 as it is or after being processed.

  Then, with the above configuration, the CPU 221 inputs various detection signals, various commands, various data, and the like via the P-CON 224 according to the control program in the ROM 222, and processes various data in the RAM 223. The entire droplet discharge apparatus 1 is controlled by outputting various control signals to the drive unit 204 via the -CON 224.

  For example, when performing a drawing operation on the workpiece W, the CPU 221 controls the ejection driving of the functional liquid droplet ejection head 16 and moves the scanning range of the workpiece W and the head unit 15 by the XY movement mechanism 11. To control. Further, when the functional recovery of the functional liquid droplet ejection head 16 is performed, the movement operation of the functional liquid droplet ejection head 16 is controlled by the XY movement mechanism 11 in the function recovery measurement area 42 of the head function recovery device 4, and the function The ejection driving of the droplet ejection head 16 and the movement operation of the maintenance system moving table 5 are controlled. Further, as will be described in detail later, when the ejection characteristics of each nozzle 65 of the functional liquid droplet ejection head 16 are inspected, the application of a fine vibration waveform to the functional liquid droplet ejection inspection apparatus 6 and the measurement by the laser Doppler vibrometer 131 are performed. Control the operation.

  Next, the functional droplet discharge inspection device 6 provided in the droplet discharge device 1 will be described in detail. The functional liquid droplet ejection inspection device 6 measures the displacement of the meniscus M of each nozzle 65 of the functional liquid droplet ejection head 16 at a plurality of displacement measurement positions, for example, immediately before the drawing operation (pre-ejection flushing). Is to obtain the target displacement.

  As shown in FIG. 4, the functional droplet discharge inspection device 6 is located in the discharge inspection area 43 (see FIG. 1), and the main part is placed on a stand (not shown) fixed on the machine base 2. A fine vibration waveform that does not involve discharge of functional droplets from the nozzle 65 is applied to the timing signal supply means 121 that supplies a timing signal to the control device 8 and the functional droplet discharge head 16, thereby causing a meniscus. A micro-vibration waveform applying means for rhythmizing M, a laser Doppler vibrometer 131 that measures the displacement of the rhythmic meniscus M, an imaging unit 133, and the like, a stereoscopic image of the meniscus M, and a captured image The monitor 203 that displays the imaging screen of the nozzle 65, the input unit 201 (selection means) that selects a plurality of displacement measurement positions on the imaging screen of the nozzle 65, and overall control While, and a said control device 8 having the elapsed time surface data synthesizing means 123 (Surface data synthesizing means) and the displacement correcting means 124 or the like to synthesize a surface data representing a three-dimensional displacement of the meniscus. The head driver 211 is made to function as the fine vibration waveform applying means. The timing signal supply means 121 generates a predetermined timing signal (trigger pulse) by frequency division from a clock generation circuit such as the CPU 221.

  The head driver 211 synchronizes with the timing signal (PTS) supplied to each pump unit 61 of the functional liquid droplet ejection head 16, and after a predetermined time (for example, 2 microseconds) from the supply of the timing signal, A fine vibration waveform is selectively applied (see FIGS. 5 and 6). As described above, the driving waveform is for discharging functional droplets from each nozzle 65, and the fine vibration waveform is for rhythmicizing the meniscus without discharging functional droplets from each nozzle 65. It is.

  As shown in FIG. 5, the drive waveform starts from the intermediate potential Vm (P11), and rises from the intermediate potential Vm to the maximum potential Vh with a predetermined voltage gradient θCM1 (eg, over 3 microseconds) ( P12), and the maximum potential Vh is maintained for a predetermined time (for example, 3 microseconds) (P13). Next, the voltage value of the drive waveform drops from the maximum potential Vh to the minimum potential Vl with a predetermined voltage gradient θDM1 (for example, over 5 microseconds) (P14). The voltage gradient θDM1 during discharge is set to be larger than the voltage gradient θCM1 during charge. Then, after the minimum potential Vl is held for a predetermined time (for example, 3 microseconds) (P15), the drive waveform rises again to the intermediate potential Vm (P16).

  FIG. 7 shows changes in the state of the meniscus M (functional liquid near the nozzle 65) due to the application of the drive waveform. In the state of P11 at the intermediate potential Vm, the meniscus M is slightly drawn from the discharge surface of the nozzle 65 (reverse concave shape) due to the surface tension between the water repellent film formed on the nozzle plate 62 and the functional liquid. It is in. Next, in the state of P12 rising from the intermediate potential Vm to the maximum potential Vh, the pump portion 61 contracts and the pressure generation chamber expands, and the meniscus M is drawn into the back of the nozzle 65. In the state of P13, the maximum potential Vh is maintained for a period of time so that the meniscus M once pulled in does not return to the position immediately before being pulled. In the state of P14, the pump unit 61 is rapidly discharged from the maximum potential Vh to the minimum potential Vl while the meniscus M is drawn into the back of the nozzle 65. As a result, the pump unit 61 expands and the pressure generation chamber contracts, and the meniscus M begins to protrude from the discharge surface of the nozzle 65. Even in the state of P15 that maintains the minimum potential Vl, the meniscus M continues to protrude due to inertia. In the state of P16, the pump unit 61 (piezoelectric vibrator) is charged again to the intermediate potential Vm with the meniscus M protruding. As a result, the pump 61 contracts and the pressure generating chamber expands, the functional liquid protruding outside from the nozzle 65 is torn off, and functional droplets are discharged.

  On the other hand, as shown in FIG. 6, the micro-vibration waveform starts from the intermediate potential Vm (P21) as in the case of the drive waveform (P21). ) Increases to the minute vibration potential Vv (P22). Then, after maintaining the micro-vibration potential Vv for a predetermined time (for example, 3 microseconds) (P23), the microvibration potential Vv is lowered to the intermediate potential Vm with a predetermined voltage gradient θDM2 (for example, over 3.5 microseconds) (P24). Here, since the fine vibration waveform gives a fine vibration that does not eject functional droplets, the fine vibration potential Vv is smaller than the maximum potential Vh of the drive waveform ((Vv−Vm) is (Vh−). About 1/2 of Vm)). In addition, the voltage gradient θCM2 during charging and the voltage gradient θDM2 during discharging of the slight vibration waveform are substantially equal.

  FIG. 8 shows a change in the state of the meniscus M near the nozzle 65 due to the application of the fine vibration waveform. In the state of P21 at the intermediate potential Vm, the meniscus M is in a position slightly pulled from the nozzle 65 as in the state of P11 described above. Next, when the pump unit 61 (piezoelectric vibrator) is charged from the intermediate potential Vm to the microvibration potential Vv (P22), the pump unit 61 contracts and the pressure generation chamber expands, so that the meniscus M is drawn into the nozzle 65. It is. However, since the micro-vibration potential Vv is smaller than the maximum potential Vh, the amount of meniscus M drawn is small. In the state of P23 in which the fine vibration potential Vv is held for only a short time, the meniscus M is maintained in a state of being slightly pulled into the nozzle 65. In the state of P24 in which the pump unit 61 (piezoelectric vibrator) is discharged from the fine vibration potential Vv to the intermediate potential Vm, the pressure generation chamber contracts, and the meniscus M is pushed back toward the discharge surface of the nozzle 65. As described above, since the slight vibration waveform causes a shallow discharge, the pressure change in the pressure generation chamber is small, and the meniscus M can be rhythmized without discharging functional droplets from the nozzle 65.

The measurement unit 122 measures the distance between the laser Doppler vibrometer 131 that measures the displacement of the meniscus M that is rhythmic at each displacement measurement position and the meniscus M when it is not rhythmic at a plurality of displacement measurement positions. A sensor head unit (not shown) that is mounted on the total 132 and the laser Doppler vibrometer 131 and that forms an integral part of the objective lens 154, the imaging unit 133 that images the nozzle 65 from below, and the functional liquid droplet ejection head 16 In contrast, a motor-driven XY stage 134 that moves the laser Doppler vibrometer 131 and the laser distance meter 132 as a unit is provided.
Although details will be described later, the plurality of displacement measurement positions measured by the measurement unit 122 are selected by the operation of the input unit 201 and include the center point of the meniscus and 1 centered on the center point. Alternatively, the three-dimensional displacement of the meniscus that is distributed on a plurality of concentric circles and is finely oscillated can be properly captured.

  The laser Doppler vibrometer 131 measures the displacement speed of the rhythmic meniscus M over a plurality of times over time, and obtains the displacement of the meniscus M from the measurement results of the plurality of times. FIG. 9 is a block diagram showing the measurement principle of the laser Doppler vibrometer 131. The laser Doppler vibrometer 131 irradiates the meniscus M with laser light (irradiated light) and a reference light generator 142 that generates reference light for reference to the laser light (reflected light) reflected by the meniscus M. A light receiving unit 143 that receives the reflected light and the reference light, and a signal processing unit 144 that obtains the displacement speed of the meniscus M based on the interference light between the reflected light and the reference light.

  The irradiation unit 141 includes a laser light source 151 composed of a He—Ne laser (wavelength 632.8 nm) and the like, and a first splitter that divides the laser light emitted from the laser light source 151 into a first laser light and a second laser light. 152, a polarization splitter 153 that transmits one of the bisected laser beams, and an objective lens 154 that focuses the first laser beam on the meniscus M as irradiation light. The spot diameter of the irradiation light condensed by the objective lens 154 is approximately 2 to 3 μm. Then, the laser light (reflected light) reflected from the meniscus M is sent to the second splitter 156 of the light receiving unit 143 via the polarization splitter 153 and the mirror 155.

  The reference light generation unit 142 includes a frequency shifter 157 that shifts the frequency of the other second laser light out of the laser light divided by the first splitter 152 in an acousto-optic manner. The second laser light passes through an optical path (not shown) and then enters the frequency shifter 157 in order to maintain the coherence with the reflected light by making the optical path length substantially the same as the optical path length on the reflected light side. The second laser light frequency-shifted in step S1 is sent to the second splitter 156 as reference light.

  The light receiving unit 143 transmits the reflected light and the reference light transmitted from the irradiation unit 141 and the reference light generation unit 142, respectively, and causes the reflected light and the reference light to enter the signal processing unit 144. In the signal processing unit 144, the laser light given a certain frequency shift by the frequency shifter 157 is used as reference light, and the reference light and the reflected light from the meniscus M cause optical interference. As a result, a voltage signal proportional to the displacement speed of the meniscus M is obtained as a speed signal having positive and negative signs. The obtained voltage signal is integrated to calculate the displacement of the meniscus M, and the obtained displacement of the meniscus M is output to the control device 8. Note that a voltage signal proportional to the displacement speed of the meniscus M may be output to the control device 8 as it is, and the displacement of the meniscus M may be obtained by calculation software incorporated in the control device 8.

  Further, as described above, the measurement of the displacement speed by the laser Doppler vibrometer 131 is started 1 microsecond after the supply of the timing signal with respect to the first application of the timing signal (in FIG. Is indicated by an arrow). That is, since the application of the minute vibration waveform from the head driver 211 to the pump unit 61 is started 2 microseconds after the timing signal is supplied, the laser Doppler vibrometer 131 applies the minute vibration waveform to the nozzle by applying the minute vibration waveform. The measurement of the displacement of the meniscus M is performed from 1 microsecond before the start of drawing into 65. According to this, since the measurement of the displacement of the meniscus M by the laser Doppler vibrometer 131 can be started in accordance with the start of the rhythm of the meniscus M by the application of the fine vibration waveform, the displacement of the rhythmic meniscus M is accurately measured. can do. The timing at which the fine vibration waveform is applied from the supply of the timing signal and the timing at which the measurement by the laser Doppler vibrometer 131 is started can be changed depending on the type of functional liquid droplet ejection head 16 used, the type of functional liquid, and the like. It is preferable to do.

  As shown in FIG. 6, the measurement of the displacement speed by the laser Doppler vibrometer 131 is performed a plurality of times over time with respect to one application of the minute vibration waveform. However, when the laser Doppler vibrometer 131 has a longer sampling period (for example, 20 microseconds) than the period of microvibration of the meniscus M (for example, 5 microseconds), the measurement is performed multiple times over time. Are measured by applying a minute vibration waveform a plurality of times and shifting the timing by a predetermined time (for example, 1 microsecond) for each application. That is, the first timing signal applied to the control device 8 is measured 1 microsecond after the timing signal is supplied, and the timing signal is applied to the second timing signal applied. The measurement is performed 2 microseconds after the supply, and so on.

  The displacement of the meniscus M thus measured is shown in FIG. 6 together with the timing chart and the time chart of the fine vibration waveform. In addition, the displacement of the meniscus M in the figure is the case where a fine vibration waveform is applied to the nozzle 65 that can normally eject functional droplets.

  In this embodiment, in order to measure the displacement of the meniscus M that rhythms with an instantaneous period of several microseconds in the nozzle 65 where it is difficult to recognize an image from the outside, a laser beam is externally used as the measuring means. Although the laser Doppler vibrometer 131 that can measure by irradiation and has a relatively short sampling period is used, other measuring means may be used as long as the instantaneous meniscus M rhythm in the nozzle 65 can be observed. .

The laser distance meter 132 is provided in the laser Doppler vibrometer 131 on the XY stage 134. A laser oscillator is provided inside, and the laser beam is measured, and the distance from the meniscus M at the time of non-rhythm is measured at each displacement measurement position using the phase of the reflected light. This measurement result is output to the control device 8.
The term “non-rhythmic” refers to the state of the meniscus M before applying the fine vibration waveform (or after the rhythm due to the application of the fine vibration waveform has completely converged) (see FIG. 11A). When the shape of the meniscus M (separation distance from the laser distance meter 132) during non-rhythming is constant depending on the types of the functional liquid and the functional liquid droplet ejection head 16, the laser distance meter 132 sequentially detects the meniscus M. The separation distance need not be measured at each displacement measurement position.

  The imaging unit 133 is mounted on the sensor head unit of the laser Doppler vibrometer 131, and a CCD camera with illumination (not shown) that images the nozzle 65, and a recognition image of the nozzle 65 recognized by the CCD camera using, for example, a template And image processing means 162 for detecting the center point of the meniscus M. The image processing means 162 is constituted by so-called image processing software incorporated in the control device 8 described above. Further, as shown in FIG. 10, the imaging result of the nozzle 65 by the CCD camera includes the above-described monitor driver together with a grid-like ruled line L (5 rows and 5 columns) that equally divides the nozzle around the detected center point. The image is displayed on the monitor 203 via 212. That is, on the captured image of the nozzle 65, the nozzle 65 is equally divided into 25 cells (matrix) by the ruled line L. The ruled line L is preferably 5 rows and 5 columns or more in order to appropriately select the displacement measurement position. Of course, the monitor 203 also displays the type of the functional liquid droplet ejection head 16 and the functional liquid, the number of the target nozzle 65, and the like (not shown).

Then, a plurality of displacement measurement positions are selected on the image of the nozzle 65 divided by the ruled line L by the mouse of the input unit 201 or the like. At this time, for example, out of 25 squares divided by the ruled line L so that the plurality of displacement measurement positions include the center point of the meniscus and are distributed on one or more concentric circles centered on the center point. Select 5 cells where “row, column” is located in “2, 2”, “2, 4”, “3, 3”, “4, 2” and “4, 4” (in FIG. The square is filled.) In addition, a plurality of displacement measurement positions may be distributed at arbitrary positions (for example, only the peripheral edge of the nozzle) according to the purpose of inspection. Thus, by displaying the ruled line L, a plurality of displacement measurement positions can be appropriately distributed at arbitrary positions.
In the case where measurement is always performed at a plurality of constant displacement measurement positions, the plurality of displacement measurement positions may be stored in the control device 8 and measured without being sequentially selected.

The XY stage 134 measures the laser Doppler vibrometer 131 and the laser with respect to the functional liquid droplet ejection head 16 so that the displacement of the meniscus M at a plurality of selected displacement measurement positions (center positions of the selected masses) is sequentially measured. The distance meter 132 is moved as a unit. That is, the laser distance meter 132 is moved together with the laser Doppler vibrometer 131 so that the separation distance from the laser Doppler vibrometer 131 at one displacement measurement position is measured, and the meniscus M at the displacement measurement position is measured after the separation distance is measured. The laser Doppler vibrometer 131 is moved together with the laser distance meter 132 so that the displacement of the laser beam is measured. After measuring the displacement of the meniscus M, the laser distance meter 132 is moved to the laser so that the separation distance at the next displacement measurement position is measured. It is moved together with the Doppler vibrometer 131.
Instead of providing the original XY stage 134, the functional liquid droplet ejection inspection apparatus 6 is mounted on the X table 12 of the drawing apparatus 3, and the functional liquid droplet ejection head is used by using the XY moving mechanism 11 of the drawing apparatus 3. A configuration in which the laser Doppler vibrometer 131 is moved relative to 16 may be used. In addition to the XY stage 134, a θ table is provided. When moving between the displacement measurement positions, the XY stage 134 is used, and the laser distance meter 132 or the laser Doppler vibrometer 131 is selectively positioned at each displacement measurement position. In this case, a θ table may be used.

  Based on the separation distance measured at each displacement measurement position, the control device 8 corrects the displacement of the meniscus M measured at each displacement measurement position, and the displacement of the meniscus M corrected by the displacement correction means 124. Among them, a plurality of elapsed time displacement amounts in a plurality of elapsed times (for example, 1 microsecond, 3 microseconds, 5 microseconds, 7 microseconds, 9 microseconds, and 11 microseconds) after the measurement of the displacement of the meniscus M is started. And elapsed time plane data combining means 123 for combining elapsed time plane data representing the three-dimensional displacement of the meniscus M at each elapsed time based on the distribution of the plurality of displacement measurement positions, and a plurality of synthesized elapsed time planes It has a moving image display means 125 that animates the rhythm of the meniscus M and displays an image based on the data. According to this, the elapsed time plane data representing the three-dimensional displacement at each elapsed time of the rhythmic meniscus M is synthesized for each elapsed time, so that the three-dimensional displacement of the rhythmic meniscus M is changed over time. It can be grasped every hour. Since the rhythm of the meniscus M is animated and displayed as a three-dimensional moving image based on a plurality of elapsed time plane data, the three-dimensional displacement of the meniscus M can be recognized in more detail. Therefore, when the meniscus M does not rhythm with respect to the center point, the abnormality can be grasped accurately and easily.

FIG. 11 is a screen in which the meniscus rhythm with respect to a normal nozzle is animated based on the elapsed time displacement and displayed as an image. As can be seen from FIG. 11, with the normal nozzle 65, it is possible to visually recognize a state in which the meniscus M is rhythmically symmetric with respect to the center point thereof ((b) and (c) in FIG. 11). , (D), and (e) substantially correspond to P21, P22, P23, and P24 of FIG. 8, respectively). Then, by correcting the displacement of the meniscus M, the absolute height position of the meniscus M at each displacement measurement position is grasped, so that an image along the actual shape is obtained. That is, even when the meniscus M at the time of non-rhythming is not flat (see FIG. 5A), the three-dimensional displacement of the meniscus M that is rhythmic can be obtained with high accuracy.
In the figure, all 25 squares divided by the ruled line L are selected as displacement measurement positions. In the same figure, the three-dimensional displacement of the meniscus is shown in a bar graph, but by calculating the elapsed time displacement at each displacement measurement position, each displacement measurement position is connected with a smooth curve. Also good.

  Here, a series of operations for inspecting the ejection characteristics of each nozzle 65 of the functional liquid droplet ejection head 16 using the functional liquid droplet ejection inspection apparatus 6 will be described. First, the head unit 15 is moved to the discharge inspection area 43 by the Y-axis table 13 of the drawing apparatus 3 (see FIG. 1). Next, the imaging unit 133 images the nozzle 65 at the left end of the one nozzle row 64 to be measured, and “row, column” out of 25 squares divided by the ruled line L displayed on the captured image. Selects 5 squares located at “2, 2”, “2, 4”, “3, 3”, “4, 2” and “4, 4”. Subsequently, the laser distance meter 132 is moved to the mass (“row, column”: “2, 2”) as the first displacement measurement position by the XY stage 134 and separated from the meniscus M at this displacement measurement position. Measure distance. Next, the laser Doppler vibrometer 131 is moved to this displacement measurement position by the XY stage 134, and the displacement of the meniscus M at this displacement measurement position is measured. When the measurement of the separation distance and the displacement of the meniscus M at the first displacement measurement position is completed, the XY stage 134 moves the laser distance to the mass (“row, column”: “2, 4”) that is the second displacement measurement position. Move the total 132. Hereinafter, similarly, measurement is performed at five displacement measurement positions for one nozzle 65.

  When the measurement at the five displacement measurement positions is completed for one nozzle 65, the XY stage 134 causes the first displacement measurement position of the second nozzle 65 from the left end ("row, column": "2 2 ”). As described above, the measurement is performed at the five displacement measurement positions for the second nozzle 65 from the left end. Thereafter, measurement is performed for all the nozzles 65 in the same manner.

  At this time, the control device 8 controls the head driver 211, and while the displacement of the meniscus M of the plurality of nozzles 65 is sequentially measured by the laser Doppler vibrometer 131, the control device 8 includes all the nozzles 65 to be measured. A fine vibration waveform is applied to the nozzle 65. According to this, since the function liquid constituting the meniscus M is stirred by rhythmizing each meniscus M, and the fresh function liquid is supplied to the meniscus M, the function liquid is thickened during the inspection. Can be effectively prevented. Therefore, if the inspection result by the functional liquid droplet ejection inspection device 6 is normal for all the nozzles 65, the drawing operation can be performed immediately after the inspection is completed while maintaining a good meniscus M state.

  Subsequently, the process of synthesizing the elapsed time plane data based on the measurement results of the separation distance and the meniscus displacement measured in this manner will be described with a specific example. FIG. 14 shows the displacement amount at each elapsed time after application of the fine vibration waveform (displacement amount before correction) among the separation distance from the laser rangefinder 132 at each displacement measurement position and the displacement of the meniscus M before correction. It shows. Of the displacement of the meniscus M corrected by the displacement correction means 124 based on the separation distance, the displacement amount (elapsed time displacement amount, 50 mm in the figure) after the application of the fine vibration waveform is calculated. Indicates the subtracted value). In this way, at each displacement measurement position, the displacement correction means 124 corrects the measurement result of the displacement of the meniscus M based on the separation distance between the laser rangefinder 132 and the non-rhythmic meniscus M, and the elapsed time displacement amount is obtained. By obtaining, the change in the absolute height position of the meniscus M at each displacement measurement position can be grasped from the elapsed time displacement amount.

  Then, the elapsed time plane data synthesizing means 123 distributes a plurality of elapsed time displacement amounts and a plurality of displacement measurement position distributions (of the 25 cells of the ruled line L, “row, column” is “2, 2”, “2, 4 ”,“ 3, 3 ”,“ 4, 2 ”, and“ 5, 4 ”located in“ 4, 4 ”), each elapsed time (1 microsecond, 3 microsecond, 5 microsecond, 7 microsecond) , 9 microseconds, and 11 microseconds), the elapsed time plane data representing the three-dimensional displacement of the meniscus M is synthesized. That is, each elapsed time plane data is composed of data indicating an elapsed time displacement amount (absolute height position) and data indicating a distribution of a plurality of displacement measurement positions.

  It should be noted that the elapsed time plane data synthesizing unit 123 generates elapsed time plane data representing the three-dimensional displacement of the meniscus M at each elapsed time based on a plurality of pre-correction elapsed time displacement amounts instead of a plurality of elapsed time displacement amounts. It is good also as composition to synthesize. In this case, since the elapsed time plane data is directly synthesized from the displacement of the meniscus M, the meniscus M at the time of non-rhythm is processed as being flat. That is, in practice, the meniscus M at each displacement measurement position starts rhythm from different height positions, but is processed as starting rhythm from the same height position.

The animation images for the nozzle indicating abnormality and the normal nozzle obtained based on the elapsed time displacement before correction are shown in FIGS. 12 and 13, respectively. In this case, since the meniscus M at the time of non-rhythming is a reverse concave shape (see FIG. 11A), the meniscus M is processed as a flat one, so that it dents below the actual point near the center point of the meniscus M. It becomes a shape.
However, since the meniscus M at the time of non-rhythming has a reverse concave shape symmetrically with respect to the center point, the obtained process is obtained even when the displacement of the meniscus M is not corrected. The time plane data does not have a distortion that is axially displaced from the center point, and it is possible to accurately grasp the cause of an abnormality (for example, a flight curve) in the case where the meniscus does not rhythm about the center point. As can be seen from FIG. 12, the nozzle 65 exhibiting an abnormality causes shaft blurring in the vibration direction of the rhythmic meniscus M. Thus, by observing the displacement amount of the meniscus M and the displacement from the central axis in the vibration direction, the presence or absence of bubbles in the functional liquid, the functional liquid mass (functional liquid on the inner surface of the nozzle 65), and the like. It is possible to determine the presence or absence of a lump formed by evaporation and drying of the solvent. For example, when the amount of displacement is small, it is conceivable that bubbles are mixed in the functional liquid. When axial blurring occurs in the vibration direction, the functional liquid mass may exist on the inner surface of the nozzle 65. Conceivable. That is, when an abnormality such as a flight curve occurs in the drawing operation, it is possible to infer or specify the cause by inspecting the ejection characteristics by the functional liquid droplet ejection inspection device 6. Of course, it is also possible to estimate or identify the cause of the ejection abnormality from the animation image obtained based on the elapsed time displacement amount by the three-dimensional displacement obtained with high accuracy.

In the present embodiment, the elapsed time plane data synthesizing unit 123 synthesizes the elapsed time plane data for each elapsed time, and the moving image display unit 125 animates it. Instead, the maximum displacement surface data that synthesizes the maximum displacement surface data representing the three-dimensional displacement of the meniscus M at the maximum displacement based on the corrected maximum displacement amount of the meniscus M and the distribution of the plurality of displacement measurement positions. A composition means may be provided, and a still image display means for displaying a three-dimensional image of the meniscus M based on the synthesized maximum surface displacement plane data may be provided instead of the moving image display means 125. According to this, since the deformation state of the meniscus M at the maximum displacement can be visually recognized, even if the rhythm of the meniscus M is not animated, the meniscus M does not rhythm symmetric about the center point. The cause of such an abnormality can be accurately grasped.
In this case as well, the maximum displacement surface data is synthesized based on the maximum displacement amount of the measurement result of the displacement of the meniscus M without correcting the displacement of the meniscus M measured by the displacement correction means. Is possible.

  As described above, according to the functional liquid droplet ejection inspection apparatus 6 according to the present invention, the state of the rhythmic meniscus M is measured by measuring the displacement of the meniscus M that is rhythmic at a plurality of displacement measurement positions. It is possible to grasp three-dimensionally, and it is possible to appropriately inspect the ejection characteristics of the nozzle 65 of the functional liquid droplet ejection head 16. Further, the laser distance meter 132 measures the separation distance from the meniscus M at the time of non-rhythming at a plurality of displacement measurement positions, and corrects the measurement result of the displacement of the meniscus M based on the separation distances. Can be obtained with high accuracy.

  By the way, as described above, the droplet discharge device 1 is controlled by the control device 8 to perform the maintenance operation by the function recovery device 4 based on the inspection result of the functional droplet discharge inspection device 6. For example, when the nozzle 65 in which the functional liquid is slightly thickened is recognized, the drawing operation is performed after the pre-discharge flushing. In addition, when a nozzle 65 in which the functional liquid is considerably thickened or a nozzle 65 in which bubbles are mixed in the functional liquid is recognized, the functional liquid that has been thickened is sucked out by suction by the suction unit 82. Then, after performing wiping by the wiping unit 83, the drawing operation is performed. On the other hand, when the nozzle 65 indicating such an abnormality is not recognized, the drawing operation is immediately started. According to this, the liquid droplet ejection apparatus 1 according to the present invention inspects whether the nozzle 65 of the functional liquid droplet ejection head 16 can normally eject the functional liquid droplets without wasting the functional liquid. Since the functional droplet discharge inspection 6 that can be performed is provided, the inspection can be performed without discharging the functional liquid, the running cost of the droplet discharge device 1 can be reduced, and the discharge characteristics of the nozzle 65 can be reduced. Since the maintenance operation of the functional liquid droplet ejection head 16 can be performed, the maintenance operation is not performed wastefully when the nozzle 65 can normally eject the functional liquid droplet, and the liquid droplet ejection apparatus 1 is efficiently performed. Can be operated.

  Next, as an electro-optical device (flat panel display) manufactured using the droplet discharge device 1 of this embodiment, a color filter, a liquid crystal display device, an organic EL device, a plasma display (PDP device), an electron emission device ( FED devices, SED devices), and active matrix substrates formed in these display devices will be described as an example for their structures and manufacturing methods. Note that an active matrix substrate refers to a substrate on which a thin film transistor, a source line electrically connected to the thin film transistor, and a data line are formed.

First, a method for manufacturing a color filter incorporated in a liquid crystal display device, an organic EL device, or the like will be described. FIG. 15 is a flowchart showing the manufacturing process of the color filter, and FIG. 16 is a schematic cross-sectional view of the color filter 500 (filter base body 500A) of this embodiment shown in the order of the manufacturing process.
First, in the black matrix formation step (S11), a black matrix 502 is formed on a substrate (W) 501 as shown in FIG. The black matrix 502 is formed of metal chromium, a laminate of metal chromium and chromium oxide, resin black, or the like. A sputtering method, a vapor deposition method, or the like can be used to form the black matrix 502 made of a metal thin film. Further, when forming the black matrix 502 made of a resin thin film, a gravure printing method, a photoresist method, a thermal transfer method, or the like can be used.

Subsequently, in the bank formation step (S12), the bank 503 is formed in a state of being superimposed on the black matrix 502. That is, first, as shown in FIG. 16B, a resist layer 504 made of a negative transparent photosensitive resin is formed so as to cover the substrate 501 and the black matrix 502. Then, an exposure process is performed with the upper surface covered with a mask film 505 formed in a matrix pattern shape.
Further, as shown in FIG. 16C, the resist layer 504 is patterned by etching an unexposed portion of the resist layer 504 to form a bank 503. When the black matrix is formed from resin black, it is possible to use both the black matrix and the bank.
The bank 503 and the black matrix 502 below the bank 503 serve as partition wall portions 507b that partition the pixel regions 507a. When forming 508B, the landing area of the functional droplet is defined.

The filter substrate 500A is obtained through the above black matrix forming step and bank forming step.
In the present embodiment, as the material for the bank 503, a resin material whose surface is lyophobic (hydrophobic) is used. Since the surface of the substrate (glass substrate) 501 is lyophilic (hydrophilic), the droplets into each pixel region 507a surrounded by the bank 503 (partition wall portion 507b) in the colored layer forming step described later. Variations in landing position can be automatically corrected.

  Next, in the colored layer forming step (S13), as shown in FIG. 16D, functional droplets are ejected by the functional droplet ejecting head 16 and each pixel region 507a is surrounded by the partition wall portion 507b. Let it land. In this case, the functional liquid droplet ejection head 16 is used to introduce functional liquids (filter materials) of three colors of R, G, and B to eject functional liquid droplets. Note that the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

Thereafter, the functional liquid is fixed through a drying process (a process such as heating), and three colored layers 508R, 508G, and 508B are formed. When the colored layers 508R, 508G, and 508B are formed, the process proceeds to the protective film forming step (S14), and as shown in FIG. 16E, the substrate 501, the partition wall portion 507b, and the colored layers 508R, 508G, and 508B are moved. A protective film 509 is formed so as to cover the upper surface.
That is, after the protective film coating liquid is discharged over the entire surface of the substrate 501 where the colored layers 508R, 508G, and 508B are formed, the protective film 509 is formed through a drying process.
Then, after forming the protective film 509, the color filter 500 moves to a film forming process such as ITO (Indium Tin Oxide) which becomes a transparent electrode in the next process.

  FIG. 17 is a cross-sectional view of a main part showing a schematic configuration of a passive matrix liquid crystal device (liquid crystal device) as an example of a liquid crystal display device using the color filter 500 described above. By attaching auxiliary elements such as a liquid crystal driving IC, a backlight, and a support to the liquid crystal device 520, a transmissive liquid crystal display device as a final product can be obtained. Since the color filter 500 is the same as that shown in FIG. 16, the corresponding parts are denoted by the same reference numerals and description thereof is omitted.

The liquid crystal device 520 is roughly configured by a color filter 500, a counter substrate 521 made of a glass substrate, and a liquid crystal layer 522 made of an STN (Super Twisted Nematic) liquid crystal composition sandwiched between them, The filter 500 is arranged on the upper side (observer side) in the figure.
Although not shown, polarizing plates are provided on the outer surfaces of the counter substrate 521 and the color filter 500 (surfaces opposite to the liquid crystal layer 522 side), and the polarizing plates located on the counter substrate 521 side are also provided. A backlight is disposed outside.

On the protective film 509 of the color filter 500 (on the liquid crystal layer side), a plurality of strip-shaped first electrodes 523 elongated in the left-right direction in FIG. 17 are formed at predetermined intervals. The color of the first electrode 523 A first alignment film 524 is formed so as to cover the surface opposite to the filter 500 side.
On the other hand, a plurality of strip-shaped second electrodes 526 elongated in a direction orthogonal to the first electrode 523 of the color filter 500 are formed on the surface of the counter substrate 521 facing the color filter 500 at a predetermined interval. A second alignment film 527 is formed so as to cover the surface of the two electrodes 526 on the liquid crystal layer 522 side. The first electrode 523 and the second electrode 526 are made of a transparent conductive material such as ITO.

The spacer 528 provided in the liquid crystal layer 522 is a member for keeping the thickness (cell gap) of the liquid crystal layer 522 constant. The sealing material 529 is a member for preventing the liquid crystal composition in the liquid crystal layer 522 from leaking to the outside. Note that one end of the first electrode 523 extends to the outside of the sealing material 529 as a lead-out wiring 523a.
A portion where the first electrode 523 and the second electrode 526 intersect with each other is a pixel, and the color layers 508R, 508G, and 508B of the color filter 500 are located in the portion that becomes the pixel.

  In a normal manufacturing process, patterning of the first electrode 523 and application of the first alignment film 524 are performed on the color filter 500 to create a portion on the color filter 500 side. Patterning of the electrode 526 and application of the second alignment film 527 are performed to create a portion on the counter substrate 521 side. Thereafter, a spacer 528 and a sealing material 529 are formed in the portion on the counter substrate 521 side, and the portion on the color filter 500 side is bonded in this state. Next, liquid crystal constituting the liquid crystal layer 522 is injected from the inlet of the sealing material 529, and the inlet is closed. Thereafter, both polarizing plates and the backlight are laminated.

  The droplet discharge device 1 according to the embodiment applies, for example, a spacer material (functional liquid) that constitutes the cell gap, and before the portion on the color filter 500 side is bonded to the portion on the counter substrate 521 side, the sealing material Liquid crystal (functional liquid) can be uniformly applied to the region surrounded by 529. Further, the printing of the sealing material 529 can be performed by the functional liquid droplet ejection head 16. Furthermore, the first and second alignment films 524 and 527 can be applied by the functional liquid droplet ejection head 16.

FIG. 18 is a cross-sectional view of an essential part showing a schematic configuration of a second example of a liquid crystal device using the color filter 500 manufactured in the present embodiment.
The liquid crystal device 530 is significantly different from the liquid crystal device 520 in that the color filter 500 is arranged on the lower side (the side opposite to the observer side) in the figure.
The liquid crystal device 530 is generally configured by sandwiching a liquid crystal layer 532 made of STN liquid crystal between a color filter 500 and a counter substrate 531 made of a glass substrate or the like. Although not shown, polarizing plates and the like are provided on the outer surfaces of the counter substrate 531 and the color filter 500, respectively.

On the protective film 509 of the color filter 500 (on the liquid crystal layer 532 side), a plurality of strip-shaped first electrodes 533 elongated in the depth direction in the figure are formed at predetermined intervals, and the liquid crystal of the first electrodes 533 is formed. A first alignment film 534 is formed so as to cover the surface on the layer 532 side.
A plurality of strip-shaped second electrodes 536 extending in a direction orthogonal to the first electrode 533 on the color filter 500 side are formed on the surface of the counter substrate 531 facing the color filter 500 at a predetermined interval. A second alignment film 537 is formed so as to cover the surface of the second electrode 536 on the liquid crystal layer 532 side.

The liquid crystal layer 532 is provided with a spacer 538 for keeping the thickness of the liquid crystal layer 532 constant and a sealing material 539 for preventing the liquid crystal composition in the liquid crystal layer 532 from leaking to the outside. Yes.
Similarly to the liquid crystal device 520 described above, a portion where the first electrode 533 and the second electrode 536 intersect with each other is a pixel, and the colored layers 508R, 508G, and 508B of the color filter 500 are located at the portion that becomes the pixel. Is configured to do.

FIG. 19 shows a third example in which a liquid crystal device is configured using a color filter 500 to which the present invention is applied, and is an exploded perspective view showing a schematic configuration of a transmissive TFT (Thin Film Transistor) type liquid crystal device. It is.
In the liquid crystal device 550, the color filter 500 is arranged on the upper side (observer side) in the figure.

The liquid crystal device 550 includes a color filter 500, a counter substrate 551 disposed so as to face the color filter 500, a liquid crystal layer (not shown) sandwiched therebetween, and an upper surface side (observer side) of the color filter 500. The polarizing plate 555 and the polarizing plate (not shown) arranged on the lower surface side of the counter substrate 551 are roughly configured.
A liquid crystal driving electrode 556 is formed on the surface of the protective film 509 of the color filter 500 (the surface on the counter substrate 551 side). The electrode 556 is made of a transparent conductive material such as ITO, and is a full surface electrode that covers the entire region where a pixel electrode 560 described later is formed. An alignment film 557 is provided so as to cover the surface of the electrode 556 opposite to the pixel electrode 560.

  An insulating layer 558 is formed on the surface of the counter substrate 551 facing the color filter 500, and the scanning lines 561 and the signal lines 562 are formed on the insulating layer 558 in a state of being orthogonal to each other. A pixel electrode 560 is formed in a region surrounded by the scanning lines 561 and the signal lines 562. In an actual liquid crystal device, an alignment film is provided on the pixel electrode 560, but the illustration is omitted.

  In addition, a thin film transistor 563 including a source electrode, a drain electrode, a semiconductor, and a gate electrode is incorporated in a portion surrounded by the cutout portion of the pixel electrode 560 and the scanning line 561 and the signal line 562. . The thin film transistor 563 is turned on / off by application of signals to the scanning line 561 and the signal line 562 so that energization control to the pixel electrode 560 can be performed.

  Note that the liquid crystal devices 520, 530, and 550 in the above examples are transmissive, but a reflective liquid crystal device or a transflective liquid crystal device is provided by providing a reflective layer or a transflective layer. You can also

  Next, FIG. 20 is a cross-sectional view of an essential part of a display region (hereinafter simply referred to as a display device 600) of the organic EL device.

The display device 600 is schematically configured with a circuit element portion 602, a light emitting element portion 603, and a cathode 604 laminated on a substrate (W) 601.
In the display device 600, light emitted from the light emitting element portion 603 to the substrate 601 side is transmitted through the circuit element portion 602 and the substrate 601 and emitted to the observer side, and the light emitting element portion 603 is opposite to the substrate 601. After the light emitted to the side is reflected by the cathode 604, the light passes through the circuit element portion 602 and the substrate 601 and is emitted to the observer side.

  A base protective film 606 made of a silicon oxide film is formed between the circuit element portion 602 and the substrate 601, and an island-shaped semiconductor film 607 made of polycrystalline silicon is formed on the base protective film 606 (on the light emitting element portion 603 side). Is formed. In the left and right regions of the semiconductor film 607, a source region 607a and a drain region 607b are formed by high concentration cation implantation, respectively. A central portion where no positive ions are implanted is a channel region 607c.

  In the circuit element portion 602, a transparent gate insulating film 608 covering the base protective film 606 and the semiconductor film 607 is formed, and a position corresponding to the channel region 607c of the semiconductor film 607 on the gate insulating film 608 is formed. For example, a gate electrode 609 made of Al, Mo, Ta, Ti, W or the like is formed. On the gate electrode 609 and the gate insulating film 608, a transparent first interlayer insulating film 611a and a second interlayer insulating film 611b are formed. Further, contact holes 612a and 612b are formed through the first and second interlayer insulating films 611a and 611b and communicating with the source region 607a and the drain region 607b of the semiconductor film 607, respectively.

A transparent pixel electrode 613 made of ITO or the like is patterned and formed in a predetermined shape on the second interlayer insulating film 611b, and the pixel electrode 613 is connected to the source region 607a through the contact hole 612a. .
A power supply line 614 is disposed on the first interlayer insulating film 611a, and the power supply line 614 is connected to the drain region 607b through the contact hole 612b.

  Thus, the driving thin film transistors 615 connected to the pixel electrodes 613 are formed in the circuit element portion 602, respectively.

The light emitting element portion 603 includes a functional layer 617 stacked on each of the plurality of pixel electrodes 613, and a bank portion 618 provided between each pixel electrode 613 and the functional layer 617 to partition each functional layer 617. It is roughly structured.
The pixel electrode 613, the functional layer 617, and the cathode 604 provided on the functional layer 617 constitute a light emitting element. Note that the pixel electrode 613 is formed by patterning in a substantially rectangular shape in plan view, and a bank portion 618 is formed between the pixel electrodes 613.

The bank unit 618 is laminated on the inorganic bank layer 618a (first bank layer) 618a (first bank layer) formed of an inorganic material such as SiO, SiO ₂ , TiO ₂ , and is made of an acrylic resin, a polyimide resin, or the like. It is composed of an organic bank layer 618b (second bank layer) having a trapezoidal cross section formed of a resist having excellent heat resistance and solvent resistance. A part of the bank unit 618 is formed on the peripheral edge of the pixel electrode 613.
An opening 619 that gradually expands upward with respect to the pixel electrode 613 is formed between the bank portions 618.

The functional layer 617 includes a hole injection / transport layer 617a formed in a stacked state on the pixel electrode 613 in the opening 619, and a light emitting layer 617b formed on the hole injection / transport layer 617a. Has been. Note that another functional layer having other functions may be further formed adjacent to the light emitting layer 617b. For example, it is possible to form an electron transport layer.
The hole injection / transport layer 617a has a function of transporting holes from the pixel electrode 613 side and injecting them into the light emitting layer 617b. The hole injection / transport layer 617a is formed by discharging a first composition (functional liquid) containing a hole injection / transport layer forming material. A known material is used as the hole injection / transport layer forming material.

  The light emitting layer 617b emits light in red (R), green (G), or blue (B), and discharges a second composition (functional liquid) containing a light emitting layer forming material (light emitting material). Is formed. As the solvent (nonpolar solvent) of the second composition, a known material that is insoluble in the hole injection / transport layer 617a is preferably used, and such a nonpolar solvent is used as the second composition of the light emitting layer 617b. By using the light emitting layer 617b, the light emitting layer 617b can be formed without re-dissolving the hole injection / transport layer 617a.

  The light emitting layer 617b is configured such that the holes injected from the hole injection / transport layer 617a and the electrons injected from the cathode 604 are recombined in the light emitting layer to emit light.

  The cathode 604 is formed so as to cover the entire surface of the light emitting element portion 603, and plays a role of flowing current to the functional layer 617 in a pair with the pixel electrode 613. Note that a sealing member (not shown) is disposed on the cathode 604.

Next, a manufacturing process of the display device 600 will be described with reference to FIGS.
As shown in FIG. 21, the display device 600 includes a bank part forming step (S21), a surface treatment step (S22), a hole injection / transport layer forming step (S23), a light emitting layer forming step (S24), It is manufactured through an electrode formation step (S25). In addition, a manufacturing process is not restricted to what is illustrated, and when other processes are removed as needed, it may be added.

First, in the bank part forming step (S21), as shown in FIG. 22, an inorganic bank layer 618a is formed on the second interlayer insulating film 611b. The inorganic bank layer 618a is formed by forming an inorganic film at a formation position and then patterning the inorganic film using a photolithography technique or the like. At this time, a part of the inorganic bank layer 618 a is formed so as to overlap with the peripheral edge of the pixel electrode 613.
When the inorganic bank layer 618a is formed, the organic bank layer 618b is formed on the inorganic bank layer 618a as shown in FIG. The organic bank layer 618b is also formed by patterning using a photolithography technique or the like in the same manner as the inorganic bank layer 618a.
In this way, the bank portion 618 is formed. Accordingly, an opening 619 opening upward with respect to the pixel electrode 613 is formed between the bank portions 618. The opening 619 defines a pixel region.

In the surface treatment step (S22), a lyophilic process and a lyophobic process are performed. The regions to be subjected to lyophilic treatment are the first stacked portion 618aa of the inorganic bank layer 618a and the electrode surface 613a of the pixel electrode 613. These regions are made lyophilic by plasma treatment using oxygen as a treatment gas, for example. Is done. This plasma treatment also serves to clean the ITO that is the pixel electrode 613.
In addition, the lyophobic treatment is performed on the wall surface 618s of the organic bank layer 618b and the upper surface 618t of the organic bank layer 618b. )
By performing this surface treatment process, when the functional layer 617 is formed using the functional liquid droplet ejection head 16, the functional liquid droplets can be landed more reliably on the pixel area. It is possible to prevent the functional droplets from overflowing from the opening 619.

  Then, the display device base 600A is obtained through the above steps. The display device base 600A is placed on the work table 22 of the droplet discharge device 1 shown in FIG. 1, and the following hole injection / transport layer forming step (S23) and light emitting layer forming step (S24) are performed. .

  As shown in FIG. 24, in the hole injection / transport layer forming step (S23), the first composition containing the hole injection / transport layer forming material is removed from the functional liquid droplet ejection head 16 into each opening 619 that is a pixel region. Discharge inside. Thereafter, as shown in FIG. 25, a drying process and a heat treatment are performed to evaporate the polar solvent contained in the first composition, thereby forming a hole injection / transport layer 617a on the pixel electrode (electrode surface 613a) 613.

Next, the light emitting layer forming step (S24) will be described. In this light emitting layer forming step, as described above, in order to prevent re-dissolution of the hole injection / transport layer 617a, the hole injection / transport layer 617a is used as a solvent for the second composition used in forming the light emitting layer. A non-polar solvent insoluble in.
However, since the hole injection / transport layer 617a has a low affinity for the nonpolar solvent, the hole injection / transport layer 617a has a low affinity even if the second composition containing the nonpolar solvent is discharged onto the hole injection / transport layer 617a. There is a possibility that the injection / transport layer 617a and the light emitting layer 617b cannot be adhered to each other, or the light emitting layer 617b cannot be applied uniformly.
Therefore, in order to increase the surface affinity of the hole injection / transport layer 617a with respect to the nonpolar solvent and the light emitting layer forming material, it is preferable to perform surface treatment (surface modification treatment) before forming the light emitting layer. In this surface treatment, a surface modifying material which is the same solvent as the non-polar solvent of the second composition used in the formation of the light emitting layer or a similar solvent is applied on the hole injection / transport layer 617a, and this is applied. This is done by drying.
By performing such treatment, the surface of the hole injection / transport layer 617a is easily adapted to the nonpolar solvent. In the subsequent step, the second composition containing the light emitting layer forming material is added to the hole injection / transport layer. It can be uniformly applied to 617a.

  Then, as shown in FIG. 26, the pixel composition (second liquid composition containing a light emitting layer forming material corresponding to one of the colors (blue (B) in the example of FIG. 26)) is used as a functional droplet. A predetermined amount is driven into the opening 619). The second composition driven into the pixel region spreads on the hole injection / transport layer 617a and fills the opening 619. Even if the second composition deviates from the pixel region and lands on the upper surface 618t of the bank portion 618, the upper composition 618t is subjected to the liquid repellent treatment as described above. Things are easy to roll into the opening 619.

  Thereafter, by performing a drying process and the like, the second composition after discharge is dried, the nonpolar solvent contained in the second composition is evaporated, and as shown in FIG. 27, a hole injection / transport layer 617a is obtained. A light emitting layer 617b is formed thereon. In this figure, a light emitting layer 617b corresponding to blue (B) is formed.

  Similarly, using the functional liquid droplet ejection head 16, as shown in FIG. 28, the same steps as in the case of the light emitting layer 617b corresponding to the blue (B) described above are sequentially performed, and other colors (red (R) and red (R) and A light emitting layer 617b corresponding to green (G) is formed. Note that the order in which the light-emitting layers 617b are formed is not limited to the illustrated order, and may be formed in any order. For example, the order of formation can be determined according to the light emitting layer forming material. Further, the arrangement pattern of the three colors R, G, and B includes a stripe arrangement, a mosaic arrangement, a delta arrangement, and the like.

  As described above, the functional layer 617, that is, the hole injection / transport layer 617a and the light emitting layer 617b are formed on the pixel electrode 613. And it transfers to a counter electrode formation process (S25).

In the counter electrode forming step (S25), as shown in FIG. 29, the cathode 604 (counter electrode) is formed on the entire surface of the light emitting layer 617b and the organic bank layer 618b by, for example, vapor deposition, sputtering, CVD, or the like. In the present embodiment, the cathode 604 is configured by, for example, laminating a calcium layer and an aluminum layer.
On top of the cathode 604, an Al film, an Ag film as electrodes, and a protective layer such as SiO ₂ or SiN for preventing oxidation thereof are provided as appropriate.

  After forming the cathode 604 in this way, the display device 600 is obtained by performing other processes such as a sealing process for sealing the upper part of the cathode 604 with a sealing member and a wiring process.

Next, FIG. 30 is an exploded perspective view of a main part of a plasma display device (PDP device: hereinafter simply referred to as a display device 700). In the figure, the display device 700 is shown with a part thereof cut away.
The display device 700 is schematically configured to include a first substrate 701, a second substrate 702, and a discharge display portion 703 formed between them, which are disposed to face each other. The discharge display unit 703 includes a plurality of discharge chambers 705. Among the plurality of discharge chambers 705, the three discharge chambers 705 of the red discharge chamber 705R, the green discharge chamber 705G, and the blue discharge chamber 705B are arranged to form one pixel.

Address electrodes 706 are formed in stripes at predetermined intervals on the upper surface of the first substrate 701, and a dielectric layer 707 is formed so as to cover the address electrodes 706 and the upper surface of the first substrate 701. On the dielectric layer 707, partition walls 708 are provided so as to be positioned between the address electrodes 706 and along the address electrodes 706. The partition 708 includes one extending on both sides in the width direction of the address electrode 706 as shown, and one not shown extending in the direction orthogonal to the address electrode 706.
A region partitioned by the partition 708 is a discharge chamber 705.

  A phosphor 709 is disposed in the discharge chamber 705. The phosphor 709 emits red (R), green (G), or blue (B) fluorescence, and the red phosphor 709R is disposed at the bottom of the red discharge chamber 705R, and the green discharge chamber 705G. A green phosphor 709G and a blue phosphor 709B are arranged at the bottom and the blue discharge chamber 705B, respectively.

On the lower surface of the second substrate 702 in the drawing, a plurality of display electrodes 711 are formed in stripes at predetermined intervals in a direction orthogonal to the address electrodes 706. A dielectric layer 712 and a protective film 713 made of MgO or the like are formed so as to cover them.
The first substrate 701 and the second substrate 702 are bonded so that the address electrodes 706 and the display electrodes 711 face each other in a state of being orthogonal to each other. The address electrode 706 and the display electrode 711 are connected to an AC power source (not shown).
When the electrodes 706 and 711 are energized, the phosphor 709 emits light in the discharge display portion 703, and color display is possible.

In the present embodiment, the address electrode 706, the display electrode 711, and the phosphor 709 can be formed by using the droplet discharge device 1 shown in FIG. Hereinafter, a process of forming the address electrode 706 on the first substrate 701 will be exemplified.
In this case, the following steps are performed with the first substrate 701 placed on the work table 22 of the droplet discharge device 1.
First, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the address electrode formation region as a functional liquid droplet by the functional liquid droplet ejection head 16. This liquid material is obtained by dispersing conductive fine particles such as metal in a dispersion medium as a conductive film wiring forming material. As the conductive fine particles, metal fine particles containing gold, silver, copper, palladium, nickel, or the like, a conductive polymer, or the like is used.

  When the replenishment of the liquid material is completed for all the address electrode formation regions to be replenished, the address material 706 is formed by drying the discharged liquid material and evaporating the dispersion medium contained in the liquid material. .

By the way, although the formation of the address electrode 706 has been exemplified in the above, the display electrode 711 and the phosphor 709 can also be formed through the above steps.
In the case of forming the display electrode 711, as in the case of the address electrode 706, a liquid material (functional liquid) containing a conductive film wiring forming material is landed on the display electrode formation region as a functional droplet.
Further, in the case of forming the phosphor 709, a liquid material (functional liquid) containing a fluorescent material corresponding to each color (R, G, B) is ejected as droplets from the functional liquid droplet ejection head 16 to cope with it. Land in the color discharge chamber 705.

Next, FIG. 31 is a cross-sectional view of an essential part of an electron emission device (also referred to as FED device or SED device: hereinafter simply referred to as a display device 800). In the drawing, a part of the display device 800 is shown as a cross section.
The display device 800 is schematically configured to include a first substrate 801, a second substrate 802, and a field emission display portion 803 formed therebetween, which are disposed to face each other. The field emission display unit 803 includes a plurality of electron emission units 805 arranged in a matrix.

  On the upper surface of the first substrate 801, a first element electrode 806a and a second element electrode 806b constituting the cathode electrode 806 are formed so as to be orthogonal to each other. In addition, a conductive film 807 having a gap 808 is formed in a portion partitioned by the first element electrode 806a and the second element electrode 806b. That is, the first element electrode 806a, the second element electrode 806b, and the conductive film 807 constitute a plurality of electron emission portions 805. The conductive film 807 is made of, for example, palladium oxide (PdO), and the gap 808 is formed by forming after forming the conductive film 807.

  An anode electrode 809 that faces the cathode electrode 806 is formed on the lower surface of the second substrate 802. A grid-like bank portion 811 is formed on the lower surface of the anode electrode 809, and a phosphor 813 is disposed in each downward opening 812 surrounded by the bank portion 811 so as to correspond to the electron emission portion 805. Yes. The phosphor 813 emits fluorescence of any one of red (R), green (G), and blue (B), and each opening 812 has a red phosphor 813R, a green phosphor 813G, and a blue color. The phosphors 813B are arranged in the predetermined pattern described above.

  The first substrate 801 and the second substrate 802 configured as described above are bonded together with a minute gap. In this display device 800, electrons that jump out of the first element electrode 806 a or the second element electrode 806 b that are cathodes through the conductive film (gap 808) 807 are formed on the phosphor 813 that is formed on the anode electrode 809 that is an anode. When excited, it emits light and enables color display.

  Also in this case, as in the other embodiments, the first element electrode 806a, the second element electrode 806b, the conductive film 807, and the anode electrode 809 can be formed using the droplet discharge device 1 and each color. The phosphors 813R, 813G, and 813B can be formed using the droplet discharge device 1.

  The first element electrode 806a, the second element electrode 806b, and the conductive film 807 have the planar shape shown in FIG. 32A, and when these are formed, as shown in FIG. 32B. In addition, the bank portion BB is formed (photolithographic method), leaving portions where the first element electrode 806a, the second element electrode 806b, and the conductive film 807 are previously formed. Next, the first element electrode 806a and the second element electrode 806b were formed in the groove portion constituted by the bank portion BB (inkjet method using the droplet discharge device 1), and the solvent was dried to form a film. After that, a conductive film 807 is formed (an ink jet method using the droplet discharge device 1). Then, after forming the conductive film 807, the bank portion BB is removed (ashing peeling process), and the process proceeds to the above forming process. As in the case of the organic EL device described above, it is preferable to perform a lyophilic process on the first substrate 801 and the second substrate 802 and a lyophobic process on the bank portions 811 and BB.

  As other electro-optical devices, devices such as metal wiring formation, lens formation, resist formation, and light diffuser formation are conceivable. By using the droplet discharge device 1 described above for manufacturing various electro-optical devices (devices), various electro-optical devices can be efficiently manufactured.

1 is a plan view schematically illustrating a droplet discharge device according to an embodiment. It is a perspective view of the functional liquid droplet ejection head concerning an embodiment. It is a block diagram which shows the control structure of the droplet discharge apparatus which concerns on embodiment. It is a block diagram showing the functional droplet discharge inspection apparatus concerning an embodiment. It is a time chart which shows a timing signal and a drive waveform. It is a time chart which shows the timing of a timing signal, a fine vibration waveform, and the measurement by a laser Doppler vibrometer. It is explanatory drawing which shows the rhythm of the meniscus when a drive waveform is applied to a functional droplet discharge head. It is explanatory drawing which shows the rhythm of the meniscus at the time of applying a fine vibration waveform to a functional droplet discharge head. It is a block diagram which shows the measurement principle of a laser Doppler vibrometer. It is a figure showing the imaging screen which imaged the nozzle with the imaging unit. It is a figure showing the screen which animatedly displayed the rhythm of the meniscus with respect to the normal nozzle based on the elapsed time displacement amount, and displayed the image. It is a figure showing the screen which animatedly displayed the rhythm of the meniscus with respect to the nozzle which shows abnormality based on the displacement amount before time of correction | amendment, and displayed the image. It is a figure showing the screen which animatedly displayed the rhythm of the meniscus with respect to the normal nozzle based on the displacement amount before time of correction | amendment, and displayed the image. It is the figure which showed the separation distance in each displacement measurement position, the elapsed time displacement amount before correction | amendment, and the elapsed time displacement amount. It is a flowchart explaining a color filter manufacturing process. (A)-(e) is a schematic cross section of the color filter shown to the manufacturing process order. It is principal part sectional drawing which shows schematic structure of the liquid crystal device using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 2nd example using the color filter to which this invention is applied. It is principal part sectional drawing which shows schematic structure of the liquid crystal device of the 3rd example using the color filter to which this invention is applied. It is principal part sectional drawing of the display apparatus which is an organic electroluminescent apparatus. It is a flowchart explaining the manufacturing process of the display apparatus which is an organic electroluminescent apparatus. It is process drawing explaining formation of an inorganic bank layer. It is process drawing explaining formation of an organic substance bank layer. It is process drawing explaining the process in which a positive hole injection / transport layer is formed. It is process drawing explaining the state in which the positive hole injection / transport layer was formed. It is process drawing explaining the process in which a blue light emitting layer is formed. It is process drawing explaining the state in which the blue light emitting layer was formed. It is process drawing explaining the state in which the light emitting layer of each color was formed. It is process drawing explaining formation of a cathode. It is a principal part disassembled perspective view of the display apparatus which is a plasma type display apparatus (PDP apparatus). It is principal part sectional drawing of the display apparatus which is an electron emission apparatus (FED apparatus). It is the top view (a) around the electron emission part of a display apparatus, and the top view (b) which shows the formation method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Droplet discharge device 3 ... Drawing apparatus 4 ... Head function recovery apparatus 6 ... Functional droplet discharge test | inspection apparatus 8 ... Control apparatus 16 ... Functional droplet discharge head 65 ... Nozzle 121 ... Timing signal supply means 123 ... Elapsed time surface data Combining means 124 ... Displacement correcting means 125 ... Moving image display means 131 ... Laser Doppler vibrometer 132 ... Laser distance meter 133 ... Imaging unit 134 ... XY stage 201 ... Input unit 203 ... Monitor 211 ... Head driver 500 ... Color filter 508 ... Colored layer CP ... Center point M ... Meniscus W ... Workpiece

Claims (19)

A functional liquid for inspecting the ejection characteristics of the nozzle by applying a fine vibration waveform not accompanied by ejection of the functional liquid droplet from the nozzle to the functional liquid droplet ejection head, and measuring the displacement of the meniscus of the rhythmic nozzle. In the droplet discharge inspection method,
Meniscus displacement measurement in which the fine vibration waveform is applied to the functional liquid droplet ejection head to cause the meniscus to rhythm, and the meniscus displacement measuring means measures the rhythmic displacement of the meniscus at a plurality of displacement measurement positions. Process,
A distance measuring step of measuring a distance from the meniscus at the time of non-rhythming at the plurality of displacement measuring positions by a distance measuring means;
A displacement correction step of correcting the displacement of the meniscus measured at each displacement measurement position based on the separation distance measured at each displacement measurement position;
A maximum displacement surface data combining step for combining maximum displacement surface data representing the three-dimensional displacement of the meniscus at the maximum displacement based on the corrected maximum displacement amount of the meniscus and the distribution of the plurality of displacement measurement positions. When,
A functional droplet discharge inspection method comprising:   The functional droplet discharge inspection method according to claim 1, further comprising a still image display step of displaying a stereoscopic image of the meniscus based on the combined maximum displacement plane data.   Instead of the maximum displacement surface data synthesis step, among the corrected meniscus displacement, a plurality of elapsed time displacement amounts at a plurality of elapsed times after the start of measurement of the meniscus displacement, and a distribution of the plurality of displacement measurement positions, 2. The functional liquid droplet ejection inspection according to claim 1, further comprising: an elapsed time plane data synthesis step of synthesizing elapsed time plane data representing the three-dimensional displacement of the meniscus at each elapsed time based on Method.   The functional droplet discharge inspection method according to claim 3, further comprising a moving image display step of animating the meniscus rhythm and displaying an image based on the synthesized plurality of elapsed time plane data.   5. The functional liquid droplet according to claim 1, wherein in the meniscus displacement measurement step, the application of the micro-vibration waveform and the measurement of the displacement of the meniscus are performed at each displacement measurement position. Discharge inspection method.   The meniscus displacement measuring means is composed of a laser Doppler vibrometer that measures the displacing speed of the meniscus that is rhythmic multiple times over time and obtains the displacement of the meniscus from the measurement results of the multiple times. The functional droplet discharge inspection method according to claim 5. The measurement over a plurality of times,
7. The functional liquid droplet ejection test according to claim 6, wherein in the meniscus displacement measurement step, the micro-vibration waveform is applied a plurality of times, and the timing is shifted by a predetermined time for each application and measured. Method.   8. The plurality of displacement measurement positions include a center point of the meniscus and are distributed on one or more concentric circles centered on the center point. Functional droplet discharge inspection method. A functional liquid for inspecting the ejection characteristics of the nozzle by applying a fine vibration waveform not accompanied by ejection of the functional liquid droplet from the nozzle to the functional liquid droplet ejection head, and measuring the displacement of the meniscus of the rhythmic nozzle. In the drop discharge inspection device,
A fine vibration waveform applying unit that applies the fine vibration waveform to the functional droplet discharge head to rhythm the meniscus;
Meniscus displacement measuring means for measuring the rhythmic displacement of the meniscus at a plurality of displacement measurement positions;
Control means for controlling the fine vibration waveform applying means and the meniscus displacement measuring means;
Distance measuring means for measuring the separation distance from the meniscus at the time of non-rhythming at the plurality of displacement measuring positions;
Displacement correcting means for correcting the displacement of the meniscus measured at each of the displacement measurement positions based on the separation distance measured at each of the displacement measurement positions;
Maximum displacement surface data synthesis that synthesizes maximum displacement surface data representing the three-dimensional displacement of the meniscus at the maximum displacement based on the corrected maximum displacement amount of the meniscus and the distribution of the plurality of displacement measurement positions. Means,
A functional droplet discharge inspection apparatus comprising:   The functional droplet discharge inspection apparatus according to claim 9, further comprising a still image display unit that displays a stereoscopic image of the meniscus based on the combined maximum displacement plane data.   Instead of the maximum displacement surface data synthesis means, among the corrected meniscus displacement, a plurality of elapsed time displacement amounts at a plurality of elapsed times after the start of measurement of the meniscus displacement, and a distribution of the plurality of displacement measurement positions 10. The functional liquid droplet ejection according to claim 9, further comprising: elapsed time plane data combining means for combining elapsed time plane data representing the three-dimensional displacement of the meniscus at each elapsed time based on Inspection device.   The functional liquid droplet ejection inspection apparatus according to claim 11, further comprising a moving image display unit that animates the meniscus rhythm and displays an image based on the plurality of synthesized elapsed time plane data. . A timing signal supply means for supplying a timing signal to the control means;
The control means controls the fine vibration waveform applying means to apply the fine vibration waveform in synchronization with the supplied timing signal and controls the meniscus displacement measuring means to synchronize with the supplied timing signal. 13. The functional droplet discharge inspection apparatus according to claim 9, wherein measurement is started. A measuring system moving unit that moves the meniscus displacement measuring unit relative to the functional liquid droplet ejection head so that the meniscus displacement at the plurality of displacement measuring positions is sequentially measured by the meniscus displacement measuring unit; Prepared,
The control means controls the fine vibration waveform applying means and the meniscus displacement measuring means so that the fine vibration waveform is applied and the meniscus displacement is measured at each displacement measurement position. The functional droplet discharge inspection apparatus according to claim 13.   The meniscus displacement measuring means is composed of a laser Doppler vibrometer that measures the displacing speed of the meniscus that is rhythmic multiple times over time and obtains the displacement of the meniscus from the measurement results of the multiple times. The functional droplet discharge inspection apparatus according to claim 14.   The control means controls the fine vibration waveform applying means to apply the fine vibration waveform a plurality of times, and controls the meniscus displacement measuring means to shift the timing for each application by a predetermined time to rhythm. The functional droplet discharge inspection apparatus according to claim 15, wherein the displacement speed of the meniscus is measured a plurality of times over time. Center point detection means for imaging the nozzle and detecting a center point of the meniscus;
Nozzle image display means for displaying an image of the imaged nozzle and a grid-like ruled line that equally divides the nozzle around the detected center point;
A selection means for selecting the plurality of displacement measurement positions on the image of the nozzle divided by the ruled line;
The functional droplet discharge inspection apparatus according to claim 9, further comprising:   18. A functional liquid droplet ejection inspection apparatus according to claim 9, and a drawing apparatus that ejects functional liquid droplets while moving the functional liquid droplet ejection head relative to the workpiece. A droplet discharge device characterized by the above. A head maintenance means for maintaining the functional liquid droplet ejection head;
19. The liquid droplet according to claim 18, wherein the control unit controls the head maintenance unit to perform maintenance of the functional liquid droplet ejection head based on an inspection result by the functional liquid droplet ejection inspection device. Discharge device.

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