JP2007132947A - 圧力および温度感知素子へ電力を供給する方法およびシステム - Google Patents

圧力および温度感知素子へ電力を供給する方法およびシステム Download PDF

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Publication number
JP2007132947A
JP2007132947A JP2006305166A JP2006305166A JP2007132947A JP 2007132947 A JP2007132947 A JP 2007132947A JP 2006305166 A JP2006305166 A JP 2006305166A JP 2006305166 A JP2006305166 A JP 2006305166A JP 2007132947 A JP2007132947 A JP 2007132947A
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Japan
Prior art keywords
tangential
voltage
radial
resistance
sensing element
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Withdrawn
Application number
JP2006305166A
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English (en)
Japanese (ja)
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JP2007132947A5 (enExample
Inventor
Thomas G Stratton
トーマス・ジー・ストラットン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honeywell International Inc
Original Assignee
Honeywell International Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc filed Critical Honeywell International Inc
Publication of JP2007132947A publication Critical patent/JP2007132947A/ja
Publication of JP2007132947A5 publication Critical patent/JP2007132947A5/ja
Withdrawn legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00—Measuring temperature based on the expansion or contraction of a material
    • G01K5/48—Measuring temperature based on the expansion or contraction of a material the material being a solid
    • G01K5/50—Measuring temperature based on the expansion or contraction of a material the material being a solid arranged for free expansion or contraction
    • G01K5/52—Measuring temperature based on the expansion or contraction of a material the material being a solid arranged for free expansion or contraction with electrical conversion means for final indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K5/00—Measuring temperature based on the expansion or contraction of a material
    • G01K5/48—Measuring temperature based on the expansion or contraction of a material the material being a solid
    • G01K5/56—Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid
    • G01K5/58—Measuring temperature based on the expansion or contraction of a material the material being a solid constrained so that expansion or contraction causes a deformation of the solid the solid body being constrained at more than one point, e.g. rod, plate, diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K2215/00—Details concerning sensor power supply

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
JP2006305166A 2005-11-10 2006-11-10 圧力および温度感知素子へ電力を供給する方法およびシステム Withdrawn JP2007132947A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/272,306 US7284438B2 (en) 2005-11-10 2005-11-10 Method and system of providing power to a pressure and temperature sensing element

Publications (2)

Publication Number Publication Date
JP2007132947A true JP2007132947A (ja) 2007-05-31
JP2007132947A5 JP2007132947A5 (enExample) 2009-12-17

Family

ID=37668188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006305166A Withdrawn JP2007132947A (ja) 2005-11-10 2006-11-10 圧力および温度感知素子へ電力を供給する方法およびシステム

Country Status (3)

Country Link
US (1) US7284438B2 (enExample)
EP (1) EP1785709B1 (enExample)
JP (1) JP2007132947A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9429479B2 (en) * 2012-07-18 2016-08-30 Millar Instruments Methods, devices, and systems which determine a parameter value of an object or an environment from a voltage reading associated with a common mode signal of a balanced circuit
DE112014002776T5 (de) 2013-06-11 2016-03-17 Danfoss A/S Dünnschichtsensor
EP2866012A1 (en) * 2013-10-23 2015-04-29 Danfoss A/S A sensor element comprising a constraining layer
US10557770B2 (en) * 2017-09-14 2020-02-11 Sensata Technologies, Inc. Pressure sensor with improved strain gauge
CN111721469A (zh) * 2020-06-17 2020-09-29 中国计量大学 一种高灵敏度微型皮拉尼计

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3123788A (en) 1964-03-03 Piezoresistive gage
US4321832A (en) * 1980-03-07 1982-03-30 Rockwell International Corporation High accuracy measuring apparatus
US4317126A (en) 1980-04-14 1982-02-23 Motorola, Inc. Silicon pressure sensor
US4399707A (en) * 1981-02-04 1983-08-23 Honeywell, Inc. Stress sensitive semiconductor unit and housing means therefor
US4539843A (en) * 1983-12-05 1985-09-10 Aerologic, Inc. Altimeter and vertical speed indicator
US5349867A (en) * 1991-12-02 1994-09-27 Kavlico Corporation Sensitive resistive pressure transducer
US5469070A (en) 1992-10-16 1995-11-21 Rosemount Analytical Inc. Circuit for measuring source resistance of a sensor
DE4417228A1 (de) * 1994-05-17 1995-11-23 Michael Dr Altwein Dehnungsmeßstreifen-Meßanordnung, Verwendung derselben und Modulationsverstärker für derartige Meßanordnungen
DE69528775T2 (de) * 1994-12-20 2003-07-03 The Foxboro Co., Foxboro AC Speisung eines Polysilizium Druckwandlers
FR2757942A1 (fr) 1996-12-31 1998-07-03 Motorola Semiconducteurs Ensemble capteur et procede de polarisation d'un capteur travaillant en presence d'humidite
JP2000041684A (ja) 1998-07-29 2000-02-15 Daicel Chem Ind Ltd 新規なｄ−アミノアシラーゼおよびその製造方法、並びに該ｄ−アミノアシラーゼを利用したｄ−アミノ酸の製造方法
US6065346A (en) * 1999-03-29 2000-05-23 Honeywell Inc. Measurement system utilizing a sensor formed on a silicon on insulator structure
DE10160794B4 (de) 2001-12-11 2006-07-27 Parker Hannifin Gmbh Signalverarbeitungseinrichtung für einen Druckschalter od. dgl.
US6510742B1 (en) * 2001-12-18 2003-01-28 Honeywell International Inc. Sensor formed on silicon on insulator structure and having reduced power up drift
US7278319B2 (en) 2005-11-10 2007-10-09 Honeywell International Inc. Pressure and temperature sensing element

Also Published As

Publication number Publication date
EP1785709B1 (en) 2011-10-26
US20070113667A1 (en) 2007-05-24
EP1785709A2 (en) 2007-05-16
US7284438B2 (en) 2007-10-23
EP1785709A3 (en) 2008-07-02

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