JP2007123864A5 - - Google Patents

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Publication number
JP2007123864A5
JP2007123864A5 JP2006264152A JP2006264152A JP2007123864A5 JP 2007123864 A5 JP2007123864 A5 JP 2007123864A5 JP 2006264152 A JP2006264152 A JP 2006264152A JP 2006264152 A JP2006264152 A JP 2006264152A JP 2007123864 A5 JP2007123864 A5 JP 2007123864A5
Authority
JP
Japan
Prior art keywords
film
opening
insulating film
conductive film
conductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006264152A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007123864A (ja
JP5027470B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006264152A priority Critical patent/JP5027470B2/ja
Priority claimed from JP2006264152A external-priority patent/JP5027470B2/ja
Publication of JP2007123864A publication Critical patent/JP2007123864A/ja
Publication of JP2007123864A5 publication Critical patent/JP2007123864A5/ja
Application granted granted Critical
Publication of JP5027470B2 publication Critical patent/JP5027470B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006264152A 2005-09-29 2006-09-28 記憶装置 Expired - Fee Related JP5027470B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006264152A JP5027470B2 (ja) 2005-09-29 2006-09-28 記憶装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2005285561 2005-09-29
JP2005285561 2005-09-29
JP2006264152A JP5027470B2 (ja) 2005-09-29 2006-09-28 記憶装置

Publications (3)

Publication Number Publication Date
JP2007123864A JP2007123864A (ja) 2007-05-17
JP2007123864A5 true JP2007123864A5 (enExample) 2009-10-08
JP5027470B2 JP5027470B2 (ja) 2012-09-19

Family

ID=38147308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006264152A Expired - Fee Related JP5027470B2 (ja) 2005-09-29 2006-09-28 記憶装置

Country Status (1)

Country Link
JP (1) JP5027470B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8047442B2 (en) * 2007-12-03 2011-11-01 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device
US8735885B2 (en) 2007-12-14 2014-05-27 Semiconductor Energy Laboratory Co., Ltd. Antifuse memory device

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3206308B2 (ja) * 1994-07-08 2001-09-10 松下電器産業株式会社 プログラマブル素子の製造方法
JPH10178098A (ja) * 1996-12-19 1998-06-30 Kawasaki Steel Corp アンチヒューズ素子を有する半導体集積回路装置
JPH10341000A (ja) * 1997-04-11 1998-12-22 Citizen Watch Co Ltd 半導体不揮発性記憶装置およびその製造方法
JP3846202B2 (ja) * 2001-02-02 2006-11-15 ソニー株式会社 半導体不揮発性記憶装置
JP2003163332A (ja) * 2001-06-22 2003-06-06 Matsushita Electric Ind Co Ltd 半導体装置

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