JP2007107904A - フッ素ガス測定装置 - Google Patents
フッ素ガス測定装置 Download PDFInfo
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- JP2007107904A JP2007107904A JP2005296148A JP2005296148A JP2007107904A JP 2007107904 A JP2007107904 A JP 2007107904A JP 2005296148 A JP2005296148 A JP 2005296148A JP 2005296148 A JP2005296148 A JP 2005296148A JP 2007107904 A JP2007107904 A JP 2007107904A
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- fluorine gas
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Abstract
【解決手段】測定ガス導入経路12から導入された試料ガスのフッ素ガス濃度を測定する測定部11と、標準フッ素ガスを供給する標準フッ素ガス供給部21と、フッ素ガスを含まない不活性ガスを供給する不活性ガス供給部31と、標準フッ素ガス及び不活性ガスを圧力調整手段22,32及び流量調整手段23,33を介して導出し、両ガスを混合するガス混合部41と、測定ガス導入経路12を介して測定部11に導入するガスを、ガス混合部41で混合したフッ素含有混合ガスと試料ガス導入経路51から導入される試料ガスとのいずれかに切り換える測定ガス切換手段61とを備えている。
【選択図】図1
Description
三洋貿易株式会社、科学機器事業部、メーカー別製品案内、米 URS Corporation、フッ素ガス濃度計。[平成17年9月21日検索]、インターネット<URL:http://www.sanyo-si.com/maker/u_urs.html>
Claims (1)
- 試料ガス中のフッ素ガス濃度を測定する測定部と、該測定部に試料ガスを導入する測定ガス導入経路とを備えたフッ素ガス測定装置において、あらかじめ設定された濃度のフッ素ガスを含有する標準フッ素ガスを供給する標準フッ素ガス供給部と、前記標準フッ素ガスを圧力調整手段及び流量調整手段を介して前記標準フッ素ガス供給部から導出する標準フッ素ガス経路と、フッ素ガスを含まない不活性ガスを供給する不活性ガス供給部と、前記不活性ガスを圧力調整手段及び流量調整手段を介して前記不活性ガス供給部から導出する不活性ガス経路と、前記標準フッ素ガス経路の標準フッ素ガスと前記不活性ガス経路の不活性ガスとを混合するガス混合部と、測定対象となる試料ガスを導入する試料ガス導入経路と、前記測定ガス導入経路を介して前記測定部に導入するガスを、前記ガス混合部で標準フッ素ガスと不活性ガスとが混合したフッ素含有混合ガスと前記試料ガス導入経路から導入される前記試料ガスとのいずれかに切り換える測定ガス切換手段とを備えていることを特徴とするフッ素ガス測定装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2005296148A JP4749823B2 (ja) | 2005-10-11 | 2005-10-11 | フッ素ガス濃度測定方法 |
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JP2005296148A JP4749823B2 (ja) | 2005-10-11 | 2005-10-11 | フッ素ガス濃度測定方法 |
Publications (2)
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JP2007107904A true JP2007107904A (ja) | 2007-04-26 |
JP4749823B2 JP4749823B2 (ja) | 2011-08-17 |
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JP2005296148A Expired - Fee Related JP4749823B2 (ja) | 2005-10-11 | 2005-10-11 | フッ素ガス濃度測定方法 |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007212379A (ja) * | 2006-02-13 | 2007-08-23 | Taiyo Nippon Sanso Corp | フッ素ガス濃度の測定方法 |
JP2009058372A (ja) * | 2007-08-31 | 2009-03-19 | Taiyo Nippon Sanso Corp | フッ素ガス測定方法及び装置 |
JP2009139276A (ja) * | 2007-12-07 | 2009-06-25 | Taiyo Nippon Sanso Corp | フッ素ガス測定方法及び装置 |
WO2020049900A1 (ja) * | 2018-09-03 | 2020-03-12 | 昭和電工株式会社 | フッ素ガス含有ガスの供給方法及び供給設備 |
US12031685B2 (en) | 2018-09-03 | 2024-07-09 | Resonac Corporation | Method and supply equipment for supplying fluorine gas-containing gas |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6190044A (ja) * | 1984-10-11 | 1986-05-08 | Central Glass Co Ltd | 酸化性ガスの濃度を測定する方法および装置 |
JPS62237341A (ja) * | 1986-04-07 | 1987-10-17 | Nippon Sanso Kk | 自動ガス分析方法およびその装置 |
JP2001165924A (ja) * | 1999-12-10 | 2001-06-22 | Osaka Oxygen Ind Ltd | フッ素を含む混合ガス中のフッ素濃度測定方法およびその装置 |
JP2005241249A (ja) * | 2004-02-24 | 2005-09-08 | Central Glass Co Ltd | F2ガス濃度の測定方法並びに測定装置 |
-
2005
- 2005-10-11 JP JP2005296148A patent/JP4749823B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6190044A (ja) * | 1984-10-11 | 1986-05-08 | Central Glass Co Ltd | 酸化性ガスの濃度を測定する方法および装置 |
JPS62237341A (ja) * | 1986-04-07 | 1987-10-17 | Nippon Sanso Kk | 自動ガス分析方法およびその装置 |
JP2001165924A (ja) * | 1999-12-10 | 2001-06-22 | Osaka Oxygen Ind Ltd | フッ素を含む混合ガス中のフッ素濃度測定方法およびその装置 |
JP2005241249A (ja) * | 2004-02-24 | 2005-09-08 | Central Glass Co Ltd | F2ガス濃度の測定方法並びに測定装置 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007212379A (ja) * | 2006-02-13 | 2007-08-23 | Taiyo Nippon Sanso Corp | フッ素ガス濃度の測定方法 |
JP2009058372A (ja) * | 2007-08-31 | 2009-03-19 | Taiyo Nippon Sanso Corp | フッ素ガス測定方法及び装置 |
JP2009139276A (ja) * | 2007-12-07 | 2009-06-25 | Taiyo Nippon Sanso Corp | フッ素ガス測定方法及び装置 |
WO2020049900A1 (ja) * | 2018-09-03 | 2020-03-12 | 昭和電工株式会社 | フッ素ガス含有ガスの供給方法及び供給設備 |
CN112639352A (zh) * | 2018-09-03 | 2021-04-09 | 昭和电工株式会社 | 含氟气的气体的供给方法和供给设备 |
TWI724493B (zh) * | 2018-09-03 | 2021-04-11 | 日商昭和電工股份有限公司 | 含氟氣之氣體的供給方法以及供給設備 |
JPWO2020049900A1 (ja) * | 2018-09-03 | 2021-08-12 | 昭和電工株式会社 | フッ素ガス含有ガスの供給方法及び供給設備 |
JP7367681B2 (ja) | 2018-09-03 | 2023-10-24 | 株式会社レゾナック | フッ素ガス含有ガスの供給方法及び供給設備 |
US12031685B2 (en) | 2018-09-03 | 2024-07-09 | Resonac Corporation | Method and supply equipment for supplying fluorine gas-containing gas |
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JP4749823B2 (ja) | 2011-08-17 |
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