JP2007107024A - Sputtering apparatus, and target plate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sputtering apparatus for performing the sputtering by a magnetron sputter system by facing a surface on the side for film deposition of a substrate parallel to a target plate which is capable of solving a problem that scattered substances from the target plate are deposited on a non-erosion portion of a conventional target plate, the thickness of the non-erosion portion is increased, the deposition is peeled off to build up foreign matters on a substrate for treatment, and defects by foreign matters and PH are formed in the substrate. <P>SOLUTION: The sputtering apparatus performs the sputtering by the magnetron sputter system by facing the surface on the side of film deposition of a substrate parallel to a target plate. The target plate is subjected to the sputtering while being held along a backing plate, and the target plate on the side of the surface of the substrate for treatment consists of only an erosion portion. In addition, a deposition preventive plate is provided along an outer periphery of the target. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a sputtering apparatus and a target plate that perform sputtering by a magnetron sputtering method with a target substrate and a surface of a processing substrate on which a film is formed facing each other in parallel.

In recent years, progress toward an information society has been remarkable, and the use of display devices has been diversified, and various display devices have been developed and put into practical use.
In particular, liquid crystal display devices have been widely used in place of CRT (Cathode-Ray Tube, CRT).
In a liquid crystal panel for color display for a liquid crystal display device, light from a backlight is displayed through a colored layer of each color, but the light passing through the colored layer of each color is liquid crystal for each pixel. Are controlled on and off as switching elements.
A transparent conductive ITO film (indium oxide doped with tin) has been conventionally used as a material for a control electrode for on-off control using a liquid crystal as a switching element for each pixel.
As a method for forming an ITO film, a method of forming a desired ITO film by sputtering an ITO on a substrate under a predetermined sputtering condition using an ITO sintered body as a target plate is disclosed in JP-A-6-24826. (Patent Document 1), JP-A-6-247765 (Patent Document 2), and the like.
Japanese Patent Laid-Open No. 6-24826 JP-A-6-247765

Impositional production is carried out from the viewpoint of productivity improvement and cost reduction, but there is a strong demand for enlargement of the transparent glass substrate used for this, and recently, the G6 generation (1800 mm x 1500 mm size) ) Mass production with large glass substrates is becoming a reality.
And, from the aspect of productivity, in-line deposition of the ITO film on the processing substrate using such a large glass substrate is performed in-line, as shown in FIG. An inline ITO sputter deposition apparatus has also been proposed.
In the sputtering apparatus shown here, as shown in FIG. 4 (b), a processing substrate 863 having a large glass substrate as a base substrate is mounted on a carrier 860 and placed in a vertical direction 892, in-line. Then, sputtering is performed while being conveyed, and an ITO film for electrodes is formed on one surface side of the processing substrate 763 by sputtering.
Briefly, the processing substrate 863 is put into the loading chamber 811, passed through the preliminary chamber 812, put into the first sputter chamber 883, sputtered while being transported, and carried into the rotation processing unit 820, where Each carrier is rotated 180 degrees by the rotating unit, the direction is changed, and the carrier is put into the second sputtering chamber 833 and sputtered while being conveyed.
Then, after sputtering, the material is unloaded through the preliminary chamber 832 and the unloading chamber 831.
Here, as shown in FIG. 4B, in a state where the processing substrate 863 is placed on a support member having a frame body 861 for holding the processing substrate 863, which is called a carrier (also referred to as a substrate holder) 860. The carrier 860 is conveyed in a standing state.
The carrier 860 includes a processing substrate holding portion 101 that holds the processing substrate 863 in order by fitting the processing substrate 863 and the back plate 861 into the frame 861, and the processing substrate 863 is arranged along the vertical direction 892. The carrier 860 is fitted into the processing substrate holding part 101 in a state where it stands upright.
Then, as shown in FIG. 4A, the processing substrate 863 is mounted on the carrier 860 together with the processing substrate holding unit 101, transported in the horizontal direction 891, and stood along the vertical direction 892. Sputtering is performed parallel to the plate 871 and facing the plate 871.
In FIG. 4A, a dotted arrow indicates the conveyance direction of the carrier 860.
Although not shown, the sputtering method here was generated by designing the magnetic field to be closed between the outer magnetic pole and the inner magnetic pole on the back side of the target plate 871 (the side opposite to the processing substrate 863 side). This is a magnetron sputtering method in which plasma exists only in the vicinity of the target plate 871.
An example of a large-size processing substrate is a color filter-formed substrate in which a colored layer of each color is formed as a color filter (hereinafter also referred to as CF) on one surface side of a large-size transparent glass substrate. An ITO film for electrodes is formed on the CF forming surface side of the substrate.

The carrier 860 shown in FIG. 4 (b) has a groove in which a groove for transmitting a driving force from a driving motor (not shown on the carrier side) not shown is engaged with a gear (not shown). A forming portion 868 is provided at the lower portion thereof, and in order to suppress wear by the gears as much as possible, conveyance support rails 866 and 867 having flat portions on both sides in the traveling direction of the groove forming portion 868 of the carrier 860 and below, It is provided to support the load of the carrier, and the flat portions of the carrier support rails 866 and 868 are placed on a rotating body 869 such as a bobbin different from the gear on the main body side.
The carrier 860 is conveyed by receiving the driving force from the driving motor by the engagement of the gears at the groove forming portion 868 while being held by the conveying support rails 866 and 867 provided below the carrier 860.
In the G6 generation, the combined weight of the processing substrate 863 to be sputtered and the carrier 860a is about 100 kg, so wear is inevitably generated. Thus, the fitting between the groove forming portion 200 and the gear is reduced as much as possible. is doing.
As a material of the carrier 860, Ti is preferably used from the viewpoint of weight and rigidity.
Sputtering is performed in an Ar gas atmosphere under a pressure of 10 ⁻⁵ torr to 10 ⁻² torr using a ITO film having a film composition to be formed as a target plate.
In this case, it is required to form the film at a low temperature from the viewpoint of heat resistance (degassing from CF) of the colored layer forming CF.
In addition, in such a magnetron sputtering method, for example, a sintered target plate material having a composition of In ₂ O ₃ , 90 w% + SnO ₂ , 10 w% is used at a thickness of 8 mm to 15 mm for low temperature sputtering.
For example, as a target plate, a Cu plate is used as a backing material, indium solder is used as an adhesive layer, and several sintered target plate materials are joined together.

  In such a sputtering apparatus, sputtering is performed with the target plate and the processing substrate based on the glass substrate to be sputtered facing each other in a standing state, but in the non-erosion portion of the target plate, What is scattered from the target plate is attached, becomes thick, and the attached material peels off, which may result in foreign matter adhering to the processing substrate. As a result, defects such as foreign matter defects and PH are generated on the processing substrate. There is a problem of doing.

As described above, in recent years, progress toward the information society has been remarkable, and the use of display devices has been diversified. In particular, liquid crystal display devices have become widespread, improving productivity and reducing costs. Therefore, imposition production is performed, but there is a strong demand for larger processing based on the glass substrate used for this, and recently, a large transparent glass substrate of G6 generation (1800 mm × 1500 mm size). Mass production at has become a reality.
In such a situation, in the sputtering apparatus as shown in FIG. 4A, the target plate 871 and the processing substrate 863 face each other in an upright state, and the sputtering process is performed while being transported. What is scattered from the target plate adheres to the non-erosion part, becomes thicker, and the adhered thing peels off, resulting in foreign matter adhering to the processing substrate, which causes foreign matter defects and defects such as PH on the processing substrate. Was a problem.
The present invention corresponds to this, and is a conventional sputtering apparatus that performs sputtering by the magnetron sputtering method with the target substrate and the surface on the film forming side of the processing substrate facing each other in parallel, and a conventional non-erosion portion of the target plate. In addition, the problem is that the material scattered from the target plate adheres, becomes thicker, the adhered material peels off, and foreign matter adheres to the processing substrate, resulting in foreign matter defects and defects such as PH on the processing substrate. It is an object of the present invention to provide a sputtering apparatus that can be used.
At the same time, a part of the target plate that does not contribute to film formation is deleted or reduced, and such a target plate is further provided.

The sputtering apparatus of the present invention is a sputtering apparatus that performs sputtering by a magnetron sputtering method with a surface on the side of a processing substrate on which a film is formed and a target plate facing each other in parallel, and the target plate is held along a backing plate In this state, the substrate is subjected to a sputtering process, and the processing substrate surface side of the target plate is only an erosion portion.
In the above sputtering apparatus, an adhesion preventing plate is provided along the outer periphery of the target plate.
In any one of the above sputtering apparatuses, the target plate is provided with a thin portion extending along the outer surface of the erosion portion and along the backing plate surface.
Alternatively, the sputtering apparatus of the present invention is a sputtering apparatus that performs sputtering by a magnetron sputtering method with a surface on the side of the processing substrate on which a film is formed and a target plate facing each other in parallel, and the target plate is a backing plate. It is used for the sputtering process while being held along, and has a region that becomes an erosion portion at the center side, and a region that becomes a non-erosion portion along the entire outer periphery of the region that becomes the erosion portion. The surface of at least part of the region that becomes the non-erosion part, or at least part of the region that becomes the erosion part and at least part of the region that becomes the non-erosion part, is roughened And an anti-adhesion plate is provided along the outer periphery of the target plate.
In any one of the above sputtering apparatuses, the surface of the deposition preventing plate on the outer peripheral portion of the target plate is roughened.
Any one of the above sputtering apparatuses, wherein the processing substrate is mounted on a carrier and sputtered while being conveyed in-line, and an ITO film for an electrode is formed on one surface of the processing substrate by sputtering. It is characterized by being.

Here, a portion that greatly contributes to sputtering and is eroded is called an erosion region. In the case of a magnetron sputtering type sputtering device that confines plasma with magnetic flux using a magnet, the magnet is swung to increase the erosion area, but there is a restriction on the rocking of the magnet, and the target plate has a non-erosion area. It is normal.
In addition, here, the roughening of the protective plate means that the rough surface is not peeled off from the target plate until the target plate is used up or until periodic maintenance. It is to become.
Further, the roughening of the non-erosion portion is roughening to make it difficult for the non-erosion portion to be peeled off from the erosion portion due to sputtering and deposited on the non-erosion portion.
By roughening the adhesion-preventing plate, time can be gained until it is peeled off, but usually it is peeled off before the target plate is used up, so it is replaced before peeling.
Furthermore, it is assumed that the protection plate is replaced several times before the target plate is used up, and the roughening of the protection plate referred to here is attached to the protection plate. It is roughening so that what is scattered from the target plate does not peel off before the replacement of the deposition preventing plate.

The target plate of the present invention is a sputtering apparatus that performs sputtering by a magnetron sputtering method with the target substrate and the surface on the film forming side of the processing substrate facing each other in parallel. The target plate is held along the backing plate. In this state, the substrate is subjected to a sputtering process, and the processing substrate surface side of the target plate is only an erosion portion.
And it is the said target plate, Comprising: The thin part extended so that the said backing plate surface side might be provided over the outer periphery is characterized by the above-mentioned.
Alternatively, the target plate of the present invention is a target plate used in a sputtering apparatus that performs sputtering by a magnetron sputtering method with a surface on the film-forming side of the processing substrate and the target facing each other in parallel. A region having an erosion portion at the center side when being subjected to sputtering treatment while being held along the backing plate, and a non-erosion portion along the entire outer periphery of the region to be the erosion portion The surface of at least a part of the region that becomes the non-erosion part, or at least a part of the region that becomes the erosion part and at least a part of the region that becomes the non-erosion part, is roughened. It is a feature.
One of the above target plates is made of sintered ITO (indium oxide doped with tin).

(Function)
In the sputtering apparatus of the present invention, the target plate is used for the sputtering process while being held along the backing plate, and the processing substrate surface side of the target plate is only the erosion portion. By using this sputtering apparatus, sputtering is performed by a magnetron sputtering method with the target substrate and the surface on the film-forming side of the processing substrate facing each other in parallel, and the conventional non-erosion portion of the target plate Spattering device that can solve the problem that the scattered material adheres to the target plate, becomes thick, and the adhered material peels off, resulting in foreign matter adhering to the processing substrate and generating foreign matter defects and defects such as PH on the processing substrate. It is possible to provide.
More specifically, since the entire processing substrate surface side of the target plate is only the erosion portion, the non-erosion portion of the target plate does not adhere to the non-erosion portion of the target plate as in the past.
And, by forming the adhesion preventing plate along the outer periphery of the target plate, the scattering of the target plate will adhere to the adhesion preventing plate. By exchanging the plate, it is possible to prevent the material scattered from the target plate and adhering to the adhesion-preventing plate from becoming thicker and peeling off and causing defects such as foreign matter defects and PH in the processing substrate. It is supposed to be.
Furthermore, the target plate extends along the outer periphery of the erosion part and is provided with a thin part along the backing plate surface. It is possible to prevent the backing plate and the indium solder portion, which is a joint, from being sputtered from the gap with the deposition plate.

Alternatively, in the sputtering apparatus of the present invention, the target plate is used for the sputtering process while being held along the backing plate, and has a region that becomes an erosion portion at the center thereof, and becomes the erosion portion. A region which becomes a non-erosion portion along the entire outer periphery of the region, and at least a part of the region which becomes the non-erosion portion, or a part of the region which becomes the erosion portion and at least one of the regions which become the non-erosion portion By forming the surface of the surface roughened, the surface on the film forming side of the processing substrate and the target plate are made to face each other in parallel, and sputtering is performed by a magnetron sputtering method. In a conventional sputtering apparatus, the target plate is placed on the non-erosion portion of the target plate. Providing a sputtering system that can solve the problem of scattered objects adhering, thickening, adhering objects peeling off, and foreign matter adhering to the processing substrate, and generating defects such as foreign matter defects and PH on the processing substrate It is possible.
Specifically, by having a region that becomes a non-erosion portion that is roughened along the entire outer periphery of the region that becomes an erosion portion, the non-erosion portion is scattered and thickened by being scattered from the target. It is assumed that deposits are difficult to peel off.
Then, by providing an anti-adhesion plate along the outer periphery of the target plate, what is scattered from the target plate adheres to the anti-adhesion plate according to the form of the invention of claim 5. By exchanging the plate, it is possible to prevent the material scattered from the target plate and adhering to the adhesion-preventing plate from becoming thicker and peeling off and causing defects such as foreign matter defects and PH in the processing substrate. It is supposed to be.
In addition, it is difficult to roughen only the non-erosion exactly at the boundary between the erosion part and the non-erosion part. Therefore, usually a part of the non-erosion part or a part of the erosion part is also roughened. .
In addition, as described above, here, the roughening of the non-erosion portion means that the material scattered from the erosion portion by sputtering and attached to the non-erosion portion becomes thick, but this is to make it difficult to peel off. Roughening.
Specific examples of the roughening method include a method of roughening by sandblasting and aluminum spraying for spraying an aluminum material.
Here, the aluminum spraying is applied only to the treatment of the deposition preventing plate, and cannot be applied to the roughening of the target plate surface.

Furthermore, the adhesion plate on the outer periphery of the target plate has a roughened surface, and the deposits adhered to the adhesion plate are scattered from the target plate. It ’s hard to peel off.
Thereby, the freedom degree of the time of replacement | exchange of a protection board can be enlarged.
As described above, the roughening of the adhesion preventing plate here means that the material adhered to the adhesion preventing plate is not peeled off until the adhesion preventing plate is used up. By roughening the surface, the roughening of the target plate is to roughen the surface of the target plate so that it does not peel off from the target plate until it is used up. .
Specific examples of the roughening method include a method of roughening by sandblasting and aluminum spraying for spraying an aluminum material.
In this case as well, aluminum spraying is applied only to the processing of the deposition preventing plate and cannot be applied to roughening the surface of the target plate.
The invention according to claim 7, wherein the processing substrate is mounted on a carrier and sputtered while being conveyed in-line, and an ITO film for electrodes is formed on one surface of the processing substrate by sputtering. It is particularly effective by adopting a form.

The target plate of the present invention is used for the sputtering process while being held along the backing plate, and the processing substrate surface side of the target plate is only an erosion portion, and is a form of the invention of claim 8 With the sputtering apparatus that performs sputtering by the magnetron sputtering method with the surface on the side of the processing substrate on which the film is formed and the target plate facing each other in parallel, the target plate is scattered on the non-erosion portion of the target plate. The material adheres, becomes thick, and the adhered material peels off, resulting in foreign matter adhering to the processing substrate, so that no foreign matter defect, PH or other defects are generated on the processing substrate.
Further, a thin-walled portion extending along the backing plate surface side is provided over the entire outer periphery of the outer periphery, so that the target plate and the anti-adherence can be adhered to the target plate by sputtering. It is possible to prevent the backing plate surface from being sputtered from the gap with the plate.
Alternatively, the target plate of the present invention has a region that becomes an erosion portion at the center side when the target plate is held along the backing plate and is subjected to the sputtering process, and the entire outer side of the region that becomes the erosion portion. It has a region that becomes a non-erosion portion along the circumference, and at least a part of the region that becomes the non-erosion portion, or a portion of the region that becomes the erosion portion and at least a portion of the region that becomes the non-erosion portion have a surface. Since the surface is roughened, the non-erosion portion or the erosion portion that has been roughened is not easily peeled off from the target plate. And can.
This is particularly effective when the target plate is made of sintered ITO (indium oxide doped with tin).

As described above, the present invention is a sputtering apparatus that performs sputtering by the magnetron sputtering method with the target substrate and the surface on the film forming side facing each other in parallel, and is applied to a conventional non-erosion portion of the target plate. Can solve the problem that the scattered material from the target plate adheres, becomes thicker, the adhered material peels off, and foreign matter adheres to the processing substrate, causing defects such as foreign matter and PH on the processing substrate. It was possible to provide a sputtering device.
In addition, it is possible to provide a target plate that is suitably used in such a sputtering apparatus.
Specifically, it has become possible to provide a target plate that can eliminate or reduce portions that do not contribute to film formation.

An embodiment of the present invention will be described.
FIG. 1A is a schematic view showing a surface of a target portion in one example of an embodiment of a sputtering apparatus of the present invention, and FIG. 1B is a view seen from the A1 side of FIG. 1C is a cross-sectional view taken along A1-A2 in FIG. 1A, FIG. 2 is a cross-sectional view showing a target portion using an example of the target plate of the present invention, and FIG. 3 is a target of the present invention. FIG. 4A is a cross-sectional view showing a target portion using another example of a plate, and FIG. 4A is a schematic cross-sectional view showing a carrier and a rotating roll for conveyance in an example of an embodiment of a sputtering apparatus of the present invention. FIG. 4B is a view showing the carrier driving gear in addition to the carrier as seen from the B1 direction of FIG. 4A, and FIG. 5 is a cross-sectional view showing the facing state of the target plate and the carrier. is there.
4A is a view as seen from the A3 direction of FIGS. 4B and 4C, and FIG. 4 shows a rotating roller and a gear in addition to the carrier. .
1 to 5, 10 is a target plate (only for the erosion portion), 10 a is a thin portion, 10 b is a roughened portion, 11 is a deposition plate, 12 is a backing plate, 13 is a target holding portion, and 15 is a magnet. , 16 is the direction of the magnetic flux, 100 is the carrier, 101 is the processing substrate holding unit, 110 is the frame, 120 is the back plate, 130 is the processing substrate, 150 is the supporting unit, 161 and 162 are positioning rotary rolls, and 161a and 162a are Reference numerals 171 and 172 denote conveyance support rails (also simply referred to as support parts), 190 denotes a rotating roll (also referred to as a rotating body), 190a denotes a shaft, 200 denotes a groove forming part, and 210 denotes a gear.

First, an example of an embodiment of a sputtering apparatus of the present invention will be described with reference to the drawings.
The sputtering apparatus of this example is in-line with a processing substrate 130 having a large transparent glass substrate of G6 generation size (1800 mm × 1500 mm size) or larger for a display panel as a base substrate mounted on a carrier. 6 is a magnetron sputtering type sputtering apparatus that performs sputtering processing while transporting and sputter-deposits an ITO film for electrodes on one surface side of the processing substrate, and has the same arrangement as the arrangement shown in FIG. It is.
In this example, in the sputtering process, the processing substrate 130 is mounted on the carrier 100 shown in FIG. 4A, and as shown in FIG. Are sputtered while being conveyed in parallel and facing each other.
In the sputtering apparatus of this example, the carrier 100 includes a processing substrate holding unit 101 that holds the processing substrate 130 by fitting the processing substrate 130 and the back plate 120 into the frame 110 in order.
Here, a color filter forming substrate in which a colored layer of each color is formed as a color filter on one surface side of a G6 generation size transparent glass substrate is used as the processing substrate 130, and an ITO film is formed by sputtering on the color filter forming surface side. To do.

The target portion is shown in FIG. 1A. The target plate 10 has a square shape, and the entire region is provided only as an erosion portion, and an adhesion prevention plate 11 is provided along the outer periphery thereof.
Here, the target plate 10 is used for the sputtering process while being held along the backing plate 12, and the processing substrate surface side thereof consists only of the erosion portion.
And the surface of the deposition preventing plate is roughened by sandblasting.
Further, in this example, as shown in FIG. 1C, a cross section taken along line A1-A2 in FIG. 1A is provided with a magnetron structure on the back side of the target plate 10 that is not on the sputtering process side, and a magnetron sputtering method. Thus, a sputtering process is performed.
In this example, although not explicitly shown in FIG. 1, a magnetron structure magnet is integrated, along the target plate surface, in the short side direction of the target plate 10, that is, in the transport direction of the carrier 100, within a predetermined range. Here, the entire region of the target plate 10 is an erosion part depending on the range of the swing and the size of the magnetron structure magnet in the longitudinal direction.
In the magnetron structure, because electrons and ions continuously move along the magnetic circuit and do not accumulate locally on the circuit design, heat does not accumulate locally on the structure such as a magnet, In particular, there is no possibility of adversely affecting the film formation distribution, which is preferable.
The magnetron structure is described in the thin film handbook (edited by the Japan Society for the Promotion of Science and Thin Film No. 131 Committee, published by Ohm Co., Ltd., published on December 10, 1995, first edition, sixth edition, pages 186 to 188). As described, it has been widely used in sputtering and the like.
The arrangement of the magnets, that is, the structure provided by devising the magnetic field, makes it possible to restrain electrons on the surface of the structure, the frequency of ionization collisions is extremely high, and very large target (material) impact current density can be easily achieved. Obtainable.
In this way, the target plate 10 has the entire target plate region as an erosion portion alone, and is provided with an adhesion preventing plate 11 on the outer peripheral portion thereof. Thus, the target plate 10 has a conventional non-erosion portion of the target plate. It is possible to solve the problem that the scattered material adheres, becomes thick, the adhered material peels off, and foreign matter adheres to the processing substrate, causing a foreign matter defect or a defect such as PH on the processing substrate.

ＲａやＲｍａｘが大きいいほど、防着板１１に付着した膜の密着力は向上し、剥がれにくくなりますが、その交換が必要で、通常、メンテナンスの周期に合わせて、交換を行う。
例えば、あるメンテナンス周期交換を行う場合、その周期の間に防着板１１に付着する膜厚が１０μｍとすると、この膜厚で剥がれなければいいだけのサンドブラスト処理を行えば良く、過剰なブラスト処理はいらない。
上記表１のサンドブラスト処理の粗面化でも十分に実用レベルである。 Further, as the target plate 10, for example, a sintered target plate material having a composition of In ₂ O ₃ , 90 w% + SnO ₂ , 10 w% and having a thickness of 8 mm to 15 mm is used. Therefore, a plurality of sintered target plate materials are joined together using a Cu plate as a backing material, indium solder as an adhesive layer.
As the adhesion preventing plate 11, for example, a stainless steel (SUS) material is used.
Here, the adhesion preventing plate 11 is roughened by sandblasting.
In this case, as shown in Table 1, the surface can be roughened by sandblasting.

The larger Ra and Rmax are, the better the adhesion of the film attached to the adhesion-preventing plate 11 becomes, and the more difficult it is to peel off. However, the replacement is necessary, and the replacement is usually performed in accordance with the maintenance cycle.
For example, when a certain maintenance cycle is replaced, if the film thickness attached to the deposition preventing plate 11 is 10 μm during the cycle, it is sufficient to perform a sandblasting process as long as it does not peel off at this film thickness, and an excessive blasting process. No.
Even the roughening of the sandblasting treatment in Table 1 is sufficiently practical.

Here, the sputtering is performed in an Ar gas atmosphere under a pressure of 10 ⁻⁵ torr to 10 ⁻² torr using a plate-shaped ITO having a film composition to be formed as a target plate.
In this case, film formation is performed at a low temperature from the viewpoint of heat resistance (degassing from CF) of the colored layer forming CF.

The sputtering apparatus of this example performs the sputtering process while being transported in the same way as the sputtering apparatus shown in FIG. 6. The flow from the placement of each chamber and the loading and unloading of the processing substrate is basically shown in FIG. This is the same as the sputtering apparatus shown in FIG.
The carrier 100 in this example is the same as the carrier 860 shown in FIG.
The carrier 100 is also transported basically in the same manner as the sputtering apparatus shown in FIG. 6, and a groove forming section that cuts a groove that transmits the driving force from the driving motor 210 by meshing with a gear (not shown). 200 is provided in the lower part of the carrier, and in order to suppress wear due to gears as much as possible, conveyance support rails 171 and 172 having flat portions on both sides and below the groove forming part 200 of the carrier 100 are provided. Provided to support the load of the carrier, the flat portions of the carrier support rails 171 and 172 are placed on a rotating body 190 such as a bobbin different from the gear on the main body side.
In this example, a plurality of such rotating bodies 190 and gears 210 are arranged along the conveyance path for conveyance.

In the sputtering apparatus of this example, simply, the processing substrate 130 (corresponding to 863 in FIG. 6) is put into a loading chamber (corresponding to 811 in FIG. 6), and a spare chamber (corresponding to 812 in FIG. 6) is provided. Then, it is put into a first sputtering chamber (corresponding to 813 in FIG. 6), sputtered while being transported, and carried into a rotation processing part (corresponding to 820 in FIG. 6). The direction is changed, the direction is changed, and the second sputter chamber (corresponding to 833 in FIG. 6) is charged and sputtered while being conveyed.
Then, after sputtering, it is unloaded through a preliminary chamber (corresponding to 832 in FIG. 6) and an unloading chamber (corresponding to 831 in FIG. 6).
In addition, there is a mechanical partition at the boundary of each chamber, and the opening of each partition is performed with the same degree of vacuum in the chambers on both sides.
Moreover, about the material of frame 110 other than the process board | substrate holding | maintenance part 101, rigidity, big, strong, and a light thing are preferable, and Ti and stainless steel are mentioned.

The sputtering apparatus of this example is one example, and the present invention is not limited to this.
An example in which the structure of the target portion of this example shown in FIG. 1 is applied to another type of magnetron type sputtering apparatus, for example, an apparatus that performs sputtering without carrying is included.
Further, there is a mode in which sputtering is performed in a state where the processing substrate 130 and the target plate 10 are tilted from the vertical direction or in a state where the processing substrate 130 and the target plate 10 face each other in parallel.
Of course, it is good also as a form which provided the structure arrangement | positioning of each part shown in FIG. 6 linearly.

Further, as a modification of the sputtering apparatus of this example, in this example, a sputtering apparatus using a target unit shown in FIG. 2 or FIG. 3 instead of the target unit shown in FIG.
In the target portion shown in FIG. 2, the target plate 10 is used for the sputtering process while being held along the backing plate 12 in the same manner as the target portion shown in FIG. A thin portion 10a extending along the plate surface side is provided, and the processing substrate surface side of the target plate 10 is only the erosion portion.
In other words, the thin-walled portion 10a is integrally added to the target plate having only the erosion portion shown in FIG.
The target plate 10 and the deposition preventing plate 11 must be electrically separated from each other. Since there is a gap between the target plate and the deposition preventing plate shown in FIG. Although the plate 12 is sputtered, in the target portion shown in FIG. 2, the target plate 10 can be prevented from being sputtered by providing the thin portion 10a.
Further, in the target portion shown in FIG. 3, the target plate 10 is used for the sputtering process while being held along the backing plate 12 as in the target portion shown in FIG. The entire surface is roughened.
11b is a roughening part.
Here, the target plate having only the erosion portion shown in FIG. 1 as its region, and the roughened non-erosion portion as its region are further added. In the case of using the roughened region as a non-erosion part during sputtering, it is possible to make it difficult to peel off deposits scattered and adhered to the roughened non-erosion part from the target plate.
2 and 3, the target plate is different in shape from the target plate shown in FIG. 1, and the other parts are the same as the target portion shown in FIG. 1.
The above description is the description of the embodiment of the target plate of the present invention.

FIG. 1A is a schematic view showing a surface of a target portion in one example of an embodiment of a sputtering apparatus of the present invention, and FIG. 1B is a view seen from the A1 side of FIG. FIG.1 (c) is sectional drawing in A1-A2 of Fig.1 (a). It is sectional drawing which showed the target part using one example of the target plate of this invention. It is sectional drawing which showed the target part which used another example of the target plate of this invention. FIG. 4A is a schematic sectional view showing a carrier and a rotating roll for conveyance in one example of the embodiment of the sputtering apparatus of the present invention, and FIG. 4B is seen from the B1 direction of FIG. 4A. FIG. 5 is a view showing a gear for driving the carrier in addition to the carrier. It is sectional drawing which showed the opposing state of the target plate and the carrier. FIG. 6A is a schematic arrangement view of an in-line type ITO sputtering film forming apparatus, and FIG. 6B is a view showing a carrier used in the ITO sputtering film forming apparatus shown in FIG.

Explanation of symbols

10 (Erosion part only) Target plate 10a Thin wall part 10b Roughening part 11 Attachment plate 12 Backing plate 13 Target holding part 15 Magnet 16 Direction of magnetic flux 100 Carrier 101 Processing board holding part 110 Frame body 120 Back board 130 Processing board 150 Support portions 161 and 162 Positioning rotary rolls 161a and 162a Shafts 171 and 172 Conveyance support rails (also simply referred to as support portions)
190 Rotating roll (also called rotating body)
190a Shaft 200 Groove forming part 210 Gear 811 Loading chamber 812 Preliminary chamber 813 Sputtering chamber 820 Rotating processing part 821 Rotating part 831 Unloading chamber 832 Preliminary chamber 833 Sputtering chambers 841 to 843 Chamber partition 841a to 843a Chamber partition 860, 860a Carrier 860A treatment Substrate holding portion 861 Frame body 862 Back plate (also referred to as pressing plate)
863 Processing substrate 864 Support portion 865 Positioning rotation rollers 865a, 865b Shafts 866, 867 Conveyance support rail (also simply referred to as support portion)
868 Groove forming portion 869 Rotating roller (also referred to as rotating portion)
869a Shaft 871 Target plate 891 Horizontal direction 892 Vertical direction

Claims (11)

  A sputtering apparatus for performing sputtering by a magnetron sputtering method with a surface on the side of a processing substrate on which a film is formed and a target plate facing each other in parallel, wherein the target plate is held along a backing plate for sputtering processing. The sputtering apparatus according to claim 1, wherein the processing substrate surface side of the target plate is only an erosion portion.   The sputtering apparatus according to claim 1, wherein a deposition preventing plate is provided along an outer periphery of the target plate.   3. The sputtering apparatus according to claim 1, wherein the target plate is provided with a thin portion extending along an outer periphery of the erosion portion and along a backing plate surface. 4. Sputtering equipment.   A sputtering apparatus for performing sputtering by a magnetron sputtering method with a surface on the side of a processing substrate on which a film is formed and a target plate facing each other in parallel, wherein the target plate is held along a backing plate for sputtering processing. A region which becomes an erosion portion at the center side thereof, and has a region which becomes a non-erosion portion along the entire outer periphery of the region which becomes the erosion portion, at least of the region which becomes the non-erosion portion A sputtering apparatus characterized in that the surface of a part or a part of a region that becomes the erosion part and a part of the region that becomes the non-erosion part are roughened.   The sputtering apparatus according to claim 4, wherein a deposition preventing plate is provided along an outer periphery of the target plate.   6. The sputtering apparatus according to claim 1, wherein a surface of the deposition preventing plate on the outer periphery of the target plate is roughened. 7.   The sputtering apparatus according to any one of claims 1 to 6, wherein the processing substrate is mounted on a carrier and sputtered while being conveyed in-line, and an electrode is provided on one side of the processing substrate. A sputtering apparatus characterized by sputtering the ITO film.   A sputtering apparatus that performs sputtering by a magnetron sputtering method with a target substrate surface facing a film forming side of a processing substrate in parallel, and the target plate is subjected to a sputtering process while being held along a backing plate. A target plate characterized in that the processing substrate surface side of the target plate is only an erosion portion.   9. The target plate according to claim 8, wherein a thin-walled portion extending along the backing plate surface side is provided over the entire outer periphery thereof.   A target plate used in a sputtering apparatus that performs sputtering by a magnetron sputtering method with a surface on a film forming side of a processing substrate facing each other in parallel, and the target plate is held along a backing plate In the center side, it has a region that becomes an erosion portion, and has a region that becomes a non-erosion portion along the entire outer periphery of the region that becomes the erosion portion, and the non-erosion portion A target plate characterized in that the surface of at least part of the region to be formed, or part of the region to be the erosion part and at least part of the region to be the non-erosion part is roughened. 11. The target plate according to claim 8, wherein the target plate is made of sintered ITO (indium oxide doped with tin).

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