JP2007015023A - Link device and carrying robot - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a link device, heightening the stop position accuracy in moving forward and backward. <P>SOLUTION: This link device includes: a pair of first gears 100, 110 provided to rotate in a body with the respective first link arms 10, 11 in two first spindles f1 on an intermediate member 12; and a pair of second gears 200, 210 provided to rotate in a body with the respective second link arms 20, 21 on two second spindles f2 on the intermediate member 12, wherein one second gear 210 is rotated in the state of meshing with one first gear 110 only when the first link arms 10, 11 are rocked in a predetermined direction to move a moving member forward, and the other second gear 200 is rotated in the state of meshing with the other first gear 100 only when the first link arms 10, 11 are rocked in the opposite direction to the predetermined direction to move the moving member backward. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a link device and a transfer robot that linearly move forward and backward a moving member for delivering a transfer object, for example.

  For example, Patent Document 1 discloses a conventional transfer robot that linearly moves a flat workpiece as a transfer object while keeping it horizontal.

  The transfer robot disclosed in Patent Document 1 includes a first main arm that is swung as a driving node, a first sub arm that is swung as a driven node, and the first main arm and the first sub arm that are parallel to each other. A second main arm that includes a first parallel link mechanism that includes a first movable link that is connected to the first movable link, and that can be swung with the first movable link as a fixed node; And a second parallel link mechanism constituted by a second movable link that connects the second main arm and the second sub arm in parallel. The first parallel link mechanism and the second parallel link mechanism are configured as one link device so that the first main arm and the second main arm, which are the driving nodes, are interlocked and the second movable link moves forward and backward linearly. Used.

  As a specific mechanism of the link device, the first main arm is rotatably supported by the first movable link via a predetermined shaft (first support shaft), and the first main arm is supported on the first support shaft. A first gear that is integrally rotatable is provided. The second main arm is rotatably supported by the first movable link via a predetermined shaft (second support shaft) adjacent to the first support shaft, and the second support arm is integrated with the second main arm. A second gear that can be rotated is provided. The first gear and the second gear mesh with each other in both forward and reverse directions and rotate with each other.

  That is, when the first main arm is swung in a predetermined direction to advance the second movable link, the first main arm is relatively forward with respect to the first movable link (on the drawing attached to Patent Document 1). Rotates clockwise). At this time, when the first gear and the second gear mesh with each other and rotate with each other, the second main arm is opposite to the first movable link in the opposite direction to the first main arm (Patent Document 1). The second movable link moves forward as a result. On the other hand, when the first main arm is swung in the direction opposite to the predetermined direction to retract the second movable link, the first main arm rotates in the opposite direction relative to the first movable link. . Also at this time, the first gear and the second gear mesh with each other and rotate to each other, so that the second main arm rotates in the positive direction relative to the first movable link, opposite to the first main arm. As a result, the second movable link moves backward.

Japanese Patent Laid-Open No. 10-6258

  However, in the transfer robot including the conventional link device, the first main arm and the second main link are connected via the same combination of the first gear and the second gear in both cases where the second movable link is moved forward and backward. The arms swing in opposite directions. When the direction is changed from forward to backward or backward to forward, the rotation direction of the first gear and the second gear is reversed. At this time, there is play due to backlash between the teeth of the first gear and the second gear. To do. In other words, in the conventional link device, a backlash shift occurs between the first main arm and the second main arm, so that the second movable link serving as the moving member is accurately set to the target stop position when moving forward or backward. There was a difficulty that could not be stopped well.

  The present invention has been conceived under such circumstances, and a link device capable of increasing the stop position accuracy at the time of forward movement and backward movement, and a transport robot including such a link device. The issue is to provide.

  In order to solve the above problems, the present invention employs the following technical means.

  That is, the link device provided by the first aspect of the present invention includes a pair of first link arms, at least one of which is swung as a driving node, and an intermediate connecting these pair of first link arms in parallel. A pair of second link arms that can swing with the intermediate member as a fixed node, and a moving member that connects the pair of second link arms in parallel. A link device comprising a configured second parallel link mechanism, wherein the moving member linearly moves forward and backward by interlocking the first parallel link mechanism and the second parallel link mechanism. In each of the two first support shafts, each of the first link arms supported so as to be rotatable relative to the intermediate member, the first link arms and A pair of first gears provided so as to rotate physically, and two second support shafts, each of which is rotatably supported relative to the intermediate member, A pair of second gears provided so as to rotate integrally with the second link arm, and one of the pair of second gears moves the first link arm in a predetermined direction. Only when the moving member is moved forward by being swung to the right, the second member is rotated while being engaged with one of the pair of first gears, while the other of the pair of second gears is the first gear. Only when the moving member is moved backward by swinging the link arm in the direction opposite to the predetermined direction, the link arm is configured to be rotated while meshing with the other of the pair of first gears. It is characterized by that.

  In a preferred embodiment, the first support shaft is provided with a first shaft body that rotatably supports the first link arm, and the second support shaft is provided with the second link arm. A second shaft body that rotatably supports the first shaft body and the second shaft body is fixed to each of the first shaft body and the second shaft body.

  In such a configuration, as a mechanism for interlocking the pair of first link arms and the pair of second link arms, there are two sets of gear pairs composed of combinations of the first gear and the second gear. When the moving member is moved forward, the first link arm and the second link arm swing in a state where the pair of gears reliably meshes with each other (without backlash). As a result, the moving member starts moving together with the second link arm without deviating from the swinging motion of the first link arm, and smoothly advances to the target stop position. On the other hand, when the moving member is moved backward, the first link arm and the second link arm swing in the direction opposite to the above with the other pair of gears reliably engaged. Also by this, the moving member starts to move together with the second link arm without deviating from the swinging motion of the first link arm, and thus smoothly moves back to the target stop position. Therefore, according to the link device according to the first aspect of the present invention, the moving member can be accurately stopped at the target stop position when moving forward and backward, and the stop position accuracy during forward and backward movement is improved. Can do.

  In another preferred embodiment, at least one of the first shaft body and the second shaft body is configured such that the first support shaft or the second link arm is positioned with respect to the first support shaft or the second link arm. It is attached via fastening means with adjustable attachment angle around the second support shaft.

  As another preferred embodiment, the first gear and the second gear that mesh only when the moving member is advanced are assembled so that the tooth surfaces on the predetermined side are in contact with each other by adjusting the mounting angle. On the other hand, the first gear and the second gear, which are meshed only when the moving member is moved backward, are assembled so that the tooth surfaces on the side opposite to the predetermined side are in contact with each other by adjusting the mounting angle. ing.

  According to such a configuration, the gear pair forming one set and the gear pair forming the other set can be assembled so as to mesh with each other in opposite directions. As a result, when the pair of gears rotates to transmit the driving force from the first link arm to the second link arm, the other pair of gears idle and transmit the driving force. When the pair of gears in the other set rotate to transmit each other and the driving force is transmitted from the first link arm to the second link arm, the pair of gears in the other set idle and Can not be transmitted.

  In another preferred embodiment, the first link arm and the second link arm are arranged in a three-dimensional intersection.

  According to such a configuration, the first link arm and the second link arm can be swung in opposite directions without causing interference.

  The transfer robot provided by the second aspect of the present invention is characterized by including the link device according to the first aspect.

  According to such a configuration, it is possible to obtain the same effect as that according to the first aspect, for example, to a stop position where the transport object is accurately targeted in a state where the transport object is placed on the moving member. Can be transported.

  Other features and advantages of the present invention will become more apparent from the detailed description given below with reference to the drawings.

  Hereinafter, a preferred embodiment of a link device according to the present invention and a transfer robot including the link device will be specifically described with reference to the drawings.

  1-7 has shown one Embodiment of the conveyance robot provided with the link apparatus based on this invention.

  As shown in FIGS. 1 and 2, the transfer robot includes a link device A on the upper portion of the fixed base 1. The link device A is for advancing and retreating the object to be conveyed linearly along the horizontal direction. The link device A is linked to the first parallel link mechanism A1, the second parallel link mechanism A2, and these. And a hand box 4 for placing a glass substrate G as an object to be conveyed. Inside the fixed base 1, a drive motor M and a drive shaft S for transmitting a rotational drive force to the link device A are incorporated (see FIG. 1). Although not particularly illustrated, the fixed base 1 incorporates a turning device for turning the drive motor M and the drive shaft S around the vertical axis and a lifting device for moving up and down in the vertical direction. The link device A can be swung integrally with the drive motor M and the drive shaft S or moved up and down.

  The first parallel link mechanism A1 includes a pair of first link arms 10 and 11 supported so as to be swingable with an upper portion of the fixed base 1 as a fixed node, and an intermediate connecting the pair of first link arms 10 and 11 in parallel. The member 12 is mainly provided. The second parallel link mechanism A2 includes a pair of second link arms 20 and 21 supported to be swingable with the intermediate member 12 as a fixed node, and a moving member that connects the pair of second link arms 20 and 21 in parallel. 22 is mainly provided. The gear box 3 is provided below the intermediate member 12 with the leading ends of the first link arms 10 and 11 interposed therebetween, and the first link arms 10 and 11 and the second link arms 20 and 21 are provided therein. Contains a pair of gears that rotate relative to each other. The hand member 4 is fixed to the upper part of the moving member 22.

  The base end portions of the first link arms 10 and 11 in the first parallel link mechanism A1 are supported by the upper portion of the fixed base 1 so as to be rotatable around the vertical axis by the 0th support shaft f0. One first link arm 10 is connected to a drive motor M via a drive shaft S, and is swung as a driving node about the 0th support shaft f0. The other first link arm 11 swings as a follower while taking a parallel posture with the first link arm 10. As is well shown in FIG. 3, a first shaft body 13 is fixed to each distal end portion of the first link arms 10 and 11 via bolts 14. The intermediate member 12 and the gear box 3 are supported via a bearing 16 so as to be rotatable around the vertical axis by the first support shaft f1. First gears 100 and 110 are fixed to the lower ends of the first shaft body 13. The pair of first gears 100 and 110 are arranged so as to be rotatable inside the gear box 3.

  In such a first parallel link mechanism A1, when the pair of first link arms 10 and 11 swings, the intermediate member 12 and the gear box 3 move in parallel following these tip portions. At this time, each of the first link arms 10 and 11 rotates relative to the intermediate member 12 and the gear box 3 around the first support shaft f1, and accordingly, the first gears 100 and 110 are in the first state. It rotates around the support shaft f1.

  As shown well in FIG. 3, the second link arms 20 and 21 in the second parallel link mechanism A2 are arranged above the intermediate member 12 so as to form a three-dimensional intersection with the first link arms 10 and 11. ing. A second shaft body 23 is fixed to each base end portion of the second link arms 20, 21 via bolts 24. These second shaft bodies 23 are connected to the intermediate member 12 and the gear box 3. The second support shaft f2 is supported via a bearing 26 so as to be rotatable around the vertical axis. Second gears 200 and 210 are fixed to the lower ends of the second shaft body 23. The pair of second gears 200 and 210 are arranged in the gear box 3 so as to be combined with the first gears 100 and 110 to form two gear pairs. The respective distal end portions of the second link arms 20 and 21 are supported by the moving member 22 so as to be rotatable around the vertical axis by the third support shaft f3 (see FIGS. 1 and 2). The first link arms 10 and 11 and the second link arms 20 and 21 are all the same length, and are between the 0th support shaft f0, between the first support shaft f1, between the second support shaft f2, and the third support shaft. All the distances between the axes f3 are the same.

  As particularly well shown in FIG. 4, the head of the second shaft body 23 is provided with a plurality of long holes 25 that can adjust the fixing position of the bolt 24 in the circumferential direction. The second shaft body 23 is attached to the second link arms 20 and 21 by adjusting the attachment angle around the second support shaft f2 by the fastening means comprising the bolts 24 and the long holes 25.

  Specifically, when the second shaft body 23 is attached, the first link arms 10 and 11 and the second link arms 20 and 21 are positioned at predetermined swing positions as shown in FIGS. 4 and 5 as an example. In this state, the first gears 100 and 110 are completely fixed to the first shaft body 13 and the first link arms 10 and 11. On the other hand, the second gears 200 and 210 are completely fixed to the second shaft body 23, but the second shaft body 23 is temporarily fixed to the second link arms 20 and 21.

  In the next operation, for example, one second link arm 20 is started in a state where the first link arms 10 and 11 and the second link arms 20 and 21 are positioned, and the second shaft body centering on the second support shaft f2 is used. The second shaft body 23 is fixed to the second link arm 20 after adjusting the mounting angle of 23. As a result, the second gear 200 is fixed so as to be rotated in a state of meshing with the first gear 100 only in a predetermined direction.

  Further, with respect to the other second link arm 21, the second shaft body 23 is fixed to the second link arm 21 after adjusting the attachment angle of the second shaft body 23 around the second support shaft f <b> 2. Thereby, the second gear 210 is fixed so as to be rotated with respect to the first gear 110 in a state of meshing only in the direction opposite to the predetermined direction.

  In other words, the first gear 100 and the second gear 200 that form one gear pair are assembled so that the tooth surfaces on the predetermined side are in contact with each other, and the second gear 200 is the second gear only when the first gear 100 rotates in the counterclockwise direction. The gear 200 is rotated in the clockwise direction without backlash. The first gear 110 and the second gear 210 constituting the other gear pair are assembled so that the tooth surfaces on the opposite side to the predetermined side are in contact with each other, and the first gear 110 rotates in the clockwise direction. Only the second gear 210 is rotated in the counterclockwise direction without backlash.

  In such a second parallel link mechanism A2, when the pair of first link arms 10 and 11 swings in the clockwise direction about the 0th support shaft f0, the first gears 100 and 110 are moved to the first support shaft f1. In this case, the second gear 210 is rotated in the counterclockwise direction while only the first gear 110 is securely meshed with the second gear 210. On the contrary, when the pair of first link arms 10 and 11 swings counterclockwise about the 0th support shaft f0, the first gears 100 and 110 move the first support shaft f1. The second gear 200 is rotated in the clockwise direction in a state where only the first gear 100 is engaged with the second gear 200 reliably. That is, when the first link arms 10 and 11 swing in the clockwise direction, the second link arm 21 swings in the counterclockwise direction as the driving node without being shifted to these, and the second link arm 21 follows the second link arm 21 without following the second link arm 21 and the second link arm 21. The link arm 20 swings in the same direction while maintaining parallel with the paired second link arm 21, and as a result, the moving member 22 and the hand member 4 advance straightly in a predetermined direction. Conversely, when the first link arms 10 and 11 swing in the counterclockwise direction, the second link arm 20 swings in the clockwise direction as a driving node without shifting to the first link arms 10 and 11, and follows this. The two link arms 21 swing in the same direction while keeping parallel with the paired second link arms 20, and as a result, the moving member 22 and the hand member 4 recede straight along a predetermined direction.

  In addition to the forward and backward movements of the hand member 4, the entire link device A swivels and moves up and down, so that the transfer robot moves the glass substrate G as a transfer object at a predetermined forward stop position to the hand member 4. You can pick it up from the bottom. In addition, the transfer robot moves the hand member 4 back to a predetermined retreat stop position that is substantially directly above the fixed base 1 with the glass substrate G placed on the hand member 4, and then moves the entire link device A to a predetermined position. By rotating the hand member 4 after turning in the direction, the glass substrate G can be transported to another advance stop position different from the predetermined advance stop position.

  Next, the forward and backward movements of the link device A will be described mainly with reference to FIGS.

  As shown in FIG. 6, when the moving member 22 (and the hand member 4) is moved forward, the first link arms 10 and 11 swing clockwise about the 0th support shaft f0, Accordingly, the intermediate member 12 (and the gear box 3) translates in the same direction. At this time, when observed from the intermediate member 12, the first gears 100 and 110 are rotating in the clockwise direction around the first support shaft f1.

  Thus, the two first gears 100 and 110 both rotate in the same direction, but only the first gear 110 is in mesh with the second gear 210 in the clockwise rotation direction. As a result, a rotational driving force is transmitted to the second link arm 21, and the second link arm 21 swings counterclockwise around the second support shaft f2 as a driving node.

  When the second link arm 21 swings in the counterclockwise direction, the second link arm 20 also swings in the same direction. That is, the first link arms 10 and 11 and the second link arms 20 and 21 swing so as to widen the angle formed between them without interfering in a three-dimensional intersection with the intermediate member 12 interposed therebetween. As a result, the moving member 22 Advances straight along a predetermined direction. At this time, when observed from the intermediate member 12, the second gear 200 rotates in the counterclockwise direction around the second support shaft f2, but in the counterclockwise direction, the second gear 200 rotates in the first direction. Since the gear 100 rotates idly, the rotational driving force is not transmitted between the first gear 100 and the second gear 200.

  Thereafter, when the movement of the first link arms 10 and 11 swinging in the clockwise direction is stopped and the swinging operation of the second link arms 20 and 21 is stopped accordingly, the moving member 22 is moved forward by a predetermined amount. The stop position is reached. At this time, as the swinging motion of the first link arms 10 and 11 is suddenly stopped, a larger inertial force acts on the second link arms 20 and 21 and the moving member 22, and the moving member 22 is stopped in a predetermined forward direction. Try to move further forward than the position. However, since the first gear 100 and the second gear 200 that do not transmit the rotational driving force at the time of forward movement are in a state in which such a state is prevented, the swing operation of the second link arm 20 is restricted. Thus, the moving member 22 is accurately stopped at a predetermined forward stop position.

  When the moving member 22 is retracted from the predetermined forward stop position, as shown in FIG. 7, the first link arms 10 and 11 are counterclockwise in the direction opposite to the forward direction around the 0th support shaft f0. The intermediate member 12 swings in the direction of rotation, and accordingly, the intermediate member 12 translates in the same direction. At this time, when observed from the intermediate member 12, the first gears 100 and 110 are rotating in the counterclockwise direction around the first support shaft f1.

  At the time of such reverse, the two first gears 100 and 110 rotate in the same direction, but only the first gear 100 is engaged with the second gear 200 in the counterclockwise rotation direction. is there. As a result, the rotational driving force is transmitted to the second link arm 20, and the second link arm 20 swings in the clockwise direction around the second support shaft f2 as a driving node. In addition, when the moving member 22 starts to move backward from the predetermined forward stop position, the tooth surfaces of the first gear 100 and the second gear 200 are almost in contact with each other without backlash. As soon as the arms 10 and 11 start swinging, the second link arm 20 starts swinging.

  When the second link arm 20 swings in the clockwise direction, the second link arm 21 also swings in the same direction. That is, the first link arms 10 and 11 and the second link arms 20 and 21 swing so as to narrow the angle formed between them without interfering in a three-dimensional intersection with the intermediate member 12 interposed therebetween. As a result, the moving member 22 Recedes straight along a predetermined direction. At this time, when observed from the intermediate member 12, the second gear 210 rotates in the clockwise direction around the second support shaft f2, but in the clockwise direction, the second gear 210 rotates in the first gear 110. Therefore, the rotational driving force is not transmitted between the first gear 110 and the second gear 210.

  Thereafter, when the movement of the first link arms 10 and 11 swinging in the counterclockwise direction is stopped and the swinging operation of the second link arms 20 and 21 is stopped accordingly, the moving member 22 Retreat stop position is reached. Also at this time, as the swinging motion of the first link arms 10 and 11 is suddenly stopped, a larger inertial force acts on the second link arms 20 and 21 and the moving member 22, and the moving member 22 is moved backward by a predetermined amount. Trying to move further back than the stop position. However, since the first gear 110 and the second gear 210 that do not transmit the rotational driving force at the time of reverse movement are in a state of being engaged in a direction that prevents such a state, the swinging operation of the second link arm 21 is restricted, Thus, the moving member 22 is accurately stopped at a predetermined backward stop position.

  Further, at the time of starting to advance the moving member 22 from a predetermined reverse stop position, the tooth surfaces of the first gear 110 and the second gear 210 are almost in contact with each other without backlash. As soon as the arms 10 and 11 start swinging, the second link arm 21 starts swinging. Thus, the moving member 22 is accurately stopped without shifting to the predetermined predetermined forward stop position and reverse stop position, and is smoothly advanced and retracted.

  Therefore, according to the transport robot of the present embodiment, the moving member 22 can be accurately stopped at the predetermined stop position that is the target at the time of forward and backward movement, and the stop position accuracy at the time of forward and backward movement can be improved. it can.

  In addition, this invention is not limited to the said embodiment.

  In the embodiment described above, by adjusting the mounting angle of the second shaft body 23 with respect to the second link arms 20 and 21, one gear pair (the first gear 100 and the second gear 200) and the other gear pair (the first gear pair) The gear 200 and the second gear 210) are assembled so that their diametrically opposite tooth surfaces are in contact with each other. For example, a fastening means comprising a bolt and an elongated hole capable of adjusting the mounting angle of the first shaft body with respect to the first link arm. And two sets of gear pairs may contact the tooth surfaces opposite to each other using such fastening means.

  Further, by adjusting the mounting angle of the first gear with respect to the first shaft body or the mounting angle of the second gear with respect to the second shaft body, the two sets of gear pairs may contact the tooth surfaces opposite to each other. .

It is a whole perspective view which shows one Embodiment of the conveyance robot provided with the link apparatus which concerns on this invention. It is a top view of the transfer robot shown in FIG. It is principal part sectional drawing of the link apparatus which follows the III-III line of FIG. It is a principal part notch perspective view of the link apparatus corresponding to FIG. It is a partially cutaway top view of a link device. It is a top view for demonstrating the advance operation | movement of a link apparatus. It is a top view for demonstrating the backward movement operation of a link device.

Explanation of symbols

A link device A1 first parallel link mechanism A2 second parallel link mechanism 10,11 first link arm 12 intermediate member 13 first shaft body 100,110 first gear f1 first support shaft 20,21 second link arm 22 movement Member 23 Second shaft body 24 Bolt (fastening means)
25 Long hole (fastening means)
200, 210 Second gear f2 Second support shaft

Claims (6)

A first parallel link mechanism including at least one of a pair of first link arms that are swung as a driving node and an intermediate member that connects the pair of first link arms in parallel; A first parallel link mechanism comprising a pair of second link arms swingable with a member as a fixed node, and a moving member that connects the pair of second link arms in parallel; And a link device configured such that the moving member linearly moves forward and backward by interlocking the second parallel link mechanism,
A pair of two first support shafts, each of which is supported so as to be rotatable relative to the intermediate member, so as to rotate integrally with each of the first link arms. A first gear;
A pair of two support shafts, each of which is supported so as to be rotatable relative to the intermediate member, so as to rotate integrally with each of the second link arms. A second gear,
And
One of the pair of second gears meshes with one of the pair of first gears only when the first link arm is swung in a predetermined direction to advance the moving member. On the other hand, the other of the pair of second gears can be rotated only when the first link arm is swung in a direction opposite to the predetermined direction to retract the moving member. A link device configured to be rotated while meshing with the other of the first gears.   The first support shaft is provided with a first shaft body that rotatably supports the first link arm, and the second support shaft is configured to rotatably support the second link arm. The link device according to claim 1, wherein a biaxial body is provided, and the first gear and the second gear are fixed to the first shaft body and the second shaft body, respectively.   At least one of the first shaft body and the second shaft body is attached to the first link arm or the second link arm in a positioned state around the first support shaft or the second support shaft. 3. The link device according to claim 2, wherein the link device is attached via a corner adjustable fastening means.   The first gear and the second gear, which are meshed only when the moving member is moved forward, are assembled so that the tooth surfaces on the predetermined side are in contact with each other by adjusting the mounting angle, while the moving member is moved backward. The first gear and the second gear meshing only in the case are assembled so that the tooth surfaces on the side opposite to the predetermined side are in contact with each other by adjusting the mounting angle. Link device.   The link device according to any one of claims 1 to 4, wherein the first link arm and the second link arm are arranged in a three-dimensional intersection.   A transport robot comprising the link device according to claim 1.

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