JP2008036762A - Substrate conveying robot - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a substrate conveying robot capable of reducing a foot print while ensuring aptitude as a clean robot. <P>SOLUTION: The substrate conveying robot is equipped with an interlocking type arm unit 300 where a tip end part 37 of the tip end arm 3 can linearly move (Y-axis movement) on the horizontal plane, an independent rotary type arm 51 which receives a driving force with a second electric motor 36 as a driving source and can rotate on the horizontal plane with a rotation center 51a as a rotating center, and an independent rotary type hands 68, 72 which can rotate on the horizontal plane with base parts 69, 73 as the rotation center with a third electric motor, and a forth electric motors 56, 57 as the driving source. The position on the horizontal straight line (Y-axis) of the tip end part 37 of the tip end arm 3, a horizontal rotational position, and the horizontal rotational position of the independent rotary type hands 68, 72 are respectively controlled, and the independent rotary type hands 68, 72 are advanced and retreated to the horizontal direction (X-axis direction) orthogonal to the linear movement direction (Y-axis movement direction) of the tip end part 37 of the tip end arm 3. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention is not a substrate transfer robot of a type in which the main body of the substrate transfer robot is linearly moved by a linear movement mechanism provided separately from the substrate transfer robot. In particular, the main body of the substrate transfer robot is held at a fixed position. The present invention relates to a substrate transfer robot of a type in which a hand of a substrate transfer robot moves linearly.

  2. Description of the Related Art Conventionally, there is known a type of substrate transfer robot in which a main body moves linearly by a linear movement mechanism (see, for example, Patent Document 1). However, since this type of substrate transfer robot moves on the rail of the linear movement mechanism, it is difficult to avoid generation of dust due to friction between the main body and the rail, and is used in a clean room. There is a tendency to lack suitability as a clean robot.

On the other hand, an articulated robot comprising a plurality of arms and one or two hands, each of which can be rotated by an individual electric motor, has no risk of dust generation. Although there is suitability, there are problems that the total number of electric motors is high and the cost is high, and the foot pool is enlarged.
JP 2000-353730 A

  SUMMARY OF THE INVENTION An object of the present invention is to provide a substrate transfer robot capable of solving the above-described problems of the prior art and reducing the foot pool while ensuring the suitability as a clean robot.

  The substrate transfer robot of the present invention has a base arm that receives a driving force using a first electric motor as a drive source and can rotate around the base portion of the base arm and a distal end portion of the base arm. An intermediate arm that can rotate around the base of the intermediate arm in conjunction with the rotation of the arm and a distal end of the intermediate arm, and the base of the distal arm rotates in conjunction with the rotation of the intermediate arm A tip arm that can rotate about the center, and an interlocking arm unit in which the tip of the tip arm can move linearly on a horizontal plane; and a first arm that extends from the tip of the tip arm and is built into the tip arm. (2) A single rotary arm that can receive a driving force using an electric motor as a drive source and rotate on a horizontal plane with the base of the single rotary arm as a center of rotation, and a distal end of the single rotary arm. For rotary arm A single rotary hand that receives a driving force using the third electric motor stored therein as a drive source and can rotate on a horizontal plane around the base of the single rotary hand as a rotation center, and the horizontal of the tip of the tip arm A position on a straight line, a horizontal rotation position of the single rotary arm, and a horizontal rotary position of the single rotary hand are respectively controlled, and the single rotary hand is controlled with respect to the linear movement direction of the tip of the tip arm. It is characterized by moving forward and backward in a horizontal direction at a predetermined angle.

  According to the substrate transfer robot of the present invention, since the tip portion of the tip arm is linearly moved by the interlocking arm unit, it is not necessary to provide a linear movement mechanism separately from the substrate transfer robot, so there is no risk of dust generation. Applicable as a clean robot. The interlocking arm unit is configured to use the first electric motor as a drive source, the intermediate arm rotates in conjunction with the rotation of the base arm, and the tip arm rotates in conjunction with the rotation of the intermediate arm. The total number of electric motors can be reduced, and costs can be reduced. The substrate transfer robot according to the present invention controls the position of the tip of the tip arm on the horizontal straight line, the horizontal rotation position of the single rotary arm, and the horizontal rotary position of the single rotary hand, respectively. Since it is configured to move forward and backward in a horizontal direction at a predetermined angle, for example, 90 degrees with respect to the linear movement direction of the distal end portion of the distal arm, the foot pool can be reduced by retracting the single rotary hand to the retracted position. It becomes possible to plan.

  Here, the base arm includes a first fixed pulley at a base portion of the base arm, and is a first movable pulley fixed to the base portion side of the intermediate arm, and has a diameter of 1 / with respect to the first fixed pulley. Two first movable pulleys at the distal end of the base arm, and a first belt suspended between the first fixed pulley and the first movable pulley. A fixed pulley is provided at the base of the intermediate arm, and a second movable pulley fixed on the base side of the tip arm and having a diameter equal to that of the second fixed pulley is provided at the tip of the intermediate arm. And a second belt stretched between the second fixed pulley and the second movable pulley, and a longitudinal dimension ratio of the base arm, the intermediate arm, and the tip arm is one pair. Two to one.

  By configuring the interlocking arm unit as described above, the distal end portion of the distal arm can be linearly moved.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

  1 is a perspective view of a substrate transfer robot according to an embodiment of the present invention, FIG. 2 is a conceptual diagram of the internal structure of the substrate transfer robot, and FIG. 3 is a schematic plan view showing an example of use of the substrate transfer robot. 4 to 9 are plan views showing a series of operations of the substrate transfer robot.

  1 and 2, the substrate transfer robot includes a main body 100 fixed to the installation surface, and a drive mechanism (not shown) that protrudes upward from the upper surface of the main body 100 and is built in the main body 100. An arm support portion 200 that can be moved up and down in the Z-axis direction (vertical direction) and is rotatable around the θ axis (around the vertical axis) is provided.

  The base arm 1 is disposed on the upper surface of the arm support portion 200 so as to be rotatable around the θ axis (around the vertical axis). The base arm 1 constitutes an interlocking arm unit 300 together with an intermediate arm 2 and a distal arm 3 described later.

  The base arm 1 is formed in a substantially hollow shape surrounded by the floor 4, the ceiling 5, and the side wall 6.

  Inside the base portion 7 of the base arm 1, the gear portion 9 of the first fixed pulley 8 is arranged along the horizontal direction. A shaft portion 10 extends vertically downward from the gear portion 9, and a lower end portion of the shaft portion 10 is fixed to the arm holding portion 200. A bearing 11 is disposed between the shaft portion 10 and the floor portion 4 of the base portion 7 of the base arm 1, and the base arm 1 is rotatable with respect to the shaft portion 10. The first fixed pulley 8 has a vertical through hole, and the base arm drive shaft 12 is inserted through the through hole. An upper end portion of the base arm drive shaft 12 is fixed to the ceiling portion 5 of the base arm 1, and a lower end portion of the base arm drive shaft 12 is connected to a main drive shaft 201 provided inside the arm support portion 200. The main drive shaft 201 is rotationally driven using the first electric motor 202 as a drive source, and the base arm 1 is rotated about the vertical axis via the base arm drive shaft 12 by the rotation of the main drive shaft 201.

  Inside the distal end portion 13 of the base arm 1 is a gear portion 16 of a first movable pulley 15 in which a first belt (timing belt) 14 is stretched between the gear portion 9 of the first fixed pulley 8 in the horizontal direction. Arranged along. A shaft portion 17 extends vertically upward from the gear portion 16. The shaft portion 17 is rotatably supported by a bearing 18 disposed on the ceiling portion 5 of the distal end portion 13 of the base arm 1. The upper end portion of the shaft portion 17 is fixed to the floor portion 20 of the base portion 19 of the intermediate arm 2. The shaft portion 17 constitutes an intermediate arm drive shaft.

  The intermediate arm 2 is formed in a substantially hollow shape surrounded by the floor 20, the ceiling 21, and the side wall 22.

  Inside the base 19 of the intermediate arm 2, a second fixed pulley 23 is disposed along the horizontal direction. An upper end portion of the vertical shaft 24 is fixed to the second fixed pulley 23, and a lower end portion of the vertical shaft 24 is fixed to the floor portion 4 of the distal end portion 13 of the base arm 1.

  Inside the distal end portion 25 of the intermediate arm 2, a gear portion 29 of a second movable pulley 28 on which a second belt (timing belt) 27 is stretched between the second fixed pulley 23 is disposed along the horizontal direction. The The gear portion 29 has a shaft portion 30 extending vertically upward. The shaft portion 30 is rotatably supported by a bearing 31 disposed on the ceiling portion 21 of the distal end portion 25 of the intermediate arm 2. The upper end portion of the shaft portion 30 is fixed to the floor portion 33 of the base portion 32 of the tip arm 3. The shaft portion 30 constitutes a tip arm drive shaft.

  The distal arm 3 is formed in a substantially hollow shape surrounded by the floor 33, the ceiling 34 and the side wall 35.

  A second electric motor 36 is installed inside the distal arm 3. Further, inside the distal end portion 37 of the distal end arm 3, a gear portion 40 of a third movable pulley 39 that is stretched around a third belt (timing belt) 38 disposed in a power transmission system of the second electric motor 36 is horizontal. Arranged along the direction. A shaft portion 41 extends vertically upward from the gear portion 40. The shaft portion 41 is rotatably supported by a bearing 42 disposed on the ceiling portion 34 of the tip portion 37 of the tip arm 3. The upper end portion of the shaft portion 41 is fixed to the floor portion 53 of the base portion 52 of the single rotary arm 51. The shaft portion 41 constitutes a single rotary arm drive shaft.

  The ratio between the diameter of the gear portion 9 of the first fixed pulley 8 and the diameter of the gear portion 16 of the first movable pulley 15 is set to 2: 1, and the diameter of the second fixed pulley 23 and the second movable pulley 28 are set. The ratio with the diameter of the gear portion 29 is set to 1: 1. Further, the plan view size from the rotation center 1a of the base arm 1 to the rotation center 2a of the intermediate arm 2, the plan view size from the rotation center 2a of the intermediate arm 2 to the rotation center 3a of the tip arm 3, and the tip arm 3 The ratio of the size in plan view from the rotation center 3a to the rotation center 51a of the single rotary arm 51 is set to 1: 2.

  In the interlocking arm unit 300 configured as described above, the first electric motor 202 is activated, and the base arm 1 is viewed in plan view with respect to the arm holding unit 200 via the main drive shaft 201 and the base arm drive shaft 12. When rotating in a predetermined direction, for example, clockwise, by α, the intermediate arm 2 includes the gear portion 9 of the first fixed pulley 8, the first belt 14, the gear portion 16 of the first movable pulley 15, and the shaft portion of the first movable pulley 15. The intermediate arm drive shaft 17 rotates with respect to the base arm 1 by a planar view angle 2α in a direction opposite to the predetermined direction, for example, counterclockwise. Further, as the intermediate arm 2 rotates, the distal arm 3 is rotated by the second fixed pulley 23, the second belt 27, the gear portion 29 of the second movable pulley 28, and the shaft portion of the second movable pulley 28 (tip arm drive shaft). Through 30, the intermediate arm 2 rotates in the clockwise direction by a plan view 2α.

  Thus, in the interlocking arm unit 300, when the base arm 1 rotates clockwise by the angle α with respect to the arm holding part 200, the intermediate arm 2 rotates counterclockwise by the angle 2α with respect to the base arm 1, The arm 3 rotates clockwise by an angle 2α with respect to the intermediate arm 2. And the dimensional ratio of the longitudinal direction of the base arm 1, the intermediate | middle arm 2, and the front-end | tip arm 3 is 1 to 2 to 1 as mentioned above. For this reason, when the base arm 1 rotates, the rotation center 51 a of the single rotary arm 51 extended to the tip portion 37 of the tip arm 3 is the rotation center 51 a of the single rotary arm 51 and the rotation center of the base arm 1. The rotation center 51a of the single-rotation arm 51 is moved linearly along the Y axis by the operation of the interlocking arm unit 300.

  The single rotary arm 51 is formed in a substantially hollow shape surrounded by the floor 53, the ceiling 54, and the side wall 55.

  A third electric motor 56 and a fourth electric motor 57 are installed inside the single rotary arm 51. Further, inside the distal end portion 58 of the single rotary arm 51, a gear portion 61 of a fourth movable pulley 60 that is stretched around a fourth belt (timing belt) 59 disposed in a power transmission system of the third electric motor 56. And the gear part 64 of the 5th movable pulley 63 hung over the 5th belt (timing belt) 62 distribute | arranged to the power transmission system of the 4th electric motor 57 is distribute | arranged along a horizontal direction, respectively. Shaft portions 65 and 66 extend vertically upward from the gear portions 61 and 64, respectively. One shaft portion 65 is rotatably supported by a bearing 67 disposed on the ceiling portion 54 of the distal end portion 58 of the single rotary arm 51, and the upper end portion of the shaft portion 65 is a lower single rotary hand. Fixed to the floor 70 of the 68 base 69. The shaft portion 65 constitutes a lower independent rotary hand drive shaft. The other shaft portion 66 is arranged coaxially with the shaft portion 65 and is rotatably supported by a bearing 71 disposed in the hollow portion of the shaft portion 65, and the upper end portion of the shaft portion 66 has an upper side. It is fixed to the floor 74 of the base 73 of the single rotary hand 72. The shaft portion 66 constitutes an upper independent rotary arm drive shaft.

  The substrate transport robot configured as described above is suitable for use in a clean room. For example, as shown in FIG. 3, the unprocessed substrate 500A is taken out from the cassette 400, and the processed substrate 500B is placed in the cassette 400. Used for storage work.

  In this substrate take-out and storage operation, the upper single rotary hand 72 holds the processed substrate 500B, and the upper single rotary hand 72 is kept in a state of being aligned with the longitudinal direction of the single rotary arm 51, while the single The rotary hand 68 is moved into the cassette 400 to hold the unprocessed substrate 500A in the cassette 400 (see FIG. 4). Next, the lower independent rotary hand 68 holding the untreated substrate 500A is retracted to the retracted position in the X-axis direction, that is, in the direction perpendicular to the Y-axis on the horizontal plane (see FIGS. 5 to 8). Next, in the retracted position, the lower single rotary hand 68 is made to coincide with the longitudinal direction of the single rotary arm 51 and the longitudinal direction of the upper single rotary hand 72 is made to coincide with the X axis (see FIG. 9). Next, the upper independent rotary hand 72 is advanced in the X-axis direction, and the processed substrate 500B is stored in the cassette 400 (the order of the series of steps of the substrate take-out operation shown in FIGS. 4 to 8 is reversed. Corresponding to the process).

  Here, the linear receding of the lower independent rotary hand 68 means that the rotational center 51a of the independent rotary arm 51 is set to the rotational center of the base arm 1 while the longitudinal direction of the lower independent rotary hand 68 always coincides with the X-axis direction. This is done by moving 1a along the Y axis. As described above, the Y axis movement of the rotation center 51a is uniquely determined by the rotation angle of the rotation center 51a on the Y axis depending on the rotation angle of the base arm 1 with respect to the arm holding portion 200, and the rotation angle of the base arm 1 is Since it is uniquely determined by the rotation angle of the first electric motor 202, it can be realized by controlling the rotation angle of the first electric motor 202. Further, in order to control the longitudinal direction of the lower independent rotary hand 68 to always coincide with the X-axis direction, the angle formed by the distal arm 3 of the independent rotary arm 51 is controlled by the rotational angle of the second electric motor 36 and This can be done by controlling the angle formed by the single rotary arm 51 of the side single rotary hand 68 with the rotation angle of the third electric motor 56.

  4-8, FIG. 6 shows the state in which the longitudinal direction of the single rotary arm 51 coincides with the Y axis, and the rotation center 51a of the single rotary arm 51 is the same as that shown in FIGS. Is moved in the Y-axis direction in the direction approaching the rotation center 1a of the base arm 1, and is moved in the Y-axis direction in the direction away from the rotation center 1a in the base arm 1 during the period shown in FIGS. The hand 68 moves backward to the retracted position shown in FIG.

  As described above, the substrate transfer robot of the present embodiment receives the driving force using the first electric motor 202 as a driving source, and can rotate the base arm 1 that can rotate around the base portion 7 (rotation center 1a) of the base arm 1 as the rotation center. An intermediate arm 2 that extends to the distal end portion 13 of the base arm 1 and can rotate around the base portion 19 (rotation center 2a) of the intermediate arm 2 in conjunction with the rotation of the base arm 1; The distal end arm 3 is extended to the distal end portion 25 and can be rotated around the base 32 (rotation center 3a) of the distal end arm 3 in conjunction with the rotation of the intermediate arm 2, and the distal end portion 37 of the distal end arm 3 is Driving force that uses an interlocking arm unit 300 that can move linearly (Y-axis movement) on the horizontal plane and a second electric motor 36 that is extended from the distal end portion 37 of the distal arm 3 and built in the distal arm 3 as a driving source. Base of single rotary arm 51 A single rotary arm 51 that can rotate on a horizontal plane with the portion 52 (rotation center 51 a) as a rotation center, and a third electric motor that extends from the tip 58 of the single rotary arm 51 and is built in the single rotary arm 51. A single unit capable of rotating on a horizontal plane around the bases 69 and 73 of the single rotary hands 68 and 72 receiving a driving force using motors (the third electric motor 56 and the fourth electric motor 57 in the present embodiment) as a driving source. Rotary hands 68 and 72, the position of the tip 37 of the tip arm 3 on the horizontal straight line (Y-axis), the horizontal rotation position of the single rotary arm 51, and the horizontal rotation of the single rotary hands 68 and 72. Each position is controlled, and the single rotary hands 68 and 72 are moved in the horizontal direction (X-axis direction) at a predetermined angle (90 degrees in the present embodiment) with respect to the linear movement (Y-axis) direction of the tip portion 37 of the tip arm 3. ) Advance to Retreat.

  According to the substrate transfer robot of the present embodiment, the distal end portion 37 of the tip arm 3 is linearly moved (Y-axis movement) by the interlocking arm unit 300, so that it is not necessary to provide a linear movement mechanism separately from the substrate transfer robot. Therefore, there is no risk of dust generation, and it is suitable as a clean robot. The interlocking arm unit 300 uses the first electric motor 202 as a drive source, the intermediate arm 2 rotates in conjunction with the rotation of the base arm 1, and the distal arm 3 rotates in conjunction with the rotation of the intermediate arm 2. Therefore, the total number of electric motors can be reduced, and the cost can be reduced. Further, the substrate transfer robot of the present embodiment has a position on the horizontal straight line (Y axis) of the tip 37 of the tip arm 3, a horizontal rotation position of the single rotary arm 51, and horizontal rotation of the single rotary hands 68 and 72. Each position is controlled, and the single rotary hands 68 and 72 are moved in the horizontal direction (X in the present embodiment at a predetermined angle (90 degrees) with respect to the linear movement direction (Y-axis movement direction) of the distal end portion 37 of the distal arm 3. Since it is configured to move forward and backward (in the axial direction), it is possible to reduce the foot pool by retracting the single rotary hands 68 and 72 to the retracted position. The predetermined angle is not limited to 90 degrees, and may be 30 degrees, 45 degrees, 60 degrees, or the like.

1 is a perspective view of a substrate transfer robot according to an embodiment of the present invention. It is a conceptual diagram of the internal structure of the substrate transfer robot. It is a schematic plan view which shows the usage example of the board | substrate conveyance robot. It is a top view which shows one process in a series of operation | movement of the board | substrate conveyance robot in the usage example of FIG. FIG. 4 is a plan view showing one process in a series of operations of the substrate transfer robot in the usage example of FIG. 3. FIG. 4 is a plan view showing one process in a series of operations of the substrate transfer robot in the usage example of FIG. 3. FIG. 4 is a plan view showing one process in a series of operations of the substrate transfer robot in the usage example of FIG. 3. FIG. 4 is a plan view showing one process in a series of operations of the substrate transfer robot in the usage example of FIG. 3. FIG. 4 is a plan view showing one process in a series of operations of the substrate transfer robot in the usage example of FIG. 3.

Explanation of symbols

1 Base Arm 1a Rotation Center 7 Base 2 Intermediate Arm 2a Rotation Center 19 Base 3 Tip Arm 3a Rotation Center 32 Base 36 Second Electric Motor 37 Tip 51 Single Rotating Arm 52 Base 56 Third Electric Motor 57 Fourth Electric Motor ( (Included in the third electric motor of the present invention)
58 tip 68 lower independent rotary hand 69 base 72 lower independent rotary hand 73 base 202 first electric motor 300 interlocking arm unit

Claims (2)

A base arm that receives a driving force using the first electric motor as a drive source and can rotate about the base portion of the base arm about the rotation center, and extends to the tip of the base arm, and in conjunction with the rotation of the base arm, An intermediate arm that can rotate around the base of the intermediate arm, and a distal arm that extends from the distal end of the intermediate arm and can rotate around the base of the distal arm in conjunction with the rotation of the intermediate arm; An interlocking arm unit in which the tip of the tip arm can move linearly on a horizontal plane,
Single rotation that is extended to the tip of the tip arm and that can receive a driving force using a second electric motor built in the tip arm as a drive source and can rotate on a horizontal plane around the base of the single rotary arm An arm,
Extends to the tip of the single rotary arm and receives a driving force using a third electric motor built in the single rotary arm as a drive source and rotates on the horizontal plane with the base of the single rotary hand as the center of rotation. With a single rotary hand that can
With
The position of the tip of the tip arm on a horizontal straight line, the position of horizontal rotation of the single rotary arm, and the position of horizontal rotation of the single rotary hand are respectively controlled, and the single rotary hand is set to the tip of the tip arm. A substrate transfer robot, wherein the robot moves forward and backward in a horizontal direction at a predetermined angle with respect to the linear movement direction of the part. The base arm is provided with a first fixed pulley at a base portion of the base arm, and is a first movable pulley fixed to the base portion side of the intermediate arm, and has a diameter ½ with respect to the first fixed pulley. A first movable pulley provided at the tip of the base arm, and a first belt suspended between the first fixed pulley and the first movable pulley;
The intermediate arm is provided with a second fixed pulley at a base portion of the intermediate arm, and is a second movable pulley fixed to the base portion side of the tip arm and having a diameter equal to that of the second fixed pulley. At the tip of the intermediate arm, and a second belt stretched between the second fixed pulley and the second movable pulley,
2. The substrate transfer robot according to claim 1, wherein a dimensional ratio of the base arm, the intermediate arm, and the tip arm in a longitudinal direction is 1: 2: 1.

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