JP2013163231A - Robot control device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve a problem in a conventional robot control device including two hands, wherein when linearly moving a first hand by a manual operation, action for linearly moving the first hand and action for rotating a second hand are performed separately so that the second hand does not interfere with a peripheral device.SOLUTION: A control device 12 controls a robot 11. The robot 11 includes: an arm 17 rotatably supported at a base 16; a first hand 28 supported at the other end of the arm 17 and holding a semiconductor wafer 23; and a second hand 30 supported at the other end of the arm 17 via a second hand shaft 29 arranged coaxially with the first hand shaft 27 and holding the semiconductor wafer 23. When the first hand 28 is moved by a manual operation, the control device 12 controls the second hand 30 to move to a base member 16 side from an arbitrarily retraction line L1 so that a manual operation of the second hand 30 is not required.

Description

  The present invention relates to a robot control apparatus, and more particularly to a robot control apparatus that controls an industrial robot.

  A robot control device that controls a horizontal articulated robot that loads and unloads objects to be transported such as a semiconductor wafer and a liquid crystal substrate from a storage body such as a cassette is disclosed (for example, see Patent Document 1). The robot is controlled so that the hand member moves linearly toward the storage body, holds the object to be transported by the hand member, and carries the object to be transported in and out of the storage body. Are provided with two hand members at the same one end.

  When the object to be conveyed is placed on one hand member (second hand member) and the object to be conveyed is to be carried out of the storage body by the other hand member (first hand member), a conventional robot controller Then, when the first hand member moves and moves straight into the storage body to carry out the transported object, the second hand member and the transported object held by the second hand member do not interfere with the storage body. Until the second hand member is rotated. Next, the first hand member is moved straight toward the storage body while the second hand member is stopped at a position where it does not interfere with the storage body. Then, the first hand member is linearly moved so as to move backward, and once stopped, the second hand member is rotated to the original position. In this way, the robot is controlled so that the object to be conveyed is held on one hand member, and another object to be conveyed is unloaded from the storage body by the other hand member.

JP 2009-136981 A

  In the conventional robot control device having two hand members, when the first hand member is moved straight by manual operation during teaching, the first hand member is moved straight and the second hand member is rotated. Are not controlled simultaneously. For this purpose, for example, when teaching the operation of carrying in and out the object to be transferred from the same storage body, the operation of moving the first hand member straight and the operation of rotating the second hand member are taught. There is a need. That is, the teaching work may become inefficient. In addition, during the rectilinear operation of the first hand member, the second hand member that avoids interference with the storage body interferes with other obstacles such as a processing device that is closer to the robot body than the storage body. In some cases, in order to avoid interference, it is necessary to manually operate each of them alternately, which makes the operation complicated.

  An object of the present invention is to provide a robot control device that facilitates manual operation of a robot and shortens teaching time.

  In other words, the invention according to claim 1 is a robot control device for controlling a robot for carrying an object in and out of a storage body, and one end of the robot is rotatable to a base member via an arm drive shaft. An arm mechanism supported by the first hand member that can be supported by the other end of the arm mechanism via a first hand shaft and can hold the object to be conveyed; and the other end of the arm mechanism, A second hand member supported via a second hand shaft disposed coaxially with the first hand shaft and capable of holding the object to be transported, wherein the robot control device comprises the first hand When the member is linearly moved so as to be moved forward or backward manually, the second hand member is controlled to move to the base member side with respect to an arbitrary retreat line.

  According to a second aspect of the present invention, when the robot control device starts linear movement so as to manually advance or retract the first hand member, the second hand member is closer to the storage body than an arbitrary retraction line. In this case, a straight line parallel to an arbitrary retreat line and passing through the position of the second hand member is controlled to be defined as a new retreat line.

  As effects of the present invention, the following effects can be obtained.

  In claim 1, in the case of manual operation of the robot, when the first hand member is moving straight, the second hand member is always moved to the base member side from the retracted line, so that the storage body and the obstacle can be reliably It can be avoided from the position where it interferes with the object. As a result, the teaching operation for the second hand member becomes unnecessary, and the teaching time can be shortened.

  According to a second aspect of the present invention, in addition to the effect of the first aspect of the invention, the second hand member is an arbitrary one when the linear movement is started so that the first hand member is manually advanced or retracted. Even when it is closer to the storage body than the retraction line, it can be reliably avoided from a position where it interferes with the storage body and the obstacle. Thereby, the efficiency of the operation | work which carries in / out a to-be-conveyed object from a storage body can be improved, and the operation | work adjustment operation of a robot can be made easy.

1 is a block diagram showing a schematic configuration of a robot control system to which a robot control apparatus according to an embodiment of the present invention is applied. The top view which shows operation | movement when a robot carries a semiconductor wafer out of a predetermined | prescribed cassette. FIG. 3 is a schematic plan view showing a robot holding a semiconductor wafer. FIG. 2 is a schematic plan view showing a relationship between a robot and a retreat line. The flowchart figure which shows operation | movement control of a 2nd hand member. The plane schematic diagram which shows operation | movement of the 2nd hand member when a 2nd hand member exists on a evacuation line. FIG. 9 is a schematic plan view showing the operation of the second hand member when the second hand member is closer to the cassette than the retreat line and the first hand member is moving toward the cassette. FIG. 9 is a schematic plan view showing the operation of the second hand member when the second hand member is closer to the cassette than the retreat line and the first hand member is not moving to the cassette side. FIG. 10 is a schematic plan view showing the operation of the second hand member when the second hand member is on the base member side with respect to the retreat line.

Next, embodiments of the invention will be described.
First, a robot control system 10 according to an embodiment of the present invention will be described with reference to FIG.

  As shown in FIG. 1, the robot control system 10 includes a horizontal articulated robot 11, a robot control device 12 that controls the operation of the robot 11, and a teaching box 13 that teaches the operation of the robot 11. . The robot control device 12 includes a servo amplifier 15 that drives a servo motor attached to the robot 11, and a control unit 14 that gives an instruction to the servo amplifier 15 to control the operation and posture of the robot 11.

  The robot 11 includes a base member 16 installed at a predetermined place, and an arm mechanism 17 that is rotatably supported by the base member 16. The arm mechanism 17 has a lower arm member 19 whose one end is rotatably supported by a base member 16 via a first shaft 18 as an arm drive shaft, and a second end which is a second end on the other end of the lower arm member 19. And an upper arm member 21 that is rotatably supported via a shaft 20.

  The robot 11 includes a first hand member 28 whose end is rotatably supported by the other end of the upper arm member 21 via a first hand shaft 27, and an end that is the other end of the upper arm member 21. The second hand member 30 is rotatably supported via the second hand shaft 29. The first hand shaft 27 and the second hand shaft 29 have the second hand shaft 29 coaxially installed on the upper side of the first hand shaft 27, and the respective shaft centers coincide in plan view. That is, the robot 11 includes two hand members that are supported by the upper arm member 21 and have the same rotation center. The lower arm member 19 is disposed above the base member 16, the upper arm member 21 is disposed above the lower arm member 19, the first hand member 28 is disposed above the upper arm member 21, and the first hand member 28 is disposed. The second hand member 30 is disposed on the upper side of the first hand member. The lower arm member 19, the upper arm member 21, the first hand member 28, and the second hand member 30 are each rotatable in the horizontal direction.

  The first hand member 28 and the second hand member 30 that can hold the object to be conveyed are formed in an elongated U shape having the same shape in plan view, and the bent portion side becomes a base point (the rotation center). The first hand shaft 27 and the second hand shaft 29 are arranged. Each of the first hand member 28 and the second hand member 30 is provided with holding means such as vacuum suction (not shown), and the object to be conveyed is placed on the upper surfaces of the first hand member 28 and the second hand member 30 by the holding means. Fixed. When the first hand member 28 is fixed and the second hand member 30 is rotated about the second hand shaft 29, they overlap and the first hand member 28 is below the second hand member 30 in plan view. It is configured to be hidden on the side. The lower arm member 19 and the upper arm member 21 are formed in an elongated flat plate shape, and the length of each of the lower arm member 19 and the upper arm member 21 is fixed when the lower arm member 19 is fixed and the upper arm member 21 is rotated about the second shaft 20. The length is set such that the first shaft 18 and the second shaft 20 overlap. The base member 16 is formed in a quadrangular prism shape whose longitudinal direction is the vertical direction, and is configured to accommodate a first shaft 18 formed in a cylindrical shape whose longitudinal direction is the vertical direction.

  The first shaft 18, the second shaft 20, the first hand shaft 27, and the second hand shaft 29 are drive shafts, and servo motors (not shown) are installed on the respective drive shafts. The first shaft 18 has a servo motor for rotating the lower arm member 19, the second shaft 20 has a servo motor for rotating the upper arm member 21, and the first hand shaft 27 has a first hand member 28. The second hand shaft 29 is provided with a servo motor for rotating the second hand member 30. The output shafts of the servo motors and the lower arm member 19, the upper arm member 21, the first hand member 28, and the second hand member 30 are connected to each other so that the lower arm member 19, the upper arm member 21, and the first arm member 21 are connected to each other. The hand member 28 and the second hand member 30 can be independently rotated. Encoders (not shown), which are operation amount detection means for detecting the rotation speed and the rotation amount of each rotation shaft of the servomotor, are installed on each rotation shaft of the servomotor (not shown). The rotation amount of the lower arm member 19, the upper arm member 21, the first hand member 28, and the second hand member 30 is detected by the operation amount detection means. Furthermore, a servo motor or a cylinder (not shown) for raising and lowering the first shaft 18 in the vertical direction is installed in the first member 18 inside the base member 16. The elevation distance of the first shaft 18 is detected by an encoder (not shown) which is a height detection means.

  Since the base member 16 is installed at a predetermined position, the first shaft 18 does not move, and the first hand member 28 and the second hand member 30 move within a predetermined range in the horizontal direction with the first shaft 18 as a base point. It will be. Further, when the first shaft 18 moves up and down, the lower arm member 19, the upper arm member 21, the first hand member 28 and the second hand member 30 which are connected to each other move up and down integrally. In this way, the robot 11 operates to convey the object to be conveyed within a predetermined range.

  The servo amplifier 15 supplies power to the servo motors installed on the first shaft 18, the second shaft 20, the first hand shaft 27 and the second hand shaft 29 based on a command signal from the control unit 14. Drive the servo motor. In addition, detection information such as the rotation angle from the encoder is fed back to the servo amplifier 15, and the servo amplifier 15 drives the servo motor so as to eliminate the difference between the command signal from the control unit 14 and the feedback signal from the encoder. Control. This control is performed by PI control, PID control, or the like, but is not limited thereto.

  The teaching box 13 is installed in the vicinity of the robot 11 and includes a switch for operating the robot 11. Using the teaching box 13, teaching points including the position and posture of the robot 11 are taught.

  The control unit 14 is connected to the servo amplifier 15 and the teaching box 13 to control the entire robot control system 10. The control unit 14 controls the operation and posture of the robot 11 by driving a servo motor set for each drive axis by sending a command signal to the servo amplifier 15 and a function for storing the contents input by the teaching box 13. And a function of acquiring and calculating information detected by an encoder such as a rotation angle of a rotation shaft of a servo motor installed on each drive shaft through a servo amplifier 15. The control unit 14 controls the operation of the robot 11 so that the robot 11 moves between teaching points taught by the teaching box 13.

  Next, the operation of the robot 11 controlled by the control unit 14 will be described.

  FIG. 2 is a plan view showing an operation when the robot shown in FIG. 1 carries out a semiconductor wafer which is an example of an object to be transferred from a predetermined cassette.

  The robot 11 is installed at an arbitrary distance from the cassette 24 which is a storage body in which the semiconductor wafer 23 is stored. The robot 11 carries in and out the semiconductor wafer 23 from the cassette 24 and transports the semiconductor wafer 23 to a processing apparatus or the like (not shown). From (a) to (c) of FIG. 2, the robot 11 having two hand members holds the semiconductor wafer 23 on the second hand member 30, and the predetermined cassette 24 is used by the first hand member 28. A series of operations to carry in the semiconductor wafer 23 is shown.

  As shown in FIG. 2A, the semiconductor wafer 23 is held on the first hand member 28 and the second hand member 30. The second hand member 30 is stopped in a state of being rotated counterclockwise in plan view about the second hand shaft 29 from the direction in which the first hand member 28 is directed (the direction of the cassette 24). As shown in FIG. 2A, the retreat line L1a is set, and the second hand member 30 is on the retreat line L1a. In the present embodiment, the center position P2 of the semiconductor wafer 23 when the semiconductor wafer 23 is held by the second hand member 30 is on the retreat line L1a.

As shown in FIG. 2B, when the first hand member 28 is manually linearly moved toward the cassette 24, the second hand member 30 is moved to the second hand member 30 or the second hand member 30. In order to avoid the held semiconductor wafer 23 from interfering with the cassette 24, the semiconductor wafer 23 is further rotated counterclockwise in plan view about the second hand shaft 29. At this time, the second hand member 30 rotates so that the second hand member 30 is on the retreat line L1a. In the present embodiment, the second hand member 30 is in a position rotated counterclockwise with respect to the first hand member 28 when the first hand member 28 is linearly moved. When the second hand member 30 is in a position rotated clockwise with respect to the first hand member 28 when the first hand member 28 is linearly moved, Rotate clockwise. In the present embodiment, the second hand member 30 rotates so that the center position P2 of the semiconductor wafer 23 when the semiconductor wafer 23 is held by the second hand member 30 is on the retreat line L1a.
Then, when reaching the position shown in FIG. 2C where the semiconductor wafer 23 has been carried into the cassette 24 from the first hand member 28, the first hand member 28 and the second hand member 30 are simultaneously stopped.

  Next, the operation of the second hand member 30 controlled by the control unit 14 when the semiconductor wafer 23 is carried into the cassette 24 by the first hand member 28 while holding the semiconductor wafer 23 on the second hand member 30. Control will be described with reference to the flowchart of FIG.

FIG. 3 shows the robot 11 in a state (the state shown in FIG. 2A) in which the semiconductor wafer 23 is about to be carried into the cassette 24 by the first hand member 28.
In the present embodiment, as shown in FIG. 3, the position P <b> 1 of the first hand member 28 and the position P <b> 2 of the second hand member 30 hold the semiconductor wafer 23 on the first hand member 28 and the second hand member 30. In this case, the center position of the semiconductor wafer 23 is set.

  Further, as shown in FIG. 3, the smaller angle among the angles formed by the first hand member 28 and the second hand member 30 is A.

  First, as shown in FIG. 5, the control unit 14 manually moves the first hand member 28 linearly based on information such as the rotation angle of the rotation shaft of each servo motor acquired via the servo amplifier 15. Information on the position P2 of the second hand member at the time is acquired (step S10). Next, the control unit 14 obtains information on the traveling direction v1 of the first hand member 28 based on the input content from the teaching box 13 regarding the traveling direction v1 of the first hand member 28 stored in the control unit 14. Obtain (step S20). Information on the position P2 is acquired as information defined by the Cartesian coordinate system, and information on the traveling direction v1 is acquired as vector information.

  Next, the control part 14 determines the evacuation line L1 from the advancing direction v1 of the 1st hand member 28 (step S30). The retreat line L1 is a line for limiting a range in which the second hand member 30 or the semiconductor wafer 23 held by the second hand member 30 moves to the cassette 24 side. The evacuation line L1 is determined based on information on the positions of the cassette 24 and other devices (such as a processing device) existing in the traveling direction v1 of the first hand member 28. For example, the retreat line L1 is determined in a direction orthogonal to the traveling direction v1 of the first hand member 28, but is not necessarily limited to the orthogonal direction, and the second hand member 30 and the second hand member. The semiconductor wafer 23 held by the semiconductor wafer 23 is determined so as to avoid interference with the cassette 24 and other devices. At least three save lines L1 are determined. As a result, a region surrounded by the retreat line L1 always occurs, and the second hand member 30 moves within this region.

  For example, as shown in FIG. 3, four evacuation lines L1a, L1b, L1c, and L1d are determined, and the second hand member 30 moves in an area surrounded by the four evacuation lines L1a, L1b, L1c, and L1d. .

  Next, the control unit 14 determines whether or not the second hand member 30 is on the retreat line L1 (step S40). In step S40, when the second hand member 30 is on the retreat line L1, the control unit 14 calculates the operation amount dA so that the second hand member 30 moves along the retreat line L1 (step S40). S50).

For example, as shown in FIG. 6A, when the position P2 of the second hand member 30 is on L1a which is one of the retreat lines L1, as shown by the solid line in FIG. The position P2 of the hand member 30 moves along the retreat line L1a.
The movement amount dA is defined by, for example, a rotation angle, and the second hand member 30 is moved dA counterclockwise with respect to the angle A between the first hand member 28 and the second hand member 30 in step S10. The second hand member 30 moves along the retreat line L1 by rotating only by this amount. In the present embodiment, the second hand member 30 is in a position rotated counterclockwise with respect to the first hand member 28 when the first hand member 28 is linearly moved. When the second hand member 30 is rotated clockwise with respect to the first hand member 28 when the first hand member 28 is linearly moved, By rotating clockwise in plan view, the second hand member 30 moves along the retract line L1. The movement amount dA is calculated based on the linear movement direction and the linear movement amount of the first hand member 28.

  When the second hand member 30 is not on the retreat line L1 in step S40, the control unit 14 determines whether or not the second hand member 30 is closer to the cassette 24 than the retreat line L1 (step S40). S60).

  If the control unit 14 determines in step S60 that the second hand member 30 is not located on the cassette 24 side with respect to the retreat line L1, whether or not the first hand member 28 is moving linearly toward the cassette 24 side is determined. (Step S70). If it is determined in step S70 that the first hand member 28 is moving linearly toward the cassette 24, the operation amount dA is set to 0 in order to maintain the posture of the second hand member 30 (step S80).

  For example, as shown in FIG. 7A, the position P2 of the second hand member 30 is not closer to the cassette 24 than L1a, which is one of the retreat lines L1, and is closer to the base member 16, and the first hand member When 28 is moving linearly toward the cassette 24 side, it moves while maintaining the angle A between the first hand member 28 and the second hand member 30, as shown in FIG. 7B.

  If the control unit 14 determines in step S70 that the first hand member 28 is not moving linearly toward the cassette 24, the control unit 14 determines that the first hand member 28 is moving linearly toward the base member 16 and newly retreats. The line L2 is determined (step S90). Then, the movement amount dA is calculated so that the second hand member 30 moves along the retreat line L2 (step S100). That is, a new retreat line L2 is defined so that the second hand member 30 does not interfere with other cassettes or devices other than the cassette 24 during the backward movement. The new evacuation line L2 is a straight line parallel to the evacuation line L1 and passing through the position P2 of the second hand member 30.

For example, as shown in FIG. 8A, the position P2 of the second hand member 30 is not closer to the cassette side than L1a, which is one of the retreat lines L1, and is closer to the base member 16, and the first hand member 28 is located. Is moving linearly toward the base member 16 side, a new evacuation line L2a is determined. The new evacuation line L2a is a straight line parallel to the evacuation line L1a and passing through the position P2 of the second hand member 30. Then, as shown by the solid line in FIG. 8B, the position P2 of the second hand member 30 moves along the retreat line L2a.
The operation amount dA is defined by, for example, a rotation angle, and is retracted by rotating it by dA in the clockwise direction with respect to the angle A between the first hand member 28 and the second hand member 30 in step S10. The second hand member 30 moves along L2. In the present embodiment, since the second hand member 30 is in a position rotated counterclockwise with respect to the first hand member 28 when the first hand member 28 is linearly moved, the plan view timepiece When the second hand member 30 is in a position rotated clockwise with respect to the first hand member 28 when the first hand member 28 is linearly moved, By rotating counterclockwise, the second hand member 30 moves along the retract line L2. The movement amount dA is calculated based on the linear movement direction and the linear movement amount of the first hand member 28.

  If the control unit 14 determines in step S60 that the first hand member 28 is closer to the cassette 24 than the retreat line L1, the control unit 14 determines a new retreat line L2 (step S110). Then, the operation amount dA is calculated so that the second hand member 30 moves along the new retreat line L2 (step S120). That is, a new retreat line L2 is defined so that the second hand member 30 does not interfere with the cassette 24 and other devices during forward movement. The new evacuation line L2 is a straight line parallel to the evacuation line L1 and passing through the position P2 of the second hand member 30.

For example, as shown in FIG. 9A, when the position P2 of the second hand member 30 is closer to the cassette 24 than L1a which is one of the retreat lines L1, a new retreat line L2a is determined. The new evacuation line L2a is a straight line parallel to the evacuation line L1a and passing through the position P2 of the second hand member 30. Then, as shown by the solid line in FIG. 9B, the position P2 of the second hand member 30 moves along the retreat line L2a.
The movement amount dA is defined by, for example, a rotation angle, and is retracted by rotating it by dA counterclockwise with respect to the angle A between the first hand member 28 and the second hand member 30 in step S10. The second hand member 30 moves along the line L2a. In the present embodiment, the second hand member 30 is in a position rotated counterclockwise with respect to the first hand member 28 when the first hand member 28 is linearly moved. When the second hand member 30 is rotated clockwise with respect to the first hand member 28 when the first hand member 28 is linearly moved, By rotating clockwise in plan view, the second hand member 30 moves along the retreat line L2a. The movement amount dA is calculated based on the linear movement direction and the linear movement amount of the first hand member 28.

As described above, the robot control device 12 is the robot control device 12 that controls the robot 11 that carries the semiconductor wafer 23 in and out of the cassette 24, and the robot 11 has one end via the arm drive shaft 18 as a base member. An arm mechanism 17 rotatably supported by 16, a first hand member 28 supported by the other end of the arm mechanism 17 via a first hand shaft 27 and capable of holding the semiconductor wafer 23, and an arm The other end of the mechanism 17 includes a second hand member 30 that is supported via a second hand shaft 29 disposed coaxially with the first hand shaft 27 and can hold the semiconductor wafer 23, and is controlled by a robot. In the case where the device 12 linearly moves the first hand member 28 so as to manually advance or retreat, the second hand member 30 is moved to an arbitrary retraction line. And it controls to move the base member 16 side than 1.
With this configuration, in the manual operation of the robot 11, when the first hand member 28 is moving straight, the second hand member 30 is always moved to the base member 16 side from the retreat line L1. Thus, it is possible to reliably avoid the position where the cassette 24 and the obstacle interfere with each other. As a result, the teaching of the work of carrying in and out the semiconductor wafer 23 from the cassette 24 can be made efficient.

Further, when the robot controller 11 starts the linear movement so that the first hand member 28 is manually advanced or retracted, the second hand member 30 is closer to the cassette 24 than the arbitrary retreat line L1. The straight line parallel to the optional retreat line L1 and passing through the position P2 of the second hand member 30 is controlled to be defined as a new retreat line.
With this configuration, when the second hand member 30 is closer to the cassette 24 than the optional retreat line L1 at the time of starting the linear movement so that the first hand member 28 is manually advanced or retracted. Even so, it can be avoided reliably from the position where it interferes with the cassette 24 and the obstacle. As a result, the teaching of the work of carrying in and out the semiconductor wafer 23 from the cassette 24 can be made efficient.

  In the embodiment of the present invention, the first hand member 28, the second hand member 30, and the arm mechanism 17 are rotated in the horizontal direction. However, it is not always necessary to configure in this manner, and in other plane directions. You may rotate. For example, the present invention may be applied to a vertical articulated robot.

  In the embodiment of the present invention, the semiconductor wafer 23 when the semiconductor wafer 23 is held by the first hand member 28 and the second hand member 30 at the positions P 1 and P 2 of the first hand member 28 and the second hand member 30. However, it is not always necessary to configure in this way, and other positions may be used. For example, the first hand member 28 and the second hand member 30 may be positioned at the center of a line connecting both U-shaped tips.

  Further, in the embodiment of the present invention, the smaller angle among the angles formed by the first hand member 28 and the second hand member 30 is A, but it is not always necessary to configure in this way, and other angles may be used. Good. For example, the smaller outer angle of the angles formed by the first hand member 28 and the second hand member 30 may be A.

  Further, in the embodiment of the present invention, it is composed of two arm members, but if the two hand members are supported by one end of one arm member via each of the drive shafts installed coaxially. , May be composed of three or more.

  In the embodiment of the present invention, the two arm members are configured to have the same length, but may be configured to have different lengths.

  Further, in the embodiment of the present invention, the arm mechanism 17 is supported by the base member 16, but may be supported by a member having another configuration, and the first shaft 18 does not move up and down. Also good.

  In the embodiment of the present invention, the first hand member 28 and the second hand member 30 are configured to hold the object to be conveyed by vacuum suction or the like, but if the object to be conveyed can be held, You may comprise the 1st hand member 28 and the 2nd hand member 30 so that a conveyed product may be hold | maintained by methods, such as pinching.

DESCRIPTION OF SYMBOLS 11 Robot 12 Robot control apparatus 16 Base member 17 Arm mechanism 18 1st axis | shaft (arm drive axis)
19 Lower arm member 20 Second shaft 21 Upper arm member 23 Semiconductor wafer (conveyed object)
24 cassette
27 First hand shaft 28 First hand member 29 Second hand shaft 30 Second hand member

Claims (2)

A robot control device that controls a robot that carries a transported object in and out of a storage body,
The robot has an arm mechanism whose one end is rotatably supported by a base member via an arm drive shaft;
A first hand member that is supported on the other end of the arm mechanism via a first hand shaft and can hold the object to be transported, and is coaxial with the first hand shaft at the other end of the arm mechanism. A second hand member that is supported via the arranged second hand shaft and can hold the object to be conveyed;
In the case where the robot controller linearly moves the first hand member so as to manually advance or retreat,
A robot control apparatus for controlling the second hand member to move to a base member side with respect to an arbitrary retreat line. When the second hand member is located closer to the storage body than the arbitrary retreat line at the time of starting the linear movement so that the first hand member is manually moved forward or backward, the robot control device may perform any retraction. 2. The robot control device according to claim 1, wherein a control is performed so that a straight line parallel to the line and passing through the position of the second hand member is defined as a new retraction line. 3.

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