KR100487879B1 - Processing Robot - Google Patents

Abstract

First and second robotic link mechanisms B ₁ rotatable together, having carriages 8a, 8b at their ends and telescopically arranged to move the carriage forward and backward in the radial direction, all of which are positioned within a small angle range (B _1). , B ₂ ).

Description

Processing robot

The present invention relates to a processing robot of a multi-chamber type manufacturing system, such as a semiconductor manufacturing system and an LCD manufacturing system, in particular a plurality of processing chambers are arranged around a single transfer chamber to constitute the same as a plurality of stations, each processing It relates to a processing robot in which a sheet-like material such as a wafer to be processed and processed in the chamber is conveyed from one of the processing chambers to another processing chamber by a processing robot arranged in the transfer chamber.

The multi-chamber semiconductor manufacturing system is constructed as shown in FIG. 1 attached and has a plurality of processing chamber stations 2a, 2b, 2c, 2d, 2e arranged around the transfer chamber 1, There is a pair of material conveying stations 3 inside, with each material conveying station 3 conveying the material out of the material conveying station 3, and the space in the conveying chamber 1 by means of the suction unit It will remain in the desired state.

The transfer chamber 1 is configured as shown in FIG. 2 and has a processing robot A provided at the center to be rotated. A plurality of dividing walls, which serve to form the outer wall of the transfer chamber 1, are opposed to each processing chamber station 2a, 2b, 2c, 2d, 2e and the material conveying station, and are supplied and shipped from each material conveying station. A plurality of gates 6 are provided which form the entrances and exits for the material. Each such gate 6 is formed to be opened and closed by an open / close door (not shown) disposed opposite each of the gates 6 in the transfer chamber 1.

As a conventional processing robot of this kind used in semiconductor manufacturing equipment, so far a so-called frog leg processing robot A having a pair of arms as shown in FIGS. 12 and 13, a processing robot A '(Japanese Unexamined Patent Publication No. Hei 7-227777) of a type that is driven in the same direction is known.

The processing robot A of frog legs having a pair of arms in the prior art is constructed as shown in Figs. 3-6B.

In this configuration, the boss portion B is provided with a pair of arms 7a, 7b having the same length, which are arranged to be rotatable about the center of rotation. On the other hand, a pair of transfer tables 8a and 8b having respective bases are provided, each of which is connected to each end by a pair of links 9a and 9b of equal length, respectively. Both links 9a and 9b are each connected to respective transfer tables 8a and 8b through a frog leg transfer table shape adjusting mechanism, so that the two links 9a and 9b are transfer tables 8a and 8b. It may also be rotated in a pair of mutually opposite directions which become fully symmetric with respect to. And, one of the pair of links 9a, 9b connected to the transfer tables 8a, 8b is rotatably supported by one of the pair of arms 7a, 7b while the other of the links 9a, 9b Are rotatably supported on the other of the arms 7a and 7b, respectively.

4A and 4B show the frog leg transfer table shape adjustment mechanism, where the front end of each of the links 9a, 9b coupled to the transfer tables 8a, 8b is shown in FIG. 4A attached. Each form θ _R and θ _L of the links 9a, 9b with respect to the transfer table 8a, 8b are connected together in an interlocking manner with a pair of gears 9c, 9c meshed with each other so that they are always the same. Can be. This ensures that each transfer table 8a, 8b is always in the radial direction and can be operated in the radial direction when each of the arms 7a, 7b is rotated. The interlocking shape for the links 9a, 9b may use a cross belt device as shown in FIG. 4B attached instead of the gear device.

The attached figure 5 shows a mechanism by which the arms 7a, 7b can be rotated independently of each other. Each base of the arms 7a, 7b is formed in the form of a ring boss and these ring bosses 10a, 10b are coaxial with respect to the center of rotation and are configured to be rotatably supported relative to the transfer chamber 1. .

On the other hand, the ring-shaped bosses 10a and 10b have a pair of disc-shaped bosses 11a and 11b respectively disposed therein, where the ring-shaped bosses 10a and 10b and the corresponding disc-shaped bosses 11a and 11b are corresponding. Are arranged to be coaxial with each other. Each of the pair of ring-shaped bosses 10a and 10b and the pair of disk-shaped bosses 11a and 11b corresponding thereto are magnetically coupled to one corresponding magnetic coupling 12a and 12b, respectively.

The pair of disk-shaped bosses 11a and 11b have respective rotary shafts 13a and 13b arranged to be coaxial with each other. The rotary shafts 13a and 13b are respectively connected to the outputs of the pair of motor units 14a and 14b which are coaxial with the frame 1a of the transfer chamber 1 and supported at different positions in the axial direction thereof.

Each of the motor units 14a and 14b is connected to a motor 15, for example, an AC servo motor and a speed reduction gear having a large speed reduction ratio, for example a Harmonic Drive (trade name, hereafter referred to the same). It is integrated in one piece. These reduction gears 16, 16 have outputs connected to respective bases of the rotary shafts 13a, 13b, respectively. And since the space of the transfer chamber 1 in which the arms 7a and 7b are located maintains a vacuum state, between the ring-shaped bosses 10a and the disk-shaped bosses 11a of each of the arm rotating mechanisms and the respective ring-shaped bosses ( The sealing film 17 is provided between 10b) and the disk-shaped boss 11b.

6A and 6B show the operation of the processing robot A. FIG. As shown in Fig. 6A, when the two arms 7a and 7b are respectively positioned in a radially symmetrical position, the links 9a and 9b are respectively referred to as the transfer tables 8a and 8b with respect to the center of rotation. The transport tables 8a, 8b can be moved towards the center of rotation so as to be in the state with the farthest rotational position relative to.

In this state, by rotating the two arms 7a and 7b in the same direction, it is shown that the two transfer tables 8a and 8b maintain their radial position while being rotated about the center of rotation. Further, by rotating the two arms 7a, 7b in a direction in which the two arms 7a, 7b can be close to each other (or opposite directions), in the state of FIG. 6A, the two arms 7a, 7b One of the transfer tables 8a, which is located where the angle formed by the angle decreases, is pushed by the links 9a and 9b so that it can be operated to protrude radially outwards, as shown in Fig. 6B. It is shown that it is located in one of the processing chamber stations 2a, 2b, 2c, 2d, 2e, 3, which are arranged radially outwardly relative to 1). At this time, although the other transfer table is moved toward the center of rotation, the amount of movement appears to be small due to the angle made between the arms 7a and 7b and the links 9a and 9b.

On the other hand, the latter processing robot A, which operates in the same direction as the prior art, is configured as shown in FIGS. 12-13B of the accompanying drawings.

The processing robot A 'disposed in the transfer chamber has a cylindrical case 22 provided with a flange 24 at the top thereof, and the flange 24 is provided with a rotating table 23 which is rotatable and further movable in the vertical direction. The first drive shaft 25 is provided to protrude from the bottom surface of the turntable 23 and passes through the flange 24. The first drive shaft 25 is connected to the first drive source 26 provided in the case 22. Thus, the device is provided with the drive source 26 operated to rotate the drive shaft 25 so that the turntable 23 may be rotated. Here, the drawing of the drive source which drives a rotating table vertically is not illustrated.

The upper surface of the rotary table 23 has a pair of first links 28a, 28b pivotally attached to each intermediate portion. The pivot portion of the link 28a, which is one of the pair of first links 28a, 28b, is secured to one end of the second drive shaft 29 provided to extend within the case 22. The other end of the second drive shaft 29 is fixed to the second drive source 30 provided in the case 22. Thus, the device is configured such that one link 28a of the pair of first links 28a, 28b can be rotated through the second drive shaft by the second drive source 30.

Each end of the pair of first links 28a, 28b is connected to one of the pair of second links 32a, 32b formed to be rotatable through the pair of second bearing shafts 31a, 31b, respectively. Correspondingly connected. Then, the pair of second links 32a and 32b have a first fork transfer table 8a 'connected to the front end thereof.

In addition, the other end of each of the first links 28a and 28b corresponds to one of the pair of third links 35a and 35b formed to rotate through the pair of third bearing shafts 34a and 34b. Connected. In addition, the pair of third links 35a and 35b has a second fork-type transfer table 8b 'connected to the front end thereof.

The second bearing shaft 31a is rotatable with respect to the first link 28 and is formed to be integral with the second link 32a, while the second bearing shaft 31b It is integral with the 1st link 28, and is formed so that it may be rotatable about the 2nd link 32b. In addition, while the third bearing shaft 34a is rotatable with respect to the first link 28 and is integrally formed with the third link 35a, the third bearing shaft 34b is formed on the first link. It is integral with the link 28b and is rotatably formed with respect to the third link 35b.

The two transfer tables 8a ', 8b' differ in their positions in the vertical direction and the first transfer table 8a 'does not overlap each other when the second transfer table 8b' is moved in the forward direction. It is moved from the retraction direction state shown in 12. The two transfer tables 8a 'and 8b' are arranged so as to be placed in the vertical direction to the other one.

The bearing shafts 31a and 31b protrude from the lower portions of the first links 28a and 28b, respectively, and these protrusions are fixed to a pair of second gears 36a and 36b having the same number of teeth. It is. In addition, each of the third bearing shafts 34a, 34b protrudes toward each of the first links 28a, 28b, respectively, and these protrusions each have the same number of teeth as shown in FIG. It is fixed to a pair of 3rd gear 37a, 37b which has. Each of these gear pairs 36a, 36b; 37a, 37b constitutes a tuning mechanism 38a, 38b.

The two tuning mechanisms 38a and 38b rotate in the forward and reverse directions by the drive source 30 via one of the pair of first links 28a and 28b via the second driven shaft 29. To rotate. The rotation is then transferred to the other link 28b and the second link 32a, 32b of the first link 28a, 28b via the first and second tuning mechanisms 38a, 38b and also to the third link 35a, 35b) to move the pair of transfer tables 8a 'and 8b' back and forth in the same direction as shown in FIGS. 13A and 13B.

Here, the two conventional processing robots A and A 'are provided with a pair of transfer tables in each of them to serve as two arm robots because of the advantage that they can be used selectively or continuously for each of a plurality of stations. I could.

More specifically, because the order of processing has been determined, in a processing chamber station, each such station could load the processed or processed wafers if the processed wafers were continuously moved to a series of subsequent stations. Then, when the wafer processed in a given station is exchanged for an unprocessed wafer therein, the former processing robot A in the prior art executes one of the unprocessed transfer tables 8a first. To support the wafer W ₁ , and then rotate the processing robot A to direct the other empty transfer table 8b to the station 2e where the wafers are to be exchanged with each other (see FIG. 7).

Thereafter, the empty table 8b is advanced to the station 2e, to receive the processing wafer W ₂ (see FIG. 8) there and to transport the wafer W ₂ into the transfer chamber 1. Subsequently, the processing robot A rotates 180 ° (Fig. 9) to position the transfer table 8a supporting the unprocessed wafer W ₁ toward the station 2e, thereby moving the transfer table 8a to the station 2e. 10, the raw wafer W ₁ is transported to the station 2e. The transfer table 8a, which is then emptied, is retracted into the transfer chamber 1 (FIG. 11).

In this way, the electronic processing robot A in the prior art has a problem that each time the wafer is exchanged at a given station, it must be rotated 180 degrees and the cycle time for each wafer exchange operation is extended. Will have

On the other hand, when the latter processing robot A 'is applied, since the two transfer tables 8a' and 8b 'are configured to advance back and forth in the same direction during operation, not only a given material is conveyed to a given processing chamber, While the processing robot A 'is in a non-operating state, another material is transported out of the chamber.

In processing robot A ', the conveying work time for inserting and removing the material into and out of the processing chamber is reduced, and the forward and backward operation for each of the two transfer tables 8a' and 8b 'can be realized in the conventional electronic processing robot A'. It can be performed with a single drive source or fewer drive sources that were not present.

In particular, the processing robot A 'is placed on the other one in turn in the vertical direction in the same posture to move forward and backward each time the transfer operation is performed, so that the dust accumulated on the upper transfer table is placed on the lower table There is a risk of falling on the upper surface of the, there was a problem of contaminating the upper surface of the lower material.

Further, the problem of not being able to move vertically with two transfer tables in different positions in the vertical direction is that the width of the vertical holes of the gate is wide when the transfer table is selectively moved back and forth without moving in the vertical direction. Is enlarged by the vertical deviation of the transfer table, which adversely affects the tightness of the gate portion. For this reason, the processing robot A 'in the form of driving in the same direction in the prior art requires the provision of a vertical movement mechanism, thus further complicating the structure for such an apparatus. In addition, when the workpiece is transported to the workpiece support table in the processing chamber, at least one transfer table needs to be moved by the vertical distance by the vertical deviation amount. Thus, an additional treatment procedure is needed, which is an undesirable obstacle to the entry and exit transport time of the material to be reduced.

Accordingly, the present invention has been devised in view of the above problem, and the main purpose is that it does not require any rotation at all, and rotates at a small angle in the order of 45 ° with respect to a given processing chamber, so that the wafer is processed in the station and in the transfer chamber. Allows unprocessed wafers to be exchanged with each other. It is another object of the present invention to ensure that the dust removed from one transfer table does not fall on all of the transfer tables, and also does not require a vertical movement mechanism, and does not require the entire robot to move in the vertical direction, but without the movement of the gate in the vertical direction. Width only for a single transfer chamber, to ensure that only minimally simplified instruments are included, and that the airtight properties of the gate portion are carried out almost as in the prior art, while at the same time the period of time for material entry and exit transport It can be reduced.

The invention will be better understood from the following detailed description and the accompanying drawings which illustrate embodiments of the invention. In this regard, it should be noted that the embodiments of the accompanying drawings are not intended to limit the invention but to make the understanding and description easier.

1 is a schematic plan view of a semiconductor manufacturing apparatus, an example of a multiple chamber type apparatus.

2 is an exploded perspective view showing the relationship between the transfer chamber and the conventional processing robot.

3 is a perspective view showing a conventional processing robot.

4A and 4B are explanatory diagrams showing the transfer table position adjusting mechanism, respectively.

5 is a cross-sectional view showing a conventional arm rotating mechanism.

6A and 6B are diagrams illustrating the operation of a conventional processing robot.

7 is an operation explanatory diagram for a predetermined station of a conventional processing robot.

8 is an operation explanatory diagram for a predetermined station of a conventional processing robot.

9 is an operation explanatory diagram for a predetermined station of a conventional processing robot.

10 is an operation explanatory diagram for a predetermined station of a conventional processing robot.

11 is an operation explanatory diagram for a predetermined station of a conventional processing robot.

12 is a perspective view of another conventional processing robot.

13A and 13B are diagrams illustrating the operation of still another processing robot in the related art.

14 is a cross-sectional view showing the boss portion of the first embodiment of the processing robot according to the present invention.

15 is a front view showing the first embodiment of the present invention.

16 is a plan view showing a first embodiment of the present invention.

17 is a perspective view showing a first embodiment of the present invention.

18 is a perspective view showing a first embodiment of the present invention.

Fig. 19 is a sectional view showing the boss portion of the second embodiment of the present invention.

20 is a front view showing a second embodiment of the present invention.

21 is a plan view showing a second embodiment of the present invention.

22 is a perspective view showing a second embodiment of the present invention.

23 is a perspective view showing a second embodiment of the present invention.

24 is a cross-sectional view showing the boss portion of the third embodiment of the present invention.

25 is a front view showing a third embodiment of the present invention.

26 is a plan view showing a third embodiment of the present invention.

27 is a perspective view showing a third embodiment of the present invention.

28 is an operation explanatory diagram of each of the above embodiments for a given station.

29 is an operation explanatory diagram of each of the above embodiments for a given station.

30 is an operation explanatory diagram for a predetermined station in each embodiment of the present invention.

31 is an operation explanatory diagram for a predetermined station in each embodiment of the present invention.

Fig. 32 is a sectional view showing the boss portion of the fourth embodiment of the present invention.

33 is a front view showing the fourth embodiment of the present invention.

34 is a plan view showing a fourth embodiment of the present invention.

35 is a perspective view showing a fourth embodiment of the present invention.

36 is a sectional view showing the boss portion of the fifth embodiment of the present invention.

37 is a front view showing the fifth embodiment of the present invention.

38 is a plan view showing a fifth embodiment of the present invention.

39 is a perspective view showing a fifth embodiment of the present invention.

40 is a cross-sectional view showing the boss portion of the sixth embodiment of the present invention.

41 is a front view showing the sixth embodiment of the present invention.

42 is a plan view showing a sixth embodiment of the present invention.

43 is a perspective view showing the sixth embodiment of the present invention.

Fig. 44 is an operation explanatory diagram for the predetermined station of the fourth embodiment of the present invention.

45 is an operation explanatory diagram for a predetermined station of the fourth embodiment of the present invention.

46 is an operation explanatory diagram for a given station of the fourth embodiment of the present invention.

47 is an operational explanatory diagram for a predetermined station of the fourth embodiment of the present invention.

48 is an operation explanatory diagram for a predetermined station of the fourth embodiment of the present invention.

49 is a plan view showing an operating state of the seventh embodiment of the present invention.

50 is a plan view showing the standby state of the seventh embodiment of the present invention.

Fig. 51 is a sectional view showing the structure of the seventh embodiment of the present invention.

52 is a sectional view showing the structure of the eighth embodiment of the present invention;

53 is a perspective view showing a first bidirectional rotary link mechanism.

54 is an operational explanatory view showing the first bidirectional rotary link mechanism.

Fig. 55 is an explanatory diagram showing the relationship between the link length and the rotation angle of the first bidirectional rotary link mechanism.

56 is a graph showing that the rotation angles of the first and second drive shafts change with respect to the rotation angle of the motor link of the first bidirectional rotation link mechanism.

57 is a perspective view showing a second bidirectional rotary link mechanism.

58 is an explanatory view of the operation of the second bidirectional rotary link mechanism.

Fig. 59 is an explanatory diagram showing the relationship between the link length and the rotation angle of the second bidirectional rotary link mechanism.

60 is a graph showing that the rotation angles of the first and second drive shafts change with respect to the rotation angle of the motor link of the first bidirectional rotation link mechanism.

61 is a plan view showing an exemplary standby state of a modified eighth embodiment of the present invention.

Fig. 62 is an explanatory diagram showing a relationship between a link length and a rotation angle of the third bidirectional rotary link mechanism.

63 is a graph showing that the rotation angles of the first and second drive shafts change with respect to the rotation angle of the motor link of the third bidirectional rotation link mechanism.

64 is an explanatory diagram showing a relationship between a link length and a rotation angle of the fourth bidirectional rotary link mechanism.

65 is a graph showing that the rotation angles of the first and second drive shafts change with respect to the rotation angle of the motor link of the fourth bidirectional rotation link mechanism.

66 is a perspective view showing a fifth bidirectional rotary link mechanism.

67 is an explanatory diagram showing a standby state of the fifth bidirectional rotary link mechanism.

Fig. 68 is an explanatory diagram showing an operating state of the fifth bidirectional rotary link mechanism.

69 is a sectional view showing another example of the fifth bidirectional rotary link mechanism.

70 is an explanatory diagram showing another exemplary standby state of the fifth bidirectional rotary link mechanism.

Fig. 71 is an explanatory diagram showing an operating state of the fifth bidirectional rotary link mechanism.

72 is a sectional view showing a ninth embodiment of the present invention.

In order to achieve the above object, there is provided a processing robot according to an aspect of the present invention, the processing robot comprising a first and second robot mechanisms configured to be rotatable jointly, each robot link mechanism for mounting a workpiece A forwarding table is provided at its front end to move forward or backward in the radial direction of the forwarding table when it is extended or retracted, and the first and second robotic link mechanisms are arranged such that the two forwarding tables are located in a narrow angle range.

Here, it should be noted that when one of the robot link mechanisms moves forward, the other robot link mechanism moves backwards. By the above-described forwarding operation, the transfer table is advanced from the transfer chamber to the processing chamber station to transfer the material on the transfer table to the processing chamber or to receive the material from the processing chamber station. In addition, the reverse operation causes the transfer table to retract from the processing chamber to the transfer chamber side. In addition, the two robotic link mechanisms may be in reverse to allow rotation within the transfer chamber.

According to the above structure, the forward and backward operations of the first and second transfer tables may alternate in a narrow angle range. In this way, the wafer processed at the station and the unprocessed wafer in the transfer chamber can be exchanged by rotating the processing robot at all or by slightly rotating only the predetermined station. This can significantly reduce the cycle time it takes to swap wafers.

In the above structure, each of the first and second robotic mechanisms includes:

A plurality of bosses each of which can be rotated independently;

Drive sources respectively connected to the bosses;

Two pairs of arms each consisting of one or two arms provided to each of the bosses;

A pair of links coupled to the front ends of each pair of arms; And

A transfer table coupled to each front end of the link pair.

And in the above structure, the following is preferably provided:

First, second, and third bosses forming the plurality of bosses;

The first arm provided on the first boss;

The second and third arms provided on the second boss;

The fourth arm provided on the side of the third boss;

The first transfer table provided at a front end of the first and second arms through the pair of links; And

The second transfer table provided at the front end of the third and fourth arms via the pair of links.

In the above structure,

The first arm is provided on the side of the first boss in a radial direction;

The second and third arms are provided on the sides of the second boss in radial directions, respectively, so as to be radially located at the second boss; And

The fourth arm is provided on the side of the third boss in the radial direction.

According to the above structure, it can be seen that when the first and second arms rotate together in a direction of approaching the first transfer table connected to the first and second arms via a link, the first transfer table moves forward. On the other hand, the third and fourth arms will rotate in a direction away from the second transfer table connected to the third and fourth arms via a link, and the second transfer table will be in a reversed state.

In the above state, this time, if the third and fourth arms rotate together in a direction approaching the second transfer table connected to the third and fourth arms via a link, the second transfer table will move forward, whereas the first The transfer table will reverse operation in reverse.

In addition, in the above structure, it is preferable to include the following:

First and second bosses forming the plurality of bosses;

The first and second arms provided to the first boss;

The third and fourth arms provided on the second boss;

The first transfer table provided at a front end of the first and fourth arms through the pair of links; And

The second transfer table provided at the front end of the second and third arms via the pair of links.

In the above structure,

The first and second arms are respectively provided on the side surfaces of the first boss in the radial direction so as to be radially located at the first boss; And

The third and fourth arms are provided to the second boss in radial directions, respectively, so as to be radially located at the second boss, one of the third and fourth arms is provided to the side of the second boss and the other It is positioned on the top surface of the second boss via a vertical leg column.

And in the above structure,

The first and second arms are respectively provided on the side surfaces of the first boss in the radial direction so as to be radially located at the first boss; And

The third and fourth arms are provided on the sides of the second boss in the radial direction, respectively, so as to be located radially in the second boss.

According to the above structure, it can be seen that the first transfer table moves forward when the first and fourth arms rotate together in a direction approaching the first transfer table side connected to the first and fourth arms via a link. On the other hand, the second and third arms will rotate in a direction away from the second transfer table connected to the second and third arms via a link, and the second transfer table will be in a reversed state.

In the above state, this time, if the second and third arms rotate together in a direction approaching the second transfer table connected to the second and third arms via a link, the second transfer table will move forward, whereas the first The transfer table will reverse operation in reverse.

Further, in the above structure, the first and second robot link mechanisms may be arranged such that the two transfer tables overlap vertically with each other.

Further, the first and second robot link mechanisms are arranged so that the two transfer tables do not overlap vertically with each other and differ in position in the rotational direction thereof.

According to the above structure, since the transfer tables do not overlap each other, even if dust is dispersed in one transfer table, the wafers of the other transfer table are not contaminated. Here, when the wafer is placed in a station and removed, the two robotic link mechanisms must be rotated at an angle corresponding to the degree of dislocation, while the disengagement is in a state where the two transfer tables do not overlap each other and the degree is slight. will be.

In addition, the above structure consists of:

Rotating table;

A first drive source operatively connected to the rotary table;

First and second drive link mechanisms supported by the rotary table so as to be rotatable, respectively;

A second drive source operatively connected to one of the first and second drive link mechanisms;

First and second driven link mechanisms having end portions respectively connected to front ends of the first and second drive link mechanisms so as to rotate simultaneously with each of the drive link mechanisms; And

Said first and second transfer tables respectively connected to said first and second driven link mechanisms.

According to the above structure, each drive link mechanism of the first and second robot link mechanisms rotates along the drive shaft so that the two transfer tables alternately move forward or backward through the driven link mechanism. Then, by rotating the turntable to another drive source, the two robotic mechanisms will rotate jointly.

Any of the drive link mechanism and the driven link mechanism of the first and second robot link mechanisms may be configured by a parallel link mechanism or a belt mechanism.

Further, in the above structure, the first and second robot link mechanisms are preferably arranged such that the two transfer tables respectively connected thereto are at the same position in the vertical direction.

In the above structure, the forward and backward operations of the transfer table by the first and second robot link mechanisms are preferably performed at the same position in the vertical direction. Because of this, not only a vertical movement mechanism is required, but this structure also fits only one transfer table at the gate of the transfer chamber that passes when moving forward or backward, thus enhancing the sealing of the gate portion and Simplify the whole structure.

DESCRIPTION OF THE PREFERRED EMBODIMENTS A preferred embodiment of the present invention for a processing robot will now be described with reference to the accompanying drawings.

Embodiments of the invention, i.e., the first embodiment of FIGS. 14 to 18, the second embodiment of FIGS. 19 to 23, the third embodiment of FIGS. 24 to 27, the fourth embodiment of FIGS. 32 to 35, and 36 Detailed Description of the Fifth Embodiment of the 39th To 39th, the Sixth Embodiment of Figs. 40-43, The Seventh Embodiment of Figs. 49-51, The Eighth Embodiment of Figs. Will follow. In the detailed description, the same components as indicated by the same reference numerals are the same as the components used up to FIG. 13 according to the conventional structure.

First embodiment

The transfer chamber 1 has a central region, in which the first, second and third ring-shaped bosses 120a, 120b and 120c are located, which are individually stacked on top of each other continuously from the bottom. They are supported coaxially with each other through bearings (not shown) to allow rotation.

In addition, there are three disk-shaped bosses 121a, 121b, and 121c corresponding to the inside of the ring-shaped bosses 120a, 120b, and 120c, and these bosses each have a bearing (not shown) to enable rotation individually. It is supported by the frame 1a side of the transfer chamber 1 coaxially with each other via.

One set of ring-shaped bosses 120a, 120b, 120c and one set of disk-shaped bosses 121a, 121b, 121c respectively corresponding to each other in the rotational direction by three magnetic couplings 122a, 122b, 122c. Magnetically connected to each other. In this structure, a sealing partition wall 17 between the ring-shaped bosses 120a, 120b and 120c and the disk-shaped bosses 121a, 121b and 121c to keep the interior of the transfer chamber 1 in a vacuum state. This is provided.

The disk-shaped bosses 121a, 121b, 121c are connected to the rotation shafts 123a, 123b, 123c, respectively, which are arranged coaxially with each other at their central portions. Among these rotary shafts, the first and second rotary shafts 123a and 123b are hollow, the second rotary shaft 123b is fitted into the first rotary shaft 123a, and the third rotary shaft 123c is the second rotary shaft ( 123b) is tightly inserted.

The first and third rotation shafts 123a and 123c are connected to the output shaft 125a of the first motor unit 124a through a coupling mechanism such as a timing belt. In addition, the second rotation shaft 123b is connected to the output shaft 125b of the second motor unit 124b through a coupling mechanism such as a timing belt.

Since the motor units 124a and 124b may be a combination of a servo motor and a reduction gear, respectively, the rotation speed of each output shaft 125a and 125b can be reduced at an enormous rate and the forward and reverse rotations are reduced. Can be precisely controlled. In addition, a pair of coupling mechanisms are provided to connect the output shafts 125a and 125b and the rotation shafts 123a, 123b and 123c, respectively, and the coupling rotation ratios are the same.

The first arm 126a is attached to the first ring-shaped boss 120a, the second and third arms 126b and 126b are attached to the second ring-shaped boss 120b, and the fourth ring is attached to the third ring-shaped boss 120c. Arms 126d are provided, each of which arms protrude radially and each front end is provided with its respective rotation node.

The circumferential arrangement relationship of the arms 126a, 126b, 126c, 126d, and each length leading up to the nodes provided at the front end will be followed. More specifically, the second and third arms 126b and 126c protrude radially (180 °) from the second ring-shaped boss 120b.

The radius of the rotational nodes (the lengths from the boss center to the nodes, respectively) of the first and second arms 126a and 126b is represented by R ₁ , R ₁ ′ and the rotation of the third and fourth arms 126c and 126d. The radius of the node is represented by R ₂ , R ₂ '. In this embodiment, R ₁ > R ₂ , R ₁ ′> R ₂ ′, R ₁ = R ₁ ′ and R ₂ = R ₂ ′. Each of the rotation nodes of the first and second arms 126a and 126b in length is in a shape such that they are located at the same position in the axial direction of the rotation center of the ring boss. Each node of the short third and fourth arms 126c and 126d is shaped to be in the same position in the axial direction of the rotational center of the ring-shaped boss, which is inside the first and second arm positions, and It is a lower position.

End portions of the first and second links 127a and 127b of the same length are respectively connected to the rotation nodes of the first and second arms 126a and 126b which are long. At each other end of each of the two links 127a and 127b is connected to the first transfer table 8a via a transfertable attitude regulating mechanism. In this regard, as shown in FIG. 16, with the two arms 126a and 126b linear in the radial direction at the center of rotation of the boss, the two links 127a and 127b are connected to the first transfer table 8a. The length of the connection point is such that the connection point is moved from the connection line toward the moving forward direction of the transfer table. This constitutes the first robot link mechanism D ₁ .

In addition, end portions of the third and fourth links 127c and 127d of the same length are connected to each node of the shorter third and fourth arms 126c and 126d so as to be rotatable. The other end of each of the two links 127c and 127d is connected to the transfer table 8b via a transfer table positioning mechanism. In this regard, as shown in Fig. 16, with the two arms 126c and 126d linearly radially at the center of rotation of the boss, the two links 127c and 127d are connected to the transfer table 8b. The connection point of is of a length that is moved from the connection line toward the moving forward direction of the transfer table and is substantially in such a position under the aforementioned first transfer table 8a. This constitutes the second robot link mechanism D2.

In the first embodiment of the present invention, when the first motor unit 124a is driven to rotate, the first and third ring-shaped bosses 120a and 120c are formed by the first and third rotation shafts 123a and 123c and the first and third. It will rotate jointly through the disk shaped bosses 121a and 121c and the magnetic couplings 122a and 122c. In addition, when the second motor unit 124b rotates, the second ring-shaped boss 120b will also rotate.

As shown in Fig. 16, the first and second arms 126a and 126b are linear in the radial direction at the boss, and the third and fourth arms 126c and 126d are the first and second arms. 126a, 126b).

In this state, when the first and second arms 126a and 126b rotate jointly to approach the first transfer table 8a by rotating the ring-shaped bosses 120a, 120b and 120c, respectively, the first transfer table 8a. ) Moves forward as shown in FIG. 17. On the other hand, the third and fourth arms 126c and 126d jointly rotate away from the second transfer table 8b, whereby the second transfer table 8b is opposed to the operation advancement of the first transfer table 8a. It is operated to reverse slightly in the direction.

Conversely, if the third and fourth arms 126c and 126d rotate jointly to approach the transfer table 8b, the second transfer table 8b will move forward as shown in FIG. On the other hand, the first and second arms 126a and 126b jointly rotate away from the first transfer table 8a, whereby the first transfer table 8a is opposed to the operation advancement of the second transfer table 8b. It is operated to reverse slightly in the direction.

Further, in the standby state of FIG. 16, by rotating the ring-shaped bosses 120a, 120b and 120c in the same direction, the transfer tables 8a and 8b rotate in the transfer chamber 1.

Second embodiment

The transfer chamber 1 has a central area, and in this area there are first and second ring shaped bosses 130a and 130b, which can be rotated separately from each other in a state where they are stacked on each other continuously from the bottom. It is supported coaxially with each other through bearings (not shown).

In addition, there are two disk-shaped bosses 131a and 131b corresponding to the inside of the ring-shaped bosses 130a and 130b, which are coaxial with each other through bearings (not shown) so as to be individually rotatable. This is supported by the frame 1a side of the transfer chamber 1.

One set of ring-shaped bosses 130a and 130b and one set of disk-shaped bosses 131a and 131b respectively corresponding to each other are magnetically connected to each other in the rotational direction by two magnetic couplings 132a and 132b. In this structure, a sealing partition 17 is provided between the ring-shaped bosses 130a and 130b and the disk-shaped bosses 131a and 131b to keep the interior of the transfer chamber 1 in a vacuum state.

The disk-shaped bosses 131a and 131b are connected to the rotation shafts 133a and 133b, respectively, which are arranged coaxially with each other at their central portions. Among these rotary shafts, the first rotary shaft 133a is hollow and the second rotary shaft 133b is inserted into the first rotary shaft 133a to fit snugly.

The first rotation shaft 133a is connected to the output shaft 135a of the first motor unit 134a through a coupling mechanism such as a timing belt. In addition, the second rotation shaft 133b is connected to the output shaft 135b of the second motor unit 134b through a coupling mechanism such as a timing belt.

Since the motor units 134a and 134b may be a combination of a servo motor and a reduction gear, respectively, the rotation speed of each output shaft 135a and 135b can be reduced at an enormous rate and the forward and reverse rotation can be accurately controlled. In addition, a pair of coupling mechanisms are provided to connect the output shafts 135a and 135b and the rotation shafts 133a and 133b, respectively, and the coupling rotation ratios are the same.

The first ring-shaped boss 130a is provided with first and second arms 136a and 136b protruding in the radial direction. In addition, the second ring-shaped boss 130a is provided with a third arm 136c on one side thereof, and the ring-shaped boss 130a is a leg column having a fourth arm 136d on the upper surface of the axis center thereof. (leg column, 136e) is provided, the arms (136c, 136d) are provided to protrude in the radial direction.

The circumferential placement relationship of the arms 136a, 136b, 136c, 136d, and each length leading up to the nodes provided at the front end will follow.

More specifically, the lengths from the center of each boss to the respective rotation nodes of the _first and second arms 136a and 136b protruding from the first ring-shaped boss 130a are R ₁ , R ₂ and R ₁ > R _2. to be.

Further, the lengths R ₂ ′, R ₁ ′ from the centers of the boss portions of the third and fourth arms 136c and 136d protruding from the second ring-shaped boss 130b to the rotational nodes thereof. The relationship is R ₁ '> R ₂ '. It should also be noted that in this embodiment, R ₁ = R ₁ ′ and R ₂ = R ₂ ′. In addition, a long first arm 136a is provided with a rotation node at its front end face and a fourth arm 136d at its front end face, two of which are in the direction of the center of rotation of the ring-shaped boss. It is in the same location.

The shorter second and third arms 136b and 136c are provided with respective rotation nodes on the upper surface of each front end and these rotation nodes are at the same position in the axial direction.

End portions of the first and fourth links 137a and 137d of the same length are connected to the respective rotation nodes of the first and fourth arms 136a and 136d which are long. Each of the other ends of the two links 137a, 137d is connected to the first transfer table 8a via a transfer table positioning mechanism. In this regard, as shown in FIG. 21, with the two arms 136a and 136d linearly radially at the center of rotation of the boss section, the two links 137a and 137d are connected to the first transfer table 8a. And the connection point is of a length such that it moves from the connection line toward the operation forward direction of the transfer table 8a. This constitutes the first robot link mechanism D ₁ ′.

In addition, end portions of the second and third links 137b and 137c having the same length are connected to the second and third arms 136b and 136c having short lengths, respectively. The other end of each of the two links 137b and 137c is connected to the transfer table 8b via a transfer table positioning mechanism. In this regard, as shown in Fig. 21, with the two arms 136b and 136c linearly radially at the center of rotation of the boss section, the two links 137b and 137c are connected to the transfer table 8b. The connection point of is of a length moving from the connection line toward the moving forward direction of the transfer table and is substantially in the same position under the aforementioned first transfer table 8a. This constitutes the second robotic link mechanism D ₂ ′.

In the second embodiment of the present invention, when the first motor unit 134a is driven to rotate, the first ring-shaped boss 130a is connected to the first rotating shaft 133a, the first disk-shaped boss 131a, and the magnetic coupling. It will rotate jointly through the ring 132a. In addition, when the second motor unit 134b rotates, the second ring-shaped boss 130b will also rotate.

As shown in FIG. 21, the first and fourth arms 136a and 136d are linear in the radial direction at the boss portion, and the second and third arms 136b and 136c are rotated in the rotational direction. At the same position as 136d), the posture is linear in the radial direction at the boss.

In this state, when the first and fourth arms 136a and 136d jointly rotate to approach the first transfer table 8a by rotating each of the ring-shaped bosses 130a and 130c, the first transfer table 8a Operation is advanced as shown in FIG. On the other hand, the second and third arms 136b and 136c jointly rotate away from the second transfer table 8b, whereby the second transfer table 8b is opposed to the operation advancement of the first transfer table 8a. It is operated to reverse slightly in the direction. The reverse operation must be in such a range that the second transfer table 8b does not touch the leg column 136e.

Conversely, if the second and third arms 136b and 136c rotate jointly to approach the transfer table 8b, then the second transfer table 8b moves forward as shown in FIG. On the other hand, the first and fourth arms 136a and 136d jointly rotate away from the first transfer table 8a, whereby the first transfer table 8a is opposite to the operation advancement of the second transfer table 8b. It is operated to reverse slightly in the direction. The reverse operation must be in such a range that the transfer table 8b does not touch the leg column 136e.

Further, in the standby state, by rotating the ring-shaped bosses 130a and 130b in the same direction, the transfer tables 8a and 8b rotate in the transfer chamber 1.

Third embodiment

The transfer chamber 1 has a central region, which has first and second ring-shaped bosses 140a and 140b, which can be rotated separately from each other while being stacked on top of each other continuously from the bottom. It is supported coaxially with each other through bearings (not shown).

In addition, there are two disk-shaped bosses 141a and 141b corresponding to the inside of the ring-shaped bosses 140a and 140b, and these bosses are coaxial with each other through bearings (not shown) so as to be individually rotatable. This is supported by the frame 1a side of the transfer chamber 1.

One set of ring-shaped bosses 140a and 140b and one set of disk-shaped bosses 141a and 141b respectively corresponding to each other are magnetically connected to each other in the rotational direction by two magnetic couplings 142a and 142b. In this structure, a sealing partition 17 is provided between the ring-shaped bosses 140a and 140b and the disk-shaped bosses 141a and 141b to keep the interior of the transfer chamber 1 in a vacuum state.

The disk-shaped bosses 141a and 141b are connected to the rotation shafts 143a and 143b, respectively, which are arranged coaxially with each other at their central portions. Among these rotating shafts, the first rotating shaft 143a is hollow and the second rotating shaft 143b is inserted into the first rotating shaft 143a.

The first rotation shaft 143a is connected to the output shaft 145a of the first motor unit 144a through a coupling mechanism such as a timing belt. In addition, the second rotation shaft 143b is connected to the output shaft 145b of the second motor unit 144b through a coupling mechanism such as a timing belt.

Since the motor units 144a and 144b may be a combination of a servo motor and a reduction gear, respectively, the rotation speed of each output shaft 145a and 145b can be reduced at an enormous rate and the forward and reverse rotation can be accurately controlled. In addition, a pair of coupling mechanisms are provided to connect the output shafts 145a and 145b and the rotation shafts 143a and 143b, respectively, and the coupling rotation ratios are the same.

The first ring-shaped boss 140a is provided on its side with first and second arms 146a and 146b protruding in the radial direction. In addition, the second ring-shaped boss 140b is provided on its side with third and fourth arms 146c and 146d protruding in the radial direction.

A description of the columnar placement relationship of the arms 146a, 146b, 146c, 146d, and the lengths leading up to the nodes provided at the front ends will follow.

More specifically, as shown in FIG. 25, the lengths from the centers of the bosses to the respective rotation nodes of the _first and second arms 146a and 146b protruding from the first ring-shaped boss 140a are R ₁ and R. ₂ and R ₁ > R ₂ .

In addition, as shown in FIG. 25, the lengths R ₂ ′, R ₁ ′ from the center of each boss portion to the respective rotation nodes of the third and fourth arms 146c and 146d protruding from the second ring-shaped boss 140b. The relationship is R ₁ '> R ₂ '. It should also be noted that in this embodiment, R ₁ = R ₁ ′ and R ₂ = R ₂ ′. The long fourth arm 146d is provided to protrude radially from the first arm 146a and the boss portion, and the short third arm 146c has a diameter from the second arm 146b and the boss portion. It is installed to protrude in the direction.

In addition, the long first and fourth arms 146a and 146d are provided with rotation nodes on their respective front ends so that the rotation nodes are at the same position in the axial direction. Also, in the shorter second and third arms 146b and 146c, the second arm 146b is on the front end face of the second arm 146c and the third arm 146c is on the front end face thereof so that the rotation node is at the same position in the axial direction. Rotating nodes are provided. This constitutes the first robotic link mechanism D ₁ ″.

As mentioned above, the long first and fourth arms 146a and 146d are provided to protrude in the radial direction from the boss portion, and each rotation node of the arms 146a and 146d has the same length so as to be rotatable. End portions of the first and fourth links 147a and 147d are connected to each other. Each of the other ends of the links 147a and 147d is connected to the first transfer table 8a via a transfer table positioning mechanism. In this connection, with the two arms 146a, 146d linearly radially at the center of rotation of the boss section, the two links 147a, 147d are connected at their connection lines with the first transfer table 8a. It is a length from which it moves to the operation forward direction of the transfer table 8a.

In addition, end portions of the second and third links 147b and 147c having the same length are connected to the second and third arms 146b and 146c having short lengths, respectively. The other end of each of the two links 147b and 147c is connected to the transfer table 8b via a transfer table positioning mechanism. In this regard, with the two arms 146b and 146c linear in the radial direction at the center of rotation of the boss section, the two links 147b and 147c are transported from their connection line with their connection points to the transfer table 8b. It is of a length that is moved toward the working forward direction of the table and is in substantially the same position under the aforementioned first transfer table 8a. This constitutes a second robotic link mechanism D ₂ ″.

In the third embodiment of the present invention, as shown in Fig. 26, the first and second motor units 144a and 144b are simultaneously in opposite directions in the standby state where the arms are linear in the radial direction at the boss station at the same angle. When rotated, for example, the first and fourth arms 146a and 146d will jointly rotate to access the first transfer table 8a connected to these arms, and the first transfer table 8a is linked to the links 147a, 147b) will move forward. Then, the second and third arms 146a and 146c are actuated away from the second transfer table 8b and as a result the second transfer table 8b will retract toward the axis center of the boss portion.

By rotating the drive sources 144a and 144b in reverse, the second transfer table 8b moves forward while the first transfer table 8b moves backward.

In each of the above-described embodiments, the motor unit is driven so that its rotation angle is adjustable so that each transfer table 8a, 8b has a predetermined position, i.e., a material take-off position, from the inside of the transfer chamber 1. workpiece attracting position, and vice versa.

In addition, according to each of the embodiments described above, the method of continuously moving a wafer processed at a given station to another station includes a series of performing steps, as shown in FIGS. 28 to 31. Thus, by first rotating the processing robot A, the unprocessed wafer W ₁ is placed on the transfer table 8a and then opposed to the station 2e to be exchanged with another wafer (FIG. 28).

Then, an empty transfer table 8b is operatively advanced to the station 2e to receive the processed wafer W ₂ (FIG. 29) and to be transferred to the transfer chamber 1.

Thereafter, the transfer table 8a with the unprocessed wafer W ₁ is operatively advanced to the station 2e (FIG. 30) to transfer the wafer W ₁ to the station 2e and to empty it. The transfer table 8a is operated back into the transfer chamber 1 to prepare for the next processing step (FIG. 31).

In this manner, the processing robot of each embodiment of the present invention can cause the processed wafer and the unprocessed wafer to be exchanged at a predetermined station without having to be rotated.

Fourth embodiment

32 to 35, the transfer chamber 1 has a central area, and in this area there are three ring-shaped bosses 240a, 240b and 240c, which are stacked on top of each other continuously from the bottom. Are supported coaxially with each other through bearings (not shown) so that each can rotate individually.

In addition, there are three disk-shaped bosses 241a, 241b, and 241c corresponding to the inside of the ring-shaped bosses 240a, 240b, and 240c, and these bosses each have a bearing (not shown) to enable rotation individually. It is supported by the frame 1a side of the transfer chamber 1 coaxially with each other via.

One set of ring-shaped bosses 240a, 240b, 240c and one set of disk-shaped bosses 241a, 241b, 241c respectively corresponding to each other magnetically in the direction of rotation by three magnetic couplings 242a, 242b, 242c. Are connected to each other. Then, a sealing partition 17 is provided between the ring-shaped bosses 240a, 240b and 240c and the disk-shaped bosses 241a, 241b and 241c to maintain the interior of the transfer chamber 1 in a vacuum state.

The disk-shaped bosses 241a, 241b and 241c are connected to the rotation shafts 243a, 243b and 243c, respectively, which are arranged coaxially with each other at the central portion thereof. Among these rotary shafts, the first and second rotary shafts 243a and 243b are hollow, the second rotary shaft 243b is fitted into the first rotary shaft 243a, and the third rotary shaft 243c is the second rotary shaft ( 243b) is fitted in place.

The first and third rotation shafts 243a and 243c are connected to the output shaft 245a of the first motor unit 244a through a coupling mechanism such as a timing belt. In addition, the second rotation shaft 243b is connected to the output shaft 245b of the second motor unit 244b through a coupling mechanism such as a timing belt.

Since the motor units 244a and 244b may each be a combination of a servo motor and a reduction gear, the rotational speed of each output shaft 245a and 245b can be reduced at an enormous rate and the forward and reverse rotation can be accurately controlled. In addition, a pair of coupling mechanisms are provided to connect the output shafts 245a and 245b and the rotation shafts 243a, 243b and 243c, respectively, and the coupling rotation ratios are the same.

The first arm 246a is in the first ring-shaped boss 240a, the second and third arms 246b and 246b in the second ring-shaped boss 240b and the third ring so that the arms protrude radially, respectively. A fourth arm 246d is provided on the shaped boss 240c, each of which is provided with a front end of the arm.

The radius of each rotational node of the arms 246a, 246b, 246c, 246d (i.e., the length from the center of the boss to the rotational node, the rotational node is called the same below) is made the same length. Each rotational node of the first and second arms 246a and 246b is positioned at the same position in the axial direction of the rotational center of the ring-shaped boss, and each rotational node of the third and fourth arms 246c and 246d is ring-shaped. It is located at the same position in the axial direction of the center of rotation of the boss, which is lower than the first and second arms 246a and 246b.

Each rotational node of the arms 246a, 246b, 246c, 246d is connected to an end of each of the first, second, third, and fourth links 247a, 247b, 247c, 247d to enable rotation. These links are all the same length but longer than the length R of the arm. The first transfer table 8a is connected to the lower end face of the first and second links 247a and 247b via the transfer table position adjusting mechanism to constitute the first robot link mechanism B ₁ . Further, the second transfer table 8b is connected to the front end surfaces of the third and fourth links 247c and 247d via the transfer table position adjusting mechanism to constitute the second robot link mechanism B ₂ .

Next, the transfer table 8a of the first robotic link mechanism B ₁ retreats toward the ring boss, for example, in a state where the first and second arms 246a and 246b are linear in the radial direction at the boss portion. The so-called standby state. Further, the second transfer table of the robotic link mechanisms (B ₂₎ (8b), the third and fourth arms (246c, 246d) when this is linear in the radial direction, as is in the standby state. The transfer tables 8a and 8b of the _{first and} second robot link mechanisms B _{1 and} B ₂ in the standby states respectively have different positions in the rotational direction of the ring-shaped boss (FIG. 34). Configure the waiting posture of the processing robot. Each of the transfer tables 8a and 8b moves forward or backwards radially from the boss from the standby position of the processing robot by the rotation of the ring-shaped boss. It is also in this waiting position that the processing robot can be rotated. Then, when one of the transfer tables moves forward, the other transfer table moves backwards further in the waiting position.

The degree to which the position deviates from the rotation direction of each of the transfer tables 8a and 8b of the two robot link mechanisms B _{1 and} B ₂ does not prevent the at least two transfer tables 8a and 8b from interfering with the rotation direction. The two wafers at the time of placing them on the transfer tables 8a and 8b should be separated so as not to interfere with each other.

Since the respective transfer tables 8a and 8b of the two robot link mechanisms B _{1 and} B ₂ do not obstruct the rotational direction, as shown in FIG. 33, these transfer tables are in the rotational center axial direction of the ring-shaped boss. (Ie in the vertical direction) in the same position. In this connection, each front end portion of the first and second arms 246a and 246b is bent outward so that the front end portions of the third and fourth arms 246c and 246d do not interfere with each other.

In the fourth embodiment of the present invention, by rotating each of the ring-shaped bosses 240a, 240b, and 240c individually, as shown in Fig. 35, one of the first and second moving tables 8a, 8b is removed from the standby state. Working forward and the other working backward. Next, each front end portion of the third and fourth arms 246c and 246d passes through the interior of the first and second arms 246a and 246b so that no interference occurs between each other.

When the ring-shaped bosses 240a, 240b and 240c are rotated in the same direction in the standby state shown in Fig. 34, the processing robot is rotated in the transfer chamber 1.

44-48 show a series of operating steps of the fourth embodiment of the present invention. First, in the state where the unprocessed wafer W1 is placed on the transfer table 8a of the robot link mechanism B ₁ , the wafer W on which the empty transfer table 8b of the robot link mechanism B ₂ is processed. The entire processing robot in the standby state is rotated to face the processing chamber station 2e with ₂ ) (FIG. 44).

Next, the empty transfer table 8b of the robotic link mechanism B ₂ is operatively advanced to the processing chamber station 2e in which the processed wafer W ₂ is located and the wafer is transferred (FIG. 45). Thereafter, the entire processing robot is rotated until the transfer table 8a of the robot link mechanism B ₁ with the unprocessed wafer W ₁ faces the processing chamber station 2e to be processed. (Figure 46). The rotation angle in this state is a sufficient angle with respect to the degree of departure in the rotation direction of the transfer tables 8a and 8b, and is not, for example, 90 ° or more.

In this state, the transfer table 8a on which the unprocessed wafer W ₁ is placed advances to the processing chamber station 2e, and lowers the wafer W ₁ to the processing chamber station 2e ( 47). The empty transfer table 8a then moves back towards the transfer chamber 1 (FIG. 48).

Thereafter, the entire processing robot is rotated until the empty transfer table 8a faces the processing chamber station 2a where the next processing is to be made. By repeating steps similar to the above, the next processing operation for the processed wafer W ₂ on the transfer table 8b will be performed in the processing chamber station 2. However, in order to face the transfer table 8b to the processing chamber station 2e, the processing robot must be rotated as opposed to the previous one.

In this way, the processing robot according to the embodiment of the present invention is rotated at a small angle, for example 90 ° or less, thereby allowing the processed wafer and the unprocessed wafer to be exchanged at a predetermined station.

In addition, since the two transfer tables 8a and 8b do not overlap each other, even if dust falls on one transfer table side, it never contaminates the upper surface of the other transfer table. In addition, since the two transfer tables 8a and 8b are located at the same position in the rotational center axial direction (i.e., the vertical direction) of the ring-shaped boss, each transfer table is provided with a predetermined gate without moving the processing robot vertically. Can move forward or backward. In addition, the vertical size of the gate 6 for each processing chamber station into which the transfer tables 8a and 8b enter is such that only one transfer table can fit, so that the vertical size can be minimized. The points according to the present embodiment are the same in the embodiment to be described later.

Fifth Embodiment

36 to 39 show a fifth embodiment of the present invention. First and second arms 256a and 256b on the side of the first ring-shaped boss 250a and a third arm 256c on the side of the second ring-shaped boss 250b through the vertical leg column 256e. The fourth arm 256d is provided radially at the center of the upper surface of the second ring-shaped boss 250b.

Each rotation node radius R of the arms 256a, 256b, 256c, and 256d is the same size. The rotation nodes of the first and fourth arms 256a and 256d have the same position in the vertical direction, and the rotation nodes of the second and third arms 256b and 256d have the same position in the vertical direction. The position is lower than the 1,4 arms 256a and 256d.

Each of the rotational nodes of the arms 256a, 256b, 256c, and 256d includes first, second, third, and fourth links 257a, 257b, and 257c that have the same length but longer than the length R of the arm so that rotation is possible. Each end of 257d is connected. And, is the first transfer table (8a) and has the front end when connected via a transfer table position adjustment mechanism of claim 1, 4 link (257a, 257d), whereby the configuration of the first robotic link mechanisms (B ₁ '). In addition, the upper end surfaces of the second and third links 257b and 257c are connected to the transfer table 8b via the transfer table position adjusting mechanism, thereby forming the second robot link mechanism B ₂ ′.

In this case, the transfer table 8a of the first robotic link mechanism B ₁ ′ is in a state of reversing toward the ring-shaped boss, that is, in a so-called standby state, which is, for example, the first, fourth arm ( 256a, 256d) becomes linear in the radial direction. In addition, the transfer table 8b of the second robot link mechanism B ₂ ′ is also placed in a standby state in which the second and third arms 256b and 256c are linear in the radial direction. Then, the position of the transfer table 8a, 8b in such a standby state is changed in its rotational direction by the rotation of the ring-shaped boss, which constitutes the standby state of the processing robot (Fig. 38). In this state, each of the transfer tables 8a and 8b, like the fourth embodiment described above, moves forward and backward in the radial direction of the ring-shaped boss, and in this state, the processing robot is designed to rotate. In this regard, the degree to which the two transfer tables 8a and 8b are displaced in each rotation direction is the same as in the case of the fourth embodiment.

Therefore, since the two transfer tables 8a and 8b do not overlap each other in the rotational direction, these tables are at the same position in the vertical direction as shown in FIG. In addition, since the front end portion of the first arm 256a is bent outward, the front end portion of the third arm 256c is not disturbed. The processing steps of the fifth embodiment are substantially the same as those of the fourth embodiment described above.

Sixth embodiment

40 to 43 show a sixth embodiment of the present invention. The first and second arms 266a and 266b are provided as side surfaces of the ring-shaped first boss 260a, and the third and fourth arms 266c and 266d are provided as side surfaces of the ring-shaped second boss 260b. ) Are projected and radially provided, and each rotational node is provided on the front lower face of each of the first and second arms 266a and 266c and the upper top face of each of the second and fourth arms 266b and 266d. do.

The radius R of each of the rotational nodes of each of the above-mentioned arms 266a, 266b, 266c, and 266d is the same size, and on the lower surface, each rotational node of the first and third arms 266a, 266c is provided, and on the upper surface, the second, fourth Each rotating node of the arms 266b and 266d is provided. Each rotational node of the first and fourth arms 266a and 266d takes the same position in the vertical direction, while each rotational node of the second and third arms 266b and 266c is the same position in the vertical direction and the first 4, the position lower than the rotation node of the arms (266a, 266d).

Each rotating node of the above-mentioned arms 266a, 266b, 266c, and 266d has respective ends of the first, second, third, and fourth links 267a, 267b, 267c, and 267d so as to be rotatable. It has the same length but is longer than the length R of each of the arms. A first robot link mechanism B ₁ ″ is formed on the front lower surface of each of the first and fourth links 267a and 267d by connecting the first transfer table 8a through a transfer table position adjusting mechanism. On the front lower surface of each of the second and third links 267b and 267c, the second transfer table 8b is connected via the transfer table position adjusting mechanism to configure the second robot link mechanism B ₂ ″.

In this case, the transfer table 8a of the first robot link mechanism B ₁ ″ retracts toward the ring-shaped boss side when the first and fourth arms 266a and 266d are linearly symmetrical. And the transfer table 8b of the second robotic link mechanism B ₂ ″ is likewise configured to be in standby when the second and third arms 266b and 266c are linearly symmetrical. do. The two transfer tables 8a, 8b in such a standby state are displaced positionally in the rotational direction of the ring-shaped boss (Fig. 42), which constitutes the standby state of the processing robot. In this state, each of the transfer tables 8a and 8b is advanced back and forth in the radial direction of the ring-shaped boss by rotation as in the fourth embodiment, and in this state, the processing robot is designed to rotate. The amount of deviation of the transfer tables 8a, 8b in each rotation direction is substantially the same as in the fourth embodiment.

Since the transfer tables 8a and 8b do not overlap in the rotational direction, they are at the same position in the vertical direction as shown in FIG. In addition, the front end of the first arm 266a is bent outward so as not to interfere with the front end of the third arm 266c. The process steps of the sixth embodiment are substantially the same as those of the fourth embodiment.

Seventh embodiment

49 and 51 show a seventh embodiment of the present invention. In the seventh embodiment, as in the fourth to sixth embodiments, the two transfer tables 8a 'and 8b' are shifted positionally in the rotational direction of the robot and are at the same position in the rotational center axis direction.

49 and 50 schematically show the structure and operation of the seventh embodiment, and the specific structure thereof is shown in FIG. As shown, the FIG. 7 embodiment shows a turntable 270 rotatably supported by the frame 1a of the transfer chamber 1, and rotatable with respect to the center of rotation of the turntable 270. Drive shaft 271 is supported. The turntable 270 is arranged to be driven forward and backward by a first motor unit 272a fastened to the side of the frame 1a of the transfer chamber 1. In addition, the drive shaft 271 is arranged to be driven in the forward and reverse directions by the second motor unit 272b fastened to the side of the turntable 270.

The first and second robot link mechanisms C1 and C2 disposed on both side surfaces of the drive shaft 271 include a pair of drive link mechanisms 273 and 274 respectively formed by parallel link mechanisms. The first drive link mechanism 273 includes a drive link 273a arranged in parallel with each other, a driven link 273b, and a link link 273c for connecting each front end of these links 273a and 273b. do. The second drive link mechanism 274 also includes a drive link 274a arranged in parallel with each other, a driven link 274b, and a link link 274c for connecting each front end of the links 274a and 274b. It consists of.

Each drive link 273a, 274a of the drive link mechanisms 273, 274 has a base portion which is fastened and connected to the above-mentioned drive shaft 271. Further, each base end of the driven link 273b, 274b is arranged on the turntable 270 so that it can be positioned away from each other at an angle with respect to the center of rotation of the turntable 270. .

The connecting links 273c and 274c for the respective drive link mechanisms 273 and 274 have a pair of support shafts 275a and 275b and a pair of support shafts 276a and 276b at each end thereof, respectively. Each of the shafts is provided in turn in the connecting links 273c and 274c together with the pair of gears 277a and 277b meshed with each other and the pair of gears 277c and 277d meshed with each other. The gears 277a, 277b, 277c, and 277d have the same number of teeth. Among these support shafts, the shafts 275a and 276a located at the front end of each of the drive links 273a and 274a are integrally connected to the respective drive links, while the support shafts 275b and 276b are respectively connected to the dowels. And rotatable relative to the copper links 273b and 274b.

_First and _second driven link mechanisms 278 and 279, which are connected to the drive link mechanisms 273 and 274 at the front end sides of the _first and second robot link mechanisms C ₁ and C ₂ , respectively, and configured by parallel link configurations, are provided. . The first driven link mechanism 278 is composed of a pair of drive links 278a extending in parallel to each other, driven links 278b and connecting links 280a connected to these links 278a and 278b. . Further, the second driven link mechanism 279 is a pair of drive links 279a, driven links 279b extending in parallel with each other, and a connecting link 280b connected to these links 279a and 279b. It is composed.

Among the base ends of these links, each base end of the drive links 278a and 279a has the support shafts at each side of the driven links 273b and 274b relative to the first and second drive link mechanisms 273 and 274. 275b and 276b are integrally connected to each other, while the base ends of the driven links 278b and 279b are rotatably connected to the support shafts 275a and 276a, respectively.

The transfer tables 8a ', 8b' are integrally connected with the connecting links 280a, 280b at respective front ends of the driven link mechanisms 278, 279, respectively. In each link configuration of the driven link mechanisms 278, 279 and each configuration of the transfer tables 8a ', 8b', the two transfer tables 8a ', 8b' are vertically shown as shown in FIG. You can see that they are in the same location. Further, the base ends of the transfer tables 8a 'and 8b' are configured not to interfere with each other. Also in this case the transfer tables 8a ', 8b' are located on each extension of the connecting links 280a, 280b at each front end side of the two driven link mechanisms 278, 279. As a result, the two transfer tables 8a ', 8b' are displaced positionally in the rotational direction by the aforementioned separation angle α with respect to the rotational center of the turntable 270. At this time, it should be noted that a ferrofluidic seal 281 is shown in FIG.

The operation of the seventh embodiment of the present invention will be described.

When the second motor unit 272b rotates in the forward and reverse directions in the standby state as shown in FIG. 50 to rotate the drive shaft 271, for example, when the second motor unit 272b rotates in the right direction, the first and second robot links are connected. Each drive link 273a, 274a of each drive link mechanism 273, 274 of the mechanism C ₁ , C ₂ is rotated in the right direction jointly.

This causes the first and second driven link mechanisms 278, 279 to rotate jointly to the left when the gears 277a, 277b, 277c, and 277d are operated as shown in FIG. The transfer table 8a 'of the mechanism C1 operates to move forward, and the transfer table 8b' of the second robotic link mechanism C2 operates to move backward. Then, the transfer tables 8a 'and 8b' operate in the directions of the angles α ₁ and α ₂ of the separation angles α of the driven links 273b and 274b of the respective drive link mechanisms 273 and 274, respectively. Each move forward and backward.

If the drive shaft 271 rotates in the reverse direction, i.e., rotates to the left, the above-mentioned operation is such that the transfer table 8a 'of the first robotic link mechanism C1 operates to change the direction of the angle α ₁ . The reverse will then be reversed and the transfer table 8b 'of the second robotic link mechanism C ₂ is operated to advance along the direction of the angle α ₂ .

As the first motor unit 272a is driven in the standby position of FIG. 50, the rotary table 270 rotates so that the first and second robot link mechanisms C ₁ and C ₂ rotate jointly.

Eighth embodiment

52 to 60 show an eighth embodiment of the present invention. The eighth embodiment is the same as the seventh embodiment, wherein the drive links 273a and 274a of the drive link mechanisms 273 and 274 are coaxial with each other by a drive shaft separately attached to the rotary table 270. Use a structure that is arranged to be driven. The eighth embodiment is characterized by a large linking action on the move forward side and a small linkage action on the move backward side.

52 to 60, the structures of the respective drive link mechanisms 273 and 274 of the _first and second robot link mechanisms C ₁ and C ₂ are the same as those of the seventh embodiment, and the rotary table 270 is arranged to be rotated by the first motor unit 272a as in the seventh embodiment.

The rotary table 270 has a central area that is coaxially supported so that the first and second drive shafts 285 and 286 can be independently rotated. The first drive shaft 285 is fastened to one end of the front end of the drive link 273a of the link mechanism 273 of the first robot link mechanism C ₁ , while the second drive shaft 286 is connected to the second robot. It is fastened to the front end of the drive link 274a of the drive link mechanism 274 of the link mechanism C ₂ .

Each base end of the first and second drive shafts 285 and 286 is connected to the single second motor unit 272b supported by the rotary table 270 via a first bidirectional rotary link mechanism X ₁ , When the second motor unit 272b is rotated in one direction, the drive link mechanism 273 of the first robot link mechanism C ₁ and the drive link mechanism 274 of the second robot link mechanism C ₂ are different from each other. It is configured to be rotated in the same direction at the rotation angle.

As shown in FIGS. 53 to 55, the bidirectional rotary link mechanism X ₁ is connected to the first driven link 287a having one end connected to the first drive shaft 285, and to the second drive shaft 286. And a second driven link 287b having one end connected thereto, and first and second drive links 288a and 288b connected to respective front ends of the links 287a and 287b, respectively. The two driving links 288a and 288b form a link structure in which upper ends thereof are connected to each other. Each upper end of the two links 288a, 288b is disposed at the front end of the motor link 289 having one end fastened to the drive shaft of the second motor unit 272b supported by the rotary table 270 mentioned above. It is connected with the connection part. The motor link 289 is disposed inside the above mentioned link mechanism.

54 and 55 diagrammatically show the first bidirectional rotary link mechanism X ₁ . When the second motor unit 272b is driven to rotate the motor link 289 at a predetermined angle θ in the right direction as shown, the bidirectional rotary link mechanism X _{1 is} shown in FIGS. 54 and 55. As shown in the drawing, the image is distorted to the right and rotated. Assume that the rotation angle of the first driven link 287a located on the upper side in the rotational direction is θ _1, and the rotation angle of the second driven link 287b located on the lower side is θ ₂ . , θ ₁ > θ ₂ is established. Further, when the motor link 289 is rotated in the reverse direction (i.e., in the left direction), the relationship of θ ₁ <θ ₂ is applied.

When the above-mentioned operation is performed in the standby state of the transfer tables 8a 'and 8b' as shown in Fig. 50, the angle θ ₁ in the forward direction of the first drive link mechanism 273 is equal to the second drive link. The mechanism 274 becomes larger than the angle θ _{2 in} the reverse direction. As a result, the amount of movement in the reverse direction of the second transfer table 8b 'when the first transfer table 8a' is operated to advance to the predetermined position is the forward movement of the above-mentioned first transfer table 8a '. It is relatively small compared to the amount.

Referring to FIGS. 55 and 56, when the bidirectional rotary link mechanism X ₁ is configured as shown in FIGS. 53 and 54, the rotation θ of the link at an upper side in the rotation direction of the motor link 289. _{The fact that the 1} (θ ₂ ) angle becomes larger than the rotation θ ₂ (θ ₁ ) angle in the downward direction will be described. The length of the first and second driven links 287a and 287b is L1, the length of the first and second drive links 288a and 288b is L2, and the length of the motor link 289 is L3, The distance between the nodes connecting the first and second drive links 288a and 288b and the axis center O of the first and second drive shafts 285 and 286 is θ, and the rotation angle of the first driven link 287a is θ. _It is assumed that 1, the rotation angle of the second driven link 287b is θ ₂ , and that the angle created by the first and second driven links 287a and 287b is 2φ. Then, θ _1, θ ₂ are represented by the following equations (1) and (2), and are shown as shown in Table 1 below. Further, θ _{1 and} θ ₂ can be represented graphically as shown in FIG. 56. In this regard, the rightward rotation of the motor link 289 is shown as minus in FIG. 56 and Table 1. FIG.

Table 1

                 (In degrees)

56 and the first and second driven links 287a and 287b driven by rotation of the motor link 289, as shown in the graphs of Equations (1) and (2) and FIG. The first and second drive link mechanisms 273 and 274 that are rotated are rotated by θ ₁ in the forward motion and by θ _{2 in} the reverse motion, respectively, to reduce the angle of action in the reverse motion as compared with the forward motion. It is noted here that FIG. 55 shows application in the case of L1: L2: L3: L4: 1: 1: 1.8: 0.8.

57 to 60 show a second bidirectional rotary link mechanism X ₂ as yet another embodiment. The second bidirectional rotary link mechanism X ₂ has a structure in which a motor link 289 rotated by the second motor unit 272b is formed in the first bidirectional rotary link mechanism X ₁ shown in FIG. The structure is connected to the outside of the same link mechanism.

If this second bidirectional rotary link mechanism (X ₂₎ is adopted, the motor link (289), the second bidirectional rotary link mechanism (X ₂₎ when rotated to the right by a predetermined angle θ in FIG. 57 and 58 is It can be seen that it is rotated as distorted in the left direction as opposed to the first case mentioned above. In this case, the rotation angle of the first driven link 287a located on the upper side of the rotation direction of the motor link 289 is θ ₁ and the rotation of the second driven link 287b located in the lower direction. Assuming that the angle is θ ₂ , θ ₁ > θ ₂ is established. In view of this, the second angle θ _1, θ _2, the direction of rotation of each of the bidirectional rotary link mechanism (X ₂₎ It is noted that it is the direction opposite to the first bidirectional rotary link mechanism (X _1). In this regard, the drive shafts 285 and 286 of the second bidirectional rotary mechanism X ₂ are the first and second drive links shown in FIGS. 49 and 50 as opposed to the case where the first bidirectional rotary link mechanism X ₁ is adopted. It can be seen that it can be connected to the instruments (273, 274). Accordingly, the drive shaft 285 fastened to the driven link 287a at the upper side of the motor link 289 in the rotational direction toward the right direction of the motor link 289 is the second drive link of the second robot link mechanism C2. The drive shaft 286, which is coupled to the instrument 274, but which is fastened to the driven link 287b on the lower side, is connected to the first drive link mechanism 273 of the first robotic link mechanism C ₁ . do.

With respect to the bidirectional rotary link mechanism X ₂ of the structure shown in FIGS. 57 and 58, the rotation θ ₁ (θ ₂ ) angle of the link at the upper side in the rotational direction is the rotation θ at the lower side. Reference is made to FIGS. 59 and 60 showing the fact that it is greater than ₂ (θ ₁ ) angles.

Here, assuming that the dimensions of the various constituent members of the second bidirectional rotary link mechanism X ₂ are the same as the constituent members of the first bidirectional rotary link mechanism X ₁ , the angles θ _1, θ ₂ are given by the following equation ( 3), (4) and represented as shown in Table 2 below. Also, θ _{1 and} θ ₂ may be represented graphically as shown in FIG. 60. In FIG. 60 and Table 2, it is assumed that the rightward rotation of the motor link 289 is marked with a plus.

Table 2

                (In degrees)

As can be seen from the graphs of Equations (3), (4) and FIG. 60 and Table 2, the first and second driven links 287a and 287b driven by rotation of the motor link 289 are used. The first and second drive link mechanisms 273 and 274 that are rotated are rotated by θ ₁ in the forward direction and rotated by θ ₂ in the reverse direction, respectively, and reduce the angle of action in the reverse motion as compared with the forward motion. It is noted here that FIG. 59 shows the application in the case of L1: L2: L3: L4: 1: 1: 1: 2.

In the second bidirectional rotary link mechanism X ₂ of the eighth embodiment of the present invention, the drive shafts 285 and 286 of the respective drive link mechanisms 273 and 274 of the _first and second robot link mechanisms C ₁ and C ₂ are Although coaxial, they may be spaced apart from each other by a distance S, as shown in FIG.

FIG. 62 shows a third bidirectional rotary link mechanism X ₃ which drives a pair of first and second robot link mechanisms C ₁ ′, C ₂ ′ when the drive shafts 285, 286 are positioned apart from each other. This structure is essentially the same as the structure of the first bidirectional rotary link mechanism X ₁ , except that the drive shafts are located apart from each other, and the description of this embodiment is the description of the first bidirectional rotary link mechanism X ₁ . Follow.

In FIG. 62, when the motor link 289 rotates in the right direction by a predetermined angle θ, the third bidirectional rotary link mechanism X ₃ rotates as distorted in the right direction. Suppose that the rotation angle of the first driven link 287a located on the upper side in the rotational direction is θ _1, and the rotation angle of the second driven link 287b on the lower side is θ ₂ . The relationship of ₁ <θ ₂ is established. Further, when the motor link 289 rotates in the reverse direction (ie, leftward direction), θ ₁ > θ ₂ is established.

Referring to Fig. 62, θ ₁ <θ ₂ as mentioned above is described.

When the motor link 289 rotates in the right direction by the angle θ, each rotation angle θ ₁ , θ ₂ of the _first and second driven links 287a and 287b is expressed by the following equations (5) and (6). When L1 = L2, it is represented by following Formula (7) and (8). And, it can be represented graphically as shown in FIG. 63. In this respect, it is noted that the graph of FIG. 63 applies to the case of L1: L2: L3: L4: 1: 1: 1.8: 0.2. In addition, it can be shown by Table 3 below.

Table 3

                 (In degrees)

Also in this embodiment, the drive link of the drive shaft, which is mainly rotated by the rotation of the motor link 289, is connected to the drive links of the drive link mechanisms 273 and 274 which move forward.

It is noted that the fourth bidirectional rotary link mechanism X ₄ has a structure in which two drive shafts of the second bidirectional rotary link mechanism X ₂ are located apart from each other.

In FIG. 64, when the motor link 289 rotates in the right direction by a predetermined angle θ, the fourth bidirectional rotation link mechanism X ₄ rotates as distorted in the left direction as shown in FIG. 64. . The rotation angle of the first driven link 287a located on the upper side in the rotational direction of the motor link 289b is θ _1, and the rotation angle of the second driven link 287b on the lower side is Assuming that θ _2, the relationship of θ _1> θ ₂ is satisfied. Further, when the motor link 289 rotates in the reverse direction (ie, leftward direction), θ ₁ <θ ₂ is established.

Referring to Fig. 64, the relationship of θ ₁ > θ ₂ as mentioned above is described.

When the motor link 289 rotates by an angle θ, each rotation angle θ ₁ , θ ₂ of the _first and second driven links 287a and 287b is represented by the following equations (9) and (10). When L1 = L2, it is represented by following formula (11), (12). And, it can be represented graphically as shown in FIG. 65. In this respect, it is noted that the graph of FIG. 65 is applied when L1: L2: L3: L4: 1: 1: 2: 0.2. In addition, when shown in a table, the results shown in Table 4 below.

Table 4

                (In degrees)

In the present embodiment, the first drive shaft connected to the first driven link 287a is connected to the drive portion of the first robotic link mechanism C ₁ ′ shown in FIG. 52, while the second driven drive The second drive shaft connected with the link 287b is connected to the drive unit of the second robot link mechanism C ₂ ′.

Each of the aforementioned 1,2,3,4 bidirectional rotary link mechanisms X ₁ , X ₂ , X ₃ , X ₄ has been described with reference to an embodiment using a link mechanism, but in another embodiment an elliptical It should be noted that a gear mechanism can be used.

66 shows a fifth bidirectional rotary link mechanism X5 constituting the latter embodiment.

The first elliptical gear 291 and the first circular gear 292 are fastened to the output shaft 290 of the second motor unit 272b. The second elliptical gear 293 engaging with the first elliptical gear 291 and the second circular gear 294 engaging with the first circular gear 292 are both coaxial to the first and second robotic link mechanisms. It is fastened to one drive shaft 285 and another drive shaft 286 of the drive shaft which is arranged to form a. The elliptical gears 291 and 293 are fastened to the shafts 285 and 290, respectively.

In this structure, when the rotating shaft 290 of the second motor unit 272b rotates, for example, in a neutral state as shown in FIG. 67, it rotates to the left by the angle θ ₁ as shown in FIG. 68. The second elliptical gear 293 rotates by the angle θ ₂ in the right direction. Then, the oppositely positioned posture of the two elliptical gears 291 and 293 satisfies the relationship θ ₁ <θ ₂ . On the other hand, the rotation angle of the second circular gear 294 is θ ₁ . This causes the first and second drive shafts 285 and 286 to rotate in the right direction by angles θ ₂ and θ ₁ , respectively. According to the relationship θ ₁ <θ ₂ , the first drive shaft 285 rotates more than the second drive shaft 286.

On the other hand, when the rotating shaft 290 rotates to the right by the angle θ ₁ in the neutral state as shown in FIG. 67, the second elliptical gear 293 rotates to the left by the angle θ ₂ . The second circular gear 294 is rotated in the left direction by θ ₁ . Then, the opposite positions of the two elliptical gears 291 and 293 satisfy the relation θ ₁ > θ ₂ . As a result, in order that the rotation angle of the second drive shaft 286 becomes θ ₂ in the left direction and the rotation angle of the first drive shaft 285 becomes θ ₁ (θ ₂ > θ ₁ ), the rotation shaft 290 is It rotates in the right direction by an angle θ ₂ greater than the angle. This allows the second elliptical gear 293 to rotate in the left direction by θ ₁ , while allowing the second circular gear 294 to rotate in the left direction by θ ₂ . In this regard, the second motor unit 272b is rotated by θ ₂ in the right direction so that the first and second drive shafts 285 and 286 rotate by θ ₁ and θ _{2 in the} left direction, respectively, and the relationship θ ₁ <θ _{According to 2} , it can be seen that the second drive shaft 286 rotates more than the first drive shaft 285.

Accordingly, when the first and second drive shafts 285 and 286 connect the first robot link mechanism C ₁ and the second robot link mechanism C ₂ shown in FIG. 49, respectively, the first robot link mechanism. When (C ₁ ) is moved forward and the second robot link mechanism (C ₂ ) is operated backward, the second motor unit 272b is rotated to the left by an angle θ ₁ and the first robot link mechanism when the contrary operation (C1) and said second robotic link mechanism (C2) and the second motor units (272b) may be seen that rotates in the right direction by the angle θ _2.

Although the fifth bidirectional rotary link mechanism X ₅ was constructed by a combination of elliptical gears and circular gears, the circular gears 292 and 294 are a pair of elliptical gears 292 engaged with each other as shown in FIGS. 69 and 70. It should be noted that it can be replaced by '294'.

71 shows the operating state in such a case. Here, the rotation angle of the first drive shaft 285 when the motor unit 272b rotates by a predetermined angle in the neutral state is the second drive shaft when the motor unit 272b rotates reversely by the same angle. 286) becomes equal to the rotation angle, because the same calculation method can be used to control the first and second robotic link mechanisms (C _1, C ₂₎ having different signs mechanism the first and second robotic link (C _1, It should be noted that C ₂ ) is more easily controllable.

9th embodiment

In the seventh and eighth embodiments, the drive link mechanisms of the _first and second robot link mechanisms C ₁ , C ₂ ; C ₁ ′, C ₂ ′ each consist of a parallel link mechanism, but such a pair of parallel The link mechanism can be replaced with a belt link structure.

72 shows one robotic link mechanism D, the robotic link mechanism D having a first arm 301 rotatably supported by a rotating table (not shown) and the first arm ( A second arm 302 rotatably connected to a front end of the 301, a first pulley 304 coaxially supported at the rotation base of the first arm 301, and the first and second arms A second pulley 306 coupled to a portion connecting the 301 and 302 coaxially with the rotational center thereof and supported in the first arm 301 and on the shaft 305, and the second arm 302 A third pulley 307 supported therein and a fourth pulley 309 supported to be fastened to the rotary shaft 308 of the transfer table 303 mentioned above at the front end of the second arm 302; The first belt 310 is wound around the first and second pulleys 304 and 306, and the second belt 311 is wound around the third and fourth pulleys 307 and 309.

The rotating base portion of the first arm 301 is connected to the first motor unit 315 via a drive pulley 312, a drive pulley 313 and a belt 314, while the first pulley 304 is provided with a first pulley 304. 2 has a shaft 316 connected to the motor unit 317. The diameter ratio of the first and second pulleys 304 and 306 is set to 2: 1, and the diameter ratio of the third and fourth pulleys 307 and 309 is set to 1: 2.

In the above structure, when the first motor unit 315 is driven to rotate the first arm 301 in one direction while the second motor unit 317 is stopped, the first pulley 304 ) Is reversed to the same rotation angle with respect to the first arm 301. The rotational angle of the first pulley 304 is transmitted to the second pulley 306 at a speed doubled through the first belt 310, so that the second arm 302 has a rotation angle twice as large. 1 to allow the arm 301 to rotate in the opposite direction of rotation. Then, the third pulley 307 located on the side of the rotation base of the second arm 302 rotates in a direction opposite to the direction of rotation of the second arm 302 as in the first pulley 304. Thus, the transfer table 303 can be rotated at a rotation angle of 1/2 in a direction opposite to the rotation direction of the second arm 302.

The rotation operation of the forward or reverse rotation of the transfer table 303 by the first motor unit 315 may be performed by the first motor unit 315 relative to the rotation base portion of the first arm 301. Allow it to radially move forward and backward. Then, the entire robot link mechanism D rotates by rotating the first and second motor units 315 and 317 at the same rotation angle in the same direction.

Although only one robotic link mechanism has been described in this embodiment, in practice, when a pair of robotic link mechanisms are used in the above-mentioned embodiments and interact with each other, one of the transfer tables operates to move forward and the other transfer table operates to move backward. To be possible.

In addition, in this embodiment, although a pair of motor units are used for the forward and backward movements and for rotation, the bidirectional rotary link mechanisms X ₁ , X ₂ , X ₃ , X ₄ , X of the seventh embodiment are shown. ₅ ) can be used by being connected to each drive shaft of the first arm of the pair of robot link mechanisms. In this way, the operation forward and backward distances required to operate the transfer table forward and backward can be reduced.

While the present invention has been described with respect to certain embodiments, modifications, deletions, and additions can be easily made by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, it is to be understood that the present invention is not limited to the specific embodiments mentioned above but includes all possible embodiments within the scope of the features detailed in the appended claims and all equivalents thereto.

Included in the above.

Claims (14)

A first and second robotic mechanisms rotatably configured to be rotatable, each robotic link mechanism having a transfer table at its front end, which moves forward or backward in the radial direction of the transfer table when it is extended or contracted; In the processing robot, the first and second robot link mechanisms are arranged such that the two transfer tables are positioned in a narrow angle range. Each of the first and second robot link mechanisms A plurality of complements each of which can be rotated independently; A driving source connected to each of the bosses respectively; Two pairs of arms each consisting of one or two arms provided to each of the bosses; A pair of links coupled to the front ends of each pair of arms; And And said transfer table coupled to front ends of said link pairs, respectively. The method of claim 1, The plurality of bosses are composed of first, second and third bosses, A first arm provided on said first boss; Second and third arms provided on the second boss; A fourth arm provided on the side of said third boss; A first transfer table provided at the front end of said first and second arms via said pair of links; And And a second transfer table provided at the front end of said third and fourth arms via said pair of links. The method of claim 2, The first arm is provided on the side of the first boss in a radial direction; The second and third arms are provided on the side surfaces of the second boss in the radial direction so as to be respectively located radially opposite from the second boss; And said fourth arm is provided on the side of said third boss in a radial direction. The method of claim 1, The plurality of bosses are composed of first and second bosses, First and second arms provided on the first boss; Third and fourth arms provided on the second boss; A first transfer table provided at the front end of said first and fourth arms via said pair of links; And And a second transfer table provided at the front end of said second and third arms via said pair of links. The method of claim 4, wherein The first and second arms are provided on the side surface of the first boss in the radial direction so as to be respectively located on opposite sides in the radial direction in the first boss; The third and fourth arms are provided on the second boss in the radial direction so as to be located on opposite sides in the radial direction at the second boss, one of the third and fourth arms is provided on the side of the second boss and The other being located on the top surface of the second boss via a vertical leg column. The method of claim 4, wherein The first and second arms are provided on the side surface of the first boss in the radial direction so as to be respectively located on opposite sides in the radial direction in the first boss; And the third and fourth arms are provided on the side of the second boss in the radial direction so as to be located on opposite sides in the radial direction at the second boss. The method according to any one of claims 1 and 2 to 6, And said first and second robotic link mechanisms are arranged such that said two transfer tables overlap vertically with each other. The method according to any one of claims 1 and 2 to 6, Wherein said first and second robotic link mechanisms are arranged such that the two transfer tables do not overlap vertically with each other and are different in position in their rotational direction. The method of claim 8, Wherein said first and second robotic link mechanisms are arranged such that said two transfer tables are in the same position in the vertical direction. The method of claim 1, Each of the first and second robot link mechanisms A rotary table; A first drive source operatively connected to the rotary table; First and second drive link mechanisms supported by the rotary table to be rotatable, respectively; A second drive source operatively connected to one of said first and second drive link mechanisms; First and second driven link mechanisms having ends respectively connected to front ends of the first and second drive link mechanisms so as to rotate simultaneously with the rotation of the respective drive link mechanisms; And And said first and second transfer tables respectively connected to said first and second driven link mechanisms. The method of claim 8, Wherein either of the drive link mechanisms and the driven link mechanisms of the first and second robotic link mechanisms are configured by a parallel link mechanism. The method of claim 8, Wherein either of the drive link mechanisms and the driven link mechanisms of the first and second robotic link mechanisms are configured by a belt mechanism. The method according to any one of claims 10 to 12, Wherein said first and second robotic link mechanisms are arranged such that the two transfer tables do not overlap each other in the vertical direction but are different in position in the rotational direction thereof. The method of claim 13, And the first and second robot link mechanisms are arranged such that the two transfer tables respectively connected thereto are in the same position in the vertical direction.