JP2007013149A - マスクをアースに電気的に接続するためのシステム、マスク - Google Patents
マスクをアースに電気的に接続するためのシステム、マスク Download PDFInfo
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- 239000011248 coating agent Substances 0.000 claims abstract description 58
- 229910052751 metal Inorganic materials 0.000 claims abstract description 46
- 239000002184 metal Substances 0.000 claims abstract description 46
- 150000001875 compounds Chemical class 0.000 claims abstract description 24
- 230000005855 radiation Effects 0.000 claims abstract description 20
- 239000004020 conductor Substances 0.000 claims abstract description 18
- 238000000059 patterning Methods 0.000 claims description 22
- 150000004767 nitrides Chemical class 0.000 claims description 11
- 150000002736 metal compounds Chemical class 0.000 claims description 10
- 238000001900 extreme ultraviolet lithography Methods 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 claims description 3
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 3
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 3
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 3
- 239000010936 titanium Substances 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 3
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052715 tantalum Inorganic materials 0.000 claims description 2
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 2
- 150000001247 metal acetylides Chemical class 0.000 claims 2
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 claims 1
- -1 carbonitride Chemical compound 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 6
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- 229910044991 metal oxide Inorganic materials 0.000 description 3
- 150000004706 metal oxides Chemical class 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000000609 electron-beam lithography Methods 0.000 description 2
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- 230000001965 increasing effect Effects 0.000 description 2
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- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
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- 238000003825 pressing Methods 0.000 description 2
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000007600 charging Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70941—Stray fields and charges, e.g. stray light, scattered light, flare, transmission loss
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/22—Masks or mask blanks for imaging by radiation of 100nm or shorter wavelength, e.g. X-ray masks, extreme ultraviolet [EUV] masks; Preparation thereof
- G03F1/24—Reflection masks; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
- G03F1/40—Electrostatic discharge [ESD] related features, e.g. antistatic coatings or a conductive metal layer around the periphery of the mask substrate
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/707—Chucks, e.g. chucking or un-chucking operations or structural details
- G03F7/70708—Chucks, e.g. chucking or un-chucking operations or structural details being electrostatic; Electrostatically deformable vacuum chucks
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- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K2201/00—Arrangements for handling radiation or particles
- G21K2201/06—Arrangements for handling radiation or particles using diffractive, refractive or reflecting elements
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- Theoretical Computer Science (AREA)
- Mathematical Physics (AREA)
- Environmental & Geological Engineering (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
【解決手段】このシステムは、アースに接続してあり且つマスクMAの少なくとも一部を覆う導電性被膜50と電気的に接触するように構成した導体CNを含み、この導電性被膜が金属ベース化合物から成る層を含む。この金属ベース化合物の導電性被膜は、導電率が十分に高く、高硬度および高化学安定性を示し、耐摩耗性があるので導体CNに掛ける圧力により被膜が傷つき粒子が発生することが少ない。
【選択図】図2
Description
− EUV放射線ビームBを調整するように構成した照明システム(照明器)IL;
− パターニング装置(例えば、マスク)MAを支持するように構築し、且つこのパターニング装置をあるパラメータに従って正確に位置決めするように構成した第1位置決め装置PMに結合した支持構造体(例えば、マスクテーブル)MT;
− 基板(例えば、レジストを塗被したウエハ)Wを保持するように構築し、且つこの基板をあるパラメータに従って正確に位置決めするように構成した第2位置決め装置PWに結合した基板テーブル(例えば、ウエハテーブル)WT;および
− パターニング装置MAによって放射線ビームBに与えたパターンを基板Wの目標部分C(例えば、一つ以上のダイを含む)上に投影するように構成した投影システムPSを含む。
放射線ビームBは、支持構造体(例えば、マスクテーブルMT)上に保持されたパターニング装置(例えば、マスクMA)に入射し、このパターニング装置によってパターニングされる。マスクMAを横断してから、放射線ビームBは、投影システムPSを通過し、それがこのビームを基板Wの目標部分C上に集束する。第2位置決め装置PWおよび位置センサIF2(例えば、干渉計測装置、線形エンコーダまたは容量式センサ)を使って、基板テーブルWTを、例えば、異なる目標部分CをビームBの経路に配置するように、正確に動かすことができる。同様に、例えば、マスクライブラリから機械的に検索してから、または走査中に、第1位置決め装置PMおよびもう一つの位置センサIF1を使ってマスクMAを放射線ビームBの経路に関して正確に配置することができる。一般的に、マスクテーブルMTの移動は、第1位置決め装置PMの一部を形成する、長ストロークモジュール(粗位置決め)および短ストロークモジュール(微細位置決め)を使って実現してもよい。同様に、基板テーブルWTの移動は、第2位置決め装置PWの一部を形成する、長ストロークモジュールおよび短ストロークモジュールを使って実現してもよい。ステッパの場合は(スキャナと違って)、マスクテーブルMTを短ストロークアクチュエータに結合するだけでもよく、または固定してもよい。マスクMAおよび基板Wは、マスク整列マークM1、M2および基板整列マークP1、P2を使って整列してもよい。図示する基板整列マークは、専用の目標部分を占めるが、それらは目標部分の間のスペースにあってもよい(それらは、スクライブレーン整列マークとして知られる)。同様に、マスクMA上に二つ以上のダイが設けてある場合は、マスク整列マークがダイ間にあってもよい。
60 背面
310 被膜のない領域
320 導電性被膜を含む領域
CN 導体
MA マスク
Claims (19)
- EUVリソグラフィ用のマスクをアースに電気的に接続するためのシステムであって、アースに接続してあり且つ上記マスクの少なくとも一部を覆う導電性被膜と電気的に接触するように構成した導体を含み、この導電性被膜が金属ベース化合物から成る層を含むシステム。
- 請求項1に記載のシステムであって、上記金属ベース化合物が金属ベース窒化物であるシステム。
- 請求項1に記載のシステムであって、上記金属ベース化合物が金属ベース炭化物であるシステム。
- 請求項1に記載のシステムであって、上記金属ベース化合物が金属ベース炭窒化物であるシステム。
- 請求項2に記載のシステムであって、上記金属ベース窒化物がチタン窒化物、チタン炭窒化物、タンタル窒化物、炭窒化物、クロム窒化物およびアルミニウム窒化物層から成る窒化物のグループの一つであるシステム。
- 請求項3に記載のシステムであって、上記金属ベース炭化物がチタン炭化物およびタンタル炭化物から成る炭化物のグループの一つであるシステム。
- 請求項1に記載のシステムであって、前記導電性被膜が各々金属ベース化合物から成る複数の層を含むシステム。
- 請求項1に記載のシステムであって、前記金属ベース化合物の導電率が100(Ω・cm)−1より高いシステム。
- EUV放射線ビームをパターニングするためのマスクであって、パターンを坦持するための前面、上記前面と向合う背面、および側面の少なくとも一つがこのマスクを電気的にアースするための導電性被膜を備え、並びにこの導電性被膜が金属ベース化合物から成る層を含むマスク。
- 請求項9に記載のマスクであって、前記金属ベース化合物が金属ベース窒化物であるマスク。
- 請求項9に記載のマスクであって、前記金属ベース化合物が金属ベース炭化物であるマスク。
- 請求項9に記載のマスクであって、前記金属ベース化合物が金属ベース炭窒化物であるマスク。
- 請求項10に記載のマスクであって、前記金属ベース窒化物がチタン窒化物、チタン炭窒化物、タンタル窒化物、タンタル炭窒化物、クロム窒化物およびアルミニウム窒化物層から成る窒化物のグループの一つであるマスク。
- 請求項11に記載のマスクであって、前記金属ベース炭化物がチタン炭化物およびタンタル炭化物から成る炭化物のグループの一つであるマスク。
- 請求項9に記載のマスクであって、前記導電性被膜が各々金属ベース化合物から成る複数の層を含むマスク。
- 請求項9に記載のマスクであって、前記金属ベース化合物の導電率が100(Ω・cm)−1より高いマスク。
- 請求項9に記載のマスクであって、前記背面が金属化合物導電性被膜を含む領域とこのマスクを取扱うために設計した分散した領域とに区切ってあるマスク。
- 請求項9に記載のマスクであって、前記前面および前記背面がこのマスクを電気的にアースするための導電性金属ベース化合物被膜を備えるマスク。
- 請求項18に記載のマスクであって、前記前面および前記背面での上記金属ベース化合物被膜が互いに電気的に接続してあるマスク。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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US11/167,560 US7514186B2 (en) | 2005-06-28 | 2005-06-28 | System for electrically connecting a mask to earth, a mask |
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JP2007013149A true JP2007013149A (ja) | 2007-01-18 |
JP3930038B2 JP3930038B2 (ja) | 2007-06-13 |
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JP2006176008A Expired - Fee Related JP3930038B2 (ja) | 2005-06-28 | 2006-06-27 | マスクをアースに電気的に接続するためのシステム、マスク |
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Cited By (4)
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JP2011108942A (ja) * | 2009-11-19 | 2011-06-02 | Renesas Electronics Corp | 反射型露光用マスク、反射型露光用マスクの製造方法、および、半導体装置の製造方法 |
KR20130033984A (ko) * | 2011-09-27 | 2013-04-04 | 어플라이드 머티리얼즈 이스라엘 리미티드 | 지지 척에 euvl 마스크를 전기적으로 커플링하기 위한 전도성 요소 |
TWI763096B (zh) * | 2019-10-28 | 2022-05-01 | 荷蘭商Asml荷蘭公司 | 用於在帶電粒子系統中檢測光罩及將光罩接地之系統 |
WO2024014207A1 (ja) * | 2022-07-14 | 2024-01-18 | Agc株式会社 | 反射型マスクブランク、反射型マスクブランクの製造方法、反射型マスク、反射型マスクの製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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WO2007130060A2 (en) | 2006-05-03 | 2007-11-15 | Schepens Eye Research | Isolation and therapeutic application of adult retinal stem cells collected from extra-retinal tissues |
US9485846B2 (en) * | 2011-05-20 | 2016-11-01 | Hermes Microvision Inc. | Method and system for inspecting an EUV mask |
US9859089B2 (en) * | 2011-05-20 | 2018-01-02 | Hermes Microvision Inc. | Method and system for inspecting and grounding an EUV mask |
US8575573B2 (en) * | 2011-05-20 | 2013-11-05 | Hermes Microvision, Inc. | Structure for discharging extreme ultraviolet mask |
US9715175B2 (en) * | 2012-06-15 | 2017-07-25 | Nikon Corporation | Mask protection device, exposure apparatus, and method for manufacturing device |
CA3089231A1 (en) * | 2018-01-23 | 2019-08-01 | Virginia Commonwealth University | Mda-7/il-24 secretory variants and methods of use |
KR20200119816A (ko) * | 2018-02-13 | 2020-10-20 | 에이에스엠엘 네델란즈 비.브이. | 리소그래피 장치에서의 인시튜 입자 제거를 위한 장치 및 방법 |
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JPH09205050A (ja) | 1996-01-24 | 1997-08-05 | Toshiba Mach Co Ltd | 電子ビーム描画装置における試料帯電防止方法 |
JPH11214242A (ja) | 1998-01-26 | 1999-08-06 | Murata Mfg Co Ltd | 導電性ペーストおよびそれを用いた積層セラミック電子部品 |
US6178221B1 (en) * | 1998-12-04 | 2001-01-23 | Advanced Micro Devices, Inc. | Lithography reflective mask |
US6180291B1 (en) * | 1999-01-22 | 2001-01-30 | International Business Machines Corporation | Static resistant reticle |
US6841309B1 (en) * | 2001-01-11 | 2005-01-11 | Dupont Photomasks, Inc. | Damage resistant photomask construction |
US6984475B1 (en) * | 2003-11-03 | 2006-01-10 | Advanced Micro Devices, Inc. | Extreme ultraviolet (EUV) lithography masks |
-
2005
- 2005-06-28 US US11/167,560 patent/US7514186B2/en not_active Expired - Fee Related
-
2006
- 2006-06-27 JP JP2006176008A patent/JP3930038B2/ja not_active Expired - Fee Related
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JP2011108942A (ja) * | 2009-11-19 | 2011-06-02 | Renesas Electronics Corp | 反射型露光用マスク、反射型露光用マスクの製造方法、および、半導体装置の製造方法 |
KR20130033984A (ko) * | 2011-09-27 | 2013-04-04 | 어플라이드 머티리얼즈 이스라엘 리미티드 | 지지 척에 euvl 마스크를 전기적으로 커플링하기 위한 전도성 요소 |
KR101579748B1 (ko) * | 2011-09-27 | 2015-12-23 | 어플라이드 머티리얼즈 이스라엘 리미티드 | 지지 척에 euvl 마스크를 전기적으로 커플링하기 위한 전도성 요소 |
TWI763096B (zh) * | 2019-10-28 | 2022-05-01 | 荷蘭商Asml荷蘭公司 | 用於在帶電粒子系統中檢測光罩及將光罩接地之系統 |
WO2024014207A1 (ja) * | 2022-07-14 | 2024-01-18 | Agc株式会社 | 反射型マスクブランク、反射型マスクブランクの製造方法、反射型マスク、反射型マスクの製造方法 |
Also Published As
Publication number | Publication date |
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US20060292457A1 (en) | 2006-12-28 |
JP3930038B2 (ja) | 2007-06-13 |
US7514186B2 (en) | 2009-04-07 |
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