JP2006527488A5 - - Google Patents

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Publication number
JP2006527488A5
JP2006527488A5 JP2006515797A JP2006515797A JP2006527488A5 JP 2006527488 A5 JP2006527488 A5 JP 2006527488A5 JP 2006515797 A JP2006515797 A JP 2006515797A JP 2006515797 A JP2006515797 A JP 2006515797A JP 2006527488 A5 JP2006527488 A5 JP 2006527488A5
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Japan
Prior art keywords
fault
fingerprint
failure
current state
vectors
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JP2006515797A
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JP2006527488A (ja
JP5102488B2 (ja
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Priority claimed from IE20030437A external-priority patent/IE20030437A1/en
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Priority claimed from PCT/EP2004/005708 external-priority patent/WO2004112118A1/en
Publication of JP2006527488A publication Critical patent/JP2006527488A/ja
Publication of JP2006527488A5 publication Critical patent/JP2006527488A5/ja
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Publication of JP5102488B2 publication Critical patent/JP5102488B2/ja
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Claims (10)

  1. 製造装置の現在状態を示す出力を持つセンサを有する前記装置における、障害状況下の前記装置の状態を表すセンサデータ(「障害フィンガープリント」)を確立する工程を含む、障害検出の方法であって、
    (a)複数の異なる障害状況の各々について、障害状況下の前記装置の状態を表す障害フィンガープリントを確立し、
    (b)前記障害フィンガープリントを障害フィンガープリントライブラリに格納し、
    (c)前記センサを使って、前記装置の現在状態を特定し、及び、
    (d)前記現在状態のセンサデータと、前記障害フィンガープリントライブラリ内の障害フィンガープリントとの比較に基づいて、障害を検出する
    ステップを含むことを特徴とする方法。
  2. 同じ公称仕様に従って作られ、かつ同じ公称プロセスを作動する異なる製造装置間で、前記障害フィンガープリントが実質的に不変であり、前記ライブラリ内の少なくともいくつかのフィンガープリントは、前記装置以外の製造装置について確立される
    ことを特徴とする請求項1に記載の方法。
  3. 前記ステップ(d)において、前記障害フィンガープリントについての公称値からのセンサデータの偏位を表すベクトルのセットと、前記現在状態についての公称値からのセンサデータの偏位を表す対応するベクトルのセットとの間で、前記比較が成される
    ことを特徴とする請求項１に記載の方法。
  4. 前記障害フィンガープリントのベクトルのセットと、前記現在状態のベクトルのセットとの間の相関によって、前記比較が成される
    ことを特徴とする請求項２又は３に記載の方法。
  5. 前記障害フィンガープリントのベクトルのセットと前記現在状態のベクトルのセットとの間のユークリッド距離を計算することにより、前記比較が成される
    ことを特徴とする請求項２又は３に記載の方法。
  6. 特定のプロセス出力への前記障害の影響を予測すること、
    をさらに含むことを特徴とする請求項１〜５のいずれか１項に記載の方法。
  7. 装置入力を管理して、前記障害を補償すること
    をさらに含むことを特徴とする請求項１〜６のいずれか１項に記載の方法。
  8. 前記障害フィンガープリントが、装置入力のセット対センサ応答曲線を含むツールプロファイルから引き出される
    ことを特徴とする請求項１〜７のいずれか１項に記載の方法。
  9. 前記製造装置がプラズマチャンバを備える
    ことを特徴とする請求項１〜８のいずれか１項に記載の方法。
  10. データ処理デバイスによって実行されるとき、請求項１〜９のいずれか１項に記載の方法のステップを実施するプログラム命令、を収容するコンピュータ読み取り可能な媒体。
JP2006515797A 2003-06-11 2004-05-03 製造装置における障害検出の方法 Expired - Lifetime JP5102488B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
IE20030437A IE20030437A1 (en) 2003-06-11 2003-06-11 A method for process control of semiconductor manufacturing equipment
IE2003/0437 2003-06-11
IE2003/0730 2003-10-03
IE2003/0730A IE83920B1 (en) 2003-10-03 A method of fault detection in manufacturing equipment
PCT/EP2004/005708 WO2004112118A1 (en) 2003-06-11 2004-05-03 A method of fault detection in manufaturing equipment

Publications (3)

Publication Number Publication Date
JP2006527488A JP2006527488A (ja) 2006-11-30
JP2006527488A5 true JP2006527488A5 (ja) 2007-05-10
JP5102488B2 JP5102488B2 (ja) 2012-12-19

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006515797A Expired - Lifetime JP5102488B2 (ja) 2003-06-11 2004-05-03 製造装置における障害検出の方法

Country Status (6)

Country Link
US (1) US7062411B2 (ja)
EP (1) EP1636832A1 (ja)
JP (1) JP5102488B2 (ja)
KR (1) KR101224705B1 (ja)
TW (1) TWI348080B (ja)
WO (1) WO2004112118A1 (ja)

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