JP2006514161A5 - - Google Patents
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- Publication number
- JP2006514161A5 JP2006514161A5 JP2004568825A JP2004568825A JP2006514161A5 JP 2006514161 A5 JP2006514161 A5 JP 2006514161A5 JP 2004568825 A JP2004568825 A JP 2004568825A JP 2004568825 A JP2004568825 A JP 2004568825A JP 2006514161 A5 JP2006514161 A5 JP 2006514161A5
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- orifices
- flow rate
- reactant gases
- plasmas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2003/005209 WO2004076716A1 (en) | 2003-02-20 | 2003-02-20 | Apparatus and method for depositing large area coatings on planar surfaces |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006514161A JP2006514161A (ja) | 2006-04-27 |
| JP2006514161A5 true JP2006514161A5 (enExample) | 2006-06-15 |
Family
ID=32925324
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004568825A Pending JP2006514161A (ja) | 2003-02-20 | 2003-02-20 | 平坦な表面上に大面積の皮膜を堆積するための装置及び方法 |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP1597409A1 (enExample) |
| JP (1) | JP2006514161A (enExample) |
| KR (1) | KR100977955B1 (enExample) |
| CN (1) | CN1764738B (enExample) |
| AU (1) | AU2003211169A1 (enExample) |
| WO (1) | WO2004076716A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6743524B2 (en) * | 2002-05-23 | 2004-06-01 | General Electric Company | Barrier layer for an article and method of making said barrier layer by expanding thermal plasma |
| US7521653B2 (en) * | 2004-08-03 | 2009-04-21 | Exatec Llc | Plasma arc coating system |
| JP5357050B2 (ja) | 2006-12-28 | 2013-12-04 | エグザテック・リミテッド・ライアビリティー・カンパニー | プラズマアークコーティング用装置および方法 |
| KR20100017761A (ko) | 2007-05-17 | 2010-02-16 | 엑사테크 엘.엘.씨. | 공통 플라즈마 코팅 구역에서 복수의 코팅 재료를 침착시키기 위한 장치 및 방법 |
| CN102618846B (zh) * | 2012-04-18 | 2014-04-09 | 南京航空航天大学 | 一种多炬等离子体喷射cvd法沉积超硬膜的方法及装置 |
| EP2784175A1 (fr) * | 2013-03-28 | 2014-10-01 | NeoCoat SA | Equipement de dépôt de diamant en phase vapeur |
| CN103924210A (zh) * | 2014-04-24 | 2014-07-16 | 无锡元坤新材料科技有限公司 | 一种等离子体沉积装置及金刚石涂层的制备方法 |
| WO2016077345A1 (en) * | 2014-11-10 | 2016-05-19 | Superior Industries International, Inc. | Method of coating alloy wheels |
| US12454759B2 (en) | 2014-11-10 | 2025-10-28 | Superior Industries International, Inc. | Method of coating alloy wheels using inter-coat plasma |
| CN107881485B (zh) * | 2017-11-01 | 2019-10-01 | 深圳市华星光电半导体显示技术有限公司 | 等离子体增强化学气相沉积设备及oled面板的封装方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0772341B2 (ja) * | 1991-02-21 | 1995-08-02 | 中外炉工業株式会社 | 圧力勾配型プラズマガンによるプラズマ発生装置 |
| US6365016B1 (en) * | 1999-03-17 | 2002-04-02 | General Electric Company | Method and apparatus for arc plasma deposition with evaporation of reagents |
| US6397776B1 (en) * | 2001-06-11 | 2002-06-04 | General Electric Company | Apparatus for large area chemical vapor deposition using multiple expanding thermal plasma generators |
| US6948448B2 (en) * | 2001-11-27 | 2005-09-27 | General Electric Company | Apparatus and method for depositing large area coatings on planar surfaces |
| US6681716B2 (en) * | 2001-11-27 | 2004-01-27 | General Electric Company | Apparatus and method for depositing large area coatings on non-planar surfaces |
| JP2003268556A (ja) * | 2002-03-08 | 2003-09-25 | Sumitomo Heavy Ind Ltd | プラズマ処理装置 |
-
2003
- 2003-02-20 JP JP2004568825A patent/JP2006514161A/ja active Pending
- 2003-02-20 WO PCT/US2003/005209 patent/WO2004076716A1/en not_active Ceased
- 2003-02-20 CN CN03826341.6A patent/CN1764738B/zh not_active Expired - Fee Related
- 2003-02-20 AU AU2003211169A patent/AU2003211169A1/en not_active Abandoned
- 2003-02-20 EP EP03816093A patent/EP1597409A1/en not_active Withdrawn
- 2003-02-20 KR KR1020057015386A patent/KR100977955B1/ko not_active Expired - Fee Related
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