JP2006513573A5 - - Google Patents

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Publication number
JP2006513573A5
JP2006513573A5 JP2004566602A JP2004566602A JP2006513573A5 JP 2006513573 A5 JP2006513573 A5 JP 2006513573A5 JP 2004566602 A JP2004566602 A JP 2004566602A JP 2004566602 A JP2004566602 A JP 2004566602A JP 2006513573 A5 JP2006513573 A5 JP 2006513573A5
Authority
JP
Japan
Prior art keywords
subpad
fixed abrasive
shore
astm
hardness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2004566602A
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English (en)
Other versions
JP2006513573A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2003/041364 external-priority patent/WO2004062849A1/en
Publication of JP2006513573A publication Critical patent/JP2006513573A/ja
Publication of JP2006513573A5 publication Critical patent/JP2006513573A5/ja
Pending legal-status Critical Current

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Claims (1)

  1. 固定研磨要素と、
    弾性要素を含むサブパッドと、
    を含む研磨物品であって、前記固定研磨要素が前記サブパッドと共に延存し、かつ前記弾性要素が、ＡＳＴＭ−２２４０を用いて測定したときに６０以下のショアＡ硬度を有する、研磨物品。
JP2004566602A 2003-01-10 2003-12-23 化学的機械的平坦化用途向けのパッド構成体 Pending JP2006513573A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US43931403P 2003-01-10 2003-01-10
PCT/US2003/041364 WO2004062849A1 (en) 2003-01-10 2003-12-23 Pad constructions for chemical mechanical planarization applications

Publications (2)

Publication Number Publication Date
JP2006513573A JP2006513573A (ja) 2006-04-20
JP2006513573A5 true JP2006513573A5 (ja) 2006-12-28

Family

ID=32713463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004566602A Pending JP2006513573A (ja) 2003-01-10 2003-12-23 化学的機械的平坦化用途向けのパッド構成体

Country Status (9)

Country Link
US (1) US7163444B2 (ja)
EP (1) EP1590127A1 (ja)
JP (1) JP2006513573A (ja)
KR (1) KR101018942B1 (ja)
CN (1) CN100551623C (ja)
AU (1) AU2003297539A1 (ja)
MY (1) MY136868A (ja)
TW (1) TWI312305B (ja)
WO (1) WO2004062849A1 (ja)

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WO2018005767A1 (en) * 2016-06-29 2018-01-04 Saint-Gobain Abrasives, Inc. Abrasive tools and methods for forming same
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USD832898S1 (en) * 2017-02-09 2018-11-06 Global Polishing Systems LLC Material removal/polishing tool
CN107081688A (zh) * 2017-05-27 2017-08-22 江苏省江南新型复合研磨材料及制品工程技术研究中心有限公司 一种高强度高性能的复合研磨片及其制造方法
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CN113226638B (zh) * 2019-02-26 2023-02-17 株式会社迪思科 用于磨削背面的胶粘片及半导体晶片的制造方法
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