JP2006500473A5 - - Google Patents

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Publication number
JP2006500473A5
JP2006500473A5 JP2004539892A JP2004539892A JP2006500473A5 JP 2006500473 A5 JP2006500473 A5 JP 2006500473A5 JP 2004539892 A JP2004539892 A JP 2004539892A JP 2004539892 A JP2004539892 A JP 2004539892A JP 2006500473 A5 JP2006500473 A5 JP 2006500473A5
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JP
Japan
Prior art keywords
plasma
inductor
energy storage
storage capacitor
substrate
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JP2004539892A
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English (en)
Japanese (ja)
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JP4578242B2 (ja
JP2006500473A (ja
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Priority claimed from US10/254,158 external-priority patent/US6808607B2/en
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Publication of JP2006500473A5 publication Critical patent/JP2006500473A5/ja
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Publication of JP4578242B2 publication Critical patent/JP4578242B2/ja
Anticipated expiration legal-status Critical
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JP2004539892A 2002-09-25 2003-09-23 アーク処理を有する高ピーク電力パルス電源 Expired - Fee Related JP4578242B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/254,158 US6808607B2 (en) 2002-09-25 2002-09-25 High peak power plasma pulsed supply with arc handling
PCT/US2003/030211 WO2004029322A1 (fr) 2002-09-25 2003-09-23 Alimentation electrique pulsee pour pulverisation au plasma presentant une puissance de crete elevee et une gestion de l'arc electrique

Publications (3)

Publication Number Publication Date
JP2006500473A JP2006500473A (ja) 2006-01-05
JP2006500473A5 true JP2006500473A5 (fr) 2010-04-02
JP4578242B2 JP4578242B2 (ja) 2010-11-10

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JP2004539892A Expired - Fee Related JP4578242B2 (ja) 2002-09-25 2003-09-23 アーク処理を有する高ピーク電力パルス電源

Country Status (6)

Country Link
US (2) US6808607B2 (fr)
EP (1) EP1543175B1 (fr)
JP (1) JP4578242B2 (fr)
CN (1) CN100467662C (fr)
TW (1) TW200409826A (fr)
WO (2) WO2004029322A1 (fr)

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