JP2006342988A - Hanger, drying device and work retaining method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a hanger, a drying device and a work retaining method, capable of properly preventing deformation such as curving and waving in a drying process even on a film-shaped work. <P>SOLUTION: This hanger 14 for retaining the square-shaped thin work by holding the same from upper, and both right and left side portions, comprises a frame-type main body 14a, an upper fixing and holding portion fixed to an upper frame 14b of the frame-type main body 10a for holding the upper portion of the work, and a tensile holding means mounted on the frame-type main body 14a for holding the work 10 in a state of tensing the work 10 in the lateral direction. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a hanger, a drying apparatus, and a work holding method.

As a drying apparatus for drying a substrate which is a thin plate-like workpiece, for example, there is one described in Patent Document 1.
This drying apparatus dries the substrate 10 by moving and passing through a drying chamber in which dry air is introduced in a state where the hangers 90 holding the substrates 10 one by one are suspended.
FIG. 12 is a front view of the hanger 90. The hanger 90 is formed of a rectangular frame-shaped main body corresponding to the shape of the substrate 10, and the frame-shaped main body has an upper side 90b that becomes horizontal when suspended and two vertical left and right sides 90c and 90d. Two clips 15 each holding the substrate 10 are fixed to each of the three sides 90b, 90c, and 90d. As a result, the hanger 90 can hold the substrate 10 from the three directions with the clip 15 and hold it in a stretched state, thereby preventing the thin plate-like substrate 10 from being waved or bent during the drying process. it can.

Japanese Patent Application No. 2001-006887

The hanger 90 having the above configuration is effective for the substrate 10 having a certain degree of rigidity.
However, recently, there are many film-like flexible and low-waist substrates, and the hanger 90 in which the clip 15 is fixed to the frame member can satisfactorily prevent the substrate 10 from being deformed by the drying process. In other words, the substrate 10 after drying may have poor dimensional accuracy.

  Therefore, the present invention has been made to solve the above-mentioned problems, and the object of the present invention is to satisfactorily prevent deformation such as bending and undulation due to a drying process even for a film-like flexible work. An object of the present invention is to provide a hanger, a drying apparatus, and a method for holding a workpiece.

In order to achieve the above object, the present invention comprises the following arrangement.
That is, the present invention is a hanger for sandwiching and holding a rectangular thin plate-shaped workpiece from above and from both the left and right sides, and is fixed to the upper frame of the frame-type body so that the frame-type body and the upper part of the work can be sandwiched. And an upper fixed clamping portion provided on the frame mold body, and a tension clamping means provided on the frame-type main body for clamping the work in a state of being pulled in the left-right direction. According to this, even if it is a film-like workpiece | work, it can hold | maintain favorably.
The pulling and clamping means includes a side fixed clamping portion that is fixed to one side frame of the frame-type main body so as to clamp one side portion of both sides of the workpiece, and both sides of the workpiece. A movable holding portion provided to the other side frame of the frame-type main body so as to be movable in the left-right direction, and the movable holding portion to the side fixed holding And an elastic member that urges in a direction away from the portion. According to this, it is possible to hold the workpiece in a state pulled in the left-right direction with a simple configuration.

The work holding method of the present invention is characterized in that, using the hanger, the work is held in a state of being pulled in the left-right direction by the pull-and-holding means, and then the upper part of the work is held by the upper fixed holding part. And According to this, it is possible to hold the work in a state where the work is pulled in the right and left direction reliably and well by the hanger.
In addition, the drying apparatus of the present invention includes the hanger, the drying chamber, and a workpiece supply device for holding the workpiece on the hanger and sending the hanger holding the workpiece to the drying chamber. According to this, even if it is a film-like workpiece | work, the drying apparatus which can prevent suitably deformation | transformation, such as a bending by a drying process and a wave, can be provided.
Further, the workpiece supply device holds the workpiece on the hanger by clamping the workpiece in a state of being pulled in the left-right direction by the tension clamping means and then clamping the upper portion of the workpiece by the upper fixed clamping portion. Features. According to this, it is possible to automatically hold the work in a state where the work is pulled in the right and left direction reliably and well.

  According to the present invention, even a workpiece that is film-like and highly flexible can be held well, and deformation such as bending and undulation of the workpiece in the drying process can be prevented well.

First, the outline of the drying apparatus according to the present invention will be described, and then the hanger and the like will be described in detail.
FIG. 4 is a side view schematically illustrating one embodiment according to the drying apparatus of the present invention. This drying apparatus is used in a drying process of a substrate 10 used in a package for a semiconductor device, and a drying chamber 12 into which drying air is introduced in a state where a hanger 14 holding substrates (workpieces) 10 is suspended. The substrate 10 is dried by moving and passing through the inside. In FIG. 1, the movement of the hanger 14 is represented by arrows H, C, F, and G, and the hanger 14 is used in a circulating manner. On the other hand, the movement of the substrate 10 is represented by arrows A, C, D, and E.

First, in the substrate supply device 18, as indicated by an arrow A, the substrates 10 that have been horizontally fed from the previous process by the supply conveyor or the like are held one by one on the hangers 14, and the hangers 14 that hold the substrates 10 are held. The operation of sequentially sending to the drying chamber 12 is performed. The hanger 14 holds and holds the rectangular thin plate-like substrate 10 from three directions (three directions that are the upper side and the left and right sides when the hanger 14 holding the substrate 10 is suspended in the drying chamber 12). .
The drying chamber 12 is provided adjacently and can generate heated and dried air, and dry air is introduced by a device (dry air blowing device (not shown)) that blows the air. Thereby, the substrate 10 is heated and / or dried. The air blow by the dry air blower collects and circulates the air introduced into the drying chamber 12, and a part of the air is supplied and exhausted. However, the air is circulated and can save energy.

In the drying chamber 12, a feeding device 22 that moves and passes through the drying chamber 12 in a state where a plurality of hangers 14 holding the substrate 10 are suspended is provided.
In the substrate discharging device 30, the substrate 10 is separated from the hanger 14 that has been sent through the drying chamber 12 by the feeding device 22. The substrate 10 removed from the hanger 14 is carried out in the direction of arrow E by the discharge conveyor.
On the other hand, the hanger 14 separated from the substrate 10 in the discharge device 30 is returned to the substrate supply device 18 by the return device 32 and moved in the drying chamber 12 after the substrate 10 is attached again.
The return device 32 is constituted by a chain 33 having an endless track, and is driven by a servo motor or the like.

Next, the hanger 14 used in the drying apparatus having the above configuration will be described in detail.
1 is a front view of the hanger 14, FIG. 2 is a right side view of the hanger of FIG. 1, and FIG. 3 is a plan view.
The hanger 14 holds the substrates 10 that are rectangular thin plate-like works one by one. The substrate 10 is used by being stacked to form a package for a semiconductor device.
As shown in FIG. 1, the hanger 14 has a rectangular frame main body 14 a corresponding to the shape of the rectangular thin plate-like substrate 10. Here, when the hanger 14 is suspended, the upper and lower parts of the frame-type main body 14a that are horizontal are referred to as an upper frame 14b and a lower frame 14e, respectively, and the left and right parts that are vertical are referred to as a left frame 14c and a right frame 14d.

More specifically, the frame main body 14a is configured by connecting rods in order to reduce the weight while securing the shape stability and the structural strength. The upper frame 14b is composed of two bars, a first upper side portion 91a and a second upper side portion 91b that is arranged in parallel to the first upper side portion 91a with a space inside the first upper side portion 91a. Has been. The left side frame 14c includes a first left side 92a and a second left side 92b that is disposed in parallel to the first left side 92a inside the first left side 92a with a space therebetween. It consists of a rod body. Similarly, the right side frame 14d includes a first right side 93a and a second right side 93b arranged in parallel to the first right side 93a with a space inside the first right side 93a. It is composed of two rods. Incidentally, the lower frame 14e is composed of a single rod.
The second left side 92b and the second right side 93b are respectively arranged so as to span between the first upper side 91a and the lower frame 14e, and the second upper side 91b is connected to the second left side 92b and the second left side 92b. 2 is arranged so as to be spanned between the right side portions 93b.

In addition, the frame-type main body 14a is formed with ears 14f and 14g for conveyance that protrude in the left-right direction from the left and right on the upper side. Specifically, both ends of the first upper side portion 91a protrude from the side portion frames 14c and 14d and are formed in the ear portions 14f and 14g.
Furthermore, the frame-type main body 14a is formed with projecting portions 14h and 14i that project in the left-right direction from the left and right sides on the lower side. Specifically, both ends of the lower frame 14e protrude from both side frames 14c and 14d to form protruding portions 14h and 14i.
The ear portions 14f and 14g and the projecting portions 14h and 14i are portions that are engaged with the moving body (the feeding operation portion 26, the receiving portion 34, etc.) when the hanger 14 is conveyed, and thereby the hanger 14 is It is transported (moved).

In addition, the hanger 14 supports the substrates 10 (or the substrate and the hanger that does not hold the substrate) held by the adjacent hangers 14 supported by the mounting portion 24 provided in the drying chamber 12. In order to prevent contact, a pair of spacing members 14j, 14k are provided at the left and right corners.
The size of the substrate 10 is set to be slightly larger than the inner periphery of the frame main body 14a. Accordingly, only the peripheral edge of the substrate 10 is abutted against and supported by the hanger 14. Thereby, the board | substrate 10 is suitably hold | maintained by the hanger 14 without damaging an internal wiring pattern.

Further, the hanger 14 is provided with an upper fixed holding portion fixed to the upper frame 14b of the frame main body 14a so that the upper portion of the substrate 10 can be clamped, and the substrate 10 provided in the frame main body 14a in the horizontal direction (arrow X There is a tension clamping means for clamping in a state pulled in the direction).
The tension clamping means is provided in the right side frame 14d so that the left side portion of the substrate 10 can be clamped and fixed to the left side frame 14c and the right side portion of the substrate 10 can be clamped. The movable holding portion is provided so as to be movable in the left-right direction (arrow X direction), and an elastic member that urges the movable holding portion in a direction away from the side fixed holding portion.
Specifically, the upper fixed clamping part is composed of two clips 15 fixed to the upper frame 14b, and the side fixed clamping part is composed of two clips 15 fixed to the left side frame 14c.
The movable clamping portion is fixed on the support portion 94 and a support portion 94 provided so as to be movable in the left-right direction (arrow X direction: a direction moving away from or approaching the left-side portion frame 14c) by the right side frame 14d. It consists of two clips 15.

The clip 15 includes a main body piece 15a, a clip piece 15b pivotally attached to the main body piece 15a, and a spring 15c that urges the clip 15b in a direction in which the clip 15b is always closed (see FIG. 2).
The clip 15 is fixed by the upper frame 14b and the both side frames 14c and 14d so that the opening / closing portion sandwiching the substrate 10 can be opened / closed inside the frame-type main body 14a so as to face the inside. Regarding the upper frame 14b, the clips 15 are fixed on two flat plates sandwiched and fixed between the first upper side 91a and the second upper side 91b, respectively. Similarly, for the left side frame 14c, the clips 15 are fixed on two flat plates sandwiched and fixed between the first left side 92a and the second left side 92b.

In the right side frame 14d, a support portion 94 having a width smaller than the interval between the first right side portion 93a and the second right side portion 93b is disposed so as to be movable in the left-right direction. Two clips 15 are fixed on the support portion 94 at intervals. Two insertion holes are formed in the support portion 94, and two support rods fixed between the first right side portion 93a and the second right side portion 93b are respectively inserted into the insertion holes. Thus, the support portion 94 is held so as to be movable in the left-right direction between the first and second right side portions 93a, 93b.
In addition, an elastic member is provided that constantly urges the movable holding portion including the support portion 94 and the two clips 15 in the direction away from the left side frame 14d (right direction). For example, the elastic member is formed of a compression coil spring 95 that is held by the support rod and is disposed between the support portion 94 and the second right side portion 93b.

Next, the substrate supply device 18 will be described in detail.
As shown in FIG. 6, the substrate supply device 18 supports the hanger 14 in the suspended vertical state so that the substrate 10 is held by the hanger 14 that is suspended and supported in the vertical state. A hanger support means 72, a substrate feeding means 74 that is a workpiece feeding means for feeding the substrate 10 to the hanger in a state where the substrate surface is vertical, and the hanger 14 holding the substrate 10 is fed into the drying chamber 12. And a mechanism.

  The hanger support means 72 is a lifting means 76 that lifts the hanger 14 that has been sent directly under the substrate supply device 18 by the return device 32 and lifts the hanger 14 to a height position that holds the substrate 10. An upper holding means 77 for holding the hanger 14 lifted by the means 76 in a fixed state at the upper part of the hanger 14 and a lower holding part 78 for holding it at the lower part of the hanger 14 are provided.

The lifting means 76 hooks and supports the two ear portions 14f and 14g of the hanger 14 so as to scoop from the lower side, and a pair of vertical movements provided on the left and right so as to be movable up and down along the linear vertical guide 76a. The support portion 76b and a drive mechanism that drives the vertical movement support portion 76b up and down are used as components.
The drive mechanism is composed of an endless track 76c that is a chain device elongated in the vertical direction and a drive motor 76d that is a drive means for driving the endless track 76c. 76b is fixed, and the vertical movement support portion 76b is driven up and down.
The slope guide 79 is a surface that guides the lower side of the hanger 14 so that it does not rise.

The upper holding means 77 holds the ears 14f and 14g of the hanger from above and below and holds them firmly (temporarily fixed).
Further, the lower holding means 78 is configured such that an interval corresponding to the thickness of the protruding portions 14h and 14i is provided by a restriction portion 78a on the front side in the feed direction and a restriction portion 78b on the rear side. Thereby, it can restrict | limit so that the protrusion parts 14h and 14i of the hanger 14 may not move to the feed direction of a hanger, and can hold | maintain the lower part of the hanger 14 suitably.

  Further, the substrate feeding means 74 includes a plurality of suction pads 80a for supplying the hanger 14 with the substrate 10 which has been horizontally fed from the previous process by a supply conveyor or the like as indicated by an arrow A (FIG. 4). An adsorbing means 80 for adsorbing and holding the substrate 10; a moving mechanism 81 for moving the adsorbing means 80; an abutting / separating means 82 for reciprocating the adsorbing means 80 in the horizontal direction so as to contact and separate from the hanger 14; The pressing device 83 that presses the outer side (rear end) of the clip 15 and the support portion 94 (the clip of the right side frame 14d) against the urging force of the elastic member in a direction (left direction) to approach the left side frame 14c. A moving device 96 (FIG. 7) is provided.

The moving mechanism 81 of the board feeding means 74 includes a vertically moving body 81b provided so as to be vertically movable along a linear vertical guide 81a, a drive mechanism for vertically driving the vertically moving body 81b, a horizontal portion, a curved portion, A hook-shaped guide 81c provided with a continuous vertical portion is used as a constituent element. The moving mechanism 81 includes an endless track 81d, which is a chain device that is long in the vertical direction, and a drive motor 81e, which is a driving means for driving the endless track 81d. Is fixed, and the vertical moving body 81b is driven up and down.
Further, a roller 80c fixed to the base 80b of the suction means 80 is fitted into the bowl-shaped guide 81c. Thereby, the adsorption | suction means 80 is guided so that the adsorption | suction surface may rise from a horizontal state, and may be in a vertical state.

  The contact / separation moving means 82 for moving the substrate feeding means 74 toward and away from the hanger 14 includes a cylinder device 82a for moving the suction means 80 toward and away from the substrate 80b, and a linear motion guide for guiding the contact / separation movement. 82b is a component. Thereby, the substrate 10 sucked and held in the vertical state by the sucking means 80 can be moved in the horizontal direction until it contacts the hanger 14.

  The pressing device 83 is configured by a plurality of cylinder devices that are fixed to the base portion 80 b and are provided corresponding to the number of the plurality of clips 15. The clip 15 can be opened by pressing the rear end of the clip 15 by extending the rod of the cylinder device. That is, the clip 15 is rotated so that the tip is opened against the urging force of the spring 15 c of the clip 15. The clip 15 can be closed by contracting the rod from this state. For the sake of explanation, the cylinder devices that press the two clips 15 of the upper frame 14b of the hanger 14 are the first and second cylinder devices, and the cylinder devices for the two clips of the left side frame 14c are the third and fourth cylinder devices. The two clip cylinder devices of the right side frame 14d are defined as fifth and sixth cylinder devices 83a and 83b (FIG. 9).

The moving device 96 includes a cylinder device 97. By extending the rod 97a of the cylinder device 97, the support device 94 is pressed against the urging force of the compression coil spring 95 to extend the support device 94 toward the left side frame 14c. Move left).
8 is a front view of the moving device 96, FIG. 9 is a side view, and FIG. 10 is a plan view for explaining the operation of the moving device 96. The cylinder device 97 of the moving device 96 is fixed to the base portion 80b and presses the support portion 94 through a crank mechanism 98 connected to the rod 97a. The crank mechanism 98 will be described. The rotating member 99 extending in the vertical direction is pivotally supported between the projecting portions 100, 100 extending in the horizontal direction from two locations of the base portion 80b. The rotating member 99 is rotatably connected to the tip of the rod 97a of the cylinder device 97 and the rod 97a at the center in the longitudinal direction. Further, two L-shaped members 101 are pivotally supported by the projecting portion 100 so as to be rotatable. The L-shaped member 101 is pivotally supported by the projecting portion 100 on one end side, and is connected to the end side of the rotating member 99 via a tension spring 102 on the other end side. According to the crank mechanism 98, when the rod 97a of the cylinder device 97 is extended as shown by the arrow in FIG. 10, the rotating member 99 is rotated, and accordingly, the two L-shaped members 101 are supported by the support portion 94. Rotate toward the side. Then, as the L-shaped member 101 rotates, the back surface of the L-shaped member 101 comes into contact with the protruding portion 94a of the support portion 94 protruding on the front side of the frame-shaped main body 14a, and further presses this. The support portion 94 moves in a direction approaching the left side frame 14 c against the urging force of the compression coil spring 95. Thus, the support portion 94 is pressed and moved at two locations by the two L-shaped members 101.

The operations of the pressing device 83 and the moving device 96 are as follows.
The six cylinder devices of the pressing device 83 are extended before the contact / separation means 82 is operated, and all the clips 15 are opened. At this time, the rod 97a of the moving device 96 stands by in a contracted state. Then, after the contacting / separating means 82 is actuated to bring the substrate 10 into contact with the hanger 14, first, the rods of the third and fourth cylinder devices are contracted to hold the left side portion of the substrate 10 with the clip 15. Thereafter, the rod 97a of the moving device 96 is extended, and the support portion 94 (that is, the clip 15 of the right side frame 14d) is moved in a direction approaching the left side frame 14c against the urging force of the compression coil spring 95. With the support portion 94 moved, the rods of the fifth and sixth cylinder devices 83a and 83b are contracted to hold the right side portion of the substrate 10 by the clip 15. Then, the rod 97a of the moving device 96 is contracted to release the pressure on the support portion 94, so that the support portion 94 is movable in the left-right direction. Then, the compression coil spring 95 urges and moves the support portion 94 in a direction away from the left side frame 14c. Thereby, the board | substrate 10 will be in the state pulled by the left-right direction. In this state, the rods of the first and second cylinder devices are contracted to hold the upper portion of the substrate 10 by the clip 15. In this way, the substrate 10 is held on the hanger 14 in a stretched state under a certain tension.
As described above, the pressing device 83 and the moving device 96 hold the substrate 10 in the state of being pulled in the left-right direction by the hanger 14, and then hold the upper portion of the substrate 10 by the upper fixed holding portion.

  With the above configuration, the substrate 10 can be held on the hanger 14 whose holding surface is held in a vertical state. That is, the substrate 10 can be held on the hanger 14 in a state where the substrate surface is parallel to the vertical holding surface of the hanger 14, that is, in a vertical state.

  The mechanism for sending the hanger 14 holding the substrate 10 into the drying chamber 12 includes a lifting device 84 that raises the hanger 14 to the height of the placement portion 24 via the upper holding means 77, and the hanger 14 on the placement portion 24. It is comprised from the cylinder apparatus 86 which presses so that it may slide and move up. According to this, the substrate 10 held by the hanger 14 so that the substrate surface is vertical can be carried into the entrance of the drying chamber 12. That is, the processing step for the substrate 10 can be suitably transferred from the previous step to the drying step.

Next, the feeding device 22 will be described in detail with reference to FIGS. 4 and 7.
The feeding device 22 includes a placement unit 24 and a feeding operation unit 26.
A plurality of hangers 14 are placed on the placement unit 24 in a row with a predetermined interval while holding the substrate 10.
The feeding operation unit 26 operates to send the plurality of hangers 14 intermittently by one pitch in the feeding direction. The feed actuating unit 26 moves upward to place the hanger 14, moves horizontally by one pitch in the feed direction by placing the hanger 14, moves downward to lower the hanger 14, and moves 1 in the direction opposite to the feed direction. It operates in the order of horizontal movement for the pitch.

Specifically, the mounting portion 24 is fixed to the base 11 of the drying device, the feeding operation portion 26 is held from above via the suspension member 26a, and is reciprocated in the vertical direction by the vertical movement means 27. C1 is reciprocated in the horizontal direction by the horizontal movement means 28. By combining the reciprocating motion C1 in the vertical direction and the reciprocating motion C2 in the horizontal direction, the feeding operation of the feeding actuating portion 26 (so-called box feeding) is performed, and a plurality of hangers 14 are simultaneously fed in the feeding direction (arrow C). ) To one pitch at a time. As a driving device for driving the feeding operation unit 26 in the vertical direction and the horizontal direction, a cam mechanism, a linear motion guide mechanism, a screw type driving mechanism, a synchronization mechanism using a rack and pinion, a chain or a timing belt, A known motion mechanism such as an electric motor or cylinder device as power may be selectively used.
As shown in FIG. 7, the hanger 14 is placed on the placement portion 24 by a pair of ear portions 14 f and 14 g, supported by the feeding operation portion 26, and sent. In addition, V-shaped concave portions are placed at regular intervals on the upper surface of the placement portion 24 and the feeding operation portion 26 on which the hanger 14 is placed so that the ear portions 14f and 14g are preferably positioned and do not slide sideways. It is formed corresponding to the number of hangers 14 to be used.

Next, the substrate discharging apparatus 30 will be described with reference to FIG.
The substrate discharging device 30 receives the hanger 14 holding the substrate 10 that has been intermittently transported on the mounting unit 24, separates the substrate 10 and the hanger 14, and discharges the substrate 10 in the horizontal direction.
The chuck transfer device 40 chucks the hanger 14, rotates 90 degrees while descending while holding the hanger 14 and the substrate 10, and positions the substrate 10 in a horizontal state.
The scraping device 38 is provided with a claw portion 38a so as to be reciprocally movable by a cylinder device 39, and the chucking device transfers the hanger 14 conveyed on the mounting portion 24 to the outlet of the drying chamber 12. The 40 chucks 42 are positioned by scraping. The tip of the claw portion 38a is a ratchet mechanism, and is configured to be locked when the hanger 14 is scraped, and to be rotated when moving in a direction opposite to the scraping direction.
The chuck transfer device 40 includes a guide pole 44 extending in the vertical direction, a guide groove 46 having a slope 46 a in the middle, a moving main body 45 that is fitted in the guide pole 44 and moves up and down, and a chuck that holds the hanger 14. 42, a holding plate 48 provided corresponding to the substrate 10 for holding the substrate 10 via the holding claws 48a and the like, and a movement attached to the holding plate 48 and movable along the guide groove 46 The configuration includes a roller 49 and the like.

The chuck 42 and the holding plate 48 are integrally provided and are rotatably mounted on the moving main body 45. Thereby, when the moving main body 45 is lowered, the moving roller 49 is guided by the guide groove 46 and can be suitably moved. The chuck 42 and the holding plate 48 are rotated 90 degrees, and the holding plate 48 is held horizontally. The As described above, the holding plate 48 is leveled and supported by the holding claws 48a attached to the holding plate 48, whereby the substrate 10 can be held horizontally as indicated by a two-dot chain line.
A chain mechanism is used as a driving means for moving the moving main body 45 up and down. Reference numeral 50 denotes a chain, which is connected to the moving main body 45. 51 is a sprocket, and a pair is arrange | positioned up and down so that the chain 50 may be hung around. An electric motor 52 is connected so as to rotationally drive the upper sprocket 51 by a chain.
As a driving means for opening and closing the chuck 42 and the holding claw 48a, a known driving device such as a cylinder device or a solenoid device may be selectively used.
Further, the holding means is not limited to the chuck 42 and the holding claws as in the present embodiment, and it is needless to say that suction means by vacuum (decompression) may be used.

Next, a mechanism for separating the hanger 14 and the substrate 10 and transferring them will be described.
The substrate 10 lowered and turned 90 degrees by the chuck transfer device 40 is received by the upper surface of the conveyor 54 raised by the cylinder device 53 which is a lifting device.
In this state, a release pressing device (not shown) and a release moving device (not shown) located below the hanger 14 are operated. Thereby, the holding of the substrate 10 by the clip 15 is released, the substrate 10 is removed from the hanger 14, and the substrate 10 is supported only by the conveyor 54. The release pressing device is constituted by a plurality of cylinder devices provided corresponding to the number of the plurality of clips 15 of the hanger 14. The clip 15 can be opened by pressing the rear end of the clip 15 by extending the rod of the cylinder device. For explanation, the cylinder devices for pressing the two clips 15 of the upper frame 14b of the hanger 14 are the seventh and eighth cylinder devices, and the cylinder devices for the two clips of the left side frame 14c are the ninth and tenth cylinder devices. The two clip cylinder devices of the right side frame 14d are referred to as eleventh and twelfth cylinder devices.
Further, the release moving device has a cylinder device, and the support portion 94 is pressed against the urging force of the compression coil spring 95 by pressing the support portion 94 of the hanger 14 by the extension of the rod of the cylinder device, and the left side frame 14c. Move it closer to

The operations of the release pressing device and the release moving device are as follows.
In the cylinder device of the release pressing device and the release moving device, the rod is contracted in the standby state.
The rods of the seventh and eighth cylinder devices are first extended with respect to the substrate 10 and the hanger 14 that are in a horizontal posture by the chuck transfer device 40, and the two clips 15 of the upper frame 14b are opened. Thereby, the upper part of the substrate 10 by the clip 15 is released. Next, the rod of the cylinder device of the release moving device is extended, the support portion 94 is pressed, and moves in a direction approaching the left side frame 14c. In this state, the rods of the ninth, tenth, eleventh, and twelfth cylinder devices are extended to open the four clips 15 on both the left and right sides of the substrate 10, and the clamping of both sides of the substrate 10 is released. Thereby, the board | substrate 10 is removed from the hanger 14, and the board | substrate 10 will be in the state supported only by the conveyor 54. FIG.
Then, the roller 54a of the conveyor 54 rotates and the board | substrate 10 is discharged | emitted. Thereafter, each cylinder device of the release pressing device and the release moving device returns to the standby state.
In this way, a method is employed in which the substrate 10 held on the hanger 14 in a state of being pulled in the left-right direction is released from being clamped by the left and right clips 15 after the left and right tensions are relaxed.

On the other hand, the hanger 14 that is lowered and turned 90 degrees by the chuck transfer device 40 is received and gripped by the vertically moving body 56 that can move up and down. In this state, after the substrate 10 is removed from the hanger 14, the hanger 14 is lowered in accordance with the downward movement of the up-and-down moving body 56 driven by the cylinder device 57 in a lying posture.
As a result, the hanger 14 is delivered to the receiving portion 34 for the hanger 14 fixed to the chain 33 of the return device 32. The hanger 14 delivered to the receiving portion 34 is transported to the substrate supply device 18 side when the return device 32 is driven.

FIG. 5 shows a moving process of the hanger 14 according to the embodiment described above.
First, in the substrate supply device 18, the substrate 10 supplied in the direction of arrow A is moved and raised in the direction of arrow B, and the hanger 14 is lifted and held in the direction of arrow H. Then, the substrate 10 is moved in the B1 direction and pressed against the hanger 14.
Next, the hanger 14 holding the substrate 10 moves in the direction of the arrow (hereinafter referred to as “hanging direction”) on the placement unit 24 in the direction of arrow C.

And the hanger 14 holding the board | substrate 10 is moved to the arrow D direction, and the hanger 14 and the board | substrate 10 are leveled by turning the hanger 14 90 degree | times. Therefore, the substrate 10 is separated from the hanger 14 (arrow D1), and the substrate 10 is discharged in the direction of arrow E. At this time, the substrate 10 is discharged from the state of being supplied to the substrate supply device 18 in an inverted state.
Next, the hanger 14 is lowered as indicated by the arrow F and transferred to the return device 32. In the return device 32, the hanger 14 is moved in the direction of arrow G and conveyed to the substrate supply device 18 side. Then, as described above, the hanger 14 is further raised as indicated by the arrow H, and is held at a height position for holding the substrate 10. Thereby, one cycle of the process concerning conveyance of one hanger 14 is completed. By repeating this cycle in sequence, a large number of substrates 10 can be efficiently conveyed and dried.

In this embodiment, the following effects can be obtained.
Since the board | substrate 10 is hold | maintained in the state pulled by the hanger 14, even if it is a flexible film-like thing, it can hold | maintain favorably. Thereby, the deformation | transformation of the board | substrate by a drying process can be prevented and a board | substrate with a sufficient dimensional accuracy can be provided.
Further, the hanger 14 is configured to hold the substrate 10 from above and from three directions in the left-right direction, so that it can pull the left and right effectively using gravity without resisting gravity, and effectively prevents bending. The substrate can be held well.
In addition, since the upper portion of the substrate is clamped after the substrate 10 is clamped in the left-right direction by the hanger 14, the substrate can be securely and satisfactorily pulled without being hindered by the clamping of the upper portion.
Further, when removing the substrate 10 from the hanger 14, the substrate 10 can be removed smoothly without applying an excessive tensile force to the substrate 10 by temporarily moving the support portion 94 to loosen the tension of the substrate 10.

As described above, the present invention has been variously described with reference to preferred embodiments. However, the present invention is not limited to these embodiments, and it goes without saying that many modifications can be made without departing from the spirit of the invention. is there. For example, you may change as follows.
The elastic member of the hanger is not limited to a compression coil spring, and may be a tension spring or the like.
In addition, instead of the conveyor 54, a reciprocating device for discharging that receives the substrate 10 by moving it up and down and linearly reciprocates in the feeding direction to discharge the substrate 10 may be provided.
Further, as the substrate feeding means 74, a plurality of suction means 80 having a plurality of suction pads 80a and a plurality of so as to be held on the hanger 14 in a state where the substrate 10 is stretched to prevent the substrate 10 from being waved or bent. The suction pad 80a may be provided with a displacement urging means that urges the suction pad 80a to displace outwardly while the substrate 10 is sucked. According to this displacement urging means, the substrate 10 can be suitably held by the hanger 14 while the substrate 10 is suitably stretched flat, and the accuracy of the substrate 10 can be further increased.
Further, the UV drying device may be integrally assembled on the upstream side or the downstream side in the substrate (workpiece) transport direction of the drying device.

It is a front view of a hanger. It is a right view of a hanger. It is a top view of a hanger. It is a side view which shows a drying apparatus typically. It is a side view explaining the movement of a hanger and a board | substrate. It is a side view of the supply apparatus of a board | substrate. It is a partial front view of a drying device. It is a front view of a moving apparatus. It is a side view of a moving apparatus. It is a top view explaining operation | movement of a moving apparatus. It is a side view of the discharge apparatus of a board | substrate. It is a front view of the conventional hanger.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Board | substrate 12 Drying chamber 14 Hanger 14a Frame type main body 14b Upper frame 14c Left side frame 14d Right side frame 14e Lower frame 15 Clip 18 Substrate supply device 94 Support part 95 Compression coil spring

Claims (5)

A hanger that holds and holds a rectangular thin plate-shaped workpiece from above and from the left and right sides,
A frame-type body,
An upper fixed clamping portion provided to be fixed to the upper frame of the frame-type main body so that the upper portion of the workpiece can be clamped;
A hanger provided on the frame main body and provided with a tension clamping means for clamping the workpiece in a state of being pulled in the left-right direction. The tension clamping means is
A side fixed holding portion provided to be fixed to one side frame of the frame-type main body so as to be able to hold one side of both sides of the workpiece;
A movable holding portion provided so as to be able to hold the other side portion of both side portions of the work and movable in the left-right direction to the other side frame of the frame-type main body;
2. The hanger according to claim 1, further comprising an elastic member that urges the movable holding portion in a direction away from the side fixed holding portion.   3. Holding a workpiece using the hanger according to claim 1 or 2, wherein the workpiece is clamped in the state of being pulled in the left-right direction by the tension clamping means, and then the upper portion of the workpiece is clamped by the upper fixed clamping portion. Method. The hanger according to claim 1 or 2,
A drying chamber;
A drying apparatus comprising: a work supply device for holding the work on the hanger and sending the hanger holding the work to the drying chamber. The workpiece supply device comprises:
5. The drying according to claim 4, wherein the workpiece is held in the state where the workpiece is pulled in the left-right direction by the pulling clamping means, and then the upper portion of the workpiece is clamped by the upper fixed clamping portion to hold the workpiece on the hanger. apparatus.

Images