JP2011167743A - Laser beam machine and holding device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser beam machine which can improve machining precision, and a holding device. <P>SOLUTION: Since the machine includes: a horizontal member 2 whose both edges are fixed to the first frame materials 101a, 101b of an XY stage 101 and further arranged in parallel with a fixed member 3; and a fastening member 4 of fastening the horizontal member 2 and the fixed member 3, when a driving apparatus 106 is shrinkedly driven, and the movable member 5 is moved, and tension is applied to a sheet W held by the fixed member 3 and the movable member 5, the tension can be applied from both the side edge parts of the sheet W whose both edges are held by the fixed member 3 and the movable member 5. Thus, the distorted elastic deformation of the sheet W can be prevented, the whole of the sheet of the deformation ratio in the sheet W can be correctly obtained, and the exact correct dimensions can be calculated. Thus, laser machining as the objective dimensions can be performed to the sheet W, and the machining precision of the sheet W can be improved. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a laser beam machine and a holding device, and more particularly to a laser beam machine and a holding device that can improve machining accuracy.

  A laser processing machine is used when performing fine processing on a workpiece made of a thin metal plate. The thin plate is attached to a holding device of a laser processing machine, held in tension, and processed by being irradiated with laser light while being moved in the XY direction. The applicant has previously developed a holding device that can hold a thin plate to be laser-processed in tension (Patent Document 1). Here, the technique disclosed in Patent Document 1 will be described with reference to FIG. FIG. 5 is a plan view of a conventional laser processing machine 100.

  In the laser processing machine 100, a processing head (not shown) for irradiating a thin plate with condensed laser light and a processing table (not shown) for sandwiching the thin plate W between the processing head are provided on a surface plate. In addition to being fixedly arranged, the XY stage 101 is attached to the surface plate so as to be movable in the XY directions. The XY stage 101 is formed in a substantially frame shape in plan view by connecting the ends of two first frame members 101a and 101b facing each other at a predetermined interval with two second frame members 101c and 101d. ing.

  The XY stage 101 is attached with a holding device that holds both ends of the thin plate W and holds the thin plate W. The holding device mainly includes a fixed member 102 and a movable member 103 arranged in parallel to the second frame members 101c and 101d, and a holding tool 104 arranged on the upper surface thereof. Both ends of the fixing member 102 are fastened and fixed to the moving member 105 by fastening bolts 102a, and are extended between the first frame members 101a and 101b via the moving member 105 along the inner side of the second frame member 101c. Yes. The moving member 105 is a member disposed on the upper surface of the first frame members 101a and 101b, and a guide groove (not shown) formed in the longitudinal direction (left and right direction in FIG. 5) of the first frame members 101a and 101b. The first frame members 101a and 101b can be fastened and fixed by rotating the handle 105a.

  The movable member 103 is provided along the inner side of the second frame member 101d, and both longitudinal ends (vertical end portions in FIG. 5) are configured to be slidable on the first frame members 101a and 101b. By changing the position of the moving member 105 fastened and fixed to the first frame members 101a and 101b, the interval between the fixed member 102 and the movable member 103 can be arbitrarily changed according to the size of the thin plate W to be held. it can. Thereby, the thin plate W of various lengths (left-right direction in FIG. 5) can be held.

  The driving device 106 is a device that applies tension to the thin plate W held by the fixed member 102 and the movable member 103. A cylinder 106a as a part of the driving device 106 is located outside the movable member 103 in the width direction of the XY stage 101, and is an imaginary line passing through the center of the XY stage 101 in the width direction (vertical direction in FIG. 5). One is arranged at a position symmetrical to each other. The cylinder 106 a is attached to the second frame member 101 d with the rod 106 b facing the movable member 103, and the distal end side of the rod 106 b is connected to the side surface of the movable member 103. As a result, when the cylinder 106a is operated and the rod 106b is contracted, the movable member 103 is attracted to the cylinder 106a side (right side in FIG. 5) by the contracting force, and tension is applied to the thin plate W. W is held by the fixed member 102 and the movable member 103 in a tensioned state.

JP 2004-160495 A

  However, in the above prior art, the fixed member 102 is fixed to the first frame members 101a and 101b at both ends via the moving member 105 and spanned between the first frame members 101a and 101b. It is connected to the second frame member 101d through a cylinder 106a. Therefore, when the cylinder 106a is driven to contract and the movable member 103 is moved to apply tension to the thin plate W, the thin plate W is obliquely connected to the end of the fixed member 102 (moving member 105) and the driving device 106 (see FIG. The force acts in the direction indicated by the arrow in FIG. Thereby, especially the edge part vicinity along the 1st frame materials 101a and 101b of the thin board W elastically deforms irregularly.

  Here, the laser processing is performed in a state in which the cylinder 106a is extended and contracted to apply tension to the thin plate W, and after the laser processing, the cylinder 106a is driven to extend to release the tension, and the thin plate W returns to the state before the tension. . If the thin plate W is uniformly elastically deformed at a predetermined deformation ratio by applying tension, laser processing is performed based on a correction dimension obtained by multiplying the target dimension by the deformation ratio, so that the tension is released and elastic. The recovered thin plate W is processed according to the target dimension.

  On the other hand, in the prior art, an oblique force indicated by an arrow in FIG. 5 acts on the thin plate W, and the vicinity of the edge of the thin plate W is elastically deformed irregularly, so that the deformation ratio in the vicinity of the edge becomes irregular. For this reason, it is difficult to calculate an accurate correction dimension. Therefore, the thin plate W cannot be processed according to the target dimension, and there is a problem that the processing accuracy of the thin plate W, particularly the processing accuracy in the vicinity of the edge portion is lowered.

  The present invention has been made to solve the above-described problems, and an object thereof is to provide a laser processing machine and a holding device that can improve processing accuracy.

Means for Solving the Problems and Effects of the Invention

  In order to achieve this object, according to the laser processing machine of claim 1, a transverse member having both ends fixed to the first frame member and juxtaposed to the fixing member, and the transverse member and the fixing member are provided. The fastening member is fastened. When the drive device is contracted to move the movable member and tension is applied to the fixed member and the thin plate held by the movable member, both ends are held by the fixed member and the movable member. Tension can be applied from both side edges of the thin plate. Therefore, it is possible to prevent the thin plate from being elastically deformed in an irregular manner and to improve the processing accuracy.

  According to the laser processing machine of claim 2, the fastening member and the driving device are positioned such that a plurality of straight lines connecting the fastening position of the fastening member in the fixing member and the connecting position of the movable member of the driving device are parallel to each other. Therefore, when the movable member is moved by contraction driving the drive device and tension is applied to the thin plate held by the fixed member and the movable member, the parallel direction connecting the fastening member and the drive device to the thin plate is provided. Force can be applied to Thereby, in addition to the effect which the laser processing machine of Claim 1 shows, there exists an effect which can improve processing accuracy further.

  According to the laser processing machine of the third aspect, since the lateral member is arranged in parallel on the side where the fixed member and the movable member are located and on the side away from the movable member of the fixed member, the thin plate is tensioned. The rigidity of the fixing member can be increased with respect to the direction of the force acting sometimes.

  In addition, since the fastening member is arranged with its axis line along the direction orthogonal to the longitudinal direction of the fixed member and the movable member, the direction of the force acting when tensioning the thin plate and the axis line of the fastening member are arranged. The direction can be matched. Thereby, it can prevent that a bending stress acts on a fastening member, and can increase the rigidity of a fixing member. As a result, deformation of the fixing member is suppressed, and tension can be uniformly applied to the thin plate. As a result, in addition to the effect produced by the laser beam machine according to claim 1 or 2, there is an effect that machining accuracy can be improved.

  According to the laser processing machine of the fourth aspect, since the transverse member includes the web and the flange, the bending rigidity can be improved while reducing the weight of the transverse member. Thereby, in addition to the effect which the laser processing machine in any one of Claims 1-3 shows, since a holding device can be reduced in weight, it is possible to miniaturize the moving device of the XY stage which moves in a plane. In addition, the energy required to drive the moving device can be reduced, and the energy saving performance can be improved.

  According to the holding device of the fifth aspect, there is an effect equivalent to that of the holding device used in the laser processing machine according to any one of the first to fourth aspects.

It is a top view of the laser beam machine in a 1st embodiment of the present invention. It is sectional drawing of the holding | maintenance apparatus in the II-II line | wire of FIG. It is the principal part side view of the holding device seen from the arrow III direction of FIG. It is sectional drawing of the holding | maintenance apparatus of the laser beam machine in 2nd Embodiment. It is a top view of the conventional laser beam machine.

  Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view of a laser beam machine 1 according to the first embodiment of the present invention. In addition, the same code | symbol is attached | subjected about the part same as the conventional laser processing machine 100, and the description is abbreviate | omitted. Moreover, in FIG. 1, description of the vicinity of the center in the longitudinal direction of the first frame members 101a and 101b is omitted.

  As shown in FIG. 1, the laser beam machine 1 includes an XY stage 101 that is attached to a surface plate (not shown) so as to be movable in the XY direction, and a holding device 20 that is attached to the XY stage 101. . The XY stage 101 is a device that is horizontally moved in a plane orthogonal to the optical axis of the laser light emitted from the machining head (not shown) toward the thin plate W. The holding device 20 includes a transverse member 2, a fixed member 3, and a movable member 5 that are disposed in parallel to the second frame members 101 c and 101 d, and a holding tool 10 that is disposed on the upper surface of the fixed member 3 and the movable member 5. Is a device that holds the thin plate W by sandwiching both ends of the thin plate W.

  The horizontal member 2 is constructed between the first frame members 101a and 101b along the inner side of the second frame member 101c, and the second frame member 101c of the moving member 105 disposed on the upper surface of the first frame members 101a and 101b. Both ends are fastened and fixed by fastening bolts 6 on the side (left side in FIG. 1).

  Both ends of the fixing member 3 are placed on the moving member 105 and are disposed along the side surface of the lateral member 2 on the second frame member 101d side (right side in FIG. 1). The fixing member 3 is located at two positions symmetrical to an imaginary line (not shown) passing through the center of the XY stage 101 in the width direction (vertical direction in FIG. 1) on the second frame member 101d side of the fixing member 3 ( A through-hole 3a is formed to penetrate from the side surface on the right side in FIG. 1 to the side surface on the lateral member 2 side (left side in FIG. 1). A through hole 2c communicating with the through hole 3a is formed to penetrate from the side surface of the lateral member 2 on the fixing member 3 side (right side in FIG. 1) to the side surface on the second frame member 101c side (left side in FIG. 1). The fixing member 3 and the lateral member 2 are fastened and fixed by a fastening member 4 inserted through the through holes 3a and 2c.

  The movable member 5 is disposed along the inner side of the second frame member 101d, and both end portions can slide on the guide surface (not shown) of the guide member 7 fixed to the first frame members 101a and 101b. It is configured. The cylinder 106a of the driving device 106 is attached to the second frame member 101d with the rod 106b facing the movable member 5, and one end side of the link 106c is pivotally coupled to the tip of the rod 106b. Yes. On the other hand, a stay member 106d fastened to the side surface of the movable member 5 is pin-coupled to the other end side of the link 106c so as to be swingable.

  Thereby, when the cylinder 106a is operated and the rod 106b is contracted, the movable member 5 is drawn to the cylinder 106a side (right side in FIG. 1) by the contraction force, and tension is applied to the thin plate W. Therefore, the thin plate W can be held by the fixed member 3 and the movable member 5 in a tensioned state. Further, both end portions in the longitudinal direction of the movable member 5 are held on the guide surface of the guide member 7 so as to be slidable in the front-rear and left-right directions, and the movable member 5 is connected to the cylinder 106a through two links 106c. Therefore, even if the thin plate W is fixed in a slightly slack state, the movable member 5 can be tilted in the horizontal direction to tension the thin plate W.

  In this way, both ends are fixed to the first frame members 101a and 101b via the moving member 105 and the lateral member 2 arranged in parallel with the stationary member 3, and the fastening for fastening the lateral member 2 and the stationary member 3 together. When the driving device 106 is driven to contract and the movable member 5 is moved to apply tension to the fixed member 3 and the thin plate W held by the movable member 5, the fixed member 3 and the movable member 5 are provided. Tension can be applied to the thin plate W held at both ends thereof from both side edges. Therefore, it is possible to prevent the thin plate W from being elastically deformed. Thereby, the deformation ratio of the thin plate W can be accurately obtained for the entire thin plate W, and an accurate correction dimension can be calculated. Therefore, the thin plate W can be subjected to laser processing according to the target dimension, and the processing accuracy of the thin plate W can be improved.

  Further, the fastening member 4 and the driving device 106 are connected to the fastening position (A shown in FIG. 1) of the fastening member 4 on the fixing member 3 and the connecting position (shown in FIG. 1) of the driving device 106 (stay member 106d) to the movable member 5. Two straight lines L (virtual lines) connecting B) are arranged in parallel to each other. As a result, when the driving device 106 is contracted to move the movable member 5 and tension is applied to the thin plate W held by the fixed member 3 and the movable member 5, the fastening member 4 and the driving device 106 are attached to the thin plate W. Since the force is applied in the connecting parallel direction (the direction of the white arrow shown in FIG. 1), the processing accuracy can be further improved.

  Further, the lateral member 2 is arranged in parallel in the plane where the fixed member 3 and the movable member 5 are positioned and on the side of the fixed member 3 away from the movable member 5 (the second frame member 101c side). The rigidity of the fixing member 3 can be increased with respect to the direction of the force acting when the thin plate W is tensioned, as compared with the case where a transverse member is provided side by side on the bottom side of the member 3 (the back side in FIG. 1). Thereby, since the deformation | transformation of the fixing member 3 is also suppressed, tension | tensile_strength can be uniformly given to the thin plate W, and a processing precision can be improved.

  The holding tool 10 includes an elongated plate-like receiving member 11 disposed along the edges of the fixed member 3 and the movable member 5, a pressing member 12 disposed on the upper portion of the receiving member 11, and the pressing member 12. And a tightening tool 13 for applying a pressing force. Four fasteners 13 are arranged on the fixed member 3 and the movable member 5 at positions symmetrical with respect to an imaginary line (not shown) passing through the center of the XY stage 101 in the width direction (vertical direction in FIG. 1). Has been.

  Next, detailed configurations of the lateral member 2 and the holding tool 10 will be described with reference to FIG. FIG. 2 is a cross-sectional view of the holding device 20 taken along line II-II in FIG. As shown in FIG. 2, the transverse member 2 is formed of angle steel having a substantially L-shaped cross section having a web 2a and a flange 2b. The web 2 a is positioned on the side surface of the fixing member 3 on the second frame member 101 c (see FIG. 1) side, and the flange 2 b is positioned on the bottom surface of the fixing member 3. A through hole 2c is formed in the web 2a, the fastening member 4 is inserted, and the fixing member 3 is fastened and fixed. Since the transverse member 2 has the web 2a and the flange 2b, the secondary moment can be increased, and the transverse member 2 can be reduced in weight while increasing the bending rigidity.

  That is, since the plane of the web 2a is orthogonal to the moving direction of the driving device 106 (see FIG. 1) and the plane of the flange 2b is parallel, the bending rigidity of the transverse member 2 can be improved. Thereby, since the holding device 20 can be reduced in weight, the moving device (not shown) of the XY stage 101 (see FIG. 1) that moves in plane can be reduced in size, and the moving device can be driven. Energy required for the operation can be suppressed, and energy saving can be improved. Further, since the horizontal member 2 is disposed so that the flange 2b is positioned on the bottom surface of the fixing member 3, the horizontal member 2 can be along the side surface and the bottom surface of the fixing member 3, and the horizontal member 2 and the fixing member The space occupied by 3 can be reduced.

  Further, the fastening member 4 does not fasten the fixed member 3 with the flange 2b, but fastens the fixed member 3 with the web 2a, so that the axis of the fastening member 4 is fixed to the fixed member 3 and the movable member. 5 (see FIG. 1) is arranged along a direction (left and right direction in FIG. 1) orthogonal to the longitudinal direction. As a result, the direction of the force acting when tensioning the thin plate W can be matched with the direction of the axis of the fastening member 4. Thereby, it can prevent that a bending stress acts on the fastening member 4, and the rigidity of the fixing member 3 can be enlarged. Therefore, deformation of the fixing member 3 is suppressed, tension can be uniformly applied to the thin plate W, and processing accuracy can be improved.

  Next, the clamping tool 10 that clamps the thin plate W will be described. As shown in FIG. 2, the holding tool 10 includes a receiving member 11 having a mounting surface 11a on which the thin plate W is mounted, and a pressing member 12 having a pressing surface 12a facing the longitudinal direction of the mounting surface 11a. Configured.

  The receiving member 11 includes a wall portion 11b erected on the rear end side (left side in FIG. 2) of the mounting surface 11a, and an upper step portion 11c that is connected to the upper end of the wall portion 11b and formed in a step shape with the mounting surface 11a. A biasing member (not shown) for biasing the presser member 12 upward is accommodated in a hole (not shown) recessed in the upper step portion 11c. Since the pressing member 12 is urged upward by the urging member, a gap can be provided between the mounting surface 11a and the pressing surface 12a. When the thin plate is held by the holding device 20, first, the thin plate W may be inserted into the gap, so that the operation can be easily performed.

  The receiving member 11 is fixed by a bolt or the like in the vicinity of the inner edge (right side in FIG. 2) of the upper surface of the fixing member 3, and the mounting surface 11 a extends in the longitudinal direction of the receiving member 11 (in FIG. 2). The right side is longer than the width of the thin plate W (the vertical direction in FIG. 1). At the inner end of the mounting surface 11a, a protrusion 11d formed in a ridge shape is provided so as to protrude upward in the longitudinal direction.

  The wall portion 11b is erected on the rear end side (left side in FIG. 2) of the mounting surface 11a in the longitudinal direction (perpendicular to the paper surface in FIG. 2) of the receiving member 11, and the upper portion is on the inner side (right side in FIG. 2). ) And protruding. Since the upper portion of the wall portion 11b protrudes from the lower portion, when the thin plate W is inserted between the mounting surface 11a and the pressing surface 12a of the pressing member 12, the tip of the inserted thin plate W gets over the wall portion 11b. Is prevented. In addition, if the thin plate W gets over the wall part 11b, when the pressing member 12 is pressed to the receiving member 11, the front-end | tip of the thin plate W will be bent by the wall part 11b or the upper step part 11c. Laser processing of the thin plate W may be performed by irradiating a laser beam from one surface of the thin plate W and then cutting it, and then turning the thin plate W upside down and engraving letters or the like on the opposite surface with the laser beam. If the tip is bent, it becomes difficult to sandwich the inverted thin plate W, and it is necessary to prevent this.

  The upper step portion 11c is a portion that is connected to the upper end of the wall portion 11b and is formed in a stepped shape with the mounting surface 11a, and has holes (not shown) at two locations near both ends (vertical direction in FIG. 1) of the receiving member 11. Is recessed. A biasing member that biases the pressing member upward is accommodated in the hole. Thus, since the urging member (not shown) is accommodated in the upper step portion 11c formed in a step shape with the mounting surface 11a by the wall portion 11b, the thin plate W is interposed between the receiving member 11 and the pressing member 12. When inserting the thin plate W, the thin plate W is obstructed by the wall portion 11b and cannot reach the biasing member. Therefore, it is possible to prevent the urging member from being damaged due to the end of the thin plate W hitting.

  The presser member 12 is formed with a concave groove 12b in which the upper step portion 11c of the receiving member 11 is accommodated in the longitudinal direction. A concave groove 12b is formed in the pressing member 12, and the upper step portion 11c of the receiving member 11 is accommodated in the concave groove 12b. Therefore, it is possible to prevent the pressing member 12 from being displaced in the short direction (left and right direction in FIG. 2) with respect to the receiving member 11.

  The pressing surface 12a is formed in the longitudinal direction on the inner side (right side in FIG. 2) from the concave groove 12b. The pressing surface 12 a is a portion that is pressed against the mounting surface 11 a of the receiving member 11. The length of the pressing surface 12a in the longitudinal direction is longer than the width of the thin plate W in the direction orthogonal to the relative movement direction (left and right direction in FIG. 2) of the movable member 5 (see FIG. 1). Accordingly, the thin plate W can be sandwiched between the pressing surface 12a of the pressing member 12 and the mounting surface 11a of the receiving member 11 without distortion. As a result, variation in the deformation of the thin plate W along the longitudinal direction of the receiving member 11 can be prevented, and the processing accuracy can be improved.

  As shown in FIG. 2, the length of the pressing surface 12a in the short direction (left and right direction in FIG. 2) is formed smaller than the length of the mounting surface 11a in the short direction. Thus, after the thin plate W is placed on the mounting surface 11a of the receiving member 11, the pressing surface 12a of the pressing member 12 is pressed against the thin plate W to sandwich the thin plate W, so that the thin plate W protrudes from the mounting surface 11a. 11d is contacted. Thereby, when the cylinder 106a (refer FIG. 1) is driven and the thin plate W is tensioned, the component force of the tension acts on the pressing surface 12a and the mounting surface 11a. As a result, since the frictional resistance between these surfaces and the thin plate W can be increased, the tensioned thin plate W is prevented from slipping and coming out from between the pressing surface 12a and the mounting surface 11a.

  In the fastener 13, a pressing body 13 a that presses the upper portion of the pressing surface 12 a formed on the pressing member 12 is attached to the link 13 b, and the link 13 b is pin 13 d to the bracket 13 c fixed to the upper surface of the fixing member 3. It is connected with. Further, the handle 13e is connected to the link 13b by a pin 13f, and is connected to the bracket 13c by a pin 13h through the link 13g. Thereby, when the handle 13e is pushed down, the pressing body 13a presses the pressing member 12, and the thin plate W inserted between the mounting surface 11a and the pressing surface 12a is held. Further, when the handle 13e is raised upward, the link 13b rotates counterclockwise and the pressurizing body 13a moves upward, so that the presser member 12 is raised by the urging force of the urging member, and the mounting surface 11a A gap is formed on the pressing surface 12a. As a result, in order to sandwich the thin plate W between the mounting surface 11a and the pressing surface 12a, the thin plate W can be inserted therebetween.

  The restricting portion 14 is a member that restricts the upward movement amount of the presser member 12 biased upward, and is disposed at two locations near both ends (the vertical direction in FIG. 1) of the presser member 12 ( (See FIG. 1). In the present embodiment, the restricting portion 14 is formed of a bolt having a shaft portion and a head portion, and is a through hole (not shown) formed through in the thickness direction (vertical direction in FIG. 2) of the pressing member. ) And the shaft portion is screwed to the receiving member 11. The outer diameter of the head is set to be larger than the inner diameter of the through hole, and as a result, the upper surface of the presser member 12 abuts on the lower surface of the head, thereby restricting further upward movement of the presser member 12. Is done.

  Next, the moving member 105 to which the lateral member 2 (see FIG. 1) is fastened and fixed will be described with reference to FIG. FIG. 3 is a side view of the main part of the holding device 20 as seen from the direction of arrow III in FIG. In FIG. 3, the description of the fixing member 3 in the longitudinal direction and the description of the transverse member 2 are omitted.

  As shown in FIG. 3, a hole in which a thread is formed on the inner periphery of the side surface 105 b on the second frame member 101 c (see FIG. 1) side of the moving member 105 disposed on the upper surface of the first frame member 101 a. The part 105c is perforated. Through holes corresponding to these holes 105c are formed in the horizontal member 2 (see FIG. 1) and fastened and fastened with fastening bolts 6 (see FIG. 1), the horizontal member 2 is fixed to the moving member 105. Since the lateral member 2 has a flange 2b (see FIG. 2) along the bottom surface of the fixing member 3, the side surface 105b of the moving member 105 is used so that the flange 2b does not hinder the fixing to the moving member 105. A recess in which the flange 2b is accommodated is provided, or the flange 2b is partially removed only at the moving member 105.

  The end of the moving member 105 on the front side (right side in FIG. 3) is formed in a step shape having vertical surfaces 105d and 105f and horizontal surfaces 105e and 105g. On the other hand, the end of the fixed member 3 is also formed in a stepped shape having vertical surfaces 3b, 3d and horizontal surfaces 3c, 3e corresponding to the shape of the end of the moving member 105. The horizontal surfaces 3 c and 3 e at the end of the fixed member 3 abut on the horizontal surfaces 105 e and 105 g at the end of the moving member 105, so that both ends of the fixed member 3 are placed on the moving member 105. In this way, the fixing member 3 is fastened and fixed to the horizontal member 2 by the fastening member 4, and both ends are mounted on the moving member 105. Therefore, the fixing member 3 does not shake in the vertical direction (vertical direction in FIG. 3). It is stably fixed to the member 2.

  In addition, since the vertical surfaces 3 b and 3 d at the end of the fixed member 3 and the vertical surfaces 105 d and 105 f at the end of the moving member 105 are not in close contact with each other, a gap is formed. It is prevented from being restrained, and when the cylinder 106a (see FIG. 1) is driven to contract, force is prevented from acting on the thin plate W in an oblique direction connecting the end of the fixing member 3 (moving member 105) and the cylinder 106a. it can. Thereby, the edge part vicinity along the 1st frame materials 101a and 101b of the thin plate W is prevented from being elastically deformed irregularly.

  Next, a second embodiment will be described with reference to FIG. FIG. 4 is a sectional view of the holding device 30 of the laser beam machine according to the second embodiment. In addition, the same code | symbol is attached | subjected about the part same as 1st Embodiment, and the description is abbreviate | omitted. In the first embodiment, the case where the transverse member 2 is formed of angle steel, the web 2a is fixed to the side surface of the fixing member 3, and the flange 2b is disposed along the bottom surface of the fixing member 3 has been described. .

  In contrast, the second embodiment is common in that the transverse member 22 is formed of angle steel and the web 22a of the transverse member 22 is fixed to the side surface of the fixing member 3, but the flange is the same. The difference is that 22b protrudes to the second frame member 101c (see FIG. 1) side (left side in FIG. 4). Due to this difference, it is not necessary to design the bottom surface of the fixing member 3 in consideration of the provision of the flange 22b, so that the degree of freedom in designing the fixing member 3 can be improved. Further, it is not necessary to partially remove the flange 22b in relation to the moving member 105, and the mounting of the lateral member 22 is easy.

  The present invention has been described above based on the embodiments. However, the present invention is not limited to the above embodiments, and various improvements and modifications can be made without departing from the spirit of the present invention. It can be easily guessed. For example, the numerical values (for example, the quantity of each component) given in the above embodiment are examples, and other numerical values can naturally be adopted.

  In each of the above embodiments, two fastening members 4 are disposed on the fixed member 3 and two driving devices 106 are disposed at corresponding positions on the movable member 5 (the fastening member 4 and the driving device 106 are connected to each other). However, the present invention is not necessarily limited to this, and other forms are possible. As another form, for example, when two or more fastening members 4 are arranged, the driving device 106 is shown with an imaginary line (not shown) passing through the center of the XY stage 101 in the width direction (vertical direction in FIG. 1). And a plurality of fastening members 4 and driving devices 106 are arranged in a symmetrical manner with respect to an imaginary line passing through the center of the XY stage 101 in the width direction. It is also possible to set up. Also in these cases, both ends of the fixing member 3 are prevented from being restrained by the first frame members 101a and 101b, and the thin plate W is prevented from being deformed.

  In each of the above-described embodiments, the case where the transverse members 2 and 22 are formed of angle-shaped steel having an L-shaped cross section has been described. However, the present invention is not necessarily limited to this, and other transverse members can naturally be employed. It is. Other transverse members include, for example, solid prismatic or hollow rectangular members, or various shapes including webs and flanges such as H-shaped steel, I-shaped steel, groove-shaped steel, and Z-shaped steel. Can be mentioned. Moreover, it is not restricted to a shape steel, It is also possible to employ | adopt the member in which the flange and the web were formed with the iron plate, the steel plate, etc. by bending process, welding, etc.

  In each of the above-described embodiments, the case where the lateral members 2 and 22 are fixed to the first frame members 101a and 101b via the moving member 105 has been described. However, the present invention is not necessarily limited thereto, and fastening bolts or the like are used. It is also possible to fix both ends of the lateral members 2 and 22 directly to the first frame members 101a and 101b.

  In each of the above embodiments, the case where the fastening member 4 is formed of a bolt and a nut has been described. However, the present invention is not necessarily limited thereto, and other fastening members other than bolts and nuts such as fasteners may be used. Of course it is possible.

  In each of the above embodiments, the case where the end of the moving member 105 and the end of the fixed member 3 are provided with vertical surfaces 105d, 105f, 3b, 3d and horizontal surfaces 105e, 105g, 3c, 3e formed in a staircase shape will be described. However, the present invention is not necessarily limited to this, and the vertical plane and the vertical plane can be inclined with respect to the horizontal direction and the vertical direction. This is because, if the fixed member 3 is not restrained by the moving member 105 with respect to the horizontal load, the same actions and effects as those in the above embodiments can be obtained.

DESCRIPTION OF SYMBOLS 1 Laser processing machine 2,22 Horizontal member 2a, 22a Web 2b, 22b Flange 3 Fixed member 4 Fastening member 5 Movable member 20,30 Holding device 101 XY stage 101a, 101b 1st frame material 101c, 101d 2nd frame material 106 Drive Equipment W Thin plate

Claims (5)

A processing head that irradiates a thin plate as a workpiece with a laser beam and a plane that moves in a direction perpendicular to the optical axis of the laser beam irradiated from the processing head and that faces each other at a predetermined interval. In a laser processing machine including an XY stage including a first frame member and a second frame member, and a holding device disposed on the XY stage and holding the thin plate,
The holding device is
A fixing member for holding one end of the thin plate;
A movable member that holds the other end opposite to one end of the thin plate held by the fixed member and is movably disposed along the first frame member;
A driving device for connecting the movable member to the second frame member and energizing the movable member to apply tension to the thin plate;
Both ends are fixed to the first frame member, and a transverse member arranged in parallel to the fixing member;
A laser processing machine comprising: a fastening member that fastens the transverse member and the fixing member.   The fastening member and the drive device are disposed at a plurality of locations of the fixed member and the movable member, and a fastening position of the fastening member on the fixed member and a connection position of the drive device on the movable member are defined. 2. The laser beam machine according to claim 1, wherein the plurality of straight lines to be connected are arranged at parallel positions. The lateral member is arranged in parallel on the side of the fixed member away from the movable member in a plane where the fixed member and the movable member are located.
The laser beam machine according to claim 1, wherein the fastening member has an axis line disposed along the straight line.   The laser processing machine according to claim 1, wherein the lateral member includes a web and a flange.   A holding device used in the laser processing machine according to claim 1.

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