JP2001289563A - Drier - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a drier capable of preventing a work from being corrugated or curved, maintaining precisions including flatness of the work and conveying a plurality of the works densely so as to dry the same efficiently in a drying process of a sheet-like work. SOLUTION: A hanger 14 is formed, when being hung, in a frame which is constituted so as to hold the work 10 from at least three sides containing a horizontal top side 14b and left and right sides 14c, 14d vertical to the top side. A clip 15 is provided for clipping and holding the work 10 on the respective sides 14b, 14c, 14d corresponding to the above three sides.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a drying apparatus.

[0002]

2. Description of the Related Art As a conventional drying device, as shown in FIG. 11, a device in which a plurality of work receiving frames 62, which are members for holding a work, are fixed to an endless track 60 composed of a chain or the like is practical. Has been The work 64 is held between the work receiving frames 62 passing through the upper surface, and the work 6
4 is dried by being conveyed while being exposed to hot air in the drying chamber 66. However, the above work receiving frame 62
Is not suitable for a work in which the area that can be contacted for support is small, for example, a substrate for a semiconductor device or the like.
When the work is a substrate for a semiconductor device or the like and is thin and flexible, the work is likely to bend, so that the work 64 is supported and held by receiving the work 64 from below like the work receiving frame 62. It is basically difficult to do. An endless track 6 is provided immediately below the work 64 held in the work receiving frame 62.
Since the movement mechanism by zero is located, the flow of the drying air is restricted, and efficient drying is difficult. For this purpose, it is effective to suspend and transport the work 64.

However, when the above-described conventional mechanism is used (when a hanger serving as a workpiece holding member is fixed to the endless track 60 and a hanger passing below the endless track 60 is used), the operation of the endless track 60 itself is performed. The mechanism of the endless track 60 serves as a large dust source, such as dust generated by the endless track 60 and dust generated by sliding contact with the configuration in which the endless track 60 contacts and supports so as not to bend. As a result, the drying room is contaminated. The pollution from this dusting
This is a very serious problem in the technical field of precision processing. For example, when the workpiece is a substrate for forming a semiconductor device package, the semiconductor device package
Because the semiconductor chip is mounted and fixed,
It is necessary to work in a clean space without dust (high clean air). In the manufacturing process of the substrate, a photographic or printing technique is applied, but in that case, a heating and drying process is essential. Of course, a high degree of cleanliness (high air cleanliness) is also required for the drying chamber in the heating / drying process. For this reason, the hot air supplied to the drying chamber is cleaned by passing through a filter (HEPA filter) having high cleaning efficiency.

In the case where a hanger, which is a work holding member, is fixed and used on an endless track, the work is held when the hanger passes below, and the return hanger naturally passes above. The height of the device is increased. For this reason, it cannot be installed properly in a factory where the height of the installation space of the manufacturing equipment is limited. further,
When the hanger is fixed on the endless track, it is difficult to maintain and manage the hanger, and it is difficult to freely set the form of the hanger itself. In response to this, there is a drying apparatus developed by the inventor of the present invention and disclosed by Japanese Patent Application Laid-Open No. H11-294955. Since the drying device is a background art of the present invention, it will be described in detail below.

(Background Art) FIG. 12 is a side view schematically illustrating a background art relating to a drying apparatus of the present invention.
3 is a partial front view thereof. This drying apparatus is used in a step of drying a substrate used for a package for a semiconductor device. Numeral 12 denotes a drying chamber via a hanger 14 for holding the substrate 10 which is a thin plate-shaped work in a suspended state.
This is a space where the substrate 10 is passed and dried. As shown in FIG. 13, the drying chamber 12 is provided adjacent to the drying chamber 12, and can generate heated and dried air, and the drying air is blown by a device (dry air blowing device 20) that blows the air. be introduced. Thereby, the substrate 10 is heated and / or dried. The air blown by the dry air blower 20 collects and circulates the air inserted into the drying chamber 12 and a part of the air is supplied and exhausted.

The hanger 14 is attached to the substrate 10 with a clip 15.
Is held in a suspended state. The hanger of this background technology is
As shown in FIG. 13, the band-shaped member is bent in a key shape at both ends thereof, both ends are formed in a lug 14 a for conveyance, and a pair of clips 15 are fixed so as to be openable and closable below. By providing the hanger 14 in this manner,
Although it has a simple configuration, it can suitably cope with automation. Further, since the hangers 14 are placed and not fixed, and can be handled independently of each other, the maintenance management is easy, and the hangers 14 can be easily replaced.

Reference numeral 18 denotes a substrate supply device which holds the substrate 10 on the hanger 14 and sends the substrate 10 to the drying chamber 12.
The substrate supply device 18 of the background art is indicated by an arrow A (FIG. 12).
The substrate 10 which has been horizontally fed from the previous process by the supply conveyor or the like is held on the hanger 14 as shown in FIG.
It is carried into the entrance of the drying chamber 12 as shown by the arrow B so as to be suspended via the elevating member which is raised by the elevating device. Thereby, the processing steps for the substrate 10
It is possible to suitably shift from the previous step to the drying step. The substrate supply device has substantially the same configuration as the substrate discharge device shown in FIG. 14, and will be described later in detail.

Reference numeral 22 denotes a feeder, which is disposed in the drying chamber 12 and on which a plurality of hangers 14 are placed in a row at predetermined intervals while holding the substrate 10. In order to place a plurality of hangers 14 and feed them one pitch at a time in the feed direction, they move up, move horizontally one pitch in the feed direction, move down, and move horizontal one pitch in the direction opposite to the feed direction. And a feed operating section 26 that operates in the order of. As shown in FIG. 13, the hanger 14 is mounted on the mounting portion 24 by a pair of ear portions 14 a, and is sent while being supported by the feeding operation portion 26.

In the feeder 22 of the background art, the receiver 2
4 is fixed to the base 11, and the feed operating portion 26 is
It is held from above by the suspending member 26a, and is vertically reciprocated C1 by the vertical movement means 27 and horizontally reciprocated C2 by the horizontal movement means 28. By combining the reciprocating motion C1 in the vertical direction and the reciprocating motion C2 in the horizontal direction, the feeding operation of the feeding operation unit 26 (so-called box feeding) as described above is performed.
4 can be simultaneously sent in the feed direction (arrow C) by one pitch. As described above, in the drying apparatus according to the present invention, since the plurality of hangers 14 are transported by box feed, dust generation at the top can be significantly reduced, and this is effective for processing the substrate 10 which requires processing in a high clean space. is there.

Reference numeral 30 denotes a substrate discharging device, and the feeding device 2
By 2, the holding of the hanger 14 sent in the drying chamber 12 on the substrate 10 is released, and the hanger 14 and the substrate 10 are separated. Substrate discharging device 30 of the background art
The substrate D sent in a state of being suspended through a hanger 14 in the drying chamber 12 and reaching the outlet of the drying chamber 12 is moved through an elevating member descending by an elevating device by an arrow D (FIG. 1).
Transfer as shown in 2), make it horizontal, and use arrow E
As shown in Figure 2 Thereby, the processing step for the substrate 10 can be suitably shifted from the drying step to the next step. Details of the substrate discharging device 30 are as follows.
This will be described later with reference to FIG.

Reference numeral 32 denotes a return device, which is a substrate discharge device 3
The hanger 14 separated from the substrate 10 by 0 is operated to return to the substrate supply device 18. The return device 32 of the background art is constituted by a chain 33 which is an example of an endless track, is driven by a servomotor or the like, and preferably returns the hanger 14 to the substrate supply device 18.
That is, the hanger 14 of the substrate discharging device 30 and the substrate 1
The hanger 14 is lowered from the position where it is separated from 0 as shown by the dotted arrow F, and is placed on the receiving portion 34 provided on the chain 33. And that hanger 1
4 is sent to the substrate supply device 18 side by the drive of the chain 33 as shown by the dotted arrow G, and the receiving portion 34
From the substrate supply apparatus 1 as shown by the arrow H in FIG.
8 is sent to a position where the substrate 10 is held by the hanger 14.

Next, a substrate discharging device 30 and a substrate supplying device will be described with reference to FIG. FIG. 14 is a side view for explaining the details of the discharge device 30 for a substrate as a work. The substrate discharging device 30 receives the substrate 10 intermittently conveyed on the mounting portion 24 and the hanger 14 holding the substrate 10, separates the substrate 10 from the hanger 14, and moves the substrate in the horizontal direction. Discharge to
Reference numeral 40 denotes a chuck transfer device which chucks the hanger 14 and rotates 90 degrees while descending while holding the hanger 14 and the substrate 10 to position the substrate 10 in a horizontal state.

Numeral 38 denotes a scraping device, in which a claw portion 38a is provided so as to be reciprocally movable by a cylinder device 39. , Chuck transfer device 40
To the chuck 42 of FIG. Claw part 38
The tip of a is a ratchet mechanism, and hanger 1
4 is locked so that it can be swung when it is moved in a direction opposite to the direction in which it is swung.
The chuck transfer device 40 includes a guide pole 44 extending in a vertical direction, and a guide groove 4 having a slope 46a at an intermediate portion.
6, a moving main body 45 which is fitted on a guide pole 44 and moves up and down, a chuck 42 which holds the hanger 14,
A holding plate 48 provided corresponding to the substrate 10 for holding the substrate 10 via holding claws 48a and the like, and a moving roller 49 attached to the holding plate 48 and movable along the guide groove 46, etc. Is provided.

The chuck 42 and the holding plate 48 are provided integrally and are rotatably mounted on the moving body 45. As a result, when the moving main body part 45 descends, the moving roller 49 is guided by the guide groove 46 and can be suitably moved, the chuck 42 and the holding plate 48 are rotated 90 degrees, and the holding plate 48 is held horizontally. You. As described above, by holding the holding plate 48 horizontally and supporting it by the holding claws 48a attached to the holding plate 48, the substrate 10 can be held horizontally as indicated by a two-dot chain line. In the background art, a chain mechanism is used as a driving unit that moves the moving main body 45 up and down. Reference numeral 50 denotes a chain, which is connected to the moving body 45. Reference numeral 51 denotes a sprocket, and a pair of upper and lower sprockets are provided so that the chain 50 can be wound around. Reference numeral 52 denotes an electric motor, which is connected to rotate the upper sprocket 51 by a chain. A known driving device such as a cylinder device or a solenoid device may be selectively used as a driving means for opening and closing the chuck 42 and the holding claw 48a. Also, as the holding means,
Not limited to the chuck 42 and the holding claw as in the present embodiment, it is a matter of course that suction means by vacuum (reduced pressure) may be used.

Next, a mechanism for separating the hanger 14 and the substrate 10 and transferring them will be described. The substrate 10 that is lowered and rotated by 90 degrees by the chuck transfer device 40 is received by the upper surface of the conveyor 54 that is raised by the cylinder device 53 that is a lifting device.
In this state, the rod 55a of the cylinder device 55 for clip release located below the clip 15 of the hanger 14
Is extended, the clip 15 is pushed, and the clip of the substrate 10 by the hanger 14 is released.
It becomes a state supported only by. Then, the roller 54a of the conveyor 54 rotates, and the substrate 10 is discharged.

The hanger 14, which is lowered and turned by 90 degrees by the chuck transfer device 40, is received and gripped by a swivel receiving portion 58 attached to a vertically movable body 56 which can move up and down by 180 degrees. You. Then, the turning receiving portion 58 turns by 180 degrees and descends with the downward movement of the vertical moving body 56 driven by the cylinder device 57. Thereby, the hanger 14
The hanger 14 fixed to the chain 33 of the return device 32
To the receiving portion 34 for use. And
The hanger 14 transferred to the receiving portion 34 by the release of the grip of the turning receiving portion 58 is conveyed to the substrate supply device 18 side by driving the return device 32.

The substrate discharging device 30 discharges the suspended hanger 14 and the substrate 10 in a horizontal state and separates the hanger 14 and the substrate 10 from each other. It can be suitably used as the device 18.
In the case of the substrate supply device 18 according to the background art, the hanger 14 is supplied in a state where the hanger 14 faces the first direction.
This is different from the substrate discharging device 30 in that a function of rotating the substrate 4 by 180 degrees is not required. As described above, the configuration of the substrate supply device 18 is basically the same as the configuration of the substrate discharge device 30, and a description thereof will be omitted.

Next, the drying step of the substrate 10 will be described with reference to FIGS. 15 and 16 which focus on the moving step of the hanger 14. FIG. 15 shows a moving process of the hanger 14 according to the embodiment described above. The hanger 14 includes a main body piece 15a and the main body piece 15a.
The clip 15 includes a clip piece 15b rotatably mounted on a and a spooling 15c for urging the clip piece 15b in a direction in which the clip piece 15b is always closed. First, in the substrate supply device 18, the substrate 10 is supplied in the direction of arrow A, and the hanger 14 is positioned in a direction in which the substrate 10 can be clipped (hereinafter, referred to as a "basic direction"). Next, the hanger 14 holding (clipping) the substrate 10 moves on the placement unit 24 in the direction of the arrow C in the direction in which it is hung (hereinafter, referred to as “hanging direction”).

When the hanger 14 holding the substrate 10 moves in the direction of arrow D, the hanger 14
At the same time, the substrate 10 is leveled and placed on the substrate discharging device 30. Then, the substrate 10 is separated from the hanger 14 and the substrate 10 is discharged in the direction of arrow E. At this time, the substrate 10 is discharged in a state where the substrate 10 is inverted from the state where it is supplied to the substrate supply device 18. In addition, the hanger 14 is oriented in an inversion direction which is inverted by 180 degrees from the basic orientation. Next, the hanger 14 is reversed as shown by the arrow F1 to return to the basic direction, further descends in the direction of the arrow F2, and delivered to the return device 32. In the return device 32, the hanger 14 is moved in the direction of arrow G and transported to the substrate supply device 18 side. Then, the hanger 14 is further raised as shown by the arrow H, returns to the initial position, and one cycle of the process of transporting one hanger 14 is completed. By repeating this cycle sequentially, many substrates 10 can be efficiently transported and dried. According to the transport operation described above, the substrate 10 can be discharged in a state where the substrate 10 is inverted from the state in which the substrate 10 is supplied.

Next, another pattern relating to the drying process of the substrate 10 will be described with reference to FIG. The moving process of the hanger 14 shown in FIG. 16 differs from the example of FIG. 15 in the transfer pattern of the substrate discharge device 30, and the other transfer patterns are the same. Portions of the same transport pattern as in the example of FIG. 15 are denoted by the same symbols (arrows) and description thereof is omitted. When the hanger 14 holding the substrate 10 is carried out of the drying chamber 12 and moves in the direction of arrow DX, the hanger 14 rotates 90 degrees clockwise, and the substrate 10 is leveled to discharge the substrate. It is placed on the device 30. Then, the substrate 10 is separated from the hanger 14 and the substrate 10 is discharged in the direction of the arrow EX. At this time, the substrate 10
Is discharged in the same state as the state where the front and back sides are supplied to the substrate supply device 18. In addition, hanger 14
Has returned to the basics. Next, the hanger 14 descends as shown by the arrow F, is transferred to the return device 32, and can return to the initial position via the return device 32 as in the example of FIG. According to the above-described transport operation, the substrate 10 is placed on the substrate supply device
8 can be discharged in the same state as the state supplied.

[0021]

However, in the drying apparatus according to the background art described above, only the upper end (upper side), which is one side of the substrate 10, is held by the clips 15 (two). If the thickness is further reduced, the substrate 10 may be wavy or bent, and the accuracy of the substrate 10 cannot be maintained.
In addition, when the distance between the adjacent substrates 10 is reduced in the drying apparatus, the lower ends of the substrates 10 are deformed and come into contact with each other. That is, when the substrate 10 is in the form of a thin sheet having a thickness of, for example, about 50 μm, the rigidity of the substrate 10 itself is lost and the substrate 10 is easily deformed. The surface (or back surface) of the material of the substrate 10 is easily affected by the difference in the coefficient of thermal expansion or the coefficient of thermal shrinkage from the layer formed from a different material such as a wiring or an insulating portion by various treatments. Easier to do. For this reason, if the drying process is performed while holding only one side of the substrate 10, the accuracy of the substrate 10, including its flatness, is reduced, and the substrate 10 is efficiently (dense) in the drying device. Cannot be transported. Note that the meaning of “dry” described above includes that the surface changes from a viscous, sticky state to a dry state, or that the solvent evaporates. For example, a thermosetting resin may be cured by being heated by warm air. In addition, depending on a resin material (including an insulating resin material and a conductive resin material) having photocurability, such as a resist ink or a silver paste, which is printed on the substrate 10, the UV may be applied before the thermal drying or after the thermal drying. Drying also had to be performed. In this case, when a UV drying device is incorporated into a drying device main body that feeds the substrates 10 individually held on a plurality of hangers 14 at a pitch and heat-drys the substrates, the substrates 1 are mounted one by one.
In order to irradiate the UV light on both sides of the sheet and to dry it, it is necessary to synchronize with the feeding operation of the apparatus main body side, and it is necessary to ensure the operation consistency so as not to interfere with the transport mechanism of the feeding apparatus main body side. Was.

Therefore, an object of the present invention is to prevent the work from waving or bending in the drying process of the thin plate-like work, to maintain the accuracy including the flatness of the work properly, and to improve the accuracy of the work. Drying equipment that can convey the product densely and dry efficiently, and UV depending on the type of work
It is an object of the present invention to provide a drying device that can realize a smooth feeding operation even when the drying device is incorporated.

[0023]

To solve the above-mentioned problems, the present invention has the following arrangement. In other words, the drying device according to the present invention includes a hanger for holding a rectangular thin plate-shaped work in a suspended state, a work supply device for holding the work on the hanger and feeding the work to the drying chamber, and a longitudinal direction of the drying chamber. A mounting portion that is provided and is mounted in a row at predetermined intervals while a plurality of hangers each hold a work,
In order to intermittently feed in the feed direction with a plurality of hangers, move upward to put the hangers, move horizontally in the feed direction with the hangers, move down to lower the hangers, level in the opposite direction to the feed direction. A feed device having a feed operating portion that operates in the order of movement, and a release device that releases the holding of the hanger sent by the feed device on the work to separate the hanger from the work, and discharges the work from the drying chamber. A drying device comprising a discharge device and a return device for sending a hanger separated from the work by the discharge device for the work to a supply device for the work, wherein the hanger is vertically suspended from a horizontal upper side when the hanger is hung. A frame is provided so as to hold the work from at least three sides including the left and right sides, and each side of the three sides has a clip holding the work therebetween. Wherein the is provided.

[0024] Further, since two clips are provided for each side, the work can be held by the hanger in a well-stretched state with good balance.

Further, the work supply device includes a hanger supporting means for suspending and supporting the returned hanger, and a work feeding means for sending the work to the hanger suspended and held vertically. With that,
The work can be suitably held by the hanger. That is, according to the work supply apparatus, the work can be held on the hanger in a state of being suspended along the direction of gravity. For this reason, the work can be held by the hanger in a suitably stretched state while preventing the work from being bent by gravity.

The work feeding means includes a suction means having a plurality of suction pads and a contact means for moving the work to the hanger while holding the work on the suction pad while holding the work by suction. By providing the separating means, it is possible to hold the work on the hanger in a stretched state so that the work is not wavy or bent.
In the case where the suction pad is provided with a displacement urging means for urging the work to be displaced outward while the work is being sucked, the work can be accurately transferred to the hanger and held.

Further, the hanger is provided with a spacing member so as to prevent the works held by adjacent hangers supported by the mounting portion from contacting with each other, so that a plurality of works can be conveyed densely. It can be dried efficiently.

When a UV drying device is integrally mounted on the upstream or downstream side of the drying device main body in the work transfer direction, an ultraviolet-curable resin material constituting a substrate is dried as an example of the work. It can be used for drying various substrate materials, and versatility is improved.
Further, the UV drying device is provided with a suspending portion for suspending the hanger in the middle of the mounting portion, and the UV drying device is provided on both sides of the work held by the hanger suspended by the suspending portion.
The UV irradiation is efficiently performed by the light irradiation unit performing the scanning and the UV drying while irradiating the UV light. In this case, the feeding device for feeding the hanger in pitches is provided with a feeding means for transferring only the leading hanger to the hanging portion in synchronization with the horizontal feeding operation, and a hanger for holding the work previously dried in UV. Since the sending means is provided for receiving and sending, the throughput can be improved.

[0029]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is a side view schematically illustrating one embodiment of a drying apparatus according to the present invention, and FIG. 2 is a partial front view thereof. 3 is a front view illustrating an embodiment of the hanger, FIG. 4 is a right side view of the hanger of FIG. 3, FIG. 5 is an enlarged sectional view taken along line AA of FIG. 3, and FIG. 7 is a plan view of the hanger of FIG. 3, and FIG. 8 is a cross-sectional view of CC of FIG. This drying apparatus is used, for example, in a step of drying a substrate used in a package for a semiconductor device as described above. This embodiment is based on the invention of the background art shown in FIGS. 12 to 16, and the same components as those of the background art are denoted by the same reference numerals and description thereof is omitted.

Reference numeral 14 denotes a hanger, which holds the substrate 10, which is a rectangular thin plate-shaped work, in a suspended state. The substrates 10 are stacked and used, for example, to form a semiconductor device package of about 50 μm.
The hanger 14 of the present embodiment is, as shown in FIGS.
The horizontal upper side 14b and the vertical left and right sides 1 when suspended
4c, 14d are provided in a frame shape so as to hold the substrate 10 via at least three sides, and the three sides 14b, 14d
Each of c and 14d is provided with a clip 15 for holding the substrate 10 therebetween. Further, in the present embodiment, as shown in FIG. 3, the clip 15 is connected to each side 14b, 14c, 1
Two pieces are provided for each 4d. Accordingly, the substrate 10 can be held by the hanger 14 in a well-balanced state in a suitably stretched state.

In the form of the hanger of this embodiment, as shown in FIG. 3, a rod-shaped member is bent at both ends into a key shape.
Both ends are formed on the transporting ears 14a, 14a.
An upper side 14b is provided below the both ears 14a, 14a, and a left side 14c and a right side 14d are provided on the left and right sides so as to extend downward perpendicular to the upper side 14b. A lower side 14e extending parallel to the upper side 14b is provided below the left and right sides 14c and 14d, and both ends of the lower side 14e protrude left and right similarly to the ears 14a.
4f and 14f. The ears 14a, 14a at the upper ends and the protrusions 14f, 14f are portions that are engaged with the moving body (the feed operating unit 26, the receiving unit 34, and the like) when the hanger 14 is transported. Thus, the hanger 14 is transported (moved).

As described above, the hanger 14 of this embodiment is
It has ears 14a, 14a and protrusions 14f, 14f, and is basically formed in a rectangular frame 16 corresponding to the shape of the substrate 10. In addition, the upper side 14b and the left and right sides 14c and 14d are provided in parallel in a plane and doubly provided with a rod-shaped material in order to sufficiently secure the shape stability and the structural strength. Further, the size of the substrate 10 is such that the upper side 14 b and the left and right sides 14
It is set slightly larger than the inner circumference of the rectangular frame formed by the inside of c and 14d and the lower side 14e. Therefore, the substrate 10 is supported by being contacted only with the hanger 14 at the peripheral edge. Thereby, the substrate 10 is suitably held without damaging the internal wiring pattern and the like.

Each clip 15 has a side 14b, 14c,
It is provided on 14d facing inward. More specifically, a clip 15 is fixed on a flat plate portion 16a fixed on each of the double sides 14b, 14c, and 14d so as to receive and support the peripheral edge of the substrate 10. Although the hanger 14 is provided as described above, the configuration is simple, but it is possible to suitably cope with automation. Further, the hanger 14 is mounted, and is not fixed to a moving body (infinite track) as in the related art.
Since each can be handled independently, maintenance management is easy, and replacement can be easily performed. In addition, the form of the hanger 14 is not limited to the one that holds the three sides of the substrate 10 by the clip 15 as in the present embodiment, and may be formed to hold the four sides from the entire surface. Of course.

The hangers 14 of the present embodiment include the substrates 10 supported by the mounting portion 24 and held between adjacent hangers 14 (or the hanger 14 that does not hold the substrate 10 and the substrate 10). To prevent contact
A pair of spacing members are provided on the left and right at upper and lower corners. 70
a is an upper spacing member, a pair of which is provided on the left and right;
Reference numeral 0b denotes a lower space member, and a pair is provided on the left and right. With these spacing members 70a and 70b, the movement is regulated by mutual contact, and it is possible to prevent the adjacent hangers 14 from swinging relatively largely. For example, the hanger 14 can be suitably juxtaposed at intervals of about 40 mm on the substrate 10 having a side of about 500 mm. Further, since the substrate 10 is suitably held and held by the plurality of clips 15, adjacent substrates do not bend and interfere with each other. Thereby, contact between the substrate 10 and an adjacent hanger 14 that does not hold the substrate 10 can be suitably prevented. By providing the spacing members 70a and 70b in this manner, the plurality of substrates 10 can be transported densely and can be efficiently dried. Further, since the interval between the plurality of hangers 14 can be suitably reduced, the size of the apparatus can be reduced.

Reference numeral 18 denotes a substrate supply device, which is a device for holding the substrate 10 on the hanger 14 and feeding the work to the drying chamber 12. The substrate supply device 18 is provided with hanger support means 72 for supporting the hanger 14 in a suspended vertical state so as to hold the substrate 10 on the hanger 14 suspended and supported in a vertical state.
And a substrate feeding means 7 for feeding the substrate 10 to the hanger 14 so that the surface of the substrate 10 is vertical.
4 and the hanger 14 holding the substrate 10
And a mechanism for feeding the inside.

The hanger support means 72 of this embodiment scoops up the hanger 14 sent directly below the substrate supply device 18 by the return device 32 and raises the hanger 14 to a height position at which the hanger 14 holds the substrate 10. The hanger 14 includes a lifting unit 76, an upper holding unit 77 that holds the hanger 14 lifted by the lifting unit 76 in a fixed state above the hanger 14, and a lower holding unit 78 that holds the hanger 14 below the hanger 14.

The lifting means 76 supports the pair of ears 14a, 14a of the hanger 14 by hooking them so as to scoop them from below, and a pair of right and left movably provided along a linear vertical guide 76a. The vertical movement support portion 76b and a drive mechanism for vertically driving the vertical movement support portion 76b are constituent elements. The drive mechanism includes an endless track 76c, which is a chain device that is long in the vertical direction, and a drive motor 76d, which is a driving unit that drives the endless track 76c. 76b is fixed, and the vertical movement support portion 76b is driven up and down. Reference numeral 79 denotes a slope guide, which guides the lower side 14e of the hanger 14 so as not to float.

The upper holding means 77 of this embodiment holds the both ears 14a, 14a of the hanger 14 from above and below in a vertical direction to hold (temporarily fix) them strongly. Also,
The lower holding means 78 of the present embodiment is configured such that an interval corresponding to the thickness of the protruding portions 14f, 14f is provided by a regulating portion 78a on the front side in the feeding direction and a regulating portion 78b on the rear side in the feeding direction. I have. Thereby, the protrusions 14f, 14f of the hanger 14 can be restricted so as not to move in the feed direction of the hanger 14, and the lower part of the hanger 14 can be suitably held.

The substrate feeding means 74 of this embodiment is
As shown in FIG. 9, a plurality of suction pads 80a are provided as shown in FIG. 9 to supply the hanger 14 with the substrate 10 which has been horizontally fed from the previous process by a supply conveyor or the like as shown by an arrow A (FIG. 1). The suction means 80 for holding the suction means 10, a moving mechanism 81 for moving the suction means 80, a contact / separation means 82 for reciprocating the suction means 80 in the horizontal direction to contact / separate the hanger 14, and the clip 15 are opened. Clip 15
And a pressing device 83 for pressing the outside (rear end) of the device.

The moving mechanism 81 of the substrate feeding means 74 includes an up-down moving body 81b provided to be able to move up and down along a linear up-down guide 81a, a driving mechanism for driving the up-down moving body 81b up and down, And a hook-shaped guide 81c in which a vertical portion and a vertical portion are continuously provided. The moving mechanism 81 includes an endless track 81d, which is a chain device arranged in a vertically long direction, and a drive motor 81e, which is a driving means for driving the endless track 81d. Is fixed, and the vertical moving body 81b is driven up and down. A roller 80c fixed to the base 80b of the suction means 80 is fitted in the hook-shaped guide 81c. Thus, the suction means 80 is guided so that the suction surface thereof rises from the horizontal state to the vertical state.

The contact / separation means 82 for moving the substrate feeding means 74 toward and away from the hanger 14 guides the cylinder device 82a for moving the suction means 80 toward and away from the base 80b, and guides the contact and separation movement. The linear motion guide 82b is a component. As a result, the adsorption means 80 adsorbs the liquid in a vertical state.
The held substrate 10 can be moved in the horizontal direction until it comes into contact with the hanger 14. Further, the pressing device 83 of the substrate feeding means 74 is constituted by a plurality of cylinder devices fixed to the base portion 80 b and provided in correspondence with the number of the plurality of clips 15. When the pressing device 83 extends before the contact / separation moving means 82 operates, the clip 15 is opened by pressing the rear end thereof. That is, the clip 15 is rotated so that the distal end is opened against the urging force of the spooling 15c of the clip 15. Then, the contact / separation moving means 82 operates to move the substrate 10 to the hanger 14.
After the contact, the pressing device 83 contracts, so that the substrate 10 is sandwiched by the clips 15,
The substrate 10 is held on the hanger 14.

With the above configuration, the substrate 10 can be held on the hanger 14 whose holding surface is held vertically. In other words, in a state where the substrate surface is parallel to the vertical holding surface of the hanger 14, that is, in a vertical state, the substrate 1
0 can be held by the hanger 14. Therefore, the substrate 10 is held on the hanger 14 in a state where the substrate surface is suspended in a direction parallel to the direction of gravity. According to this, it is possible to prevent the gravity from acting on the substrate 10 so as to cause the substrate 10 to bend, and to hold the substrate 10 on a hanger in a suitably stretched state.

The mechanism for feeding the hanger 14 holding the substrate 10 of the present embodiment into the drying chamber 12 includes a hanger 14.
And a cylinder device 86 that presses the hanger 14 so as to slide and move the hanger 14 onto the mounting portion 24 via the upper holding means 77. ing. According to this, the substrate 10 held by the hanger 14 so that the substrate surface is vertical
Can be carried into the entrance of the drying chamber 12. That is, the processing step for the substrate 10 can be suitably shifted from the previous step to the drying step.

The substrate feeding means 74 includes a suction means 80 having a plurality of suction pads 80a,
A plurality of suction pads 80a are biased so as to be displaced outward while holding the substrate 10 so that the substrate 10 is held on the hanger 14 in a state where the substrate 10 is stretched to prevent the substrate 10 from waving or bending. An urging means may be provided. According to this displacement urging means, the substrate 10 can be suitably held by the hanger 14 in a state where the substrate 10 is suitably stretched, and the accuracy of the substrate 10 can be suitably maintained.
Further, once, the upper side 12b and the left and right sides 14c, 14d
After the substrate 10 is held upright on the hanger 14 in the upright state by all the clips 15 provided on the upper side 12b, the other than the clips 15 provided on the upper side 12b are opened again, and the substrate 10 Once fully extended, it may be sandwiched and held again. This also makes use of the force of gravity, which is slightly weaker. However, the substrate 10 can be suitably held in a stretched state, and the accuracy of the substrate 10 can be maintained appropriately.

Reference numeral 22 denotes a feeder, which is disposed in the drying chamber 12 and on which a plurality of (plural) hangers 14 are placed in a row at predetermined intervals while holding the substrate 10. In order to intermittently feed a plurality of hangers 14 in the feed direction one pitch at a time, the ascending movement for mounting the hangers 14, the horizontal movement of one pitch in the feed direction with the hangers 14 mounted, and the hanger 14 A feed operation unit 26 that operates in the order of descending movement for lowering and horizontal movement for one pitch in a direction opposite to the feed direction. As shown in FIG. 2, the hanger 14 is mounted on the mounting portion 24 by a pair of ear portions 14a, and is sent while being supported by the feed operating portion 26.
In addition, the hanger 14 of the placing section 24 and the feed operating section 26
On the upper surface on which is mounted, V-shaped concave portions are formed corresponding to the number of hangers 14 placed at regular intervals so that the ear portions 14a are suitably positioned and do not slide sideways. Although a large number of substrates 10 are hung on the mounting portion 24,
In FIG. 1, it is omitted.

In the feeding device 22 of the present embodiment, the mounting portion 24
Is fixed to the base 11, the feed operating section 26 is held from above via a suspending member 26 a, and is vertically reciprocated C 1 by vertical moving means 27, and is horizontally moved by horizontal moving means 28. Is reciprocated C2. By combining the reciprocating motion C1 in the vertical direction and the reciprocating motion C2 in the horizontal direction, the feeding operation of the feeding operation unit 26 (so-called box feeding) as described above is performed.
4 can be simultaneously sent in the feed direction (arrow C) by one pitch. As described above, in the drying apparatus according to the present invention, since the plurality of hangers 14 are transported by box feed, dust generation at the top can be significantly reduced, and this is effective for processing of the substrate 10 which requires processing in a high clean space. is there. In addition, as a drive device for driving the feed operation portion 26 of the feed device 22 in the vertical direction and the horizontal direction, a cam mechanism, a linear motion guide mechanism, a screw drive mechanism, a rack and pinion, a chain or a timing belt, or the like is used. A known motion mechanism, such as a synchronous mechanism, an electric motor or a cylinder device as power, may be selectively used.

Reference numeral 30 denotes a substrate discharging device,
By 2, the holding of the hanger 14 sent in the drying chamber 12 on the substrate 10 is released, and the hanger 14 and the substrate 10 are separated. The substrate discharge device 30 of the present embodiment
As shown by an arrow D (FIG. 1), the substrate 10 sent in a state of being suspended through a hanger 14 in the drying chamber 12 and reaching the outlet of the drying chamber 12 is moved through an elevating member lowered by an elevating device. To a horizontal position, and arrow E
As shown in (1), it is carried out by the reciprocating device for discharge. Thereby, the processing step for the substrate 10 can be suitably shifted from the drying step to the next step.

The substrate discharging device 30 has basically the same function as the discharging device 30 of FIG. 14 described in the background art, and has a common configuration. So, below,
The points different from the discharging device 30 of FIG. 14 will be described, and the description of the common configuration and the operation thereof will be omitted.
In the substrate discharging device 30 of the present embodiment, the hanger 14 is placed on the receiving portion 34 of the return device 32 in a state where the hanger 14 is lowered without being turned over. For this reason,
It does not have the swivel receiving portion 58 that inverts by 180 degrees as in the background art, but includes a vertically moving body that simply receives and receives the hanger 14 and moves up and down. Further, instead of the conveyor 54 of the discharge device 30 in FIG. 14, a discharge reciprocating device that receives the substrate 10 by moving it up and down, linearly reciprocates in the feed direction and discharges the substrate 10 is provided.

The return device 32 of this embodiment is basically configured in the same way as the return device 32 of the background art, and the hanger 14 separated from the substrate 10 by the substrate discharge device 30 is supplied to the substrate supply device. It operates to return to the device 18.
However, the return device 32 of the present embodiment is configured to move the substrate 10 transferred by driving the chain 33 as shown by a dotted arrow G.
Is transferred to the lifting means 76, and is different from the return device of the background art. In addition, the lifting means 76 lifts the hanger 14 to a height position for holding the substrate 10 by scooping up, as described above. If a chain mechanism is used for the return device 32, automation can be suitably performed with a simple configuration for moving the chain 33 in one direction. Also,
In this embodiment, one hanger 14 is returned from the substrate discharge device 30 side to the substrate supply device 18 side at once, corresponding to one feed (one pitch feed) by the feed device 22. The hanger 14 can be used effectively. In contrast, more than half of the holding members, such as hangers, fixed to the endless track, as described in the section of the prior art, are not used, but only move, and the operating efficiency of the holding members is increased. Will be bad.

Next, the step of drying the substrate 10 will be described with reference to FIG. 10 focusing on the step of moving the hanger 14. FIG. 10 shows a moving process of the hanger 14 according to the embodiment described above. The hanger 14 includes a main body piece 15a fixed on the flat plate portion 16a,
Clip piece 1 rotatably mounted on its main body piece 15a
5b, and a spool 15 that urges the clip piece 15b in a direction to always close it. First, in the substrate supply device 18, the substrate 10 supplied in the direction of arrow A is moved in the direction of arrow B and stands up, and the hanger 14 is lifted in the direction of arrow H and held upright. Then, the substrate 10 is moved in the direction B <b> 1 and pressed against the hanger 14. Next, the hanger 14 holding (clipping) the substrate 10 moves on the placement unit 24 in the direction of the arrow C in the direction in which it is hung (hereinafter, referred to as “hanging direction”).

When the hanger 14 holding the substrate 10 moves in the direction of arrow D, the hanger 14
The hanger 14 and the substrate 10 are made horizontal by being rotated by degrees. Then, the substrate 10 is separated from the hanger 14 (arrow D1), and the substrate 10 is discharged in the direction of arrow E. At this time, the substrate 10 is discharged in a state where the substrate 10 is inverted from the state where it is supplied to the substrate supply device 18. Next, the hanger 14 is lowered as shown by the arrow F and delivered to the return device 32. In the return device 32, the hanger 1
4 in the direction of arrow G to move the substrate supply device 18
To the side. Then, the hanger 14 is further raised as shown by the arrow H as described above, and is held at a height position for holding the substrate 10. This completes one cycle of the process of transporting one hanger 14. By repeating this cycle sequentially, many substrates 10 can be efficiently transported and dried. According to the above transport pattern, the substrate 10 can be discharged in a state where the substrate 10 is inverted from the state in which the substrate 10 is supplied.

Next, a case where a UV drying apparatus is provided will be described with reference to FIGS. 17 is a partial front view of a drying apparatus main body to which a UV drying apparatus is assembled, FIG. 18 is a top view of FIG. 17, and FIG. 19 is a right side view of FIG. In the present embodiment, a case will be described in which a UV drying device is assembled upstream of a drying device main body that performs thermal drying in the substrate transport direction. Note that the same members as those of the above-described embodiment are denoted by the same reference numerals, and the description is referred to. That is, the substrate 10 sent from the substrate supply device 18 is first sent to a UV drying device to perform UV drying, and then sent to a drying device main body to perform thermal drying.

First, an example of the operating mechanism of the feed operating section 26 constituting the feed device 22 on the drying device main body side for performing thermal drying will be described. First, the vertical movement means 27 will be described. An eccentric cam drive motor 27a is provided on the upper plate 91 of the drying device main body 90. The eccentric cam 2 is connected to the motor shaft of the eccentric cam driving motor 27a via a gear train.
7b is linked to two places. A guide shaft 27c is provided on both sides of the upper plate 91, and a cam contact plate 27d and a suspension plate 27e are respectively connected to the guide shaft 27c via a linear bush. The suspension plate 27e is a cam contact plate 27d.
Are connected so as to be movable in the horizontal direction by a shaft support (linear shaft R1). Eccentric cam drive motor 27
a is actuated and the eccentric cam 27b is moved to the cam contact plate 27d.
Is moved up and down, the suspension plate 27e also moves up and down.

The suspension rod 27 is attached to the suspension plate 27e.
The intermediate support plate 27g is supported by 7f.
A feed plate 27h is connected to the intermediate support plate 27g movably in the horizontal direction by a shaft support (linear shaft R2). The feed plate 27h is connected to the substrate 10
And these are connected in the longitudinal direction by a connecting bar 27i. The first moving rod 27k is suspended and supported on both sides of the feed plate 27h via suspension rods 27j. First moving rod 2
7k is arranged side by side on the outside of the mounting portion (fixed rod) 24. When the eccentric cam 27b operates and moves upward,
The ear 14a of the hanger 14 is supported and delivered from the mounting portion 24. The mounting section 24 is supported by support arms 24 a provided on both side walls of the drying device main body 90. V-shaped concave portions into which the ear portions 14a of the hanger 14 are dropped are formed in the mounting portion 24 and the first moving rod 27k continuously at equal pitch intervals in the longitudinal direction. The mounting portion 24 and the first moving rod 27k are arranged side by side at the same pitch of the concave portion.

Next, a description will be given of the horizontal moving means 28. A linear motor 28a for pitch-feeding the first moving rod 27k in the feed direction is suspended and supported on the linear shaft R2 connected to the feed plate 27h. I have. When the linear motor 28a is operated, the link 28b
The feed plate 27h connected via the shaft reciprocates along the linear shaft R2.

When the eccentric cam drive motor 27a is operated to rotate the eccentric cam 27b, the cam contact plate 2
7d and the suspension plate 27e are raised, the first moving rod 27k is raised from the height aligned with the mounting portion 24, and the ear portion 14a of the hanger 14 is supported from the mounting portion 24 in the V-shaped concave portion. Handed over. At this time, the linear motor 28a is operated to move the first moving rod 27k forward by one pitch while supporting the hanger 14, and when the eccentric cam 27b makes one rotation, it moves down to the original height position. At this time, the hanger 14 is delivered to the mounting portion 24 in a state of being sent by one pitch. Then, the first moving rod 27k is returned to the original position in the horizontal direction by operating the linear motor 28a to prepare for the next feeding operation. The feeding operation section 26 sends the substrate 10 supplied from the substrate supply device 18 to the UV drying device 92 side by repeating the same pitch feeding operation (box feeding operation).

Next, the UV drying device 92 is provided on the upstream side of the drying device main body 90 in the substrate feeding direction, and performs the UV drying prior to the thermal drying of the substrate 10. U
In the V drying device 92, the hanger 14 is
Is provided. The hanging portion 93 has a V-shaped recess 95 formed at a lower end of a hanging rod 94 having an upper end fixed to the upper plate 91, and the hanger 14 is provided in the V-shaped recess 95 one by one. It can be hung. UV light irradiation sections 96 provided on both sides of the substrate 10 held on the hanger 14 suspended by the suspension section 93 scan the substrate surface in the vertical direction while irradiating the substrate surface with UV light, thereby performing UV drying. The UV light irradiating section 96 is provided with UV lamps 96a and 96b at two upper and lower locations, and these pulleys 97a and
The timing belt 98 is connected to the timing belt 98 extended between 97b. Timing belt 100 from lifting motor 99
The drive is transmitted to pulleys 97a and 97b through the pulleys 97a and 97b, and the timing belt 98 moves up and down.
a, 96b rise or fall.

Further, the loading section 24 is
While the hanger 14 placed on the front side is pitch-fed, only the top hanger 14 is synchronized
As a sending means for sending to the hanging portion 93 of the V drying device 92, as a sending means for receiving the feeding arm 101 and the hanger 14 holding the substrate 10 previously UV-dried from the hanging portion 93 and sending it to the downstream drying device main body 90. Each of the delivery arms 102 is provided. The feed arm 101 and the feed arm 102 support the shaft (the linear shaft R) on the cam contact plate 27d.
1) and moves up and down according to the rotation of the eccentric cam 27b. The feed arm 101 and the feed arm 102 are provided side by side outside the first moving rod 27k, and are slidably connected to the linear shaft R1 via feed plates 103 and 104. Second moving rods 105 and 106 each having a V-shaped concave portion formed at each of the distal ends of the feed arm 101 and the feed arm 102 are formed. The hangers 14 can be supported one by one in the V-shaped concave portions of the second moving rods 105 and 106. 2nd moving rod 1
05 and 106 are located between the mounting portion 24 and the first moving rod 27k so as not to interfere with each other.
It is bent in a U-shape from the outside to the inside.

A feed motor 107 is provided on the cam contact plate 27d corresponding to the upper side of the UV drying device 92.
Are provided at two places, and are connected to the drive pulley 108. A driven pulley 10 is provided on the substrate supply device 18 side and the drying device main body 90 side on the cam contact plate 27d.
9 are provided. A timing belt 110 is stretched between the driving pulley 108 and the driven pulley 109. The feed plates 103 and 104 are connected to a part of the timing belt 110, and the feed motor 1
07 is driven forward and reverse so that the feed arm 101 and the feed arm 102
1 is reciprocated.

Next, a description will be given of the connection between the pitch feeding operation of the feeding operation section 26 and the feeding operation to the UV drying device 92. The V-shaped concave portion of the mounting portion 24 is provided with a substrate supply device 18.
It is assumed that the hanger 14 holding the substrate 10 is supplied and placed without gaps. When the eccentric cam drive motor 27a rotates, the eccentric cam 27b rotates and pushes up the cam contact plate 27d, and the hanger 14 is transferred from the mounting portion 24 to the first moving rod 27k, and the leading side is moved. Is transferred to the second moving rod 105. In addition, the hanger 14 suspended by the suspension unit 93 and subjected to UV drying first is transferred to the second moving rod 106. Then, the linear motor 28a is operated to feed the first moving rod 27k forward by one pitch of the V-shaped recess. Also, the feed motor 107 is rotated in a predetermined direction to slide the feed arm 101 and the feed arm 102, and the second moving rod 105 is moved to the position of the hanging portion 93 of the UV drying device 92, and the second movement is performed. The rod 106 is moved to the position of the mounting portion 24 of the drying device main body 90.

When the eccentric cam 27b makes one rotation, the cam contact plate 27d moves down, and the hanger 14 supported by the first moving rod 27k is moved forward by one pitch to the mounting portion 24. Handed over. Further, the hanger 14 supported by the second moving rod 105 is delivered to the hanging portion 93, and the hanger 14 supported by the second moving rod 106 is on the rear end side of the mounting portion 24 of the drying device main body 90. Handed over to
Then, the linear motor 28a is operated to return the first moving rod 27k backward by one pitch of the V-shaped recess at a height position that does not interfere with the hanger 14. In addition, the feed motor 107 is rotated in a predetermined direction to slide the feed arm 101 and the feed arm 102 to opposite sides, and the second moving rod 105 is moved to the leading position of the mounting portion 24 so as not to interfere with the hanger 14. Move it to the second position
Is moved to the position of the hanging portion 93 of the drying device main body 90. During this time, the UV drying device 92 performs the UV drying when the lifting / lowering motor 99 is rotated and the UV irradiation unit 96 is raised or lowered from both sides of the substrate 10 newly installed on the suspension unit 93. When the UV drying is performed, the above operation is continuously and repeatedly performed.

An air curtain is provided at the boundary between the UV drying device 92 and the drying device main body 90 and near the downstream outlet of the drying device main body 90, so that heat from the drying device main body 90 is hardly dissipated. I have. The resin material such as a solder resist is thermally cured (IR cured) by hot air drying in the drying apparatus main body 90 on the substrate 10 subjected to the UV drying.

According to the above configuration, the substrate 1 requiring heat drying
In addition to 0, the substrate 10 that requires UV drying can also be dried by one apparatus, so that work efficiency is good, and since various substrate materials can be dried, versatility can be improved. In particular, a feeding device 22 for feeding the hanger 14 at a pitch.
Next, a feed arm 101 for transferring only the leading hanger 14 to the hanging unit 93 in synchronization with the horizontal feed operation, and a hanger 14 for holding the substrate 10 previously UV-dried.
The feed arm 102 is provided to receive the substrate 10 and send it out to the drying device main body 90 on the downstream side. Therefore, the throughput can be improved, and one substrate 10 is synchronized with the pitch feeding operation on the drying device main body 90 side. UV each
Since the UV drying device 92 is sent to the drying device 92 to perform UV drying on both surfaces of the substrate, a smooth feeding operation can be realized even if the UV drying device 92 is incorporated in the drying device main body 90 according to the substrate material.

Although the preferred embodiments of the present invention have been described in various ways, the present invention is not limited to the above-described embodiments, and has mainly been described with respect to the step of drying the substrate 10. It is needless to say that the present invention can be widely applied to a process of heating and drying various rectangular thin plate-shaped works. Further, the UV drying device 92 may be installed not only on the upstream side of the drying device main body 90 but also on the downstream side, and of course, many modifications can be made without departing from the spirit of the invention.

[0065]

According to the drying device of the present invention, the hanger holds the rectangular thin plate-like work through at least three sides, which are the horizontal upper side and the vertical left and right sides, when hung. Each of the three sides is provided with a clip that is provided in a frame shape and holds the work therebetween. For this reason, in the drying process of the thin plate-shaped work, it is possible to prevent the work from waving or bending, to appropriately maintain the accuracy including the flatness of the work, and to efficiently transport a plurality of works densely. Can be dried. Also, as an example of a work, in addition to a substrate requiring heat drying, a substrate requiring UV drying can also be dried by one apparatus, so that work efficiency is high and versatility can be achieved because various substrate materials can be dried. Can be improved. In particular, the feeder for pitch-feeding the hangers includes a feeding means for transferring only the leading hanger to the hanging portion in synchronization with the horizontal feeding operation, and a hanger for holding the work previously dried in UV. Since the delivery means is provided for receiving and sending the workpiece, the throughput can be improved.
Since UV drying can be performed on both surfaces of the work by feeding the sheet to the UV drying device one by one, there is a remarkable effect that a smooth feeding operation can be realized even if the UV drying device is incorporated in the drying device main body.

[Brief description of the drawings]

FIG. 1 is a side view schematically illustrating one embodiment of a drying apparatus according to the present invention.

FIG. 2 is a partial front view of the embodiment of FIG.

FIG. 3 is a front view illustrating an embodiment of a hanger according to the drying apparatus of the present invention.

FIG. 4 is a right side view of the hanger of FIG. 3;

FIG. 5 is an enlarged sectional view taken along line AA of FIG. 3;

FIG. 6 is an enlarged sectional view taken along line BB of FIG. 3;

FIG. 7 is a plan view of the hanger of FIG. 3;

FIG. 8 is an enlarged sectional view taken along line CC of FIG. 3;

FIG. 9 is a side view illustrating an embodiment of a substrate supply apparatus according to the present invention.

FIG. 10 is a side view illustrating an embodiment of a hanger moving step according to the present invention.

FIG. 11 is a side view illustrating a conventional technique.

FIG. 12 is a side view schematically showing a drying apparatus according to the background art.

FIG. 13 is a partial front view of the background art in FIG. 12;

FIG. 14 is a side view illustrating a substrate discharging device according to the background art of FIG. 12;

FIG. 15 is a side view illustrating a moving step of the hanger according to the background art of FIG. 12;

FIG. 16 is a side view illustrating a moving step of a hanger according to another background art.

FIG. 17 is a partial front view of a drying device main body to which a UV drying device according to another example is assembled.

18 is a top view of the drying device of FIG.

19 is a right side view of the drying device of FIG.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 Substrate 12 Drying room 14 Hanger 14b Upper side 14c Left side 14d Right side 15 Clip 16 Frame-shaped body 16a Flat plate part 18 Substrate supply device 20 Dry air blower 22 Sending device 24 Placement unit 26 Sending operation unit 27 Vertical movement means 27a Unbalanced Core cam drive motor 27b Eccentric cam 27c Guide shaft 27d Cam contact plate 27e Suspension plate 27f, 27j Suspension rod 27g Intermediate support plate 27h, 103, 104 Feed plate 27i Connection bar 27k First moving rod 28 Horizontal movement Means 28a Linear motor 28b Link 30 Substrate ejection device 32 Return device 33 Chain 34 Receiving part 38 Squeezing device 40 Chuck device 70a Upper spacing member 70b Lower spacing member 72 Hanger support means 74 Substrate feeding means 7 6 Lifting means 77 Upper holding means 78 Lower holding means 80 Suction means 81 Moving mechanism 82 Contacting / separating means 83 Pressing device 86 Cylinder device 90 Drying device main body 91 Upper plate 92 UV drying device 93 Hanging portion 94 Hanging rod 95 V-shaped Concave part 96 UV light irradiation part 96a, 96b UV lamp 97a, 97b Pulley 98, 100, 110 Timing belt 99 Lifting motor 101 Feeding arm 102 Sending arm 105, 106 Second moving rod 107 Feeding motor 108 Drive pulley 109 Follower Pulley

Claims (9)

[Claims] 1. A hanger for holding a rectangular thin plate-shaped work in a suspended state, a work supply device for holding the work on the hanger and feeding the work to a drying chamber, and disposed in a longitudinal direction of the drying chamber. A plurality of hangers that hold the work in a row while being arranged in a row at a predetermined interval; and a hanger for mounting the hangers so as to intermittently feed the plurality of hangers in a feed direction. Feeding device having a feed operating portion that operates in the order of ascending movement, placing the hanger horizontally in the feed direction, descending for lowering the hanger, and horizontally moving in the direction opposite to the feed direction, and feeding by the feed device. A work discharge device that releases the work from the drying chamber while releasing the hanger and the work from the drying chamber, by releasing the holding of the hanger with respect to the work; A return device for sending the hanger separated from the work by the discharge device to the supply device for the work, wherein the hanger has a horizontal upper side and a vertical left and right when suspended. Drying characterized by being provided in a frame shape so as to hold the work from at least three sides including two sides, and a clip for holding the work therebetween is provided on each side of the three sides. apparatus. 2. The drying apparatus according to claim 1, wherein two clips are provided for each of said sides. 3. A work supply device, comprising: a hanger supporting means for suspending and supporting the returned hanger; and a work for sending and holding the work to the hanger suspended and held in a vertical state. The drying device according to claim 1, further comprising a feeding unit. 4. A work feeding means comprising: a suction means having a plurality of suction pads; and a work being held on the hanger by moving toward and away from the hanger while the work is being sucked and held by the suction pad. 4. The drying device according to claim 1, further comprising a contact / separation means. 5. The drying apparatus according to claim 4, further comprising: a displacement urging unit that urges the suction pad to be displaced outward in a state where the suction pad sucks the work. 6. A spacing member is provided on the hanger so as to prevent contact between the workpieces held by adjacent hangers supported by the mounting portion. The drying device according to 1, 2, 3, 4 or 5. 7. The drying device according to claim 1, wherein a UV drying device is integrally mounted on an upstream side or a downstream side of the drying device main body in the work transfer direction. Drying equipment. 8. The UV drying device, wherein a suspending portion for suspending the hanger is provided in the middle of the placing portion, and the UV drying device is provided on both sides of the work held by the hanger suspended by the suspending portion. The drying apparatus according to claim 7, wherein the work is UV-dried by scanning while irradiating the UV light with the provided UV light irradiation unit. 9. A feeding means for feeding only the leading hanger to the hanging portion in synchronization with the horizontal feeding operation while the hanger mounted on the mounting portion is pitch-fed to the feeding device. 9. The drying apparatus according to claim 8, further comprising a delivery unit that receives a hanger holding the substrate that has been previously UV-dried from the hanging unit and sends it to the downstream side.