JP2001221570A - Hanging dryer for thin substrate and hanger therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve quality of substrate by suppressing dust inside drying room to enhance cleanness of products. SOLUTION: A substrate V is tightly hung via a hanger J1 on a pair of fixed beams 1 in the drying room. The substrate V is dried while the substrate is advanced along the hanger J1 by a predetermined pitch by means of a walking beam mechanism W.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to BGA, CSP,
The present invention relates to a hanging dryer for a thin substrate and a hanger for hanging a substrate, in which a thin printed circuit board used for a computer or information device such as a PGA or a mobile phone is suspended and dried via a hanger. is there.

[0002]

2. Description of the Related Art As a conventional typical dryer for drying the above-mentioned thin printed circuit board (hereinafter simply referred to as "substrate"), there are a wicket type, a chain hanging type and the like. The former wicket type dryer uses an endless chain as a transport conveyor, and attaches a large number of holding jigs for holding a substrate to the endless chain at a predetermined interval in an inclined posture, and attaches a substrate to each holding jig. Is held in an inclined posture, and the substrate is dried while being transported linearly. In the latter chain hanging dryer, the same endless chain is used as the conveyor.
A large number of clip hangers are attached integrally to the endless chain running on the ceiling of the drying room at predetermined intervals,
The substrate is dried while the substrate is hung on each hanger and transported linearly.

[0003] In any of the above-mentioned types of dryers, since an endless chain is used for transporting the substrate,
Dust may be generated from the chain driving unit or the chain itself and may enter the drying chamber, so that the cleanness of the drying chamber is reduced. With the recent increase in the precision of substrates, the decrease in cleanliness in the drying chamber is due to the quality of the product substrates,
Or, since it greatly affects the product yield, there is a strong demand for improvement in the cleanness of the drying chamber.

Further, in any of the above-mentioned types of dryers, since the substrate holding jig or the clip hanger is directly attached to the endless chain, it is not possible to cope with a change in the size of the substrate and to remove the same. , Cleaning etc. could not be done easily. Further, since the endless chain elongates due to a temperature rise, a shift in the clip position of the board occurs, so that when the board thickness is 0.2 mm or less,
There is also a problem that it is difficult to perform the method on a thin substrate having a thickness equal to or less than the above thickness because the substrate is warped or deformed.

[0005]

SUMMARY OF THE INVENTION A first object of the present invention is to prevent the use of a conveyor having dusting action, such as an endless chain, to suppress the generation of dust in a drying chamber and to improve its cleanness. The second problem is to enable a wide range of substrates to be dried by adapting to changes in the substrate size, the substrate thickness, the interval between substrates that are continuously transported, and the like. It is.

[0006]

According to a first aspect of the present invention, there is provided a dryer for drying a thin substrate by suspending the substrate through a hanger and drying the hanger. A pair of fixed beams for suspending the substrate through the entire length of the dryer body, and perform a rectangular motion in a front view to move the substrate suspended and supported by the fixed beam to a predetermined position. A walking beam device for advancing and transporting the substrate by a pitch, and attaching the hanger to a substrate carried in a horizontal position in front of the entrance of the dryer main body to bring the substrate into a vertical position, and then moving the substrate to the hanger In order to transfer and carry into a pair of fixed beams in the drying chamber through the, a substrate loading device disposed connected to the entrance, and at the exit of the dryer body,
In order to remove the hanger from the dried substrate and carry out the substrate from the vertical position to the horizontal position, the substrate is provided with a substrate carrying-out device disposed at the outlet portion. It is characterized by being arranged outside the drying room of the machine body.

The substrate to be dried is loaded into the substrate loading device in a horizontal position, and a hanger is attached to the upper end portion by the substrate loading device to change the substrate to a vertical position. With the hanger attached to the pair, it is transferred and carried into a pair of fixed beams disposed in the drying chamber of the dryer body. In the drying chamber, the substrate is suspended and supported by a pair of fixed beams via a hanger, and is transported forward by a set pitch by a walking beam device, during which both surfaces or one surface are heated and dried. Then, at the outlet of the drying chamber, the hanger attached to the substrate is removed by the substrate carrying-out device, and the dried substrate is changed from the vertical posture to the horizontal posture and carried out in this horizontal posture.

[0008] As described above, the substrate is suspended and supported by the pair of fixed beams in the drying chamber via the hanger, and is transported forward by the walking beam device at a set pitch. Since both the return conveyor is disposed outside the drying chamber, the generation of dust in the drying chamber is almost eliminated, and the cleanness of the inside is enhanced. In addition, the hanger for suspending and supporting the substrate is separated from the walking beam device, which is a means for transporting the substrate, so that the hanger can be easily cleaned.
It contributes to the improvement of cleanliness in the drying room. Further, since the substrate transfer means is a walking beam device, the amount of horizontal advance (pitch) in one rectangular movement can be adjusted, and the interval between continuously transferred substrates can be adjusted. For this reason, it can be dried at an optimal interval according to the type of the substrate such as the size and thickness. Furthermore, since the substrate is suspended and supported by a pair of fixed beams via hangers separated from the walking beam device, the size, thickness, etc., of the hangers vary depending on the structure or size of the hangers. Various substrates can be dried.

According to the third aspect of the present invention, the hanger returned from the substrate in the substrate unloading device is provided with a hanger return conveyor for returning the hanger to the substrate loading device, so that the hanger can be used repeatedly. At the same time, it is possible to achieve full automation of a dryer configured to suspend and support a substrate via a hanger.

According to a fifth aspect of the present invention, a curtain take-up shaft is provided at a portion lower than the bottom wall of the drying chamber, and the position of the upper end of the curtain at the top of the curtain is set according to the presence or absence of the substrate or the substrate size. A shutter device that is adjustable so as to close the opening of the drying chamber is disposed at one or both of the entrance and the exit of the dryer main body. Thus, since the curtain winding shaft is provided at a position lower than the bottom wall of the drying chamber, and the position of the upper end of the winding of the curtain can be adjusted, the walking beam device,
Alternatively, the opening of the entrance and the exit of the drying chamber can be thermally shut off without interfering with the hanger return conveyor, and the position of the upper end of the curtain winding can be adjusted according to the presence or absence of the substrate or the substrate size. Since it can be adjusted freely, it is possible to partially close the opening in order to cope with mixed transport of different types of substrates having different sizes (dimensions in the vertical direction in the vertical posture).

Further, the invention according to claim 6 is a hanger used for suspending a substrate in a dryer, comprising a hanger frame and a plurality of hanger frames attached to a vertical member of the hanger frame. It is characterized by being composed of clips. For this reason, even if the substrate is a thin substrate, it is fixed to the hanger frame via a plurality of clips. The thermal distortion during drying such as is suppressed, and a high-quality substrate is manufactured. In particular, when the structure of the clip is configured such that the substrate attached to the hanger frame is pulled and fixed in the horizontal direction at the time of the clip, the structure along the horizontal direction that is likely to occur on the substrate is provided. The sag is effectively eliminated and a high quality substrate is manufactured.

[0012]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in more detail by way of examples. FIG. 1 is an overall plan view of a hanging type dryer according to the present invention, in which a central portion is omitted, FIG. 2 is a partial front view of a left portion, and FIG. 3 is a partial front view of a right portion. FIG. 4 is a schematic cross-sectional view taken along line XX of FIG. 1 when the walking beam device W is not operated. Schematic construction of suspended beneath dryer thin substrate V of this invention, a pair of fixed beams 1 for hanging the thin substrate V via the hanger J ₁ is the drying chamber R ₁ of the dryer main body D, wherein arranged in the longitudinal direction of the entire length at a width interval corresponding to the hanger J _1, wherein the inlet side of the dryer main body D, drying the thin substrate V is material to be dried in the dryer body D substrate carry-in device a for loading one by one into the chamber R ₁ is arranged to connect, in its outlet side, the dried thin substrate V
The drying chamber substrate carry-out device for discharging one by one from R within ₁ B is arranged by connecting a rectangular movement in the drying chamber R front view a pair of movable beams 2 arranged in _one The drying beam main body D is provided with a walking beam apparatus W for moving the thin substrate V suspended and supported by the fixed beam 1 by a set pitch and transporting it.

As shown in FIGS. 2 to 4,
The interior of the dryer body D is provided with a drying chamber R.₁And the bottom wall just below
First device storage room R separated through_TwoAnd these
Drying room R₁And the first equipment storage room R_TwoInner side wall 4 on the side of
Equipment storage room R separated through_ThreeWith three rooms
ing. As shown in FIG. 4 and FIG.
The beam 1 is disposed slightly inside the pair of movable beams 2.
And drying room R ₁It is located at the top of the. First
Equipment storage room R_TwoHas many hot air heaters H and
The used hanger J from the unloading device B to the substrate loading device A side
₁And a hanger return conveyor C for returning
Have been. Many hot air heaters H carry the thin substrate V.
Arranged at predetermined intervals along the feeding direction Q,
A hanger return conveyor C is provided immediately below the wind heater H.
Have been. In addition, the second equipment storage room R_ThreeThe circulation fan
F and a hot air tube 5 are provided, and a drying room R is provided.₁Hot air inside
By the action of the circulation fan F, the flow provided on the bottom wall 3
After flowing into the hot air heater H through the outlet hole 6,
Connected to the hot air tube 5 and the upper end thereof.
The upper end of the inner side wall 4
Through the inlet 8 provided in the drying chamber R₁Flow into
It is circulating like so. That is, the drying room R of the dryer body D
₁At a predetermined interval along the transport direction Q of the substrate V
Hot air circulation paths are independent at many locations
It is formed upright. Thus, the drying room R₁Within
Hot air flows downward, causing fine dust
At the same time as the rising of the kind is prevented,
Fine dust contained in the hot air by the filter 7
Is removed, the drying room R₁Cleanness inside
And the hot air circulates during the circulation.
Drying room R₁Inside
The temperature is kept at the set temperature. The drying room R ₁Out of
On the mouth side (board V unloading side), counting from the exit end
The heated substrate V is heated to a temperature close to room temperature in a predetermined length.
There is a cooling zone for cooling at
Cooling air is not circulating in the cooling zone.
No.

Next, the walking beam device W will be described with reference to FIGS. In this embodiment, since the dryer main body D is long, a plurality of (in the embodiment, three as shown in FIG. 26) walking beam devices W are connected in series. Driving parts of the walking beam device W is disposed on the upper surface of the top wall 9 of the dryer main body D, is disposed outside the drying chamber R _1, the said drying chamber R _1, through the top wall 9 Only the suspension rod 12 inserted into the hole 11 is arranged. A pair of movable beams 2 arranged at predetermined intervals along the width direction in the upper part of the drying chamber R ₁ are suspended and supported by the suspension rod 12 via the frame 58 at each of the front and rear ends thereof. ing. The driving unit of each walking beam device W is a driving unit 1 disposed on the upper surface of the ceiling wall 9 of the dryer main body D.
3 and a driven unit section 14 arranged at a predetermined distance from the drive unit section 13 along the transport direction Q of the thin substrate V. In each of the drive and driven unit sections 13 and 14, the movable plate 17 is disposed on the upper surfaces of the base plates 15 and 15 'via the linear guide 16 so as to be movable in the transport direction Q of the thin substrate V. At each end in the direction orthogonal to the transport direction Q, a guide tube 18 is fixed vertically, and the suspension rods 12 are inserted through the guide tubes 18 respectively. , At the upper end thereof are integrally connected via a connecting plate 19.

The drive unit 13 is provided with a suspension rod.
Motor M for raising / lowering 12₁And the suspension b
Linear motor M for linearly moving the pad 12_Two
And a lifting / lowering motor M₁Is the movable plate 17
, And a linear movement motor M_TwoIs the base plate 15
Mounted on Driving and driven unit units 1
A connecting rod is connected to each of the movable plates 17 via a bearing 21.
22 are supported, and each of the connecting rods 22
An eccentric cam 23 is attached to a portion immediately below the connecting plate 19.
The connecting plate 1 is attached to a circumferential groove 24 on the outer peripheral surface thereof.
9, the cam follower 25 fixed to the lower surface
I have. The connecting rod 22 is moved up and down through a plurality of gears.
Motor M₁The connection rod 22
Of the suspension rod 12 (and thus the movable beam)
2) is raised or doubled by twice the eccentric amount of the eccentric cam 23.
Or descend. The rotation of the eccentric cam 23
The turning angle is higher for the movable beam 2 than for the fixed beam 1
Since the angle is sufficient, the eccentric cam 23 is continuously rotated.
If not, the amount of elevation of the movable beam 2 is
In some cases, it may be twice or less. In addition, the linear movement motor M
_TwoThe forward and reverse rotational movement of the
The movable plate 17 of the unit 13 is moved linearly in both the forward and reverse directions.
Is connected via the connecting rod 22.
The movable plate 17 of the driven unit 14 is also
The horizontal forward movement amount is the transfer pitch of the substrate V.
I will be. As a result, each mode for vertical movement and linear movement
M₁, M _TwoAs a result, the suspension rod 12 (and thus the movable
2) is a vertical movement (U) and a horizontal shift in a front view.
A rectangular motion with a momentum (P) is performed (see FIG. 9). That is, FIG.
And as shown in FIG. 9, the walking beam device W
In the non-operation of the movable beam 2, (the upper surface of) the movable beam 2 is fixed.
Origin position T lower than (upper surface of) constant beam 1₀In
To move the movable beam 2 to the origin position T₀From the front
Perform a rectangular motion and move up (position T₁), Horizontal forward movement
(Position T_Two), Descend (position T_Three) And horizontal retreat (position T
₀) In this order, hanger J₁Fixed via
The thin substrate V suspended and supported by the
After being transferred to the beam 2, the beam is returned to the fixed beam 1 again.
The movable beam 2 is horizontally suspended
Switch) [P]. Also, FIG.
As shown in FIG. 8, the ceiling wall 9 of the dryer body D
Back side (drying room R₁On both sides of the through-hole 11)
A pair of guide plates 10 is fixed, and the pair of guide plates 10
An opening of the through hole 11 is provided between the ceiling wall 9 and the ceiling 10.
The closing plate 40 made of resin to be closed moves along the transport direction Q.
Said suspension, which is mounted so as to be capable of suspending the movable beam 2
The lower rod 12 penetrates the closing plate 40. this
Therefore, the suspension rod 12 moves horizontally forward and backward.
Is performed, the closing plate 40 is formed on the pair of guide plates 10 as a plan.
And move horizontally integrally with the suspension rod 12
At the same time, when the suspension rod 12 moves up and down,
The suspension rod 12 is moved upward and downward with respect to the stopped closing plate 40.
Structure that always moves and closes the remaining hole of the through hole 11
It has become. With this structure, the suspension rod 12
Despite the fact that the hole 11 is elongated,
Remaining hole portion in which the suspension rod 12 in 11 is not inserted
Is always closed and in the portion of the through hole 11
Room R₁Inside and outside are thermally shielded. FIG.
FIG. 2 is a cross-sectional view taken along line XX of FIG.
To move the movable beam 2 to the suspension rod 12
The attachment structure is shown differently from that of FIGS.
You.

Subsequently, the substrate loading apparatus A will be described including its operation. This substrate loading device A
The front end portion of the substrate V which is carried in a horizontal state by the substrate carrying-conveyor 26 (portion to be the upper end in the vertical position), sandwiched between hanger J ₁ waiting, changing the substrate V of this horizontal posture to a vertical posture Te, then slightly remain vertical position by horizontal conveyance, by holding down suspended by transferring to the ends of a pair of fixed beams 1, is transferred transporting the substrate V into the drying chamber R ₁ Device. Here, the hanger J ₁ is 31
As shown in the figure, the clip mounting plate portion 2 which is vertically arranged
7, flat suspension plates 28 are integrally provided at both ends,
A pair of washing scissors-like clips 29 are integrally attached to both ends in the longitudinal direction (horizontal direction) of the clip mounting plate portion 27 so as to face vertically downward, and are close to the outer end of each of the hanging plate portions 28. The part is provided with a lateral displacement prevention unit 30 for preventing the substrate V from shifting in the horizontal direction when the substrate V is suspended and transferred, or when the substrate V is returned by the hanger return conveyor C. Then, as shown in FIG.
_The configuration is such that the substrate V is hung by a pair of clips 29 provided at ₁ with appropriate locations such as both upper corners of the substrate V interposed therebetween. Also, as shown in the left side view of FIG.
Is a configuration in which the roller body 20b is attached at several places at both ends and the center of the roller shaft 20a. When viewed from the substrate V, only the non-printing part contacts the roller body 20b, and the printing part is Because of the structure arranged between the respective roller bodies 20b, the printed portion of the substrate V is not damaged at all when the carry-in conveyor 26 carries in.

As shown in FIG. 10 and FIG. 16, a pair of endless belts 31 are disposed on the inner surfaces of the side walls 56 on both sides of the substrate carry-in conveyor 26 so as to face each other. On the inner side of the endless belt 31 (closer to the dryer main body D), there is provided a guide body 33 that guides a lifting and lowering body 32 connected to a part of the endless belt 31. The schematic configuration of the above-described substrate carrying-in device A is different from that of FIG. 10 in that connector bodies 35 are attached to both ends in the width direction of a front end portion (an upper end portion in a vertical posture) of a frame-shaped substrate support plate 34.
As shown in the left side view of FIG. 2, the connecting body 35 is connected to the inside of each elevating body 32 attached to a pair of endless belts 31 facing each other. On the other hand, at both ends in the width direction of the rear end (the lower end in the vertical position) of the substrate support plate 34,
A cam follower 37 is attached via a bracket 36, and the cam follower 37 is attached to the substrate loading conveyor 26.
Are fitted in the cam bodies 38 arranged at both ends in the width direction of the cam. The cam body 38 has a front end portion (dryer body D).
(A side close to) is provided with a quadrant arc-shaped curved portion, and the horizontal portion and the vertical portion are continuous via the curved portion. Accordingly, in a state where the substrate support plate 34 is in the horizontal posture, when the lifting / lowering body 32 is raised by driving the pair of endless belts 31, as shown in FIG.
The front end of the cam body 38 rises immediately above, and the lower end of the cam body 38 is moved by being restricted by the cam shape of the cam body 38. It is configured to be vertically vertical.

As shown in FIGS. 10 and 11, on the back side of the portion near the lower end of the substrate support plate 34, it is disposed on the front side (the side facing the dryer main body D in the vertical position). A clip 39 for holding the vertical edge of the substrate V at four places is attached. As shown in FIG. 11, the clip 39 has a bent portion of a bell crank lever-like holding member 41 in which a pin 4 is attached to a fixing member.
2 by the action of an air cylinder 43 disposed on the back side of both side edges of the substrate support plate 34.
1 is rotated about the pin 42 so that the edge of the substrate V is clamped between the pedestal 44 and the tip of the clamp 41. Further, the both corners of the upper portion of the substrate support plate 34, the front side pair of hanger clamp fixture for clamping the hanger J ₁ hanging lower plate portion 28 disposed on the (lower side in the horizontal position) 45 are attached.

Further, the hanger return conveyor C, as shown in FIG. 10, a pair of endless chains 46, arranged at a slightly smaller distance than the full width of the clip plate portion 27 of the hanger J ₁ In this configuration, the suspension plates 28 at both ends of the hanger J ₁ are supported by the respective endless chains 46, and the hanger J ₁ is transported. As shown in FIGS. 10 and 12, a pair of stopper cylinders 47 are vertically arranged slightly outside each endless chain 46 at intervals to be described later. A stopper body 48 is attached to the rod of the stopper cylinder 47. At the lower end of the rod, the stopper body 4
8 is disposed slightly above the pair of endless chains 46, allowing stop hanger J ₁ sent back toward the side of the substrate carry-in device A. The distance between the pair of the stopper cylinder 47, though slightly larger than the spacing between the pair of lateral displacement preventing portion 30 which is secured to the lower surface of each suspending the lower plate portion 28 of the hanger J _1, wherein each stopper member 48, The outer end of each suspension plate 28 is supported. In addition, almost immediately above the pair of stopper cylinders 47,
A pair of transfer tool 49 is arranged to be rotatable by the rotation actuators 51, as shown in FIG. 12, the hanger J ₁ of each of the left and right suspending the lower plate portion 28 lifted up to upper end by a stopper cylinder 47 Is the pair of transfer tools 4
By 9 rotates to vertically downward, enters into the holding groove, thereafter, by the lowering of the pair of stopper cylinder 47, the hanger J _1, as shown in FIG. 13, the cylinder for a pair of stoppers From each stopper body 48 of 47, it is transferred to a pair of transfer tools 49 (FIG. 36).
reference). The interval between the pair of transfer tools 49 is narrower than the interval between the pair of stopper cylinders 47, and the arrangement is such that the two do not interfere with each other during the transfer. Next, the pair of transfer tool 49, by further 90 ° rotation clockwise, each hanging lower plate portion 28 of the right and left hangers J _1, a pair of hanger clamp fixture waiting at the falling edge 45 from the opening between each clamp piece 45a of it enters therein, and thereafter, close the clamp piece 45a of the clamp member 45 is, as shown in FIG. 14, the hanger J ₁ is the pair transfer From the tool 49 to a pair of hanger clamp tools 45. Regarding the distance between the pair of hanger clamp tools 45 and the pair of transfer tools 49, the two 45, 49 do not interfere with each other during the transfer, as described above.

In the above state, as shown in FIG. 15, at the lower end of the pair of hanger clamps 45, the clip piece 2 of the clip 29 disposed immediately below it
The rod 52a of the pressing cylinder 52 for pressing and opening the 9a protrudes, and the clip piece 29 of the clip 29
a is opened, and in this state, the substrate loading conveyor 26
When the substrate V is carried in from above, the leading end of the substrate V enters between the clip pieces 29a of the pair of clips 29 in the open state, and then the rod 52a of the pressing cylinder 52 is retracted. The front end of the substrate V in a horizontal posture is sandwiched between a pair of clips 29. Each clip 39 attached to the substrate support plate 34 is open before the insertion of the substrate V, and is closed after the insertion, so that both edges of the rear portion of the substrate V in the horizontal posture are in four places. , Each clip 39 (FIGS. 37 and 3
8). As a result, the substrate V is supported by the substrate support plate 34 at a total of six positions, two at the front end and four at the rear edges. Since the portions of the substrate V sandwiched by the clips 29 and 39 are all non-printed portions on the outer peripheral edge, there is no damage to the substrate V at all. Further, the support position of the substrate V with respect to the substrate support plate 34 and the number thereof are not limited to the above positions and numbers.

Then, while the substrate V is supported on the lower surface of the substrate support plate 34 in the horizontal position as described above, the pair of endless belts 31 are activated to raise the elevating body 32 connected thereto. When this is done, the front end (upper end) of the substrate support plate 34 is connected to the elevating body 32 via the connecting body 35, so that it rises as it is, and the rear end (lower end) is The cam follower 37 of this portion is fitted in the cam body 38 and moves while being guided by the cam shape of the cam body 38. Therefore, as shown by the two-dot chain line in FIG. 16, the front end portion of the substrate support plate 34 gradually rises, the inclination angle increases, and the substrate support plate 34 assumes a vertical posture at the rising end, and has a front surface. The substrate V is disposed on the substrate (see FIGS. 39 and 40).

Further, FIGS. 16 and as shown in FIG. 17, the dryer body D and a pair of fixed beams 1 arranged in the drying chamber R _1, the pair of movable beams 2 arranged on the outside thereof
Is slightly projected outside from the entrance opening 81 of the drying chamber R ₁ , and the left ends of the pair of fixed beams 1 are close to the hanger clamp 45 located at the rising end. while being supported by the hanger clamp fixture 45, the hanger J ₁ are suspended substrate V, when the intact horizontally moved, are to enable the transfer of a pair of hanger clamp fixture 45 to the pair of fixed beams 1. Further, a surface opposite to the back surface side (surface on which the clip 29 is attached to the clip plate portion 27 of the hanger J ₁ which is located upper end in a state of being disposed on the front surface of the substrate supporting plate 34 in the vertical position ), A pair of pressing plates 53 are vertically arranged.
The upper end of the pair of the pressing plate 53, they become horizontal bent at right angles toward the front, the horizontal portion is coupled to the drying chamber connecting plate 69 arranged in the width direction of the R _1,
Both ends of the connecting plate 69 are fixed to the respective cylinders 55 fitted in the guide rods 54 arranged in the front-rear direction.

For this reason, after the substrate support plate 34 in the horizontal position is set in the vertical position as described above, the hanger J _{1 is set.}
Clips of both sides of the suspending the lower plate portion 28 while releasing the clamping of the pair of hangers clamping member 45 that clamps and supports the left and right edges of the substrate V which is suspended on the hanger J ₁ while releasing 39, by the driving means, when horizontally moving the said pressure plate 53 forward, as shown in FIG. 17, the hanger J ₁ that has been supported by a pair of the hanger clamp fixture 45, a pair fixed It is transferred to the end of the beam 1 (see FIG. 41). Further, the driving unit for moving the connecting plate 69 back and forth is disposed outside both ends of the substrate V suspended below the connecting plate 69 in a plan view. be dropped waste acids are generated from parts, it has a structure that does not adhere to the substrate V, also by this structure, cleanliness in the drying chamber R ₁ is enhanced. Incidentally, as shown in FIG. 17, the fixed beams 1 and the upper surface of the movable beam 2, preventing protrusions 1a shift back and forth at a wider spacing than the width of each hanger J ₁ hanging the lower plate portion 28, 2a, respectively Is provided.

After the hanger J ₁ is transferred to the pair of fixed beams 1, the pair of movable beams 2 constituting the walking beam device W perform the above-described rectangular motion in a front view, so that the hanger J ₁ is moved. _The substrate V suspended on the substrate ₁ is transported forward by the horizontal forward movement amount (pitch) [P] of the movable beam 2 (see FIG. 42 and FIG. 43), and is placed in the drying chamber R ₁ of the dryer main body D. Are sequentially conveyed forward. When the dryer body D substrate V from the inlet opening of is carried continuously, in the drying chamber R _1, a number of substrates V horizontal forward movement of the movable beam 2 (pitch)
At equal intervals as (P), it is lower supporting suspended via the hanger J ₁ to the pair of fixed beams 1, the walking beam device W, a number of substrates V is carried by the pitch P forward together In the meantime, the substrate V
The two surfaces are dried by contacting the circulating hot air. Then, the outlet side of the drying chamber R ₁ (discharge side of the substrate V)
The portion near the, have a predetermined length of the cooling zone is provided, heated dried substrate V, while passing through the cooling zone is cooled to a temperature close to room temperature, the drying chamber R ₁ in this state Is discharged to the outside.

Subsequently, the substrate unloading device B connected to the outlet side of the dryer main body D will be described. Since the configuration of the substrate unloading device B has a portion similar to the configuration of the substrate unloading device A, the description of the substrate unloading device A is the same as or similar to the configuration of the substrate unloading device B. Therefore, no duplicate explanation will be given. 18 to 21, a pair of endless belts 62 and a pair of guide rails 63 are provided on opposite inner side surfaces of both side wall portions 61 of the substrate unloading device B.
Doo is provided to face, a pair of vertically movable bodies 64 for the vertical movement are connected to the two 62, 63 are connected by a connecting member 65, the left and right ends of the hanger J ₁ in the joint member 65 Clamps 66 are attached to portions corresponding to the positions of the suspension plate portions 28, respectively. This clamp 6
6, by sandwiching the upper surface of each suspending the lower plate portion 28 of the hanger J ₁ which is transferred to the upper surface of the pedestal plate 67 in clamping plate board 68,
Hanger J ₁ is held by a pair of clamp fixture 66.

For this reason, as shown in FIG. 19, the hanger J ₁ suspending the substrate V reaching the end of the fixed beam 1 on the exit side is moved from the exit side of each suspension plate portion 28 to the hanger J _1. The rear side is pushed in the transport direction by each vertically arranged push plate 71, and the pair of fixed beams 1 is used to move the base plate 6 of the pair of clamps 66 arranged on an extension of the pair of fixed beams 1.
7 (see FIG. 44), and thereafter, are clamped from above and below by the downward movement of the clamping plate 68 of each clamp tool 66. When viewed from the front, slightly behind the pair of endless belts 62 and the pair of guide rails 63 (the substrate loading device A
), A substrate support plate 72 having substantially the same configuration as the substrate support plate 34 of the substrate loading apparatus A is on standby, and the substrate support plate 72 in a vertical posture has a dried substrate At the center in the height direction of the V, four clips 73 for holding both side edges at four places are attached. The configuration of the clip 73 is the same as the clip 39 of the substrate loading device A. The substrate support plate 72 includes:
The substrate support plate 72 is rotatable about a rotation shaft 74 in a vertical plane, and the rotation causes the substrate support plate 72 to change from a vertical position to a horizontal position or vice versa.

Then, the lifting / lowering body 64 stops at the intermediate stop position, and the dried substrate V is placed on the front surface of the substrate support plate 72.
Is disposed, the above-described four portions of the dried substrate V are clamped by a plurality of clips 73 attached to the support plate 72, and then provided on the elevating body 64 as shown in FIG. The clip release piece 75 is moved forward,
When the clip 29 holding the two upper ends of the dried substrate V is released and the pair of clamps 66 is raised by raising the elevating body 64, the dried substrate V It is arranged on the front surface of the support plate 72 and is in a state of being supported by it. In addition, a roller is attached to the tip of the clip release piece 75 so that dust is not generated even if the clip is rubbed against the clip 29. Next, the substrate support plate 72 supporting the dried substrate V on the front surface is rotated around the rotation shaft 74,
When the clip 73 is rotated forward to the horizontal position, the clips 73 arranged on the front side in the vertical position pass through the rollers 77 of the unloading conveyor 76 without interfering with the rollers 77, and are unloaded. The dried substrate V is arranged with a slight gap between each roller 77 of FIG.
5 and FIG. 46). For this reason, when the clips 73 of the substrate support plate 72 are released in this state, the dried substrate V supported by the support plate 72 drops slightly, and is dropped and transferred onto the unloading conveyor 76. Is done. The configuration of each roller 77 of the carry-out conveyor 76 is the same as that of the carry-in conveyor 2.
6, the printed portion of the dried substrate V is not damaged at all.

Further, the conveyer 7 carried out from the substrate support plate 72
After transferring the dried substrate V to 6, the substrate support plate 72 is rotated in the opposite direction to the above, and returned to the upright posture,
When the elevating body 64 is lowered, a pair of clamps 66
Hanger J in which the hanging plate portions 28 at both ends are supported by
₁ is lowered to the portion of the upper run of the hanger return conveyor C, the unsupported by the clamp fixture 66 in the hanger J ₁ hanging the lower plate portion 28 portion, a pair constituting said return conveyor C It is supported by the endless chain 46 and mounted thereon. Further, a between a pair of endless chains 46 which constitutes the hanger return conveyor C, than hangers J ₁ to be placed on the return conveyor C in the portion located on the side of the unloading conveyor 76, placed on the return conveyor C the hanger J ₁ which is supported by drawn toward the side of the substrate carry-in device a Te, attracting ingredients 78 for separating the respective suspending the lower plate portion 28 at both ends of the hanger J ₁ from the pair of clamping members 66 is located Have been. Therefore, after the hanger J ₁ is placed on the return conveyor C, and pull the hanger J ₁ on the side of the substrate carry-in device A by the attracting jig 78, the hanger J _1, a pair of clamping members 66
And is transferred to the return conveyor C, and is returned to the substrate loading apparatus A side by the return conveyor C as it is (see FIG. 47). In this way, the hanger J ₁ passes through the circulation path of the rectangular shape (rectangular shape), it is repeatedly used (see Figure 48).

[0029] Subsequently, the inlet portion of the drying chamber R _1, or drying chamber for the shutter device disposed at the boundary between the cooling zone and the heating zone provided at the outlet portion of the R ₁ will be described. In general, the substrate drying apparatus, variation in the heating atmosphere, hot air leakage, or for blocking or the like of the effect of disturbance, the said portion of the drying chamber R ₁ is a shutter device is provided, the present invention In the case where the walking beam device W and the hanger return conveyor C are provided in the dryer body as in the hanging type dryer according to the above, it is necessary to avoid interference with these devices. The shutter device interferes with each of the above devices and cannot be used. In addition, when the shutter device is not used, it is necessary to provide extensions on the entrance side and the exit side of the drying chamber in order to avoid the influence of disturbance. Would. Furthermore, when a substrate is continuously carried into the drying chamber, the substrate itself is intermittently carried in, although there is little problem without providing a shutter device because the substrate itself functions as a shutter. In such a case, all openings are opened for a predetermined period of time at the entrance and the exit. To avoid this, a dummy substrate may be mixed with a regular substrate to ensure a continuous transport state.

Further, FIG. 22, the drying chamber R ₁ inlet opening 8
FIG. 23 is a perspective view of a use state of the shutter device S ₁ according to the present invention mounted on ₁ , and FIG.
Figure 24 is a same side view, FIG. 25 is a side view of a non-use state of the shutter device S _1. As shown in FIGS. 22 to 25, a drive shaft 82 and a driven shaft 83 are respectively provided at upper and lower ends of an inlet opening 81 of the dryer main body D.
Are horizontally supported, and chain gears 84 are attached to both ends of the shafts 82 and 83, respectively, and there is an endless space between the chain gears 84 attached to one end of the shafts 82 and 83. A chain 85 is mounted. The drive shaft 82 is disposed below the lower end of the entrance opening 81 by a predetermined length, and a Teflon curtain 86 is provided between the drive shaft 82 and the entrance opening 81.
Is horizontally supported.

Further, both ends of the take-up shaft 87 are connected to respective brackets 88 vertically supported on the entrance surface of the dryer main body D.
a, 88b. The winding-side end (the upper end in the used state) of the curtain 86 wound around the winding shaft 87 is connected to a connecting plate 89 having a length corresponding to the interval between the pair of left and right endless chains 85. The both ends of the connecting plate 89 are connected to the rear running portions of the pair of left and right endless chains 85. Further, a weight 91 for assisting the power at the time of winding the curtain 86 is connected to the front running portion of each endless chain 85. A motor for driving and rotating the drive shaft 82 and the winding shaft 87 for driving the pair of left and right endless chains 85 and a power transmission mechanism thereof (both not shown) are provided on one side of the bracket 8.
It is housed in a drive unit box 92 attached inside 8a. In addition, a guide shaft 93 for guiding the winding of the curtain 86 and the winding thereof is disposed in a free rotation state above the winding shaft 87 obliquely above.

Therefore, when the motor housed in the drive unit box 92 is rotated forward, the pair of endless chains 8
5 and the take-up shaft 87 rotate in the forward direction (the direction in which the weight 91 connected to the endless chain 85 descends), and the weight 91 serves as auxiliary power, and the curtain wound around the take-up shaft 87. 86 is wound up, the whole of the inlet opening 81, or a partially is closed, and the inside of the drying chamber R _1, and its outside is cut off. Here, FIGS. 22 to 24 show a state in which substantially all of the substrate passage openings 81a of the entrance openings 81 through which the substrate V passes are closed, and the upper part of the entrance openings 81 above the substrate passage openings 81a. Is an opening 81b for arranging the walking beam device for securing a space for arranging the walking beam device W. In addition, the hanger return conveyor C
The first is disposed below the drying chamber R ₁ via the bottom wall 3.
Have been arranged in the interior of the equipment storage chamber R _2, the drive shaft 82 which constitutes the lowermost portion of the shutter device S ₁ is disposed above the first device housing chamber R _2. Therefore, in the hanging dryer of the substrate V of the present invention, the walking beam device W is used for transporting the substrate V, and the hanger J ₁ for hanging the substrate V on the pair of fixed beams ₁ is used. despite using a hunger return conveyor C for repeated use, the shutter device S _1, the a walking beam apparatus W and hangers return conveyor C, and has a configuration that does not interfere.

For this reason, as shown in FIG. 26, when a board detection sensor 94 is installed immediately below the board carry-in conveyor 26 and the passing board V is detected by the sensor 94 at regular intervals. , The substrate V is continuously carried in, and in this state, the substrate V continuously carried in
This itself functions as a curtain, and the curtain 86 is wound up to the maximum, and the opening size of the entrance opening 81 is the maximum. When the substrate V is not detected within the set time by the substrate detection sensor 94, the motor provided in the drive unit box 92 is started, the curtain 86 is pulled out from the winding shaft 87, and the entrance opening is opened. all substrate passage openings 81a of 81, is closed by the curtain 86 rolled up to the uppermost end, the drying chamber R ₁ and the outside is thermally blocked by the curtain 86 (see FIG. 27).

On the other hand, a plurality of types of substrates having different sizes (particularly, lengths in the vertical direction in a suspended state) may be mixed and carried into one dryer. And FIG.
As shown in the figure, when mixed with a normal substrate V and mixed and transported with a small-sized substrate V ′ and dried,
The opening is formed below the lower end of the substrate V 'only when the substrate V' having a small size is carried in.
In such a case, the size of the carry-in board (the length in the vertical direction in the suspended state) is detected in advance by another sensor (not shown), and the number of rotations corresponding to the detected value is detected. By controlling the winding length of the curtain 86 by rotating a motor (not shown) of the drive shaft 82, even when a plurality of types of substrates having different sizes are mixed and conveyed,
Opening size of the drying chamber R ₁ of the inlet opening 81 (opening height of the substrate passage openings 81a) made automatic control, it is possible to partial obstruction of the inlet opening 81.

Further, as shown in FIGS. 26 and 29, above the boundary portion between the heating zone is provided in a portion close to the outlet portion of the drying chamber R ₁ and the cooling zone shutter device S ₁
When you arranged the shutter device S ₂ having substantially the same configuration, it is possible to perform external thermal cutoff at the outlet side of the drying chamber R _1. In this case, below the bottom wall 3 of the drying chamber R ₁ together with the driving part of the shutter device S ₂ is arranged, the drying chamber endless chain device comprising the endless chain 85 in the side walls of R ₁ relative The bottom wall 3
Drying chamber R ₁ through a through hole 95 (see FIG. 29) provided in
It becomes the structure into which the curtain 86 enters.

Further, the pair of the substrate detecting sensor 96 for detecting the presence or absence of substrate V, as shown in FIG. 30, slightly inclined with respect to the drying chamber width direction of the R ₁ to hanging the upper end portion of the substrate V Be placed. As a result, the passage substrate V can be detected. For this reason, the substrate detection sensor 9 exceeds the set time.
When 6 does not detect the passage board V, as shown in FIG. 26, operates the shutter device S ₂ is the curtain 86 in the boundary portion is wound up to the uppermost position, the drying chamber R
_At the outlet side of ₁ , it is thermally isolated from the outside. Further, as shown in FIG. 29, even when a plurality of types of substrates having different sizes are conveyed, another sensor (not shown) detects the size of the substrate in the same manner as described above, and this detection is performed. By winding up the curtain 86 to the winding height corresponding to the value, the opening below the lower end of the substrate can be partially closed at the boundary portion at the time of mixing and transporting the substrate.

When the shutter devices S ₁ and S ₂ described above are used, they can be installed on the entrance side and the exit side of the drying chamber R ₁ without interfering with the walking beam device W and the hanger return conveyor C, and the dummy substrate can be used. Thermal shut-off can be performed at the inlet and outlet of the dryer without wasting or lengthening the length of the dryer. Further, since the position of the upper end of the roll of the curtain 86 of the shutter devices S ₁ and S ₂ can be adjusted according to the substrate size, it is possible to mix and transport different types of substrates of different sizes.

[0038] Subsequently, another hanger J ₂ for hanging holding the substrate V will be described with respect to a pair of fixed beams 1. The hanger J ₁ is to hold the two portions of the upper two corners of the substrate V clip 29, hanging the entire substrate V, is of configuration to transport, the substrate thickness is substantially zero.
If it is not more than 2 mm, the substrates conveyed one after another may come into contact with each other due to shaking due to hot air acting during conveyance, thermal distortion, warpage due to the difference in thermal expansion between the base material and the coating film, and the like. There is. If the substrates come into contact with each other in an undried state, the substrates become defective and the yield is reduced.

Therefore, the thickness of the substrate V is 0.2 mm or less.
In FIG. 32, the hanger J shown in FIG._Twouse
The use of the above solves the above problem. This hanger J
_TwoIs a hanger frame 101 having a rectangular frame shape, and the frame 1
Attached to each of the two vertical frame members 101a constituting the vertical side of No. 01
With a plurality of (four in this embodiment) clips 102
Be composed. A hanging support is provided at the upper end of the hanger frame 101.
The holding portion 103 is provided integrally, and the hanger frame 10
Each left and right two vertical frame members 101a forming one vertical side
Is connected to the clip 102 via a mounting bracket 104.
Are respectively attached. Also, the hanger frame 10
Lightly touch the lower end of the substrate V to be supported on the lower end of the vertical side of No. 1.
A contact plate portion 100 to be in contact with and supported is provided. This c
Ngar J _TwoIs used, the substrate V to be supported is
The two sides in the direction are a total of four places by the clip 102.
Supported and, in this state, suspended and transported,
The thin substrate V has a hanger frame 10 having two vertical sides.
Fixed to 1. As a result, the substrate V is warped, bent,
As a result, the quality can be improved.

As described above, when the two sides of the substrate V in the vertical direction are clamped by the clip, even if the clamping itself can be performed, the warpage in the vertical direction when the substrate is in the vertical posture is as follows. Almost eliminated by gravity,
Lateral (lateral) warpage may remain, and in order to improve the substrate quality, it is desirable to completely remove the lateral warpage of the substrate before drying. Therefore,
As shown in a clip 105 shown in FIGS. 33 to 35, when the clip is held, the holding claw 106 is connected to the fulcrum pin 1.
07, the pedestal portion 108
Not only sandwiches the substrate V at the end but also pulls the sandwiched substrate V toward the fulcrum pin 107, so that the tension in the left-right direction is applied to the substrate V. As a result, warpage in the same direction is eliminated. In order to make the above-described operation of the clip 105 most effective, the substrate V is held between the two sides in the vertical direction by each clip 105 to be in the vertical posture, and then one of the two sides in the vertical direction is used. When the side clip 105 is once released, sandwiched again, and pulled toward the fulcrum pin 107, the warpage remaining on the substrate V can be almost completely eliminated.
Further, if a resin having a large friction coefficient is attached to the surface of the pedestal portion 108, the tension acting on the substrate V
It is possible to prevent the holding portion from shifting and the tension from being reduced.

[0041]

According to the first and second aspects of the present invention, the means for transporting the substrates continuously carried into the drying chamber is constituted by a walking beam device, and the driving unit is disposed outside the drying chamber. In addition, since there is no dusting effect unlike endless chains, the drying chamber can be maintained at a high degree of cleanliness for a long time, and the quality of the manufactured substrate and the yield thereof can be improved. In addition, since the substrate transfer means is a walking beam device, the amount of horizontal movement (pitch) in one transfer can be easily adjusted, so that a plurality of substrates can be continuously loaded according to the type of substrate to be dried. The distance between a large number of substrates suspended and held by the fixed beam can be easily adjusted. Further, the hanger for suspending and holding the substrate is separated from the walking beam device as a transport means, and is separated from both the walking beam device and the substrate each time one substrate is dried. Therefore, the hanger can be easily cleaned, which also contributes to the improvement of the cleanliness in the drying chamber. By changing the size of the hanger, it becomes possible to transport different kinds of substrates having different sizes.

According to the third and fourth aspects of the present invention, there is provided a hanger return conveyor for automatically returning the hanger removed at the substrate unloading device side to the substrate loading side, and attaching and detaching the hanger to and from the substrate. Is performed automatically, so that the hanger can be used repeatedly,
At the same time, fully automatic drying of the substrate becomes possible.

Further, according to the fifth aspect of the present invention, since the shutter device capable of adjusting the position of the upper end of the winding according to the substrate size is provided, the walking beam device mounted on the dryer main body and the hanger return. Since it can be mounted on the dryer without interfering with the conveyor, and the opening of the drying chamber can be partially closed, it is possible to cope with mixed transport of different types of substrates having different sizes.

Further, according to the invention of claim 6, since the transfer board is sandwiched at a plurality of positions on the edges of both vertical sides thereof,
Support for extremely thin substrates becomes possible. In particular, when the structure of the clip is configured such that the substrate attached to the hanger frame is pulled in the horizontal direction, the slack in the horizontal direction that is likely to occur in the substrate is almost completely removed and the clip is dried. Can be

[Brief description of the drawings]

FIG. 1 is an overall plan view in which a central portion of a hanging dryer according to the present invention is omitted.

FIG. 2 is a partial front view of the same left side.

FIG. 3 is a partial front view of the same right part.

4 is a schematic cross-sectional view taken along line XX of FIG. 1 when the walking beam device W is not operated.

FIG. 5 is an enlarged plan view of the walking beam device W.

FIG. 6 is an enlarged side view of the same.

FIG. 7 is a cross-sectional view when the walking beam device W is not operated.

FIG. 8 is a cross-sectional view showing the same operation.

FIG. 9 is a schematic view showing a rectangular movement of the walking beam device W.

FIG. 10 is an enlarged side view of the substrate loading device A.

11 shows a clip 39 attached to the substrate support plate 34. FIG.
FIG.

12 is an enlarged side view showing a state in which the hanger J ₁ sent back to the side of the substrate carry-in device A is raised by a pair of stopper cylinder 47 by the hanger return conveyor C.

FIG. 13 shows a pair of transfer tools 4 from a pair of stopper bodies 48;
9 the hanger J ₁ is an enlarged side view showing a state of being transferred.

[14] hangers J ₁ from the pair of transfer tool 49 to a pair of hanger clamp fixture 45 is an enlarged side view showing a state of being transferred.

[15] clip 39 of the hanger J ₁ is opened by the pressure cylinder 52 is an enlarged side view showing a state where the front end portion of the substrate V is inserted therebetween.

FIG. 16 is an enlarged side view showing a state where the substrate V supported on the front surface of the substrate support plate 34 has been changed from a horizontal posture to a vertical posture.

[Figure 17] hanger J ₁ the substrate V of a pair of hanger clamp fixture 45 to the pair of fixed beams 1 through is an enlarged side view showing a state of being transferred.

18 is an overall side view of the substrate unloading device B showing a state where a dried substrate V is disposed on the front surface of the substrate support plate 72. FIG.

[19] substrate V of already dried over hanger J ₁ from the pair of fixed beams 1 to a pair of clamping members 66 is an enlarged side view showing a state of being transferred.

Figure 20 is an enlarged side view showing a state opened by a clip 73 clip releasing pieces 75 of the hanger J ₁ which is clamped in the clamping device 66.

FIG. 21 is a perspective view of the conveyor 7 when the substrate support plate 72 is rotated.
6 is an enlarged side view showing a state where a dried substrate V has been transferred onto 6; FIG.

[22] the inlet opening 81 of the drying chamber R ₁ is a perspective view of a shutter apparatus S ₁ in a state of being closed by the curtain 86.

FIG. 23 is a front view of the same.

FIG. 24 is a side view of the same.

[Figure 25] All of the curtain 86 is wound into the inlet opening 81 is a side view of the shutter apparatus S ₁ in a state of being opened.

FIG. 26 is a schematic front view showing a usage state of _two shutter devices S ₁ and S ₂ .

[27] Since the substrate V is no longer carried, the inlet opening 81 is a schematic front view showing a state of being closed by the shutter device S _1.

[Figure 28] different substrate different V sizes, when mixed transport of V ', only a portion of the inlet opening 81 is a schematic front view showing a state of being closed by the shutter device S _1.

[Figure 29] different substrate different V sizes, when mixed transport of V ', is a schematic front view showing the state of being closed by a portion of the inner portion of the outlet opening shutter device S _2.

FIG. 30 is a plan view showing an arrangement of a pair of substrate detection sensors 96 arranged inside the outlet opening.

31 is a perspective view of the hanger J _1.

Figure 32 is a perspective view of the hanger J _2.

FIG. 33 is a schematic side view of the clip 105 when not in use.

FIG. 34 is a schematic side view of the clip 105 in the process of being clamped.

FIG. 35 is a schematic side view of a state in which a substrate V is held between clips 105;

FIG. 36 is a view illustrating the operation of a state in which the hanger J ₁ sent back is lifted above the return conveyor C.

[Figure 37] The hanger J ₁ is a horizontal position, an operation explanatory view of a state immediately before the substrate V enters between the clip 29.

FIG. 38 is a working explanatory view of a state that has entered the substrate V between the horizontal position of the hanger J ₁ clip 29.

FIG. 39 is an operation explanatory view showing a state in which the substrate V held by the substrate support plate 34 is in an inclined position from a horizontal position to a vertical position.

FIG. 40 is an operation explanatory view showing a state where the substrate V held by the substrate support plate 34 has changed from a horizontal posture to a vertical posture.

[Figure 41] by the action of walking beam apparatus W, which is an operation explanatory view illustrating the state where the substrate V is transferred to the pair of fixed beams 1 through the hanger J _1.

FIG. 42 is an operation explanatory view in a state where the walking beam device W has moved up.

FIG. 43: After the walking beam device W is raised,
It is an operation explanatory view of a state where horizontal forward movement is performed.

FIG. 44 is an operation explanatory view showing a state in which the frontmost substrate V is transferred from the pair of fixed beams 1 to the substrate unloading device B by the rectangular movement of the walking beam device W.

45 is an operation explanatory view showing a tilted state immediately before a substrate V transferred to the substrate unloading device B is transferred to the unloading conveyor 76. FIG.

[Figure 46] and transferred to the substrate V on the side of the substrate carry-out device B is transferred to the unloading conveyor 76 is an operation explanatory view illustrating a state in which the hanger J ₁ is placed on the return conveyor C.

FIG. 47: Hanger J ₁ by hanger return conveyor C
FIG. 9 is an operation explanatory view showing a state in which is returned to the substrate loading device A side.

FIG. 48 is an operation explanatory view showing a state in which the substrate V on the carry-out conveyor 76 is discharged and a new substrate V is carried into the carry-in conveyor 26.

[Explanation of symbols]

A: the substrate carry-in device B: a substrate carry-out device C: Hanger return conveyor D: drying machine body J _1, J _2: Hanger R _1: drying chamber R _2: the first device housing chamber R _3: second equipment storage chamber S ₁ , S ₂ : shutter device V, V ′: thin substrate W: walking beam device 1: fixed beam 2: movable beam 3: bottom wall of dryer main body 9: ceiling wall of dryer main body 81: entrance opening 86: curtain 87 : Winding shaft 101: Hanger frame 102, 105: Clip

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Tokutaka Sugi 3-36, Noritakeshinmachi, Nishi-ku, Nagoya-shi, Aichi Prefecture Noritake Co., Ltd. (72) Inventor Takatoshi Ishikawa 3-1-1 Noritakeshinmachi, Nishi-ku, Nagoya-shi, Aichi Prefecture No. 36 Noritake Co., Ltd. F-term (reference) 3L113 AA02 AB02 AC35 AC45 AC46 AC63 AC75 AC76 BA34 DA04 DA30

Claims (7)

[Claims] 1. A drier of a type in which a thin substrate is hung via a hanger and dried, wherein a pair of fixed beams for hanging the substrate via a hanger are provided over an entire length of a drying chamber. A walking beam device for performing a rectangular motion in a front view to advance and convey a substrate suspended and supported by the fixed beam by a predetermined pitch; and After attaching the hanger to the substrate to be carried in a horizontal position on the front side of the entrance portion and bringing the substrate to a vertical position, in order to transfer and carry the substrate to a pair of fixed beams in a drying chamber via the hanger, At the substrate loading device connected to the entrance, and at the exit of the dryer body, remove the hanger from the dried substrate, and move the substrate from the vertical position to the horizontal position. And a substrate unloading device disposed at the outlet portion, wherein the driving section of the walking beam device is disposed outside a drying chamber of the dryer body. Hanging dryer for substrates. 2. The hanging dryer according to claim 1, wherein the driving unit of the walking beam device is installed on an upper surface of a ceiling wall of the drying chamber. 3. The thin substrate according to claim 1, further comprising a hanger return conveyor for returning the hanger removed in the substrate unloading device to the substrate unloading device. Hanging dryer. 4. The thin substrate for a thin substrate according to claim 3, wherein the hanger return conveyor is disposed in an equipment storage chamber separately provided below a drying chamber via a bottom wall. Hanging dryer. 5. A curtain winding shaft is provided at a portion lower than the bottom wall of the drying chamber, and the position of the upper end of the curtain can be adjusted in accordance with the presence or absence of a substrate or the size of the substrate. A shutter device disposed at one or both of an inlet and an outlet of the drying chamber of the dryer main body to close an opening communicating with the dryer. 4. The hanging dryer for a thin substrate according to any one of 4. 6. A hanger used for suspending a substrate in a dryer, comprising: a hanger frame; and a plurality of clips attached to a vertical member of the hanger frame. Hanger for substrate suspension. 7. The hanger for suspending a board according to claim 6, wherein the clip has a structure in which a board attached to the hanger frame is pulled and fixed in a lateral direction.