JP2000016580A - Chucking type processor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To restrain production of dust in the inside of a drying furnace to the utmost, to improve a maintenance property of exchange of a hanger, etc., to stabilize temperature in the furnace, to reduce energy loss, to improve environment of the circumference of the furnace and to improve quality of a substrate. SOLUTION: A substrate carry-in part 2 is constituted of an alignment means AC to align substrates S carried in from a preceding process by centering them, an inlet carrier means IC to further carry the aligned substrates S, an input means AM1 arranged adjacent to it and to revolve hanger clamping upper end parts of the substrates S upward by holding them, an input elevating means 12 to elevate the hanger by suspending it therefrom, a transfer means 14 to transfer the hanger to an inlet part of a substrate processing part by scooping it therefrom and holding it, a bearer 25 arranged adjacent to the inlet part of the substrate processing part and to load a plural number of the hangers, a carrier means 20 to intermittently deliver a plural number of the hangers with the bearer to the substrate processing part at one time and a carrier means RC to return used emply hangers from a substrate delivery part 4 to the substrate carry-in part 2, and this chucking type processor 1 is constituted of the substrate carry-in part 2, the substrate processing part and the substrate delivery part 4.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a chucking type processing apparatus used for drying printed circuit boards and the like.

[0002]

2. Description of the Related Art In a conventional chucking type processing apparatus, for example, a drying apparatus, a large number of hangers hung from an endless conveyor chain are sandwiched between printed boards and the like, loaded into a drying furnace, and placed in an endless conveyor. The hot air heated by a heater or the like is supplied into the furnace while the chain is intermittently fed and penetrates the drying furnace to dry the printed surface of the printed circuit board.

[0003]

However, in such a conventional drying apparatus using an endless conveyor chain, the hanger fixed to the conveyor chain is an intermittent feed in which substrates to be dried are tactfully fed one by one. I was For this reason, shutters cannot be provided at the entrance and the exit to shut off the inside of the drying furnace from outside air, and as a result,
Deterioration of the environment around the dryer, loss of energy, and unevenness of the temperature distribution at the inlet and outlet of the furnace affect the quality of the board. Had led to a decline.

Therefore, in the chucking type processing apparatus of the present invention, several hangers, for example, 10 hangers are collectively tact-feeded without using an endless conveyor chain for transporting the hangers into the drying furnace, and the hangers are fed onto the rollers. After loading the hanger into the furnace, the entrance and exit of the furnace are sealed with a shutter, and a return conveyor is provided at the bottom of the drying furnace body to return the used hanger to the original loading point. I did it. As a result, the generation of dust in the drying furnace is minimized, the maintenance performance such as hanger replacement is excellent, and the shutters can be provided at the inlet and the outlet of the furnace, thereby stabilizing the furnace temperature, Provided is a chucking type processing apparatus capable of realizing reduction of energy loss, improvement of surrounding environment, and high quality of a substrate.

[0005]

SUMMARY OF THE INVENTION The present invention relates to a chucking type processing apparatus comprising a substrate loading section, a substrate processing section, and a substrate unloading section, wherein the substrate loading section handles a substrate transported from a previous process. Aligning means for centering and aligning, inlet transport means for further transporting the aligned substrates, and a hanger disposed adjacent to the inlet transport means and holding a hanger for holding the upper end of the substrate, and turning upward. Charging means for suspending the hanger received from the charging means, and raising and lowering the hanger; transferring means for scooping and holding the hanger from the charging and lifting means and transferring the hanger to the entrance of the substrate processing section; A pedestal that is arranged adjacent to the entrance of the main body and mounts a plurality of hangers, a unit that sends a plurality of hangers together with the pedestal into the drying furnace at one time, and an empty empty space used from the substrate unloading section. Han And conveying means for returning the over to the substrate carry-in section, made of.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the chucking type processing apparatus according to the present invention will be described below with reference to the accompanying drawings.

As shown in FIGS. 1 and 2, a chucking type processing apparatus of the present invention, for example, a drying apparatus 1 receives a printed circuit board S on which printed wiring is provided from a previous step, for example, a printing apparatus, and cleans the substrate S with hot air. The drying apparatus includes a substrate carrying-in section 2 for carrying in a drying furnace main body 3 to be dried and a substrate carrying-out section 4 for carrying out a hot-air-dried substrate S from the drying furnace main body 3 and sending it to the next step, for example, an exposure apparatus. In addition, an ink tank for immersing the substrate in order to form a pattern on the substrate may be provided between the substrate loading section and the drying furnace.

[0008] substrate inlet First, substrate inlet 2, introduced from 3 as shown in detail in FIG. 5, the substrate S is not yet dry ink sent from the printing process of the step substrate inlet 2 Alignment conveyor (alignment means) AC, an inlet conveyor IC for discharging the aligned substrates S from the alignment conveyor AC, and an input arm (input means) AM1 for inverting and lifting a hanger H clamping (chucking) the substrates S. And a loading lift cylinder (loading / lowering means) 12 for lifting and lowering the hanger H on the loading fork 14a and a hanger H suspended from the loading lift cylinder 12 are sequentially received, and several, for example, ten, are stored together. Hanger cradle 25
And a return conveyor (return transport means) RC for returning the used hanger H from the substrate unloading section 4 to the substrate loading section 2 through the lower part of the drying furnace main body 3.

On the alignment conveyor AC, a photoelectric tube for detecting the substrate S sent and stopping its operation, an alignment lift cylinder 6 for lifting up the substrate S, and aligning the substrate S with the lifted line with the transport line center. There is provided an alignment motor 7a for aligning the stopper and a stopper cylinder 7 for raising and lowering the stopper. An entrance conveyor IC is provided adjacent to the alignment conveyor AC. The entrance conveyor IC including the several belts is rotationally driven by the drive motor 17, and carries the substrate S from the alignment conveyor AC into the loading arm AM1.

The input arm AM1 is provided with a chucking claw (see FIG. 10) for holding the hanger H at its turning tip, and rotates around a pivot and rises as described later. Hanger H holding S
Into the loading fork 14 via the loading lift cylinder 12
a. Also, the input arm AM
1. A supply lifting cylinder 8, a jig opening cylinder 9, and a supply chuck cylinder 9a are provided adjacent to 1. An arm chuck cylinder 10 is provided at the tip of the input arm AM1, and a substrate holding cylinder 11 is provided on a frame of the apparatus. Have been. Further, as shown in FIG. 5, the hanger supply rotation motor 16, the closing arm rotation motor 1
7a and a substrate holding lateral movement cylinder 18 are provided.

Further, a station 23 for supporting the hanger receiver 25 and the like of the apparatus of the present invention is supported at a lower portion of the drying furnace 1 over a substantially entire length thereof by a plurality of station elevating cylinders 23a. The return conveyor RC is rotatably driven by a return conveyor motor 22 arranged near the floor.

As shown in FIG. 3, a hanger H is mounted on the substrate carrying section 2 and moves to approach a loading lift cylinder 12 which rises to a loading transfer level.
The loading fork 14a for transferring the
It is fixed to. The inlet vertical cylinder 14 is driven by the inlet horizontal movement servomotor 13 via a timing belt, guided by a guide 13a, and is used to transfer the hanger H from the transfer position from the loading lift cylinder 12 to the hanger receiver 25. You can move to the side. In addition, as shown in FIG. 4, an entrance elevating cylinder 19 for lifting the transferred hanger H from the hanger receiver 25 and a hanger lateral movement cylinder 20 for moving the hanger H into the furnace are provided at the entrance. .

Drying Furnace Body A drying furnace body (substrate processing unit) 3 that is connected to the above-described substrate carrying-in section 2 and that dries a printed substrate S suspended by a hanger H with hot air is provided. As shown in FIGS. 1 and 2, the furnace body 3 is formed of a steel plate or the like and has a tunnel shape, and has an inlet and an outlet provided with an inlet shutter (which shuts off the inside of the furnace from outside air). A shut-off means 27 and an exit shutter (cut-off means) 34 are provided, which are opened and closed by shutter opening / closing cylinders 15 and 15a. When closed, they are pressed by shutter sealing cylinders 26 and 35 so that the inside of the furnace can be completely sealed. It is.

A station 23 which can be moved up and down over the entire length of the lower part of the furnace body 3 has a hanger receiver 3.
0 and a plurality of these hanger receivers 3
The hangers H loaded in the furnace are pushed together by rollers (rolling and transferring means) 31 arranged side by side so that the hangers H can be tact-fed toward the furnace outlet.

Further, a circulating blower 32 for blowing hot air into the furnace and a heater 33 for generating hot air from electric heat or steam are provided at an upper portion of the furnace main body 3.

In this manner, the hanger H on the hanger receiver 30 is tact-fed on the rollers 31, and after the loading of the hanger H into the furnace is completed, the inside of the furnace is closed and dried by hot air.

Substrate unloading unit A substrate unloading unit 4 is connected to the outlet of the drying furnace main body 3 and unloads the substrate S dried by hot air to the outside of the furnace as shown in FIGS.

As shown in FIGS. 6 to 9, the substrate S which has been dried and discharged from the furnace main body 3 is held between the substrate discharge section 4 and the shutter 34 at the outlet of the furnace main body 3. A hanger receiver 25a for the hanger H, a pair of pitch feed vertical cylinders 50 for lifting these hangers H from the hanger receiver 25a, and a pitch feed horizontal cylinder 45 for performing lateral movement are provided. Done. In addition, hanger receiving 25
A cooling fan motor 41 is provided in the upper part of a, and cools the substrate S by blowing cool air therefrom.

As shown in FIG. 6, a receiving fork for transferring the hanger H by moving between the exit end of the hanger receiver 25a and the vertically movable receiving lift cylinder 42, substantially in the same manner as the substrate loading section 2. 44a is fixedly suspended from the outlet vertical cylinder 44. This outlet vertical cylinder 4
The guide 4 moves in the lateral (transport) direction while being guided by a guide 43a rotated and driven via a timing belt by an exit lateral movement motor 43.

Further, the receiving lift cylinder 42
And a swingable receiving arm AM2 is disposed adjacent to the swinging arm H, swings the hanger H upward, receives the hanger H, and removes the processed substrate S from the hanger H to the outlet conveyor OC driven by the outlet conveyor motor 51. Is to be discharged.

Further, a discharge lifting cylinder 46, a discharge lift cylinder 47, and a jig opening cylinder 4 for releasing the clamp of the hanger H adjacent to the receiving arm AM2.
8 and a discharge chuck cylinder 54, and an arm chuck cylinder 49 is provided on the receiving arm AM2.

Hanger Next, a description will be given of a chucking hanger H for holding and transporting the substrate S by the chucking type processing apparatus 1 of the present invention.

As shown in FIG. 10, this hanger H is
A main body (flat bar) 70 having a rectangular cross section and made of an elongated steel plate, a round bar-shaped support bar 71 fixed to the upper surfaces of both ends of the main body 70 by welding or the like, and fixed to a lower surface of the main body 70. And a pair of receiving seats 72 sliding on the fixed roller 31 in the furnace, and a chucking claw 73 for holding the substrate S therebetween. Here, the support bar 71 fits into the V groove of the hanger receiver 25, 25a, and
2 slides on the in-furnace fixing roller 31 and the hanger H holding the substrate S is conveyed from the substrate loading unit 2 to the drying furnace main body 3 and dried by hot air.

A pair of chucking claws 7 for holding the substrate S
As shown in FIGS. 11 to 13, 3 is fixed to the main body 70 by rivets 86 or the like, and hangs down from the main body 70 so as to sandwich the upper end of the substrate S.

The chucking claw 73 includes a base 80 having a rectangular shape fixed to the main body 70 and having a bent portion 80a at a tip thereof, a bracket 81 integrated with the base 80 by welding or the like, and a bracket 81. A pin 84 fixed to the lower end of the main body 80, and pivots about the pin 84 to hold the substrate S between the pin and the surface of the main body 80. The holding piece 83 is hardened. Serrated protrusions 83a are engraved on the cured tip (sandwich) portion.
In order to rotate the holding piece 83 to hold the substrate S, a lever 82 having a long hole 82a to be engaged with the pin 82b implanted in the holding piece 83 and rotating around the guide bolt 85 is provided. Is provided. To release the chucking claws, the jig opening cylinders 9, 48 shown in FIG.
The end face of the lever 82 is pressed by the tip of the lever 82.

Operation of Chucking Processing Device Finally, the operation of the chucking processing device of the present invention will be described.

As shown in FIG. 1, first, empty hangers H that have flowed back on the return conveyor RC and are returned one by one into the oven of the drying oven main body 3 by chucking (chucking) the substrates S. Carry-in). Therefore, the stopper cylinder 5 of the entrance hanger is operated to raise the rod, and only one hanger H at the head on the return conveyor RC is set at the clamp position. And
The substrate S flowing from the printing apparatus, which is the previous process, is sensed by the photoelectric tube on the alignment conveyor AC, the movement of the alignment conveyor AC is stopped, and the alignment lift cylinder 6 is operated to raise the rod to lift the substrate S. The substrate S is aligned and aligned with the line center of the alignment conveyor AC. After the completion of the alignment of the substrates S, the alignment lift cylinder 6 and the stopper cylinder 7 descend to discharge the substrates S from the alignment conveyor AC.

Further, when the substrate S is sensed by the alignment conveyor AC, the supply lifting cylinder 8 is lowered (actually, its rod is raised and lowered; the same applies hereinafter), and the hanger H is clamped by the supply chuck cylinder 9a. After the confirmation, the supply lifting cylinder 8 is raised. At this raised position, the hanger H is rotated in the horizontal direction by the hanger supply rotation motor 16, the jig opening cylinder 9 advances to release the chucking claw 73 of the hanger H, and waits for the arrival of the substrate S.

The substrate S discharged from the alignment conveyor AC
Is sent to the entrance conveyor IC, and when the photoelectric tube senses the presence of the substrate S, the entrance conveyor IC stops, the substrate holding lateral movement cylinder 18 operates, and the substrate holding cylinder 11
Is moved to the end face of the substrate S, and the substrate holding cylinder 11 is moved.
Is lowered to press the end surface of the substrate S. By the function of the substrate press, the substrate level is fixed, and the clamping of the substrate S to the chucking claws 73 is facilitated.

Further, the supply lift cylinder 8 moves forward,
The end face of the substrate S is held in the chucking claw 73. At this time, since the substrate S is stopped by hitting the stopper pin, the holding margin of the substrate S can be adjusted by adjusting the mounting position of the stopper pin. At the forward end of the supply elevating cylinder 8, the jig opening cylinder 9 retreats and contacts the lever 82 of the chucking claw 73, the chucking claw 73 closes and clamps the upper end of the substrate S, and the substrate holding cylinder 11 Ascends and releases the substrate holder. Further, the substrate holding cylinder 18 moves backward to return the substrate holding to the origin.

At the forward end of the supply lift cylinder 8, the hanger H is clamped by the arm chuck cylinder 10, and after confirming this clamp, the clamp is released by the supply chuck cylinder 9a. Arm A to lift the arm upward
Change to M1. At the retreat end of the supply lifting cylinder 8, the hanger supply rotation motor 16 rotates in the reverse direction, and the supply part of the hanger H from the return conveyor RC returns to the starting point.

At the retreat end of the supply lifting cylinder 8,
The input arm rotation motor 17a rotates to lift the hanger H vertically to the upper part of the apparatus. At this time, three guide arms are mounted between the loading arms AM1 so that the lower portion of the substrate S is at the same angle as the rotation angle of the loading arm AM1.

When the loading arm AM1 turns to the vertical position, the arm chuck cylinder 10 releases the clamp of the hanger H, and raises the loading lift cylinder 12 to the loading transfer level. This loading lift cylinder 12
Is raised to the loading transfer level, the length of the loading arm AM1 can be reduced, and the dimensions of the entire apparatus can be reduced. At the upper limit of the raising of the loading lift cylinder 12, the loading arm rotation motor 17a rotates in the reverse direction, and the loading arm AM1 returns to the turning origin.

Further, at the upper limit of the rising of the loading lift cylinder 12, the loading fork 14a is advanced to the position of the hanger H by the inlet laterally moving servomotor 13, and the inlet vertical cylinder 14 is raised to remove the hanger H from the loading lift cylinder 12. Rake-up, entrance side movement servo motor 1
3, the input fork 14a advances to the hanger receiver 25. At this forward end, the inlet vertical cylinder 14 descends and puts the hanger H on the hanger receiver 25. At the lower limit of the lowering of the inlet vertical cylinder 14, the inlet laterally moving servomotor 13 retreats to the starting origin position. At this time, since a servomotor is used, deceleration control is performed in order to control the forward position to the hanger receiver 25 and to prevent contact with the preceding substrate S due to swinging of the substrate S when stopped.

By repeating such an operation, the hangers H are transferred to the hanger receiver 25 one by one, for example, up to ten hangers H, or the cycle time is increased.

The transfer of several (for example, ten) hangers H placed on the hanger receiver 25 to the furnace is performed by first releasing the shutter sealing cylinders 26 and 35 and sealing the entrance shutter 27 and the exit shutter 34. Is released, the shutter opening / closing cylinders 15 and 15a are operated to lift the inlet shutter 27 and the outlet shutter 34, and to open these shutters 27 and 34. Next, the inlet lift cylinder 19 is operated to collect several hangers H at the inlet from the hanger receiver 25, and the hanger horizontal transfer cylinder 20 slides laterally (by tact feeding) to transfer the hangers H into the furnace. Move.

The movement of the hanger H in the furnace (drying furnace main body 3) is performed by moving the hanger H placed on a roller 31 disposed in the furnace.
Without being lifted, it is pushed by the in-furnace hanger receiver 30 and slid on the rollers 31.

Lateral movement of the hanger H in the furnace and hanger H
When the loading of the station is completed,
a descends and is mounted on the rollers 31 in the furnace using the seats 72 of the hanger H. Station lifting cylinder 23
At the lower limit of “a”, the hanger horizontal transfer cylinder 20 slides and retreats, and at the retreat end, the station elevating cylinder 23 a moves up and lowers the hanger receiver 30.

The shutter opening / closing cylinders 15, 1
5a, the inlet shutter 27 and the outlet shutter 34 are closed, and the shutter closed cylinder 2 is closed.
By operating the shutters 6, 35, both shutters 27, 34 are closed, and in a completely closed state, the hot air generated by the heater 33 is circulated in the furnace by the circulation blower 32 as shown by arrows (see FIGS. 4 and 7). The substrate S held between the hangers H of the furnace is dried with hot air.

When the hot-air drying is completed, the inlet and outlet shutters 27 and 34 are opened, and the hanger H is discharged from the furnace. Here, several final hangers reaching the outlet of the furnace, for example, 10 hangers, are lifted from above the rollers 31 because there is a level difference between the rollers 31 and the hanger receiver 25a at the outlet (substrate unloading section 4). It is discharged outside the furnace.

The hangers H discharged from the furnace are:
The pitch-feed vertical cylinder 50 collectively lifts the pieces, and the pitch-feed horizontal cylinder 45 horizontally moves the pitch one pitch at a time and places it on the hanger receiver 25a. Here, in this cycle, the hanger H moves forward to the final hanger receiver 25a while repeating this operation due to the time-up set by the pitch feed cycle timer. At this time, the fan motor 41 is driven to blow cool air to cool the dried substrate S.

The hanger H, which has arrived at the final hanger receiver 25a, is moved forward by the outlet lateral movement motor 43 to the final hanger, and the outlet vertical cylinder 44 rises to scoop the hanger H from the hanger receiver 25a. At the upper limit of the rise of the cylinder 44, the exit lateral movement motor 43
It retracts to the receiving position of the receiving lift cylinder 42. Then, the outlet vertical cylinder 44 descends to receive the hanger H, and puts it on the cradle of the cylinder 42.
3 moves back to the starting point.

When the receiving position of the hanger H is confirmed,
The receiving arm rotation motor 52 rotates to rotate the receiving arm AM2 to the vertical position. This receiving arm AM
At the vertical position of No. 2, the receiving lift cylinder 42 is lowered to transfer the hanger H to the receiving arm AM2. At the lower limit of the lowering of the receiving lift cylinder 42, the arm chuck cylinder 49 clamps the hanger H. After confirming this clamp, the receiving arm rotating motor 52 rotates in the reverse direction to rotate the receiving arm AM2, and the outlet conveyor O
The hanger H holding the substrate S horizontally is set on C.

Here, the discharge elevating cylinder 46 advances, the discharge chuck cylinder 54 clamps the hanger H, and after the clamping, the jig opening cylinder 48 is operated to open the chucking claw 73 of the hanger H. The substrate S is placed on the exit conveyor OC. The dried substrate S is sent to, for example, an exposure apparatus for performing the next step.

After confirming that the substrate S has passed through the outlet conveyor OC, the jig opening cylinder 48 retreats to close the chucking claw 73, the arm chuck cylinder 49 releases the clamp, and the discharge lifting cylinder 46 retreats. Then, the hanger H is transferred from the receiving arm AM2.

Thereafter, the hanger discharge rotation motor 53 rotates to vertically rotate the hanger H toward the return conveyor RC. The discharge lift cylinder 47 rises at the vertical position of the hanger H, and the discharge chuck cylinder 54 opens the clamp at the upper limit of the lift to place the hanger H on the receiving stand of the discharge lift cylinder 47. Then, the discharge lift cylinder 47 is lowered and the hanger H is placed on the return conveyor RC.
As a result, the hanger H is returned to the substrate loading section 2 side. Here, the hanger discharge rotation motor 53 rotates backward at the lower lower limit of the discharge lift cylinder 47 and returns to the starting point.

A stopper cylinder 23b is provided at an intermediate point of the return conveyor RC, and a force applied to the leading hanger H when the returned hanger H stands by over the intermediate point is determined by this intermediate point. Is dispersed.

In this manner, the transfer of the hanger H into the furnace and the empty hanger H are returned to the original carry-in position, and the substrate is dried with hot air.

[0049]

According to the chucking type processing apparatus of the present invention, the inside of the drying furnace can be completely shut off from the outside air, so that the generation of dust in the drying furnace can be suppressed as much as possible.
Maintainability such as hanger replacement can be improved, and
It is possible to stabilize the furnace temperature, reduce energy loss, improve the environment around the furnace, and achieve high quality substrates.

[Brief description of the drawings]

FIG. 1 is a front view of a chucking type processing apparatus according to an embodiment of the present invention.

FIG. 2 is a plan view of the chucking type processing apparatus shown in FIG.

FIG. 3 is a partially enlarged front view of a substrate loading section of the chucking type processing apparatus shown in FIG. 1;

FIG. 4 is a side view of a substrate loading section of the chucking type processing apparatus shown in FIG. 3 as viewed from a substrate loading direction.

FIG. 5 is a plan view of a substrate loading section of the chucking type processing apparatus shown in FIG. 3;

6 is a partially enlarged front view of a substrate unloading section of the chucking type processing apparatus shown in FIG.

7 is a side view of the substrate unloading unit of the chucking type processing apparatus shown in FIG. 6 as viewed from the substrate unloading direction.

FIG. 8 is a plan view of a substrate unloading section of the chucking type processing apparatus shown in FIG. 6;

FIG. 9 is a side view of the hanger receiving portion of the chucking type processing apparatus shown in FIG. 1 as viewed from a substrate loading direction.

10A and 10B are a plan view and a front view, respectively, of a hanger used in the chucking type processing apparatus shown in FIG.

FIG. 11 is a side view of the chucking jig of the hanger shown in FIG. 10;

FIG. 12 is an enlarged front view of the chucking jig of the hanger shown in FIG.

FIG. 13 is an enlarged side view of the chucking jig shown in FIG. 11;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Chucking type processing apparatus 2 Substrate carry-in part 3 Drying furnace main body 4 Substrate carry-out part 5 Stopper cylinder 6 Alignment lift cylinder 7 Stopper cylinder 7a Alignment motor 8 Supply / lift cylinder 9 Jig opening cylinder 9a Supply chuck cylinder 10 Arm chuck cylinder 11 Substrate Holder cylinder 12 Loading lift cylinder 13 Inlet horizontal movement servomotor 14 Inlet vertical cylinder 14a Loading fork 15, 15a Shutter opening / closing cylinder 16 Hanger supply rotation motor 17 Inlet conveyor drive motor 17a Loading arm rotation motor 18 Substrate holding horizontal movement cylinder 19 Inlet lift cylinder Reference Signs List 20 hanger horizontal transfer cylinder 22 return conveyor motor 23 station 23a station elevating cylinder 25 hanger -Cradle 25a Hanger receiver 26 Shutter closed cylinder 27 Inlet shutter 30 Hanger receiver 31 Transfer roller 32 Circulation blower 33 Heater 34 Outlet shutter 35 Shutter closed cylinder 41 Cooling fan motor 42 Receiving lift cylinder 43 Exit horizontal moving cylinder 44 Exit vertical cylinder 44a Receiving Fork 45 Pitch feed horizontal cylinder 46 Discharge lift cylinder 47 Discharge lift cylinder 48 Jig open cylinder 49 Arm chuck cylinder 50 Pitch feed vertical cylinder 51 Exit conveyor motor 52 Receiving arm rotation motor 53 Hanger discharge rotation motor 54 Discharge chuck cylinder 70 Main body ( Flat bar) 71 Support bar 72 Receiving seat 73 Chucking claw 82 Lever S Substrate H Han Over AC alignment conveyor AM1-up arm AM2 receives arm IC entrance conveyor OC outlet conveyor RC return conveyor.

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Takayuki Matsui 1-18-3 Toganecho, Katsushika-ku, Tokyo F-term (reference) 3F044 AA13 AB03 AB08 AB23 AB24 AB37 BA02 BB02 BC02 CA01 CB01 CD01 CD06 CD08 3L113 AA02 AB02 AB05 AC05 AC08 AC16 AC21 AC36 AC45 AC46 AC51 AC57 AC63 AC67 AC76 AC90 BA34 DA02 DA07 DA22 DA24 DA26 4K050 AA05 BA17 CF06 CF16 CG10 CG30

Claims (3)

[Claims] 1. A chucking type processing apparatus comprising a substrate carry-in part, a substrate processing part, and a substrate carry-out part, wherein said substrate carry-in part centers and aligns a substrate conveyed from a previous process. Inlet transfer means for further transferring the aligned substrates; input means for holding the hanger disposed adjacent to the input transfer means and holding the upper end of the substrate and turning upward; Loading / lowering means for suspending and raising / lowering the hanger from a means; transfer means for scooping and holding the hanger from the charging / lowering means and transferring the hanger to an entrance of the substrate processing unit; A receiving table that is arranged adjacent to the mounting table and mounts the hangers; a transfer unit that sends the plurality of hangers for each receiving table into the substrate processing unit at one time; And conveying means for returning the empty hangers already use to the substrate inlet, chucking type processing apparatus comprising a. 2. A chucking type processing apparatus comprising a substrate carry-in part, a substrate processing part, and a substrate carry-out part, wherein the substrate processing part is a drying furnace main body, and the drying furnace main body is provided with the substrate carrying part. Rolling transfer means for holding and transferring a plurality of hangers holding the substrate conveyed therefrom, and a pedestal disposed adjacent to the rolling transfer means and holding the plurality of hangers and capable of moving up and down. A chucking type processing apparatus comprising: a blowing unit that supplies hot air to the drying furnace main body to circulate the hot air to dry the substrate; and an openable and closable closing unit that seals an inlet and an outlet of the drying furnace main body. 3. A chucking type processing apparatus comprising a substrate carry-in section, a substrate processing section, and a substrate carry-out section, wherein the substrate carry-out section feeds a plurality of hangers holding a substrate processed from the substrate processing section at a pitch. Means for unloading, a cradle on which the plurality of hangers sent at a pitch are mounted, means for scooping and holding the hangers from the cradle, and transferring the hangers to an outlet portion; and receiving the hangers from the transfer means. Receiving means for lifting and lowering the hanger, receiving and rotating the hanger from the receiving means to return the substrate surface to a horizontal position, and releasing the substrate from being hung by the hanger; and transporting the released substrate to the next step. And a chucking type processing apparatus comprising: