JP2006324692A5 - - Google Patents

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Publication number
JP2006324692A5
JP2006324692A5 JP2006218563A JP2006218563A JP2006324692A5 JP 2006324692 A5 JP2006324692 A5 JP 2006324692A5 JP 2006218563 A JP2006218563 A JP 2006218563A JP 2006218563 A JP2006218563 A JP 2006218563A JP 2006324692 A5 JP2006324692 A5 JP 2006324692A5
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JP
Japan
Prior art keywords
substrate
rim
chuck body
air
peripheral side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006218563A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006324692A (ja
JP4643520B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2006218563A priority Critical patent/JP4643520B2/ja
Priority claimed from JP2006218563A external-priority patent/JP4643520B2/ja
Publication of JP2006324692A publication Critical patent/JP2006324692A/ja
Publication of JP2006324692A5 publication Critical patent/JP2006324692A5/ja
Application granted granted Critical
Publication of JP4643520B2 publication Critical patent/JP4643520B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2006218563A 2006-08-10 2006-08-10 検査方法および検査装置 Expired - Lifetime JP4643520B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006218563A JP4643520B2 (ja) 2006-08-10 2006-08-10 検査方法および検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006218563A JP4643520B2 (ja) 2006-08-10 2006-08-10 検査方法および検査装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2000080695A Division JP3936828B2 (ja) 2000-03-22 2000-03-22 基板搭載装置

Publications (3)

Publication Number Publication Date
JP2006324692A JP2006324692A (ja) 2006-11-30
JP2006324692A5 true JP2006324692A5 (cg-RX-API-DMAC10.html) 2007-04-12
JP4643520B2 JP4643520B2 (ja) 2011-03-02

Family

ID=37544079

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006218563A Expired - Lifetime JP4643520B2 (ja) 2006-08-10 2006-08-10 検査方法および検査装置

Country Status (1)

Country Link
JP (1) JP4643520B2 (cg-RX-API-DMAC10.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5414602B2 (ja) 2010-03-31 2014-02-12 株式会社日立ハイテクノロジーズ 検査装置
CN109461691A (zh) * 2017-09-06 2019-03-12 富士迈半导体精密工业（上海）有限公司 晶圆支撑装置
JP7331139B2 (ja) * 2019-12-24 2023-08-22 株式会社日立ハイテク 基板検査装置
CN117979571A (zh) * 2020-09-02 2024-05-03 深圳市鑫达辉软性电路科技有限公司 一种fpc翘曲修复方法
US20250004043A1 (en) * 2021-09-08 2025-01-02 Hitachi High-Tech Corporation Wafer inspection apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2891894B2 (ja) * 1995-03-30 1999-05-17 大陽東洋酸素株式会社 基板回転装置
JPH11111819A (ja) * 1997-09-30 1999-04-23 Asahi Kasei Micro Syst Co Ltd ウェハーの固定方法及び露光装置

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