JP2006313356A5 - - Google Patents

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Publication number
JP2006313356A5
JP2006313356A5 JP2006128585A JP2006128585A JP2006313356A5 JP 2006313356 A5 JP2006313356 A5 JP 2006313356A5 JP 2006128585 A JP2006128585 A JP 2006128585A JP 2006128585 A JP2006128585 A JP 2006128585A JP 2006313356 A5 JP2006313356 A5 JP 2006313356A5
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JP
Japan
Prior art keywords
light
radiation component
polarization
component
reflecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2006128585A
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English (en)
Japanese (ja)
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JP4865399B2 (ja
JP2006313356A (ja
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Publication date
Priority claimed from DE102005020543A external-priority patent/DE102005020543A1/de
Application filed filed Critical
Publication of JP2006313356A publication Critical patent/JP2006313356A/ja
Publication of JP2006313356A5 publication Critical patent/JP2006313356A5/ja
Application granted granted Critical
Publication of JP4865399B2 publication Critical patent/JP4865399B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2006128585A 2005-05-03 2006-05-02 光を調節可能に変化させるための方法および装置 Expired - Fee Related JP4865399B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102005020543.7 2005-05-03
DE102005020543A DE102005020543A1 (de) 2005-05-03 2005-05-03 Verfahren und Vorrichtung zur einstellbaren Veränderung von Licht

Publications (3)

Publication Number Publication Date
JP2006313356A JP2006313356A (ja) 2006-11-16
JP2006313356A5 true JP2006313356A5 (https=) 2010-07-15
JP4865399B2 JP4865399B2 (ja) 2012-02-01

Family

ID=36615723

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006128585A Expired - Fee Related JP4865399B2 (ja) 2005-05-03 2006-05-02 光を調節可能に変化させるための方法および装置

Country Status (4)

Country Link
US (1) US7605976B1 (https=)
EP (1) EP1720054A3 (https=)
JP (1) JP4865399B2 (https=)
DE (1) DE102005020543A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7864423B2 (en) * 2007-08-10 2011-01-04 Aegis Lightwave, Inc. Spectrally adjustable filter
US8284489B2 (en) * 2007-09-11 2012-10-09 Aegis Lightwave, Inc. Spectrally adjustable filter
ITFI20070260A1 (it) * 2007-11-21 2009-05-22 Light 4 Tech Firenze S R L Dispositivo per illuminare un oggetto con una sorgente di luce multispettrale e rivelare lo spettro della luce emessa.
US7817272B2 (en) * 2008-06-09 2010-10-19 Aegis Lightwave, Inc. High-resolution spectrally adjustable filter
DE102008049748A1 (de) * 2008-09-30 2009-12-17 Carl Zeiss Ag Strahlteilereinrichtung
WO2011052248A1 (en) * 2009-11-02 2011-05-05 Olympus Corporation Beam splitter apparatus, light source apparatus, and scanning observation apparatus
DE102011077327B4 (de) * 2011-06-09 2022-03-03 Carl Zeiss Microscopy Gmbh Lichtrastermikroskop mit Strahlkombinierer zum Kombinieren von zwei jeweils eigenständig gescannten Beleuchtungsstrahlen
DE102012205722B4 (de) * 2012-04-05 2020-07-23 Carl Zeiss Microscopy Gmbh Abbildendes Farbteilermodul, Mikroskop mit einem solchen Farbteilermodul sowie Verfahren zum Abbilden eines Objektfeldes in eine erste und eine zweite Bildebene
DE102012019472B4 (de) * 2012-09-28 2023-05-04 Carl Zeiss Microscopy Gmbh Optische Filtervorrichtung, insbesondere für Mikroskope, und Mikroskop
JP2014092682A (ja) * 2012-11-02 2014-05-19 Olympus Corp 顕微鏡用照明装置及びそれを備えた顕微鏡
KR102659810B1 (ko) * 2015-09-11 2024-04-23 삼성디스플레이 주식회사 결정화도 측정 장치 및 그 측정 방법
JP2020515828A (ja) * 2017-04-07 2020-05-28 ヴェリリー ライフ サイエンシズ エルエルシー 落射蛍光集光用のパターン形成光学系
EP4361703A1 (en) * 2022-10-27 2024-05-01 ASML Netherlands B.V. An illumination module for a metrology device

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6167173A (en) 1997-01-27 2000-12-26 Carl Zeiss Jena Gmbh Laser scanning microscope
DE19758744C2 (de) 1997-01-27 2003-08-07 Zeiss Carl Jena Gmbh Laser-Scanning-Mikroskop
WO1999042884A1 (de) 1998-02-19 1999-08-26 Leica Microsystems Heidelberg Gmbh Optische anordnung mit spektral selektivem element
DE19842288A1 (de) 1998-08-04 2000-02-10 Zeiss Carl Jena Gmbh Einstellbare Einkopplung und/oder Detektion einer oder mehrerer Wellenlängen in einem Mikroskop
US6377344B2 (en) 1998-08-04 2002-04-23 Carl Zeiss Jena Gmbh Adjustable coupling in and/or detection of one or more wavelengths in a microscope
DE19936573A1 (de) 1998-12-22 2001-02-08 Zeiss Carl Jena Gmbh Anordnung zur Separierung von Anregungs- und Emissionslicht in einem Mikroskop
DE19923822A1 (de) 1999-05-19 2000-11-23 Zeiss Carl Jena Gmbh Scannende Anordnung, vorzugsweise zur Erfassung von Fluoreszenzlicht
DE19930532C2 (de) * 1999-06-30 2002-03-28 Zeiss Carl Jena Gmbh Anordnung zur Optimierung der Pulsform in einem Laser-Scanning-Mikroskop
US6958811B2 (en) 2000-06-29 2005-10-25 Carl Zeiss Jena Gmbh Method for the detection of dyes in fluorescence microscopy
DE10033180B4 (de) 2000-06-29 2006-08-31 Carl Zeiss Jena Gmbh Verfahren zur Detektion von Farbstoffen in der Fluoreszenzmikroskopie
CA2443664A1 (en) * 2001-04-03 2002-10-17 Cidra Corporation Variable optical source
DE10137155B4 (de) 2001-07-30 2006-11-30 Leica Microsystems Cms Gmbh Optische Anordnung und Scanmikroskop
US6947127B2 (en) 2001-12-10 2005-09-20 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and/or back scattered light beam in a sample
US6888148B2 (en) 2001-12-10 2005-05-03 Carl Zeiss Jena Gmbh Arrangement for the optical capture of excited and /or back scattered light beam in a sample
DE10241472B4 (de) * 2002-09-04 2019-04-11 Carl Zeiss Microscopy Gmbh Verfahren und Anordnung zur einstellbaren Veränderung von Beleuchtungslicht und/oder Probenlicht bezüglich seiner spektralen Zusammensetzung und/oder Intensität
DE10247247A1 (de) * 2002-10-10 2004-04-22 Leica Microsystems Heidelberg Gmbh Optische Anordnung und Mikroskop

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