JP2006281268A5 - - Google Patents

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Publication number
JP2006281268A5
JP2006281268A5 JP2005104326A JP2005104326A JP2006281268A5 JP 2006281268 A5 JP2006281268 A5 JP 2006281268A5 JP 2005104326 A JP2005104326 A JP 2005104326A JP 2005104326 A JP2005104326 A JP 2005104326A JP 2006281268 A5 JP2006281268 A5 JP 2006281268A5
Authority
JP
Japan
Prior art keywords
laser
optical path
optical
optical system
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005104326A
Other languages
English (en)
Japanese (ja)
Other versions
JP2006281268A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005104326A priority Critical patent/JP2006281268A/ja
Priority claimed from JP2005104326A external-priority patent/JP2006281268A/ja
Priority to TW095105909A priority patent/TW200633807A/zh
Priority to CNA2006100573189A priority patent/CN1840278A/zh
Priority to KR1020060028939A priority patent/KR20060105577A/ko
Publication of JP2006281268A publication Critical patent/JP2006281268A/ja
Publication of JP2006281268A5 publication Critical patent/JP2006281268A5/ja
Pending legal-status Critical Current

Links

JP2005104326A 2005-03-31 2005-03-31 レーザ加工機 Pending JP2006281268A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2005104326A JP2006281268A (ja) 2005-03-31 2005-03-31 レーザ加工機
TW095105909A TW200633807A (en) 2005-03-31 2006-02-22 Laser machining apparatus
CNA2006100573189A CN1840278A (zh) 2005-03-31 2006-03-08 激光加工装置
KR1020060028939A KR20060105577A (ko) 2005-03-31 2006-03-30 레이저가공기

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005104326A JP2006281268A (ja) 2005-03-31 2005-03-31 レーザ加工機

Publications (2)

Publication Number Publication Date
JP2006281268A JP2006281268A (ja) 2006-10-19
JP2006281268A5 true JP2006281268A5 (enExample) 2007-04-12

Family

ID=37029564

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005104326A Pending JP2006281268A (ja) 2005-03-31 2005-03-31 レーザ加工機

Country Status (4)

Country Link
JP (1) JP2006281268A (enExample)
KR (1) KR20060105577A (enExample)
CN (1) CN1840278A (enExample)
TW (1) TW200633807A (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4765474B2 (ja) * 2005-08-16 2011-09-07 パナソニック株式会社 レーザ加工装置
JP4490410B2 (ja) * 2006-11-28 2010-06-23 住友重機械工業株式会社 レーザ照射装置及びレーザ加工方法
DE102007056254B4 (de) * 2007-11-21 2009-10-29 Lpkf Laser & Electronics Ag Vorrichtung zur Bearbeitung eines Werkstücks mittels paralleler Laserstrahlen
DE502008001155D1 (de) * 2008-05-02 2010-09-30 Leister Process Tech Verfahren und Laservorrichtung zum Bearbeiten und/oder Verbinden von Werkstücken mittels Laserstrahlung mit Leistungswirk- und Pilotlaser und mindestens einem diffraktiven optischen Element
KR101134937B1 (ko) * 2009-10-14 2012-04-17 주식회사 한광옵토 레이저 조사장치
JP6430790B2 (ja) 2014-11-25 2018-11-28 株式会社ディスコ レーザー加工装置
JP6851751B2 (ja) 2016-08-30 2021-03-31 キヤノン株式会社 光学装置、加工装置、および物品製造方法
JP6844901B2 (ja) * 2017-05-26 2021-03-17 株式会社ディスコ レーザ加工装置及びレーザ加工方法
TWI843784B (zh) * 2019-01-31 2024-06-01 美商伊雷克托科學工業股份有限公司 雷射加工設備、與設備一起使用的控制器及非暫時性電腦可讀取媒體
JP7462219B2 (ja) * 2020-05-08 2024-04-05 パナソニックＩｐマネジメント株式会社 レーザ加工装置
CN112538566B (zh) * 2020-11-25 2022-07-29 中国科学院宁波材料技术与工程研究所 一种激光冲击强化加工系统
WO2024241936A1 (ja) * 2023-05-25 2024-11-28 東京エレクトロン株式会社 基板処理方法及び基板処理装置

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