JP2006278562A5 - - Google Patents

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Publication number
JP2006278562A5
JP2006278562A5 JP2005093051A JP2005093051A JP2006278562A5 JP 2006278562 A5 JP2006278562 A5 JP 2006278562A5 JP 2005093051 A JP2005093051 A JP 2005093051A JP 2005093051 A JP2005093051 A JP 2005093051A JP 2006278562 A5 JP2006278562 A5 JP 2006278562A5
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JP
Japan
Prior art keywords
plane
piezoelectric
piezoelectric layer
piezoelectric element
liquid ejecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2005093051A
Other languages
English (en)
Japanese (ja)
Other versions
JP5297576B2 (ja
JP2006278562A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2005093051A external-priority patent/JP5297576B2/ja
Priority to JP2005093051A priority Critical patent/JP5297576B2/ja
Priority to EP06006124.9A priority patent/EP1707367B2/en
Priority to CN2006100674245A priority patent/CN1841803B/zh
Priority to US11/390,222 priority patent/US7651199B2/en
Priority to KR20060027935A priority patent/KR100830626B1/ko
Publication of JP2006278562A publication Critical patent/JP2006278562A/ja
Publication of JP2006278562A5 publication Critical patent/JP2006278562A5/ja
Publication of JP5297576B2 publication Critical patent/JP5297576B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2005093051A 2005-03-28 2005-03-28 圧電素子及びアクチュエータ装置並びに液体噴射ヘッド及び液体噴射装置 Expired - Lifetime JP5297576B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005093051A JP5297576B2 (ja) 2005-03-28 2005-03-28 圧電素子及びアクチュエータ装置並びに液体噴射ヘッド及び液体噴射装置
EP06006124.9A EP1707367B2 (en) 2005-03-28 2006-03-24 Piezoelectric element, actuator device, liquid-jet head and liquid-jet apparatus
CN2006100674245A CN1841803B (zh) 2005-03-28 2006-03-27 压电元件、致动器装置、液体喷射头和液体喷射设备
KR20060027935A KR100830626B1 (ko) 2005-03-28 2006-03-28 압전부재, 액츄에이터 장치, 액체분사 헤드 및 액체분사장치
US11/390,222 US7651199B2 (en) 2005-03-28 2006-03-28 Piezoelectric element, actuator device, liquid-jet head and liquid-jet apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005093051A JP5297576B2 (ja) 2005-03-28 2005-03-28 圧電素子及びアクチュエータ装置並びに液体噴射ヘッド及び液体噴射装置

Publications (3)

Publication Number Publication Date
JP2006278562A JP2006278562A (ja) 2006-10-12
JP2006278562A5 true JP2006278562A5 (https=) 2007-10-25
JP5297576B2 JP5297576B2 (ja) 2013-09-25

Family

ID=36481363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005093051A Expired - Lifetime JP5297576B2 (ja) 2005-03-28 2005-03-28 圧電素子及びアクチュエータ装置並びに液体噴射ヘッド及び液体噴射装置

Country Status (5)

Country Link
US (1) US7651199B2 (https=)
EP (1) EP1707367B2 (https=)
JP (1) JP5297576B2 (https=)
KR (1) KR100830626B1 (https=)
CN (1) CN1841803B (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5297576B2 (ja) * 2005-03-28 2013-09-25 セイコーエプソン株式会社 圧電素子及びアクチュエータ装置並びに液体噴射ヘッド及び液体噴射装置
KR20100057596A (ko) * 2007-07-03 2010-05-31 코닌클리즈케 필립스 일렉트로닉스 엔.브이. 존재 검출을 위한 박막 검출기
JP5540654B2 (ja) * 2009-11-03 2014-07-02 セイコーエプソン株式会社 液体噴射ヘッド及び液体噴射装置並びに圧電素子
US9761785B2 (en) 2011-10-17 2017-09-12 The United States Of America As Represented By The Secretary Of The Army Stylo-epitaxial piezoelectric and ferroelectric devices and method of manufacturing
US8866367B2 (en) 2011-10-17 2014-10-21 The United States Of America As Represented By The Secretary Of The Army Thermally oxidized seed layers for the production of {001} textured electrodes and PZT devices and method of making
JP6273829B2 (ja) 2013-09-13 2018-02-07 株式会社リコー 電気機械変換素子とその製造方法、及び電気機械変換素子を有する液滴吐出ヘッド、液滴吐出ヘッドを有する液滴吐出装置
CN111703207B (zh) * 2020-05-13 2021-09-14 苏州锐发打印技术有限公司 带单层内电极的压电喷墨打印器件

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3890634B2 (ja) † 1995-09-19 2007-03-07 セイコーエプソン株式会社 圧電体薄膜素子及びインクジェット式記録ヘッド
JP4182329B2 (ja) * 2001-09-28 2008-11-19 セイコーエプソン株式会社 圧電体薄膜素子およびその製造方法、ならびにこれを用いた液体吐出ヘッド及び液体吐出装置
JP2003133604A (ja) * 2001-10-26 2003-05-09 Seiko Epson Corp 圧電体薄膜素子およびその製造方法、ならびにこれを用いたインクジェット記録ヘッド及びインクジェットプリンタ
KR100581257B1 (ko) * 2001-12-18 2006-05-22 마쯔시다덴기산교 가부시키가이샤 압전소자, 잉크젯헤드, 각속도센서 및 이들의 제조방법,그리고 잉크젯방식 기록장치
JP4530615B2 (ja) 2002-01-22 2010-08-25 セイコーエプソン株式会社 圧電体素子および液体吐出ヘッド
JP3956134B2 (ja) † 2002-01-29 2007-08-08 セイコーエプソン株式会社 圧電体素子の製造方法、及び液体吐出ヘッドの製造方法
US7048360B2 (en) * 2002-02-19 2006-05-23 Matsushita Electric Industrial Co., Ltd. Piezoelectric body, manufacturing method thereof, piezoelectric element having the piezoelectric body, inject head, and inject type recording device
JP3555682B2 (ja) 2002-07-09 2004-08-18 セイコーエプソン株式会社 液体吐出ヘッド
US7144101B2 (en) * 2003-01-31 2006-12-05 Canon Kabushiki Kaisha Piezoelectric element
US7215067B2 (en) 2003-02-07 2007-05-08 Canon Kabushiki Kaisha Ferroelectric thin film element, piezoelectric actuator and liquid discharge head
KR100628812B1 (ko) * 2003-05-21 2006-09-26 제이에프이 미네랄 가부시키가이샤 압전단결정 소자와 그 제조방법
JP5297576B2 (ja) * 2005-03-28 2013-09-25 セイコーエプソン株式会社 圧電素子及びアクチュエータ装置並びに液体噴射ヘッド及び液体噴射装置
JP2006278489A (ja) * 2005-03-28 2006-10-12 Seiko Epson Corp 圧電素子及びアクチュエータ装置並びに液体噴射ヘッド及び液体噴射装置

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